Media recycling apparatus and semiconductor testing system

Abstract

The utility model provides a kind of medium recovery equipment and semiconductor testing system, it is related to semiconductor testing technical field, the utility model provides the medium recovery equipment including heat exchange pipeline, gas inlet pipeline, bypass pipeline and gas-water separation liquid storage component, heat exchange pipeline has liquid inlet section and liquid outlet section, liquid inlet section and liquid outlet section are used to communicate with heat load and form circulation flow channel, gas inlet pipeline is communicated with liquid outlet section, bypass pipeline is connected in parallel with liquid inlet section, the inlet of gas-water separation liquid storage component and liquid outlet are all communicated with bypass pipeline.The utility model provides the medium recovery equipment has the advantages of reducing the dissipation of medium, protecting test environment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a dielectric recovery device and a semiconductor testing system. Background Technology

[0002] The high and low temperature integrated unit is connected to the probe station's tray via two pipes, one inlet and one outlet. The pipes contain fluorinated liquid, which circulates between the internal piping system of the integrated unit and the flow channels within the tray during operation. At specific temperatures (e.g., near or above the boiling point of the medium), the fluorinated liquid in the tray needs to be returned to the integrated unit to prevent the fluorinated liquid from evaporating due to heat at high temperatures on the tray, which would cause pressure expansion within the piping.

[0003] Currently, an air inlet pipe is installed on the external liquid inlet pipe of the probe station. Gas is introduced into the heat exchange module through the air inlet pipe. The gas blows away the residual refrigerant in the heat exchange channels of the heat exchange module, allowing it to flow back into the heat exchange pipe for recovery. Excess gas is discharged through the outlet of the three-way valve in the heat exchange pipe to maintain pressure balance. However, because a mist of liquid may appear at the exhaust outlet of the three-way valve during exhaust, the gas may carry some of the vaporized fluorinated liquid into the environment. This results in the dissipation of the fluorinated liquid and contamination of the testing environment. Utility Model Content

[0004] The purpose of this invention is to provide a dielectric recovery device that has the advantages of reducing dielectric dissipation and protecting the testing environment. Additionally, a semiconductor testing system including the aforementioned dielectric recovery device is also provided.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] In a first aspect, this utility model provides a medium recovery device, including a heat exchange pipeline, an air inlet pipeline, a bypass pipeline, and a gas-liquid separation and storage component. The heat exchange pipeline has an inlet section and an outlet section, both of which are used to communicate with a heat load and form a circulation channel. The air inlet pipeline is connected to the outlet section, and the bypass pipeline is connected in parallel with the inlet section. The inlet and outlet of the gas-liquid separation and storage component are both connected to the bypass pipeline.

[0007] In an optional embodiment, the gas-liquid separation and storage assembly includes a gas-liquid separator, the inlet of which is connected to the bypass pipeline, the gas-liquid separator having a water storage chamber connected to the inlet of the gas-liquid separator, and the drain outlet of the water storage chamber connected to the bypass pipeline.

[0008] In an optional embodiment, the bypass pipeline between the inlet of the gas-liquid separator and the liquid inlet section is provided with a first valve.

[0009] In an optional embodiment, an oil mist separator is also included, the inlet of which is connected to the exhaust port of the gas-water separation and storage assembly, and the exhaust port of the oil mist separator is connected to a second valve.

[0010] In an optional embodiment, the drain port of the oil mist separator is connected to the inlet section.

[0011] In an optional embodiment, a third valve is provided between the liquid inlet section and the liquid outlet section, or the liquid outlet section is provided with a third valve.

[0012] In an optional embodiment, a pump body, a heat exchanger, and a heater are provided between the inlet section and the outlet section, and the heat exchanger and the heater are both located downstream of the pump body along the flow direction of the medium in the heat exchange pipeline.

[0013] In an optional embodiment, the media recovery device further includes a return pipeline connected in parallel between the inlet and outlet of the pump body, and the return pipeline is equipped with a flow regulating valve.

[0014] In an optional implementation, a fourth valve is provided on the intake pipe.

[0015] Secondly, this utility model provides a semiconductor testing system, including a dielectric recovery device as described in any of the foregoing embodiments.

[0016] The media recovery equipment provided by this utility model can produce the following beneficial effects:

[0017] Compared with existing technologies, firstly, the gas-liquid separation and liquid storage component in the media recovery equipment provided by the first aspect of this utility model can perform gas-liquid separation before the gas is discharged, effectively reducing the dissipation of the medium and protecting the testing environment; secondly, the gas-liquid separation and liquid storage component not only has the function of gas-liquid separation but also the function of liquid storage, occupying only the space of one component, and has a small volume; thirdly, the above solution does not have the back discharge of separated gas, requires fewer valves and other components, has a relatively low failure rate, and has simple control logic and strong equipment stability; finally, it does not require the periodic return of discharged gas to the equipment, and the filtration efficiency can be guaranteed. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of a media recovery device provided in an embodiment of the present utility model.

[0020] Icons: 1-Heat exchange pipeline; 11-Liquid inlet section; 12-Liquid outlet section; 2-Air inlet pipeline; 3-Bypass pipeline; 4-Gas-liquid separation and storage assembly; 5-Heat load; 6-Pump body; 7-First valve; 8-Oil mist separator; 9-Second valve; 10-Third valve; 011-Heat exchanger; 012-Heater; 013-Return pipeline; 014-Flow regulating valve; 015-Fourth valve. Detailed Implementation

[0021] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0022] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0025] The first aspect of this utility model provides a media recovery device, such as... Figure 1As shown, it includes a heat exchange pipeline 1, an air inlet pipeline 2, a bypass pipeline 3, and a gas-liquid separation and storage assembly 4. The heat exchange pipeline 1 has an inlet section 11 and an outlet section 12. Both the inlet section 11 and the outlet section 12 are used to connect with the heat load 5 and form a circulation channel. The air inlet pipeline 2 is connected to the outlet section 12. The bypass pipeline 3 is connected in parallel with the inlet section 11. The inlet and outlet of the gas-liquid separation and storage assembly 4 are both connected to the bypass pipeline 3.

[0026] The aforementioned thermal load 5 can be the probe station's tray, but it is not limited to it. For scenarios where the medium normally circulates between the device and the load, but in specific situations requires the medium to be removed from the load and recycled back to the connected device, the aforementioned medium recycling device can be used with minimal modifications to the semiconductor testing system.

[0027] The following explanation uses the probe station's tray with heat load 5 as an example:

[0028] The media recovery equipment operates in three modes. The first mode is shutdown mode, where the probe station does not use the media recovery equipment; the media inside the equipment is static, while the media is present in the internal and external piping and the tray. The second mode is operation mode, where the probe station requires the media recovery equipment to deliver media to the tray for cooling or heating / temperature control. The media circulates between the heat exchange piping 1 and the tray. The third mode is air-blowing recovery mode, which recovers the media from the tray back into the media recovery equipment to prevent excessive pressure caused by boiling, vaporization, and expansion of the media when the tray heats up.

[0029] In the third mode, when it is necessary to recover the medium in the loading tray, the air inlet pipe 2 exhausts gas into the heat exchange pipe 1. The gas enters the loading tray along the medium flow direction, pushing the liquid in the loading tray into the bypass pipe 3 connected in parallel with the liquid inlet section 11. After gas and liquid separation by the gas-liquid separation and storage component 4 in the bypass pipe 3, the liquid is stored in the gas-liquid separation and storage component 4, thus remaining inside the equipment to realize the recovery of the medium. At the same time, it can also supply liquid for the start-up of the equipment, and the separated gas is discharged to the outside.

[0030] In the medium recovery device provided by the first aspect of this utility model, before the gas is discharged, it will be separated into gas and liquid through the gas-liquid separation and storage component 4 in the bypass pipeline 3. The liquid can be stored in the gas-liquid separation and storage component 4, which effectively reduces the dissipation of the medium and protects the test environment.

[0031] The gas-liquid separation and liquid storage component 4 not only has the function of gas-liquid separation but also the function of liquid storage, occupying only the space of one component and having a small volume.

[0032] Secondly, since the gas-liquid separation and storage component can store the medium, there is no back discharge of separated gas during medium recovery. Therefore, fewer valves and other components are required, the failure rate is relatively low, the control logic is simple, the equipment is highly stable, and the filtration efficiency can be guaranteed.

[0033] In alternative implementations, such as Figure 1 As shown, the heat exchange pipeline 1 is equipped with a pump body 6, which is located between the liquid inlet section 11 and the liquid outlet section 12. The inlet of the bypass pipeline 3 is connected to the liquid inlet end of the liquid inlet section 11, and the outlet of the bypass pipeline 3 is connected to the liquid outlet end of the liquid inlet section 11.

[0034] When the equipment is started, the pump body 6 works and needs to draw in a large amount of liquid. At this time, it is not enough for the pump body 6 to draw in the liquid in the heat exchange pipeline 1 to start successfully. Since the bypass pipeline 3 is connected in parallel with the liquid inlet section 11 and the pump body 6 is located between the liquid inlet section 11 and the liquid outlet section 12, the pump body 6 can draw liquid from the gas-liquid separation and storage component 4 to replenish the liquid and ensure the successful start of the pump body 6.

[0035] In an optional embodiment, the gas-liquid separation and storage assembly 4 includes a gas-liquid separator, the inlet of which is connected to the bypass pipe 3, the gas-liquid separator has a water storage chamber, the water storage chamber is connected to the inlet of the gas-liquid separator, and the drain port of the water storage chamber is connected to the bypass pipe 3.

[0036] When it is necessary to recover the medium in the loading tray, the gas-liquid mixture in the bypass pipe 3 can enter the gas-liquid separator. After the gas-liquid separator separates the gas and liquid, the liquid enters the water storage chamber, and the gas can be discharged from the exhaust port of the gas-liquid separator.

[0037] In other embodiments, the gas-liquid separation and storage assembly 4 may include a gas-liquid separator and a water tank, which are separately arranged, and the drain port of the gas-liquid separator and the inlet port of the water tank are connected by a pipeline.

[0038] In an optional embodiment, a first valve 7 is provided in the bypass line 3 between the inlet of the gas-liquid separator and the liquid inlet section 11.

[0039] In operating mode, the user can close the first valve 7, allowing the medium to circulate only between the heat exchange pipe 1 and the loading tray, without passing through the gas-liquid separation and storage component 4. The gas-liquid separation and storage component 4 only serves as a liquid replenishment function when starting the operating mode. The advantage of this setting is that it avoids all the medium in the gas-liquid separation and storage component 4 from participating in the circulation, thus avoiding significant cooling loss at low temperatures and additional power consumption of the equipment.

[0040] The first valve 7 can be a solenoid valve, which allows the user to control the opening degree of the first valve 7.

[0041] In alternative implementations, such as Figure 1 As shown, the media recovery equipment also includes an oil mist separator 8. The inlet of the oil mist separator 8 is connected to the exhaust port of the gas-water separation and storage component 4, and the exhaust port of the oil mist separator 8 is connected to a second valve 9.

[0042] After the gas-liquid separator separates the gas and liquid, the gas can be discharged from the exhaust port of the gas-liquid separator to the oil mist separator 8. Since the gas and liquid have been initially separated in the gas-liquid separator, there is less mist liquid in the gas entering the oil mist separator 8. After further filtration in the oil mist separator 8, the gas is discharged into the environment through the second valve 9.

[0043] The second valve 9 can be a solenoid valve, which allows the user to control the opening degree of the second valve 9.

[0044] It should be noted that if the gas-liquid mixture in the inlet section 11 is directly discharged into the oil mist separator 8, a large amount of liquid will directly fill the oil mist separator 8, rendering it ineffective and clogging the pipeline. Furthermore, the first valve 7 prevents the medium from impacting the oil mist separator 8, thus extending its lifespan.

[0045] Specifically, the oil mist separator 8 is a fine filtration component that enhances the gas-liquid separation effect. One or more oil mist separators 8 can be configured, and multiple oil mist separators 8 can be connected in parallel or in series. The oil mist separator 8 can further filter the gas discharged from the gas-liquid separator, recover the liquid within it, and release the filtered gas into the environment.

[0046] In alternative implementations, such as Figure 1 As shown, the drain port of the oil mist separator 8 is connected to the inlet section 11, so that the liquid separated by the oil mist separator 8 can be discharged into the inlet section 11 to avoid the loss of the medium.

[0047] In alternative implementations, such as Figure 1 As shown, a third valve 10 is provided between the liquid inlet section 11 and the liquid outlet section 12, or a third valve 10 is provided in the liquid outlet section 12.

[0048] When it is necessary to recover the medium in the loading tray, the first valve 7 can be opened and the third valve 10 can be closed to cut off the circulation between the heat exchange pipeline 1 and the loading tray, which is conducive to the discharge of the medium in the loading tray by gas.

[0049] In operation mode, the first valve 7 can be closed and the third valve 10 can be opened to achieve circulation between the heat exchange pipeline 1 and the loading tray.

[0050] like Figure 1 As shown, the liquid outlet section 12 is equipped with a third valve 10.

[0051] The third valve 10 can be a solenoid valve, which allows the user to control the opening degree of the third valve 10.

[0052] In alternative implementations, such as Figure 1 As shown, a pump body 6, a heat exchanger 011, and a heater 012 are provided between the liquid inlet section 11 and the liquid outlet section 12. The heat exchanger 011 and the heater 012 are both located downstream of the pump body 6 along the flow direction of the medium in the heat exchange pipeline 1.

[0053] The heat exchanger 011 and the heater 012 are used to exchange heat and raise the temperature, respectively, and work together to control the temperature of the medium.

[0054] In alternative implementations, such as Figure 1 As shown, the media recovery equipment also includes a return pipeline 013, which is connected in parallel between the inlet and outlet of the pump body 6. The return pipeline 013 is equipped with a flow regulating valve 014.

[0055] The return pipeline 013 and the flow regulating valve 014 thereon are used to adjust the flow rate of the medium discharged from the outlet section 12. When the flow rate of the medium in the heat exchange pipeline 1 is too large, the medium can return to the inlet of the pump body 6 through the flow regulating valve 014, and the remaining liquid is output to the outside of the equipment along the heat exchange pipeline 1.

[0056] In an optional embodiment, a fourth valve 015 is provided on the intake pipe 2.

[0057] In operation mode, the fourth valve 015 can be closed. When it is necessary to recover the medium in the loading tray, the fourth valve 015 can be opened.

[0058] The fourth valve 015 can be a solenoid valve, which makes it easy for users to control the opening degree of the fourth valve 015.

[0059] The following is a detailed description of the usage process when the above-mentioned media recovery equipment and the loading tray form a cycle:

[0060] The water tank in the gas-liquid separation and storage assembly 4 has ample space and is filled to a specific liquid level during shutdown. The bottom of the gas-liquid separation and storage assembly 4 is connected to the inlet of the pump body 6. During startup, the pump body 6 draws liquid from the inlet section 11 and the water tank, then outputs it to components such as the heater 012 and heat exchanger 011 for temperature regulation. After reaching the required temperature, it is output to the external pipeline of the equipment, passes through the loading tray, returns to the equipment, and then re-enters the pump body 6, repeating the cycle. When it is necessary to recover the medium in the loading tray, the operation of the pump body 6 is first stopped, then the fourth valve 015 is opened, the third valve 10 is closed, and the first valve 7 is opened. At this time, the outside gas enters the loading plate along the direction of medium flow, pushing the liquid in the loading plate back into the equipment. The medium returning to the equipment includes a mixture of gas and liquid. It enters the gas-liquid separation and storage component 4 through the first valve 7 for gas-liquid separation. The liquid remains in the water tank. The gas at the outlet passes through the oil mist separator 8. The second valve 9 is opened, and the gas undergoes further filtration in the oil mist separator 8. The air is discharged into the environment, while the separated liquid remains inside the equipment.

[0061] A second aspect of this utility model provides a semiconductor testing system, which includes the aforementioned dielectric recovery device.

[0062] The semiconductor testing system provided in the second aspect of this utility model includes the dielectric recovery device provided in the first aspect of this utility model, and thus has all the beneficial effects of the dielectric recovery device provided in the first aspect of this utility model.

[0063] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A medium recovery apparatus characterized by comprising: It includes a heat exchange pipeline (1), an air inlet pipeline (2), a bypass pipeline (3), and a gas-liquid separation and storage assembly (4). The heat exchange pipeline (1) has an inlet section (11) and an outlet section (12). Both the inlet section (11) and the outlet section (12) are used to connect with the heat load (5) and form a circulation channel. The air inlet pipeline (2) is connected to the outlet section (12). The bypass pipeline (3) is connected in parallel with the inlet section (11). The inlet and outlet of the gas-liquid separation and storage assembly (4) are both connected to the bypass pipeline (3).

2. The medium recovery apparatus of claim 1, wherein The gas-water separation and liquid storage assembly (4) includes a gas-water separator. The inlet of the gas-water separator is connected to the bypass pipeline (3). The gas-water separator has a water storage chamber. The water storage chamber is connected to the inlet of the gas-water separator. The drain outlet of the water storage chamber is connected to the bypass pipeline (3).

3. The medium recovery apparatus of claim 2, wherein The bypass pipeline (3) between the inlet of the gas-liquid separator and the liquid inlet section (11) is equipped with a first valve (7).

4. The medium recycling apparatus according to claim 1, wherein It also includes an oil mist separator (8), the inlet of which is connected to the exhaust port of the gas-water separation and storage assembly (4), and the exhaust port of the oil mist separator (8) is connected to a second valve (9).

5. The medium recovery apparatus of claim 4, wherein The drain port of the oil mist separator (8) is connected to the inlet section (11).

6. The medium recycling apparatus according to claim 1, wherein A third valve (10) is provided between the liquid inlet section (11) and the liquid outlet section (12), or the liquid outlet section (12) is provided with a third valve (10).

7. The medium recycling apparatus according to claim 1, wherein A pump body (6), a heat exchanger (011), and a heater (012) are provided between the liquid inlet section (11) and the liquid outlet section (12). The heat exchanger (011) and the heater (012) are both located downstream of the pump body (6) along the flow direction of the medium in the heat exchange pipeline (1).

8. The medium recovery apparatus of claim 7, wherein The media recovery device also includes a return pipeline (013), which is connected in parallel between the inlet and outlet of the pump body (6), and the return pipeline (013) is equipped with a flow regulating valve (014).

9. The medium recycling apparatus according to claim 1, wherein The intake pipe (2) is equipped with a fourth valve (015).

10. A semiconductor testing system, characterized in that, Includes the media recovery device as described in any one of claims 1-9.

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