An air cooling system

Abstract

This utility model relates to the technical field of refrigeration equipment, and more specifically, to a gas-cooling system. A gas distribution subsystem is connected to an on / off switching element, which is connected to a first heat exchanger. The first heat exchanger is also connected to a primary compression refrigeration subsystem. The outlet end of the on / off switching element is equipped with a second heat exchanger and a third heat exchanger. The inlet end of the first heat exchange channel of the second heat exchanger is connected to the second outlet end of the on / off switching element and to the first heat exchanger. The first heat exchange channels of the second and third heat exchangers are connected, and the second heat exchange channel of the third heat exchanger is connected to a secondary compression refrigeration subsystem, which is also connected to the primary compression refrigeration subsystem. The second and third heat exchangers are used for heat exchange of the target gas. This utility model can be used for refrigeration, and can also realize the recovery of exhaust cooling capacity and reduce the system's power output, achieving energy saving and emission reduction.

Description

Technical Field

[0001] This utility model relates to the technical field of refrigeration equipment, and more specifically, to an air-cooling system. Background Technology

[0002] After a chip or wafer is manufactured, it needs to undergo performance testing at specific ambient temperatures to check if it meets standards. This requires providing a relatively stable ambient temperature. Existing methods for providing this stable temperature environment include: using refrigeration equipment with liquid and heat exchangers to control the temperature of the cavity containing the chip or wafer; or directly introducing treated cryogenic gas into the cavity for surface cooling. However, after the cryogenic gas has cooled the chip or wafer, the cooling capacity of the exhaust gas is not well utilized, and this cryogenic gas is mostly used for temperature control with the entire system running at full capacity, resulting in high energy consumption. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of existing refrigeration equipment where the exhaust cooling capacity is not utilized, and to provide an air-cooling system that can be used for refrigeration, recover exhaust cooling capacity, and reduce system power output, thereby achieving energy conservation and emission reduction.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0005] A gas-cooling system is provided, including a gas distribution subsystem and an on / off switching device. The gas distribution subsystem is connected to the inlet end of the on / off switching device. The first outlet end of the on / off switching device is connected to a first heat exchanger, and the first heat exchanger is also connected to a primary compression refrigeration subsystem. The second outlet end of the on / off switching device is provided with a second heat exchanger and a third heat exchanger. The inlet end of the first heat exchange channel of the second heat exchanger is connected to the second outlet end of the on / off switching device and to the first heat exchanger. The outlet end of the first heat exchange channel of the second heat exchanger is connected to the first heat exchange channel of the third heat exchanger. The second heat exchange channel of the third heat exchanger is connected to a secondary compression refrigeration subsystem, and the secondary compression refrigeration subsystem is connected to the primary compression refrigeration subsystem. The second heat exchange channel of the second heat exchanger and the first heat exchange channel of the third heat exchanger are used for heat exchange of the target gas.

[0006] This invention discloses an air-cooling system. The gas distribution subsystem allows for multi-path gas distribution, and the on / off switching element switches between cooling modes. The air-cooling system can switch between the first and second outlets of the on / off switching element and enter different heat exchange channels according to the set temperature requirements. The second heat exchange channel of the second heat exchanger and the first heat exchange channel of the third heat exchanger can be used for heat exchange of the target gas. For example, when performing heat exchange within a cavity containing a chip or wafer, the second and third heat exchangers can be connected to the cavity. This invention can be used for cooling and can also recover exhaust cooling capacity through each heat exchanger. By switching different heat exchange channels, different cooling modes can be achieved, allowing the primary and secondary compression refrigeration subsystems to be used in a dual-stage cascade or single-stage manner, reducing system power output and achieving energy saving and emission reduction.

[0007] Preferably, the inlet end of the first heat exchange channel of the first heat exchanger is connected to the first outlet end of the on / off switching element, and the outlet end of the first heat exchange channel of the first heat exchanger is connected to the inlet end of the first heat exchange channel of the second heat exchanger; the primary compression refrigeration subsystem is connected to the second heat exchange channel of the first heat exchanger.

[0008] Preferably, a one-way valve is provided between the outlet end of the first heat exchange channel of the first heat exchanger and the inlet end of the first heat exchange channel of the second heat exchanger.

[0009] Preferably, the inlet end of the second heat exchange channel of the second heat exchanger is connected to a second gas input pipeline, and the outlet end of the second heat exchange channel of the second heat exchanger is connected to a gas discharge pipeline, wherein the gas discharge pipeline is provided with a first radiator; the outlet end of the first heat exchange channel of the third heat exchanger is connected to a second gas output pipeline, wherein the second gas output pipeline is provided with a heater.

[0010] Preferably, the primary compression refrigeration subsystem includes a first compressor, a first return gas pipeline, a first condenser filter pipeline, and a first capillary tube; the first compressor is connected to the outlet end of the second heat exchange channel of the first heat exchanger; the first return gas pipeline is connected to the first compressor, and a first oil separator is provided on the first return gas pipeline; the inlet end of the second heat exchange channel of the first heat exchanger is connected to the first oil separator through the first condenser filter pipeline, and a condenser and a first filter are provided on the first condenser filter pipeline; the first condenser filter pipeline is also connected to the first compressor through the first capillary tube.

[0011] Preferably, the two-stage compression refrigeration subsystem includes an expansion tank, a second compressor, a second radiator, and a second oil separator connected in sequence, and further includes a second return gas line, a second condenser filter line, and a second capillary line; the outlet end of the second heat exchange channel of the third heat exchanger is connected to the second compressor, and the second oil separator is also connected to the second compressor through the second return gas line; the inlet end of the second heat exchange channel of the third heat exchanger is connected to the second oil separator through the second condenser filter line, and the second condenser filter line is provided with a second filter; the second condenser filter line is also connected to the second compressor through the second capillary line.

[0012] Preferably, a fourth heat exchanger is provided at the connection between the primary compression refrigeration subsystem and the secondary compression refrigeration subsystem.

[0013] Preferably, the gas distribution subsystem includes a gas distributor, the inlet end of which is connected to a first gas input pipeline, the first outlet end of which is connected to a first gas output pipeline, and the second outlet end of which is connected to the inlet end of the on / off switching element.

[0014] Preferably, the gas distribution subsystem further includes a dew point sensor, a flow meter, and a pressure reducing valve disposed on the first gas input pipeline.

[0015] Preferably, the gas distribution subsystem further includes a first on / off component and a second on / off component, the first on / off component being disposed in the first gas output pipeline, and the second on / off component being disposed between the second outlet end of the gas distributor and the inlet end of the on / off switching element.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] This utility model discloses an air-cooling system. The gas distribution subsystem is configured for multi-path gas distribution, and the on / off switching element is configured for switching cooling modes. The air-cooling system can switch between the first and second outlets of the on / off switching element and enter different heat exchange channels according to the set temperature requirements. The second heat exchange channel of the second heat exchanger and the first heat exchange channel of the third heat exchanger can be used for heat exchange of the target gas. For example, when performing heat exchange within a cavity containing a chip or wafer, the second and third heat exchangers can be connected to the cavity. Wherein:

[0018] In one refrigeration mode, the on / off switch is switched to the heat exchange channel at the first outlet end. At this time, the first-stage compression refrigeration subsystem can work and provide cooling capacity to the first heat exchanger. The gas at the first outlet end of the on / off switch can enter the first heat exchanger for heat exchange and then be delivered to the second heat exchanger. Then it is output to the cavity through the third heat exchanger. The gas in the cavity can be discharged to the outside after heat exchange through the second heat exchanger.

[0019] In another refrigeration mode, the on / off switch is switched to the heat exchange channel at the second outlet. At this time, the first-stage compression refrigeration subsystem can provide cooling capacity to the second-stage compression refrigeration subsystem. The second-stage compression refrigeration subsystem can operate and provide more cooling capacity to the third heat exchanger. The gas at the second outlet of the on / off switch can enter the second heat exchanger, and then be output to the cavity after heat exchange in the third heat exchanger. At the same time, the gas in the cavity can be discharged to the outside after heat exchange in the second heat exchanger.

[0020] This invention can be used for refrigeration and can also recover the cold energy of exhaust gas through various heat exchangers. By switching different heat exchange channels, different refrigeration modes can be switched, enabling the primary compression refrigeration subsystem and the secondary compression refrigeration subsystem to be used in a two-stage cascade or single-stage manner, reducing the power output of the system and achieving energy saving and emission reduction. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a first embodiment of an air-cooling system according to the present invention. The arrows in the diagram indicate the flow direction of the air streams.

[0022] Figure 2 This is a schematic diagram of the structure of a second embodiment of an air-cooling system according to the present invention. The arrows in the diagram indicate the flow direction of the air streams.

[0023] Figure 3 This is a schematic diagram of the third embodiment of an air-cooling system according to the present invention. The arrows in the diagram indicate the flow direction of the air streams.

[0024] In the attached diagram: 110, First heat exchanger; 120, Second heat exchanger; 130, Third heat exchanger; 140, Fourth heat exchanger; 200, On / off switching element; 300, First-stage compression refrigeration subsystem; 310, First compressor; 320, First oil separator; 330, Condenser; 340, First filter; 350, First capillary tube; 360, Sight glass; 371, First expansion valve; 372, First solenoid valve; 373, Second expansion valve; 381, First temperature sensor; 382, ​​First pressure sensor; 383, Second temperature sensor; 384, Second pressure sensor; 400, Second-stage compression refrigeration subsystem; 410, Second compressor; 420, Second radiator; 430, Second oil separator; 440. Second filter; 450. Second capillary tube; 460. Expansion container; 471. Second solenoid valve; 472. Third expansion valve; 473. Fourth expansion valve; 481. Third temperature sensor; 482. Third pressure sensor; 483. Fourth temperature sensor; 484. Fourth pressure sensor; 500. First radiator; 510. Fifth temperature sensor; 520. Sixth temperature sensor; 600. Heater; 610. Seventh temperature sensor; 710. Gas distributor; 720. Dew point sensor; 730. Flow meter; 740. Pressure reducing valve; 751. Third solenoid valve; 752. First manual valve; 761. Fourth solenoid valve; 762. Second manual valve; 800. Check valve; 900. Insulation cotton. Detailed Implementation

[0025] The present invention will be further described below with reference to specific embodiments. The accompanying drawings are for illustrative purposes only, representing schematic diagrams rather than actual physical objects, and should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0026] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0027] Example 1

[0028] like Figure 1 and Figure 2 The first embodiment of the air-cooling system of this utility model is shown, including a gas distribution subsystem and an on / off switching element 200. The gas distribution subsystem is connected to the inlet end of the on / off switching element 200. The first outlet end of the on / off switching element 200 is connected to a first heat exchanger 110, and the first heat exchanger 110 is also connected to a first-stage compression refrigeration subsystem 300. The second outlet end of the on / off switching element 200 is provided with a second heat exchanger 120 and a third heat exchanger 130, wherein:

[0029] The inlet end of the first heat exchange channel of the second heat exchanger 120 is connected to the second outlet end of the on / off switching element 200 and to the first heat exchanger 110. The outlet end of the first heat exchange channel of the second heat exchanger 120 is connected to the first heat exchange channel of the third heat exchanger 130. The second heat exchange channel of the third heat exchanger 130 is connected to the secondary compression refrigeration subsystem 400, and the secondary compression refrigeration subsystem 400 is connected to the primary compression refrigeration subsystem 300. The second heat exchange channel of the second heat exchanger 120 and the first heat exchange channel of the third heat exchanger 130 are used for heat exchange of the target gas.

[0030] The gas distribution subsystem is configured for multi-path gas distribution, and the on / off switch 200 is configured for switching cooling modes. The gas cooling system can switch between the first and second outlets of the on / off switch 200 and enter different heat exchange channels according to the set temperature requirements. The second heat exchange channel of the second heat exchanger 120 and the first heat exchange channel of the third heat exchanger 130 can be used for heat exchange of the target gas. For example, when performing heat exchange within a cavity containing a chip or wafer, the second heat exchanger 120 and the third heat exchanger 130 can be connected to the cavity. Wherein:

[0031] In one cooling mode, the on / off switch 200 switches to the heat exchange channel at the first outlet end. At this time, the first-stage compression refrigeration subsystem 300 can work and provide cooling capacity to the first heat exchanger 110. The gas at the first outlet end of the on / off switch 200 can enter the first heat exchanger 110 for heat exchange and then be delivered to the second heat exchanger 120. Then it is output to the cavity through the third heat exchanger 130. The gas in the cavity can exchange heat through the second heat exchanger 120 and then be discharged to the outside.

[0032] In another refrigeration mode, the on / off switch 200 switches to the heat exchange channel at the second outlet end. At this time, the first-stage compression refrigeration subsystem 300 can provide cooling capacity to the second-stage compression refrigeration subsystem 400. The second-stage compression refrigeration subsystem 400 can operate and provide more cooling capacity to the third heat exchanger 130. The gas at the second outlet end of the on / off switch 200 can enter the second heat exchanger 120, and then be output to the cavity after heat exchange in the third heat exchanger 130. At the same time, the gas in the cavity can be discharged to the outside after heat exchange in the second heat exchanger 120.

[0033] This invention can be used for refrigeration and can also recover exhaust cooling capacity through various heat exchangers. Different refrigeration modes can be switched by changing different heat exchange channels, allowing the primary compression refrigeration subsystem 300 and the secondary compression refrigeration subsystem 400 to be used in a dual-stage cascade or single-stage manner, reducing system power output and achieving energy saving and emission reduction. In this embodiment, an air-cooling system can be applied to a probe station, which is the cavity where the chip or wafer is located. In this embodiment, the inlet end of the second heat exchange channel of the second heat exchanger 120 can be connected to the probe station, and the outlet end of the first heat exchange channel of the third heat exchanger 130 can be connected to the probe station. In this embodiment, the on / off switching element 200 is a solenoid three-way valve.

[0034] like Figure 1 and Figure 2 As shown, the inlet end of the first heat exchange channel of the first heat exchanger 110 is connected to the first outlet end of the on / off switching element 200, and the outlet end of the first heat exchange channel of the first heat exchanger 110 is connected to the inlet end of the first heat exchange channel of the second heat exchanger 120; the first-stage compression refrigeration subsystem 300 is connected to the second heat exchange channel of the first heat exchanger 110. To prevent gas backflow, a one-way valve 800 is provided between the outlet end of the first heat exchange channel of the first heat exchanger 110 and the inlet end of the first heat exchange channel of the second heat exchanger 120.

[0035] like Figure 1 and Figure 2 As shown, the inlet end of the second heat exchange channel of the second heat exchanger 120 is connected to a second gas input pipeline, and the outlet end of the second heat exchange channel of the second heat exchanger 120 is connected to a gas discharge pipeline. The gas discharge pipeline is equipped with a first radiator 500, which is used to ensure that the gas temperature discharged to the outside environment is at room temperature. The outlet end of the first heat exchange channel of the third heat exchanger 130 is connected to a second gas output pipeline, which is equipped with a heater 600. The heater 600 is used to fine-tune the gas temperature at this location to ensure the accuracy of the gas supply temperature.

[0036] In this embodiment, the gas discharge pipeline is connected to the outside environment, allowing the gas discharged from the second heat exchange channel of the second heat exchanger 120 to the gas discharge pipeline to be cooled by the first radiator 500 before being discharged to the outside environment. In this embodiment, the second gas inlet pipeline is connected to the probe station, allowing the gas in the probe station that needs to be heated or cooled to enter the second heat exchanger 120 through the second gas inlet pipeline; the second gas outlet pipeline is connected to the probe station, allowing the gas output from the third heat exchanger 130 to be temperature-adjusted by the heater 600 on the second gas outlet pipeline before being output to the probe station.

[0037] like Figure 2 As shown, the first-stage compression refrigeration subsystem 300 includes a first compressor 310, a first oil separator 320, a condenser 330, a first filter 340, a first capillary tube 350, a sight glass 360, a first expansion valve 371, a first solenoid valve 372, and a second expansion valve 373. It also includes a first return gas line, a first condensate filter line, and a first branch line; wherein:

[0038] The outlet end of the second heat exchange channel of the first heat exchanger 110 is connected to the first compressor 310, and the first oil separator 320 is connected to the first compressor 310; the first oil separator 320 and the first compressor 310 are also connected through a first return gas pipeline; the inlet end of the second heat exchange channel of the first heat exchanger 110 is connected to the first oil separator 320 through a first condensation filter pipeline, and the condenser 330, the first filter 340, the sight glass 360, and the second expansion valve 373 are arranged sequentially along the flow direction on the first condensation filter pipeline;

[0039] The first condenser filter line and the first compressor 310 are also connected via a first capillary line 350. The first capillary line 350 includes a first capillary section and a first connecting section connected to the first capillary section. The first capillary section is connected to the first compressor 310, and the first connecting section is connected to the first condenser filter line. Specifically, the first connecting section is connected to the pipeline position between the sight glass 360 and the second expansion valve 373 on the first condenser filter line, and the first solenoid valve 372 is located on the first connecting section. The first condenser filter line is connected to the secondary compression refrigeration subsystem 400.

[0040] The first branch line is located at the first condenser filter line. Specifically, the inlet end of the first branch line is connected to the pipeline position between the first oil separator 320 and the condenser 330 on the first condenser filter line, and the outlet end of the first branch line is connected to the pipeline position between the second expansion valve 373 and the first heat exchanger 110 on the first condenser filter line. The first expansion valve 371 is located on the first branch line.

[0041] In the primary compression refrigeration subsystem 300: the refrigerant in the first compressor 310 is discharged to the first oil separator 320. The lubricating oil in the gas is separated by the first oil separator 320 and then enters the first compressor 310 through the first return gas line. The exhaust gas, after passing through the first oil separator 320, enters the first condenser filter line. In the first condenser filter line, the exhaust gas passes through the condenser 330 and then enters the first filter 340. After passing through the first filter 340, it enters the sight glass 360. After passing through the sight glass 360, one path enters the first capillary... Pipeline 350 enters the first solenoid valve 372 in the first capillary tube 350, then enters the return port of the liquid injection valve of the first compressor 310 through the first capillary tube section, and another path enters the second expansion valve 373 and can be connected to the secondary compression refrigeration subsystem 400, then enters the first heat exchanger 110, and returns to the suction port of the first compressor 310 to form a loop; a path is separated from the inlet of the condenser 330 and enters the first branch pipeline, and in the first branch pipeline, after passing through the first expansion valve 371, it merges into the first heat exchanger 110.

[0042] like Figure 2 As shown, the two-stage compression refrigeration subsystem 400 includes a second compressor 410, a second radiator 420, a second oil separator 430, a second filter 440, an expansion tank 460, a second solenoid valve 471, a third expansion valve 472, and a fourth expansion valve 473. It also includes a second capillary tube 450, a second return gas line, a second condensate filter line, and a second branch line; wherein:

[0043] The outlet end of the second heat exchange channel of the third heat exchanger 130 is connected to the second compressor 410. The second oil separator 430 is also connected to the second compressor 410 through the second return gas pipeline. The inlet end of the second heat exchange channel of the third heat exchanger 130 is connected to the second oil separator 430 through the second condensation filter pipeline. The second filter 440 and the third expansion valve 472 are arranged sequentially along the flow direction on the second condensation filter pipeline.

[0044] The second condenser filter pipeline is also connected to the second compressor 410 via a second capillary pipeline 450. The second capillary pipeline 450 includes a second capillary section and a second connecting pipeline section connected to the second capillary section. The second capillary section is connected to the second compressor 410, and the second connecting pipeline section is connected to the second condenser filter pipeline. Specifically, the second connecting pipeline section is connected to the pipeline between the second filter 440 and the third expansion valve 472 on the second condenser filter pipeline, and the second solenoid valve 471 is located on the second connecting pipeline section. The second condenser filter pipeline is connected to the first-stage compression refrigeration subsystem 300.

[0045] The second branch line is located at the second condenser filter line. Specifically, the inlet end of the second branch line is connected to the pipeline position between the second oil separator 430 and the second filter 440 on the second condenser filter line, and the outlet end of the second branch line is connected to the pipeline position between the third expansion valve 472 and the third heat exchanger 130 on the second condenser filter line. The fourth expansion valve 473 is located on the second branch line.

[0046] In the two-stage compression refrigeration subsystem 400: the refrigerant in the second compressor 410 is discharged to the second radiator 420 and then enters the second oil separator 430. The lubricating oil in the gas is separated by the second oil separator 430 and then enters the second compressor 410 through the second return gas line. The exhaust gas enters the second condenser filter line after passing through the second oil separator 430. In the second condenser filter line, the exhaust gas can be connected to the first-stage compression refrigeration subsystem 300, and then enters the second filter 440. After passing through the second filter 440, one of the channels enters the second capillary tube 450. In the second capillary tube 450, the refrigerant... The refrigerant enters through the second solenoid valve 471, then through the second capillary tube section into the return port of the injection valve of the second compressor 410. Another path enters through the third expansion valve 472 and then into the third heat exchanger 130. After passing through the third heat exchanger 130, it returns to the suction port of the second compressor 410 to form a loop. Before being connected to the first-stage compression refrigeration subsystem 300 on the second condenser filter line, one path is separated and enters the second branch line. In the second branch line, after passing through the fourth expansion valve 473, it merges into the third heat exchanger 130. The expansion container tank 460 is connected to the low-pressure side of the second compressor 410 and can be used for refrigerant vaporization and expansion when the second compressor 410 is stopped.

[0047] In this embodiment, a fourth heat exchanger 140 is provided at the connection between the primary compression refrigeration subsystem 300 and the secondary compression refrigeration subsystem 400. In this embodiment, the first condenser filter pipe is connected to the second condenser filter pipe, and the fourth heat exchanger 140 is provided at the connection between the first condenser filter pipe and the second condenser filter pipe. The first heat exchange channel of the fourth heat exchanger 140 is connected to the first condenser filter pipe, and the second heat exchange channel of the fourth heat exchanger 140 is connected to the second condenser filter pipe.

[0048] Specifically, the inlet end of the first heat exchange channel of the fourth heat exchanger 140 is connected to the second expansion valve 373, and the outlet end of the first heat exchange channel of the fourth heat exchanger 140 is connected to the inlet end of the second heat exchange channel of the first heat exchanger 110; wherein, in the first-stage compression refrigeration subsystem 300: after entering the second expansion valve 373, it enters the fourth heat exchanger 140, then enters the first heat exchanger 110, and then returns to the suction port of the first compressor 310 through the first heat exchanger 110 to form a loop; and, in the first branch line, after passing through the first expansion valve 371, it merges into the outlet of the fourth heat exchanger 140, and then merges into the first heat exchanger 110.

[0049] Specifically, the inlet end of the second heat exchange channel of the fourth heat exchanger 140 is connected to the second oil separator 430, and the outlet end of the second heat exchange channel of the fourth heat exchanger 140 is connected to the second filter 440; wherein, in the two-stage compression refrigeration subsystem 400: exhaust gas enters the fourth heat exchanger 140 after passing through the second oil separator 430, and then enters the second filter 440 after passing through the fourth heat exchanger 140; and, on the second condensation filter pipeline, a branch is separated from the inlet end of the second heat exchange channel of the fourth heat exchanger 140 and enters the second branch pipeline, and in the second branch pipeline, after passing through the fourth expansion valve 473, it merges into the outlet of the third expansion valve 472.

[0050] Example 2

[0051] This embodiment is a second embodiment of an air-cooling system. This embodiment is similar to the first embodiment, except that, as shown in the following... Figure 2 As shown, the gas distribution subsystem includes a gas distributor 710. The inlet end of the gas distributor 710 is connected to a first gas input pipeline, which is used to introduce dry, low-dew-point gas into the gas distributor 710. The first outlet end of the gas distributor 710 is connected to a first gas output pipeline. In this embodiment, the first gas output pipeline is configured to communicate with a probe station and output dry, room-temperature gas into the probe station to replace the humid air inside the probe station. The second outlet end of the gas distributor 710 is connected to the inlet end of the on / off switching element 200. The gas distribution subsystem also includes a dew point sensor 720, a flow meter 730, and a pressure reducing valve 740 disposed on the first gas input pipeline.

[0052] To facilitate gas on / off control, the gas distribution subsystem further includes a first on / off assembly and a second on / off assembly. The first on / off assembly is located in the first gas output pipeline, and the second on / off assembly is located between the second outlet end of the gas distributor 710 and the inlet end of the on / off switching element 200. In this embodiment, the first on / off assembly includes a third solenoid valve 751 and a first manual valve 752 located in the first gas output pipeline, and the second on / off assembly includes a fourth solenoid valve 761 and a second manual valve 762 located between the second outlet end of the gas distributor 710 and the inlet end of the on / off switching element 200.

[0053] To facilitate temperature and pressure monitoring of the air-cooling system, the first compressor 310 is equipped with a first temperature sensor 381 and a first pressure sensor 382 at its inlet, and a second temperature sensor 383 and a second pressure sensor 384 at its outlet. The second compressor 410 is equipped with a third temperature sensor 481 and a third pressure sensor 482 at its inlet, and a fourth temperature sensor 483 and a fourth pressure sensor 484 at its outlet. A fifth temperature sensor 510 is provided on the gas discharge pipeline. Specifically, on the gas discharge pipeline, the first radiator 500 and the fifth temperature sensor 510 are arranged sequentially along the flow direction. A sixth temperature sensor 520 is provided on the second gas input pipeline. A seventh temperature sensor 610 is provided on the second gas output pipeline. Specifically, on the second gas output pipeline, the heater 600 and the seventh temperature sensor 610 are arranged sequentially along the flow direction.

[0054] It should be noted that the air-cooling system may also include a controller, and all components in the air-cooling system are electrically connected to and controlled by the controller. Specifically, the controller can be a PLC controller.

[0055] The working principle of an air-cooling system in this embodiment is as follows:

[0056] Dry, low-dew-point gas enters the gas distributor 710 after passing through a pressure reducing valve 740, a flow meter 730, and a dew-point sensor 720 on the first gas input pipeline. The PLC controller sets the flow path. A third solenoid valve 751 controls the opening and closing of the first gas output pipeline. When the third solenoid valve 751 is open, it outputs dry, room-temperature gas to the probe station, displacing the humid air inside. A fourth solenoid valve 761 controls the opening and closing of the second outlet, introducing the gas requiring cooling into the heat exchanger for heat exchange, resulting in low-temperature gas that is then introduced into the probe station, bringing it to the operating environmental conditions. The dry gas passes through a second hand valve 762 and a fourth solenoid valve 761. The controller identifies different set temperature ranges and controls the flow direction of the on / off switching element 200, determining whether the primary compression refrigeration subsystem 300 and the secondary compression refrigeration subsystem 400 are used together or only the primary compression refrigeration subsystem 300 is used.

[0057] When the set temperature value is in a relatively high temperature range, specifically, when the set temperature value is higher than -20℃, the on / off switch 200 switches to open the first outlet, and dry gas is introduced into the first heat exchanger 110. At this time, the primary compression refrigeration subsystem 300 is working while the secondary compression refrigeration subsystem 400 is not working. After the dry air is cooled to the required temperature by the first heat exchanger 110, it passes through the one-way valve 800 and enters the first heat exchange channel of the second heat exchanger 120. In the second heat exchanger 120, it mixes with the exhaust gas that needs to be heated / cooled, which is input from the probe station into the second gas inlet pipe. The exhaust gas undergoes heat exchange, causing its temperature to decrease / rise to room temperature before being discharged into the atmosphere through the exhaust pipeline. The first radiator 500 and the fifth temperature sensor 510 in the exhaust pipeline are used to ensure that the temperature of the gas discharged to the outside environment is room temperature. Then, the dry gas in the first heat exchange channel of the second heat exchanger 120 enters the heater 600 after passing through the third heat exchanger 130. The heater 600 makes fine adjustments according to the actual temperature to ensure the accuracy of the gas supply temperature. At this time, since the secondary compression refrigeration subsystem 400 is not turned on, the third heat exchanger 130 has no cooling output.

[0058] When the set temperature value is in a relatively low temperature range, specifically, when the set temperature value is lower than or equal to -20℃, the on / off switch 200 switches to open the second outlet end. After the first-stage compression refrigeration subsystem 300 is turned on for a period of time, the second-stage compression refrigeration subsystem 400 is turned on, and the on / off switch 200 switches to open the second outlet end. Gas is introduced into the first heat exchange channel of the second heat exchanger 120 and exchanges heat with the gas in the second heat exchange channel of the second heat exchanger 120, that is, the exhaust gas that needs to be heated returning from the probe station. This causes the temperature of the exhaust gas passing through the gas exhaust pipe to rise back to normal temperature, while the dry gas in the first heat exchange channel drops to a negative temperature, and then enters... The gas enters the third heat exchanger 130, which provides cooling capacity. It should be noted that the first-stage compression refrigeration subsystem 300 can provide cooling capacity to the second-stage compression refrigeration subsystem 400 through the fourth heat exchanger 140, reducing the supply gas temperature to the required value. The gas then enters the heater 600 for fine-tuning to achieve the required supply gas temperature accuracy before being output to the probe station. It should also be noted that the low-temperature exhaust gas entering the air-cooling system from the probe station exchanges heat with the ambient temperature supply gas through the second heat exchanger 120 to achieve heat recovery and improve the utilization rate of cooling capacity. In this way, the cooling capacity provided by the second-stage compression refrigeration subsystem 400 can be reduced by about half, achieving the effect of energy saving and emission reduction.

[0059] Example 3

[0060] This embodiment is a third embodiment of an air-cooling system. This embodiment is similar to Embodiment 1 or 2, except that, as Figure 3As shown, in order to stabilize the temperature of the gas in the pipeline, insulation cotton 900 can be installed on the pipeline in the gas cooling system. Specifically, insulation cotton 900 is installed on the gas discharge pipeline, the second gas input pipeline, the second gas output pipeline, the first condenser filter pipeline, and the second condenser filter pipeline. In addition, insulation cotton 900 is also installed on the pipeline between the second heat exchanger 120 and the third heat exchanger 130, the pipeline between the expansion container tank 460 and the second compressor 410, the pipeline at the inlet end of the second heat exchange channel of the first heat exchanger 110, and the pipeline at the inlet end of the second heat exchange channel of the third heat exchanger 130.

[0061] In the specific implementation of the above embodiments, the technical features can be combined in any non-contradictory way. For the sake of brevity, not all possible combinations of the above technical features are described. However, as long as the combination of these technical features is not contradictory, it should be considered to be within the scope of this specification.

[0062] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. An air-cooling system, characterized in that, The system includes a gas distribution subsystem and an on / off switching element (200). The gas distribution subsystem is connected to the inlet end of the on / off switching element (200). The first outlet end of the on / off switching element (200) is connected to a first heat exchanger (110), and the first heat exchanger (110) is also connected to a first-stage compression refrigeration subsystem (300). The second outlet end of the on / off switching element (200) is provided with a second heat exchanger (120) and a third heat exchanger (130), wherein: The inlet end of the first heat exchange channel of the second heat exchanger (120) is connected to the second outlet end of the on / off switching element (200) and to the first heat exchanger (110). The outlet end of the first heat exchange channel of the second heat exchanger (120) is connected to the first heat exchange channel of the third heat exchanger (130). The second heat exchange channel of the third heat exchanger (130) is connected to a secondary compression refrigeration subsystem (400), and the secondary compression refrigeration subsystem (400) is connected to the primary compression refrigeration subsystem (300). The second heat exchange channel of the second heat exchanger (120) and the first heat exchange channel of the third heat exchanger (130) are used for heat exchange of the target gas.

2. The air-cooling system according to claim 1, characterized in that, The first heat exchange channel inlet of the first heat exchanger (110) is connected to the first outlet of the on / off switching element (200), and the first heat exchange channel outlet of the first heat exchanger (110) is connected to the first heat exchange channel inlet of the second heat exchanger (120); the first-stage compression refrigeration subsystem (300) is connected to the second heat exchange channel of the first heat exchanger (110).

3. The air-cooling system according to claim 2, characterized in that, A one-way valve (800) is provided between the outlet end of the first heat exchange channel of the first heat exchanger (110) and the inlet end of the first heat exchange channel of the second heat exchanger (120).

4. The air-cooling system according to any one of claims 1 to 3, characterized in that, The second heat exchanger (120) has a second gas input pipe connected to the inlet end of the second heat exchange channel and a gas discharge pipe connected to the outlet end of the second heat exchange channel. The gas discharge pipe is equipped with a first radiator (500). The third heat exchanger (130) has a second gas output pipe connected to the outlet end of the first heat exchange channel. The second gas output pipe is equipped with a heater (600).

5. The air-cooling system according to claim 1, characterized in that, The first-stage compression refrigeration subsystem (300) includes a first compressor (310), a first return gas pipeline, a first condenser filter pipeline, and a first capillary pipeline (350); the first compressor (310) is connected to the outlet end of the second heat exchange channel of the first heat exchanger (110); the first return gas pipeline is connected to the first compressor (310), and a first oil separator (320) is provided on the first return gas pipeline; the inlet end of the second heat exchange channel of the first heat exchanger (110) is connected to the first oil separator (320) through the first condenser filter pipeline, and a condenser (330) and a first filter (340) are provided on the first condenser filter pipeline; the first condenser filter pipeline is also connected to the first compressor (310) through the first capillary pipeline (350).

6. The air-cooling system according to claim 1, characterized in that, The secondary compression refrigeration subsystem (400) includes an expansion tank (460), a second compressor (410), a second radiator (420), and a second oil separator (430) connected in sequence, and also includes a second return gas pipeline, a second condenser filter pipeline, and a second capillary pipeline (450); the outlet end of the second heat exchange channel of the third heat exchanger (130) is connected to the second compressor (410), and the second oil separator (430) is also connected to the second compressor (410) through the second return gas pipeline; the inlet end of the second heat exchange channel of the third heat exchanger (130) is connected to the second oil separator (430) through the second condenser filter pipeline, and a second filter (440) is provided on the second condenser filter pipeline; the second condenser filter pipeline is also connected to the second compressor (410) through the second capillary pipeline (450).

7. The air-cooling system according to any one of claims 1, 5, and 6, characterized in that, A fourth heat exchanger (140) is provided at the connection between the primary compression refrigeration subsystem (300) and the secondary compression refrigeration subsystem (400).

8. The air-cooling system according to any one of claims 1 to 3, 5, and 6, characterized in that, The gas distribution subsystem includes a gas distributor (710), the inlet end of which is connected to a first gas input pipeline, the first outlet end of which is connected to a first gas output pipeline, and the second outlet end of which is connected to the inlet end of the on / off switching element (200).

9. The air-cooling system according to claim 8, characterized in that, The gas distribution subsystem also includes a dew point sensor (720), a flow meter (730), and a pressure reducing valve (740) installed on the first gas input pipeline.

10. The air-cooling system according to claim 8, characterized in that, The gas distribution subsystem further includes a first on / off component and a second on / off component. The first on / off component is located in the first gas output pipeline, and the second on / off component is located between the second outlet end of the gas distributor (710) and the inlet end of the on / off switching component (200).

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