An insulation device for the ion source water pipe of an ion implanter

Abstract

This utility model discloses an insulation device for the ion source water pipe of an ion implanter, specifically relating to the field of water pipe insulation. It includes two threaded heads, with a corrugated insulating pipe fixedly connected between them. A linkage ring is fixedly connected to the outer wall of each threaded head. An adjustment and installation assembly is provided on the outer wall of the linkage ring. The adjustment and installation assembly includes a support frame fixedly connected to one side of the outer wall of the linkage ring, and a sliding rod fixedly connected to one side of the inner wall of the support frame. A sleeve block is slidably connected to the outer wall of the sliding rod. By adjusting the installation assembly, the linkage rod drives the sleeve block to move until the inner arc surface of the concave strip contacts other installed pipes. A compression bolt is threadedly connected to the concave strip, and a locking bolt is pressed and locked onto the outer wall of the sliding rod. This allows for adjustment according to the installation angle and different installation distances, resulting in superior installation adjustability.

Description

Technical Field

[0001] This utility model relates to the field of water pipe insulation technology, and more specifically, to an ion source water pipe insulation device for an ion implanter. Background Technology

[0002] By using a rigid-flexible composite ferrule and a flexible corrugated pipe, high-voltage end sealing and stress absorption are achieved. Combined with the snap-fit ​​installation design, the problem of vacuum contamination and high-voltage short circuit caused by the failure of traditional insulating tape sealing is solved. Therefore, it provides insulation operation for the ion source water pipe of the ion implanter.

[0003] When the ion source water pipe of the ion implanter is used for insulation, an insulating tube needs to be fitted onto the outer wall of the water pipe. Since the insulating tube is made of flexible material, the threaded ends at both ends are used for stable support. However, due to the connection with other pipes, it is difficult to adjust the length of the installation according to the actual use requirements, resulting in poor installation adjustability. Utility Model Content

[0004] To overcome the aforementioned deficiencies of the prior art, this utility model provides the following technical solution: an insulation device for an ion source water pipe of an ion implanter, comprising two threaded heads, a corrugated insulating pipe fixedly connected between the two threaded heads, and a linkage ring fixedly connected to the outer wall of each threaded head. The outer wall of the linkage ring is provided with an adjustment and installation assembly, the adjustment and installation assembly comprising:

[0005] A support frame is fixedly connected to one side of the outer wall of the linkage ring, and a sliding rod is fixedly connected to one side of the inner wall of the support frame. A sleeve block is slidably connected to the outer wall of the sliding rod.

[0006] A linkage bar is fixedly connected to one side of the sleeve block. A concave strip is fixedly connected to one end of the linkage bar, and a compression bolt is threaded onto the inner wall of the concave strip.

[0007] In a preferred embodiment, the two threaded heads are symmetrically arranged about the corrugated insulating tube, and the outer wall of the sleeve block and the inner wall of the support frame are both smooth surfaces.

[0008] In a preferred embodiment, the outer wall of the slide rod is a smooth surface, and the vertical cross-sectional shape of the slide rod is circular.

[0009] In a preferred embodiment, the top cross-sectional shape of the extrusion bolt is polygonal, and the vertical cross-sectional shape of one side of the inner wall of the concave strip is arc-shaped.

[0010] In a preferred embodiment, the other side of the sleeve block is threaded with a locking bolt, which is used to press and lock the slide rod.

[0011] In a preferred embodiment, multiple sliders are fixedly connected to both sides of the linkage ring and near its edge line.

[0012] Each slider has a slide bar fixedly connected to one end, a limit ring slidably connected to the inner wall of the slider, the limit ring slidably connected to the linkage ring, and the limit ring fixedly connected to the threaded head.

[0013] In a preferred embodiment, both sliders are slidably connected to the limiting ring, and the two sliders are symmetrically arranged about the limiting ring.

[0014] The technical effects and advantages of this utility model are as follows:

[0015] 1. This utility model adopts an adjustable installation component. The concave strip is moved, and the linkage strip drives the sleeve block to move. The sleeve block slides along the outer wall of the slide rod until the inner arc surface of the concave strip contacts other installation pipes. The extrusion bolt is threadedly connected to the concave strip. The locking bolt is rotated and the locking bolt is pressed and locked on the outer wall of the slide rod. This allows for adjustment according to the installation angle and different installation distances, resulting in better installation adjustability.

[0016] 2. This utility model adopts a linkage ring rotation, which drives the slider to rotate, and the slider drives the slide bar to rotate, so as to realize the linkage ring to rotate stably and is suitable for different installation angles of the linkage ring. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the ion source water pipe insulation device of the ion implanter of this utility model.

[0018] Figure 2 This is a partial structural diagram of the connection between the threaded head and the linkage ring of this utility model.

[0019] Figure 3 This is a side view of the insulation device of the ion source water pipe of the ion implanter of this utility model.

[0020] Figure 4 This is a partial structural diagram of the connection between the support frame and the slide bar of this utility model.

[0021] Figure 5 This is a partial structural diagram of the connection between the limiting ring and the threaded head of this utility model.

[0022] The attached diagram is labeled as follows: 1. Threaded head; 2. Corrugated insulating tube; 3. Linkage ring; 4. Support frame; 5. Slide rod; 6. Sleeve block; 7. Linkage bar; 8. Concave bar; 9. Extrusion bolt; 10. Locking bolt; 11. Slider; 12. Slide bar; 13. Limiting ring. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figure 1 - Figure 5 The diagram shows an ion source water pipe insulation device for an ion implanter. This device is equipped with an adjustment and installation assembly. The adjustment and installation assembly allows the inner arc surface of the concave strip 8 to contact other installation pipes. The compression bolt 9 is threadedly connected to the concave strip 8. By rotating the locking bolt 10, the locking bolt 10 is pressed and locked onto the outer wall of the slide rod 5. This allows for adjustment according to the installation angle and different installation distances, resulting in superior installation adjustability. The specific structural configuration of the adjustment and installation assembly is as follows.

[0025] In this embodiment, as Figure 1 - Figure 4 As shown, a corrugated insulating tube 2 is fixedly connected between two threaded heads 1. A linkage ring 3 is fixedly connected to the outer wall of each threaded head 1. An adjustment and installation assembly is provided on the outer wall of the linkage ring 3. The adjustment and installation assembly includes: a support frame 4, fixedly connected to one side of the outer wall of the linkage ring 3; a slide rod 5 fixedly connected to one side of the inner wall of the support frame 4; a sleeve block 6 slidably connected to the outer wall of the slide rod 5; and a linkage bar 7, fixedly connected to one side of the sleeve block 6. A concave bar 8 is fixedly connected to one end of the linkage bar 7, and a pressing bolt 9 is threadedly connected to the inner wall of the concave bar 8. The two threaded heads 1 are symmetrically arranged about the corrugated insulating tube 2. The outer wall of the sleeve block 6 and the inner wall of the support frame 4 are both smooth surfaces. The outer wall of the slide rod 5 is a smooth surface, and the vertical cross-section of the slide rod 5 is circular. The top cross-section of the pressing bolt 9 is polygonal, and the vertical cross-section of one side of the inner wall of the concave bar 8 is arc-shaped.

[0026] In this embodiment, as Figure 4 As shown, a locking bolt 10 is threadedly connected to the other side of the sleeve block 6. The locking bolt 10 is used to press and lock the slide rod 5 so that the locking bolt 10 can be rotated. Under the action of the thread meshing force, the locking bolt 10 and the sleeve block 6 are pressed and locked on the outer wall of the slide rod 5, which increases the stability of the slide rod 5.

[0027] In use, the ion source water pipe insulation device of this ion implanter involves inserting the ion source water pipe into the threaded head 1 and the corrugated insulation pipe 2. One corrugated insulation pipe 2 is then threaded onto the insulation end, and the other corrugated insulation pipe 2 is threaded onto the other insulation end. Simultaneously, the linkage ring 3 rotates at an angle on the outer wall of the threaded head 1, moving the concave strip 8. The concave strip 8 drives the linkage strip 7 to move, which in turn drives the sleeve block 6 to move. The sleeve block 6 slides along the inner wall of the support frame 4 and also slides along the outer wall of the slide rod 5 until the concave strip 8... When the inner arc surface of the concave strip 8 contacts other installed pipes, the compression bolt 9 is rotated. The compression bolt 9 is threadedly connected to the concave strip 8, thus the compression bolt 9 is pressed against the other pipes for fixation. At the same time, the locking bolt 10 is rotated. Under the action of the threaded engagement force, the locking bolt 10 is pressed and locked onto the outer wall of the slide rod 5. This can be adjusted according to the installation angle and different installation distances to ensure that the position of the linkage ring 3 remains unchanged after the threaded head 1 is installed. This makes the suspended installation of the threaded head 1 more stable and facilitates the adjustment and installation of the threaded head 1.

[0028] In this embodiment, as Figure 5 As shown, multiple sliders 11 are fixedly connected to both sides of the linkage ring 3 near its edge; a slide bar 12 is fixedly connected to one end of each slider 11, and a limit ring 13 is slidably connected to the inner wall of the slider 11. The limit ring 13 is slidably connected to the linkage ring 3 and fixedly connected to the threaded head 1. Both slide bars 12 are slidably connected to the limit ring 13, and the two sliders 11 are symmetrically arranged about the limit ring 13.

[0029] When this technology is used, when the linkage ring 3 rotates, the linkage ring 3 rotates on the outer wall of the threaded head 1. The linkage ring 3 drives the slider 11 to rotate, and the slider 11 drives the slide bar 12 to rotate. Both the slider 11 and the slide bar 12 slide on the limit ring 13, so that the linkage ring 3 can rotate stably.

[0030] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An insulation device for the ion source water pipe of an ion implanter, comprising two threaded heads (1), characterized in that: A corrugated insulating tube (2) is fixedly connected between the two threaded heads (1). A linkage ring (3) is fixedly connected to the outer wall of each threaded head (1). An adjustment and installation assembly is provided on the outer wall of the linkage ring (3). The adjustment and installation assembly includes: The support frame (4) is fixedly connected to one side of the outer wall of the linkage ring (3), and a slide rod (5) is fixedly connected to one side of the inner wall of the support frame (4). A sleeve block (6) is slidably connected to the outer wall of the slide rod (5). A linkage bar (7) is fixedly connected to one side of the sleeve block (6). A concave bar (8) is fixedly connected to one end of the linkage bar (7), and a compression bolt (9) is threadedly connected to the inner wall of the concave bar (8).

2. The ion source water pipe insulation device for the ion implanter according to claim 1, characterized in that: The two threaded heads (1) are symmetrically arranged about the corrugated insulating tube (2), and the outer wall of the sleeve block (6) and the inner wall of the support frame (4) are both smooth surfaces.

3. The ion source water pipe insulation device for the ion implanter according to claim 1, characterized in that: The outer wall of the slide rod (5) is a smooth surface, and the vertical cross-section of the slide rod (5) is circular.

4. The water tube insulation apparatus for an ion source of an ion implanter as recited in claim 1, wherein: The top cross-sectional shape of the extrusion bolt (9) is polygonal, and the vertical cross-sectional shape of one side of the inner wall of the concave strip (8) is arc-shaped.

5. The water tube insulation apparatus for an ion source of an ion implanter as recited in claim 1, wherein: The other side of the sleeve block (6) is threaded with a locking bolt (10), which is used to press and lock the slide rod (5).

6. The ion source water pipe insulation device for the ion implanter according to claim 1, characterized in that: Multiple sliders (11) are fixedly connected to both sides of the linkage ring (3) and near its edge line; Each slider (11) has a slider (12) fixedly connected to one end. A limit ring (13) is slidably connected to the inner wall of the slider (11). The limit ring (13) is slidably connected to the linkage ring (3). The limit ring (13) is fixedly connected to the threaded head (1).

7. The ion source water pipe insulation device for the ion implanter according to claim 6, characterized in that: Both of the sliders (12) are slidably connected to the limiting ring (13), and the two sliders (11) are symmetrically arranged about the limiting ring (13).

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