Air blowing and liquid discharging device and temperature control system
By designing a gas-blowing and liquid-draining device, the recovery and gas-liquid separation of fluorinated liquid were realized, solving the problems of fluorinated liquid overflow and spraying in the high and low temperature integrated machine, and improving the stability and environmental friendliness of the system.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU CHANGCHUAN TECH CO LTD
- Filing Date
- 2025-08-04
- Publication Date
- 2026-08-04
AI Technical Summary
In existing high and low temperature integrated machines, fluorinated liquid is prone to overflow during rapid heating, leading to waste and environmental pollution, and liquid spraying is likely to occur at the exhaust port.
Design an air blowing and liquid draining device, including a liquid storage tank, an air blowing pipeline, a liquid draining pipeline and an exhaust pipeline. The air-liquid separation is achieved through the air-liquid separator to recover the medium in the load heat exchange device and prevent overflow. Air-liquid separation is also performed at the exhaust port to prevent liquid spraying.
It effectively avoids the waste of fluorinated liquid and environmental pollution, ensures that the medium does not overflow under high temperature conditions, reduces noise and liquid spraying, and improves the stability of the system.
Smart Images
Figure CN224593495U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor testing technology, and in particular to an air blowing and liquid draining device and a temperature control system. Background Technology
[0002] In the field of semiconductor testing, probe stations are key equipment for wafer-level chip testing. To simulate the operating performance of chips under different temperature environments, high and low temperature integrated systems are widely used in probe station systems to achieve rapid temperature switching and precise temperature control. High and low temperature integrated systems typically use fluorinated liquids as the heat transfer medium, transferring temperature to the chip under test on the tray through a circulation system.
[0003] Existing high and low temperature integrated compressors maintain a stable testing temperature environment by filling the sample tray with fluorinated liquid during operation. However, when temperature switching is required, especially after low-temperature testing when a temperature increase is needed, current solutions often directly shut down the compressor. Because fluorinated liquid has a low boiling point, residual fluorinated liquid rapidly vaporizes and boils during rapid heating. The lack of an effective recovery mechanism in existing systems leads to the easy overflow of this boiling fluorinated liquid from the compressor, resulting in waste and environmental pollution. Utility Model Content
[0004] The purpose of this invention is to provide a blowing and draining device that prevents fluorinated liquid from overflowing from the high-low temperature integrated machine under high-temperature conditions, reducing media waste and environmental pollution, and effectively preventing liquid spraying at the exhaust port. Additionally, a temperature control system incorporating the aforementioned blowing and draining device is also provided.
[0005] To achieve the above objectives, this utility model provides the following technical solution: In a first aspect, this utility model provides an air-blowing and liquid-draining device for draining liquid from a load heat exchanger, comprising a liquid storage tank, a gas-liquid separator, an air-blowing pipeline, a liquid-draining pipeline, and an exhaust pipeline; the air outlet of the air-blowing pipeline is used to connect to the input end of the load heat exchanger, and the liquid-draining pipeline is used to connect the liquid-draining end of the load heat exchanger to the liquid storage tank; the exhaust pipeline is connected to the air outlet of the liquid storage tank, and the gas-liquid separator is installed on the exhaust pipeline.
[0006] In an optional embodiment, the air blowing line is provided with a one-way valve group, which is configured to allow gas in the air blowing line to flow into the load heat exchanger in one direction only. And / or, the air blowing line is provided with a first valve, the first valve being configured to control the flow rate of the air blowing line.
[0007] In an optional embodiment, the exhaust pipe is provided with a first one-way valve, which is located between the liquid storage tank and the gas-liquid separator. The first one-way valve is configured to allow gas in the liquid storage tank to flow unidirectionally into the gas-liquid separator. And / or, the exhaust pipe is provided with a second valve, the second valve being configured to control the flow rate of the exhaust pipe.
[0008] In an optional embodiment, the load heat exchange device includes a circulation pipeline connected between the air blowing pipeline and the liquid draining pipeline, and a load heat exchanger is provided on the circulation pipeline.
[0009] In an optional embodiment, a replenishment pipeline is connected between the storage tank and the circulation pipeline.
[0010] In an optional embodiment, the air blowing and liquid draining device further includes a return blowing pipeline, one end of which is connected to the air blowing pipeline, and the other end is connected to the exhaust pipeline between the gas-liquid separator and the liquid storage tank.
[0011] In an optional embodiment, the backflush line is provided with a third valve, which is used to control the flow rate of the backflush line.
[0012] In an optional embodiment, the air-blowing and liquid-draining device further includes a return liquid pipeline, the gas-liquid separator has a liquid-draining end, and the return liquid pipeline is connected between the liquid-draining end and the liquid storage tank.
[0013] In an optional embodiment, the return line is provided with a second one-way valve configured to allow liquid in the gas-liquid separator to flow unidirectionally into the storage tank, and / or, the return line is provided with a fourth valve for controlling the flow rate of the return line.
[0014] Secondly, this utility model provides a temperature control system, including a load heat exchange device and an air blowing and liquid draining device as described in any of the foregoing embodiments.
[0015] The air blowing and liquid draining device and temperature control system provided by this utility model can produce the following beneficial effects: Compared with the prior art, the air blowing and liquid draining device provided by this utility model can recover the medium in the load heat exchange device and the liquid draining pipeline to the liquid storage tank, avoiding the medium from overflowing from the high and low temperature integrated machine under high temperature conditions, reducing the waste of medium and pollution to the environment. In addition, the gas-liquid separator can realize gas and liquid separation at the exhaust port, effectively avoiding the phenomenon of liquid spraying at the exhaust port caused by directly blowing air into the liquid draining pipeline.
[0016] The temperature control system provided in the second aspect of this utility model includes the air blowing and liquid draining device provided in the first aspect of this utility model, thereby having all the beneficial effects of the air blowing and liquid draining device provided in the first aspect of this utility model. Attached Figure Description
[0017] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0018] Figure 1 A schematic diagram of the first air-blowing and liquid-draining device provided in this embodiment of the present utility model when it is filling the load heat exchange device with air. Figure 2 A schematic diagram of the second type of air blowing and liquid drainage device provided in the embodiments of this utility model; Figure 3 A schematic diagram of the third type of air blowing and liquid drainage device provided in the embodiments of this utility model; Figure 4 This is a schematic diagram of the first type of air-blowing and liquid-draining device provided in this embodiment of the present invention when recovering the medium in the gas-liquid separator.
[0019] Icons: 1-Storage tank; 2-Gas-liquid separator; 3-Blowing pipe; 4-Draining pipe; 5-Exhaust pipe; 6-Load heat exchanger; 61-Circulation pipe; 611-First pipe; 612-Second pipe; 62-Pump body; 63-Sixth valve; 64-Load heat exchanger; 7-Check valve group; 71-Third check valve; 72-Fourth check valve; 8-First valve; 9-First check valve; 10-Second valve; 011-Drying gas system; 012-Fifth valve; 013-Replenishment pipe; 014-Return pipe; 015-Third valve; 016-Return pipe; 017-Second check valve; 018-Fourth valve. Detailed Implementation
[0020] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0023] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.
[0024] The first aspect of this utility model is to provide an air-blowing and liquid-draining device, such as... Figure 1 As shown, it includes a liquid storage tank 1, a gas-liquid separator 2, an air blowing pipe 3, a liquid draining pipe 4, and an exhaust pipe 5; the air outlet of the air blowing pipe 3 is used to connect to the input end of the load heat exchange device 6, and the liquid draining pipe 4 is used to connect the liquid draining end of the load heat exchange device 6 to the liquid storage tank 1; the exhaust pipe 5 is connected to the air outlet of the liquid storage tank 1, and the gas-liquid separator 2 is installed on the exhaust pipe 5.
[0025] The air blowing and liquid draining device provided in the first aspect of this utility model, when in use, such as Figure 1 As shown in the red line, the air blowing pipe 3 can charge air into the load heat exchange device 6, blowing the medium in the load heat exchange device 6 and the drain pipe 4 back to the storage tank 1. At the same time, the excess gas in the storage tank 1 enters the gas-liquid separator 2 in the exhaust pipe 5 for gas-liquid separation. The separated liquid is stored in the gas-liquid separator 2, and the gas is discharged.
[0026] Therefore, the air blowing and liquid draining device provided in the above embodiment can recover the medium in the load heat exchange device 6 and the liquid draining pipeline 4 to the liquid storage tank 1, avoiding the medium from overflowing from the high and low temperature integrated machine under high temperature conditions, reducing the waste of medium and pollution to the environment.
[0027] In addition, the gas-liquid separator 2 can separate gas and liquid at the exhaust port, effectively avoiding the phenomenon of liquid spraying at the exhaust port caused by directly blowing air into the load heat exchange device 6.
[0028] The aforementioned load heat exchanger 6 can be the probe station's loading tray and its connecting pipes, but it is not limited to a loading tray. For scenarios where the medium normally circulates between the equipment and the load heat exchanger 64, but in specific situations requires the medium to be removed from the load heat exchanger 64 and returned to the connected equipment, the aforementioned air-blowing and liquid-draining device can be used.
[0029] In an optional embodiment, the air blowing line 3 is provided with a first valve 8, which is configured to control the flow rate of the air blowing line 3.
[0030] Specifically, when the air blowing pipeline 3 needs to blow air to the load heat exchange device 6, the first valve 8 is in the open state. At this time, the flow rate of the air blowing pipeline 3 can also be controlled by controlling the opening degree of the first valve 8. When the air blowing pipeline 3 does not need to blow air to the load heat exchange device 6, the first valve 8 is in the closed state.
[0031] The first valve 8 can be a solenoid valve, which allows the user to control the opening and closing of the first valve 8 and the degree of opening.
[0032] In an optional embodiment, the air blowing line 3 is provided with a one-way valve group 7, which is configured to allow the medium in the air blowing line 3 to flow into the load heat exchange device 6 in one direction.
[0033] The one-way valve group 7 allows the medium in the air blowing pipeline 3 to flow into the load heat exchanger 6 in one direction, preventing the medium in the load heat exchanger 6 from flowing into the air blowing pipeline 3 under normal operating conditions, ensuring the stability of the air blowing and liquid drainage device and avoiding the waste of medium.
[0034] Among them, such as Figure 1 As shown, the one-way valve group 7 may include a third one-way valve 71, which is located between the first valve 8 and the load heat exchange device 6.
[0035] The third check valve 71 ensures that the medium can only flow from the first valve 8 to the load heat exchanger 6 in one direction, thus preventing the load heat exchanger 6 from experiencing a performance degradation due to backflow of the medium.
[0036] In other implementations, such as Figure 2 and Figure 3 As shown, the one-way valve group 7 may include a third one-way valve 71 and a fourth one-way valve 72. The third one-way valve 71 is located between the first valve 8 and the load heat exchange device 6, and the fourth one-way valve 72 is located between the first valve 8 and the drying gas system 011.
[0037] The advantage of the above-described embodiment is that it can prevent the medium in the first valve 8 and the air blowing pipeline 3 between the first valve 8 and the fourth check valve 72 from flowing into the drying gas system 011, and the air blowing and liquid draining device has better stability when in use.
[0038] In alternative implementations, such as Figure 1 As shown, one end of the exhaust pipe 5 is connected to the top of the liquid storage tank 1, and the other end is connected to the air inlet of the gas-liquid separator 2. The exhaust pipe 5 is equipped with a first one-way valve 9, which is located between the liquid storage tank 1 and the gas-liquid separator 2.
[0039] The first one-way valve 9 allows gas in the storage tank 1 to flow into the gas-liquid separator 2 in one direction, preventing gas in the gas-liquid separator 2 from flowing back into the storage tank 1. Especially when the gas pressure in the gas-liquid separator 2 is high, it can effectively prevent the backflow of gas.
[0040] In alternative implementations, such as Figure 1 As shown, the exhaust pipe 5 is equipped with a second valve 10, which is configured to control the flow rate of the exhaust pipe 5.
[0041] Specifically, when the gas-liquid separator 2 needs to receive the gas discharged from the storage tank 1, the second valve 10 is in the open state. At this time, the flow rate of the exhaust pipe 5 can also be controlled by controlling the opening degree of the second valve 10. When the gas-liquid separator 2 does not need to receive the gas discharged from the storage tank 1, the second valve 10 can be in the closed state.
[0042] The second valve 10 may be, but is not limited to, a manual valve.
[0043] In alternative implementations, such as Figure 1 As shown, the exhaust pipe 5 is equipped with a fifth valve 012, which is located downstream of the exhaust port of the gas-liquid separator 2 to control the connection between the exhaust port of the gas-liquid separator 2 and the external environment.
[0044] In alternative implementations, such as Figure 2 As shown, the load heat exchange device 6 includes a circulation pipeline 61, which is connected between the air blowing pipeline 3 and the liquid discharge pipeline 4. A pump body 62 and a load heat exchanger 64 are provided on the circulation pipeline 61.
[0045] In normal usage mode, refer to Figure 2 As shown by the red line in the diagram, the pump body 62 is working, and the medium circulates in the circulation pipeline 61, flowing through the inlet and outlet of the load heat exchanger 64 to maintain a stable test temperature environment for the load heat exchanger 6. At this time, the first valve 8 is closed, and the drain pipeline 4 can supply liquid from the storage tank 1 to the circulation pipeline 61.
[0046] Specifically, such as Figure 2 As shown, the circulation pipeline 61 includes a first pipeline 611 and a second pipeline 612. One end of the first pipeline 611 and the second pipeline 612 are connected to the air outlet of the air blowing pipeline 3, and the other end of the first pipeline 611 and the second pipeline 612 are connected to the liquid inlet of the liquid drain pipeline 4. The pump body 62 is installed in the first pipeline 611, and the load heat exchanger 64 is installed in the second pipeline 612.
[0047] In alternative implementations, such as Figure 2 As shown, a sixth valve 63 is provided on the first pipeline 611, which controls the opening and closing of the first pipeline 611. When the air blowing pipeline 3 blows air into the load heat exchanger 6, the gas in the air blowing pipeline 3 enters the drain pipeline 4 through the second pipeline 612, discharging the medium in the load heat exchanger 64. During the above process, the sixth valve 63 is closed to prevent the gas from bypassing the load heat exchanger 64 and directly entering the storage tank 1 through the first pipeline 611. When the load heat exchanger 64 is working normally, the sixth valve 63 is in the open state.
[0048] The sixth valve 63 is installed on the first pipeline 611 between the air blowing pipeline 3 and the pump body 62. The sixth valve 63 may be, but is not limited to, a solenoid valve.
[0049] In alternative implementations, such as Figure 3 As shown, a replenishment pipeline 013 is connected between the storage tank 1 and the first pipeline 611 in the circulation pipeline 61.
[0050] Reference Figure 3 As shown by the red line in the figure, the above implementation method allows the medium in the storage tank 1 to enter the circulation pipeline 61 through the replenishment pipeline 013, supplying liquid to the circulation pipeline 61 and ensuring that there is sufficient medium in the load heat exchange device 6.
[0051] Of course, such as Figure 2 As shown, the above-mentioned replenishment pipeline 013 may not be installed, and the medium in the storage tank 1 can be directly discharged to the load heat exchange device 6 through the drain pipeline 4.
[0052] As the gas-liquid separator 2 is used, the liquid separated by the gas-liquid separator 2 will gradually accumulate at the bottom of the gas-liquid separator 2. To ensure the normal operation of the gas-liquid separator 2, in optional embodiments, such as... Figure 4 As shown, the air blowing and liquid draining device also includes a return air pipe 014, one end of which is connected to the air blowing pipe 3, and the other end is connected to the exhaust pipe 5 between the gas-liquid separator 2 and the liquid storage tank 1.
[0053] When using, refer to Figure 4As shown by the red line, the blowing pipe 3 can blow air into the return blowing pipe 014. The gas enters the gas-liquid separator 2 from the exhaust pipe 5, which increases the gas pressure in the gas-liquid separator 2 and forces out the liquid medium collected in the gas-liquid separator 2, preventing the gas-liquid separator 2 from being filled with fluorinated liquid and causing separation failure.
[0054] During the above process, in order to prevent the gas in the blowing pipe 3 from entering the load heat exchanger 6, the first valve 8 is in the closed state, and in order to prevent the gas in the exhaust pipe 5 from entering the liquid storage tank 1, the second valve 10 is in the closed state.
[0055] In alternative implementations, such as Figures 1 to 3 As shown, the return air line 014 is equipped with a third valve 015, which is used to control the flow rate of the return air line 014.
[0056] Specifically, when it is necessary to press out the liquid medium collected in the gas-liquid separator 2, the third valve 015 is in the open state. At this time, the flow rate of the backflush pipeline 014 can also be controlled by controlling the opening degree of the third valve 015. When it is not necessary to press out the liquid medium collected in the gas-liquid separator 2, the third valve 015 is in the closed state.
[0057] The third valve 015 can be a solenoid valve, which allows the user to control the opening and closing of the third valve 015 and the degree of opening.
[0058] In alternative implementations, such as Figure 4 As shown, in order to reduce the waste of liquid medium, the air blowing and draining device also includes a return liquid pipeline 016. The gas-liquid separator 2 has a drain end, and the return liquid pipeline 016 is connected between the drain end and the storage tank 1.
[0059] Reference Figure 4 As shown by the red line in the diagram, the liquid medium collected in the gas-liquid separator 2 can be squeezed out from the drain end, and the liquid medium enters the storage tank 1 through the return liquid pipeline 016 for storage, thereby realizing the recovery of the liquid medium.
[0060] In an optional embodiment, the return line 016 is provided with a second check valve 017.
[0061] The second one-way valve 017 allows the liquid medium in the gas-liquid separator 2 to flow into the storage tank 1 in one direction, preventing the liquid medium in the storage tank 1 from flowing back into the gas-liquid separator 2.
[0062] In alternative implementations, such as Figures 1 to 3 As shown, the return line 016 is equipped with a fourth valve 018, which is used to control the flow rate of the return line 016.
[0063] Specifically, when the storage tank 1 needs to receive the liquid medium pressed out by the gas-liquid separator 2, the fourth valve 018 is in the open state. At this time, the flow rate of the return pipeline 016 can also be controlled by controlling the opening degree of the fourth valve 018. When the storage tank 1 does not need to receive the liquid medium pressed out by the gas-liquid separator 2, the fourth valve 018 is in the closed state.
[0064] Among them, the fourth valve 018 may be, but is not limited to, a manual valve.
[0065] The following is a detailed explanation of the media recovery process of the air blowing and liquid drainage device: The drying gas system 011 starts working, closing the sixth valve 63. Gas passes through the first valve 8, the one-way valve group 7, and the load heat exchanger 6 into the storage tank 1 to blow the fluorinated liquid in the load heat exchanger 6 and the drain pipe 4 back into the storage tank 1. Subsequently, excess gas in the storage tank 1 is discharged through the second valve 10, the first one-way valve 9, the gas-liquid separator 2, and the fifth valve 012, ensuring constant pressure inside the storage tank 1. The function of the gas-liquid separator 2 is to collect the liquid fluorinated liquid carried during the exhaust process. During the above process, the third valve 015 and the fourth valve 018 are in the closed state.
[0066] Subsequently, the first valve 8, the second valve 10, and the fifth valve 012 are closed, and the third valve 015 and the fourth valve 018 are opened. The drying gas system 011 is activated, and the gas enters the storage tank 1 through the third valve 015, the gas-liquid separator 2, the second check valve 017, and the fourth valve 018 to blow the fluorinated liquid collected in the gas-liquid separator 2 back into the storage tank 1, preventing the gas-liquid separator 2 from becoming full of fluorinated liquid and causing separation failure.
[0067] Within the probe station's wide temperature range (150℃~-40℃), a single fluorinated liquid cannot meet the requirements of all temperature points. The aforementioned air blowing and liquid drainage device can ensure the stability of the entire machine when the probe station switches temperatures, whether the high and low temperature integrated machine is running or stopping. The entire machine can recover fluorinated liquid under operating conditions from low temperature to high temperature, reducing the loss of fluorinated liquid, which is known as "liquid gold," and also eliminating noise and fluorinated liquid spraying caused by the high temperature expansion of fluorinated liquid.
[0068] The second aspect of this utility model provides a temperature control system, which includes a load heat exchange device 6 and the above-mentioned air blowing and liquid drainage device.
[0069] The temperature control system provided in the second aspect of this utility model has the air blowing and liquid draining device provided in the first aspect of this utility model, and thus has all the beneficial effects of the air blowing and liquid draining device provided in the first aspect of this utility model.
[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.
Claims
1. A blow and drain device for draining a load heat exchanger device (6), characterized in that, It includes a storage tank (1), a gas-liquid separator (2), a blowing pipe (3), a drain pipe (4), and an exhaust pipe (5); the outlet end of the blowing pipe (3) is used to connect to the input end of the load heat exchange device (6), the drain pipe (4) is used to connect the drain end of the load heat exchange device (6) to the storage tank (1); the exhaust pipe (5) is connected to the outlet of the storage tank (1), and the gas-liquid separator (2) is installed on the exhaust pipe (5).
2. The air and liquid discharge device according to claim 1, wherein The air blowing pipeline (3) is provided with a one-way valve group (7), which is configured to allow gas in the air blowing pipeline (3) to flow into the load heat exchange device (6) in one direction only. And / or, the air blowing line (3) is provided with a first valve (8), which is configured to control the flow rate of the air blowing line (3).
3. The air and liquid discharge device according to claim 1, wherein The exhaust pipe (5) is provided with a first one-way valve (9), which is located between the liquid storage tank (1) and the gas-liquid separator (2). The first one-way valve (9) is configured to allow gas in the liquid storage tank (1) to flow into the gas-liquid separator (2) in one direction. And / or, the exhaust pipe (5) is provided with a second valve (10) configured to control the flow rate of the exhaust pipe (5).
4. The device according to claim 1, wherein The load heat exchange device (6) includes a circulation pipeline (61) which is connected between the air blowing pipeline (3) and the liquid discharge pipeline (4), and a load heat exchanger (64) is provided on the circulation pipeline (61).
5. The air and liquid discharge device according to claim 4, wherein The storage tank (1) is connected to the circulation pipeline (61) by a replenishment pipeline (013).
6. The device according to any one of claims 1 to 5, wherein The air blowing and liquid draining device also includes a return air pipe (014), one end of which is connected to the air blowing pipe (3), and the other end is connected to the exhaust pipe (5) between the gas-liquid separator (2) and the liquid storage tank (1).
7. The air and liquid discharge device according to claim 6, wherein The return air line (014) is equipped with a third valve (015), which is used to control the flow rate of the return air line (014).
8. The air and liquid discharge device according to claim 6, wherein The air-blowing and liquid-draining device also includes a return liquid pipeline (016), the gas-liquid separator (2) has a liquid-draining end, and the return liquid pipeline (016) is connected between the liquid-draining end and the liquid storage tank (1).
9. The device according to claim 8, wherein The return line (016) is provided with a second check valve (017), which is configured to allow liquid in the gas-liquid separator (2) to flow unidirectionally into the storage tank (1), and / or, the return line (016) is provided with a fourth valve (018), which is used to control the flow rate of the return line (016).
10. A temperature control system, characterized by, It includes a load heat exchange device (6) and a blow-out liquid discharge device as described in any one of claims 1-9.