Metal sputtering target manufacturing apparatus

Abstract

The utility model discloses a kind of metal sputtering target material is made using metal casting device, including smelting furnace, blanking station, heat dissipation top cover, composite crucible and metal casting homogenization cooling unit, the utility model is in the process of using, crucible inner layer is composed of high-purity graphite, crucible outer layer is composed of porous graphite, vacuum cavity is provided between crucible outer layer and crucible inner layer, the vacuum cavity is filled with argon gas heat insulation layer, can effectively reduce the heat source loss of crucible inner layer, simultaneously, the heat conduction efficiency of crucible outer layer composed of porous graphite is low, guarantee the metal material casting temperature inside crucible, when copper quality mould temperature drops to suitable gradient, work type water tank adds auxiliary heat dissipation liquid medium, and through two groups of circulating water tank and the water pump outside on circulating pipeline, heat accumulation at the bottom area of work type water tank is carried away in circulation, to reach the purpose of increasing speed copper quality mould cooling, satisfy the gradient type cooling effect of copper quality mould, guarantee the casting forming of metal material inside copper quality mould.

Description

Technical Field

[0001] This utility model relates to the field of metal sputtering target material preparation technology, specifically a metal melting and casting device for manufacturing metal sputtering targets. Background Technology

[0002] Sputtering targets are key materials in physical vapor deposition (PVD) technology, and their purity, density, and microstructure directly affect the performance of the thin film. Conventional casting equipment suffers from problems such as inaccurate temperature control, poor melt flowability, and susceptibility to oxidation, leading to low target yields and unstable performance.

[0003] In the prior art, publication number "CN218744783U" discloses a metal casting device for making metal targets, including a smelting furnace body and a fastening mechanism. The smelting furnace body is provided with support shafts on both sides, and a support frame is provided at one end of the support shaft. A bearing seat is provided between the support shaft and the support frame. One of the two support frames is provided with an adjusting rod, which is connected to the support shaft. The fastening mechanism includes a fixed seat, a first electric telescopic rod, and a second electric telescopic rod. The fixed seat is located below the smelting furnace body. The fastening mechanism can fix the smelting furnace body and prevent the smelting furnace body from tilting at an angle through the support shaft, thereby preventing the molten metal from flowing out of the smelting furnace body and improving the safety of the smelting furnace body during operation.

[0004] However, existing technologies and the aforementioned devices still have significant shortcomings, such as:

[0005] 1. Single-layer crucibles tend to have a high heat loss rate, which affects the temperature maintenance of the metal material inside the crucible;

[0006] 2. The heat source at the bottom of the crucible has a temperature difference, resulting in large variations in the overall heating temperature range of the induction coil. The temperature of the inner coil is higher than that of the outer coil, which affects the sputtering target preparation effect. Utility Model Content

[0007] The purpose of this invention is to provide a metal casting apparatus for manufacturing metal sputtering targets, so as to solve the problems mentioned in the background art.

[0008] To achieve the above objectives, this utility model provides the following technical solution: a metal casting apparatus for manufacturing metal sputtering targets, comprising a melting furnace, a feeding platform, a heat dissipation top cover, a composite crucible, and a metal casting homogenization cooling unit. The feeding platform has a feeding cavity on its surface, which is connected to the interior of the melting furnace. The composite crucible includes an inner crucible layer and an outer crucible layer, with the outer crucible layer covering the outer surface of the inner crucible layer. The surface of the outer crucible layer is porous. The heat dissipation top cover is installed on one side of the feeding cavity surface. The metal casting homogenization cooling unit is located on the heat dissipation top cover and is used to cool and shape the metal casting mold.

[0009] Preferably, the metal casting homogeneous cooling unit includes a heat dissipation section, the heat dissipation section includes a heat dissipation chamber, the heat dissipation chamber is configured as two sets, the two sets of heat dissipation chambers are symmetrically installed on the surface of the heat dissipation top cover, an I-shaped water tank is installed through the heat dissipation top cover between the two sets of heat dissipation chambers, the bottom of the I-shaped water tank is inserted into the heat dissipation top cover, and an exhaust fan is added to the surface of the heat dissipation chamber.

[0010] Preferably, the metal melting and casting homogeneous cooling unit further includes a circulation section, which includes a circulating water tank. The circulating water tanks are symmetrically installed in two groups, and the two groups of circulating water tanks are unidirectionally connected through a conduit. A circulation pipeline is installed on the top of the circulating water tank, and multiple groups of circulation pipelines are arranged in an array. The circulating water tanks are connected to the I-shaped water tank through the circulation pipelines.

[0011] Preferably, the bottom of the outer layer of the crucible is provided with a molten metal casting guide unit.

[0012] Preferably, the molten metal casting guide unit includes a guide part, the guide part includes an electric rotating seat, the electric rotating seat is installed on the inner cavity of the melting furnace, a heat-insulating connecting rod is installed on the rotating end of the electric rotating seat, one end of the heat-insulating connecting rod is fixed to the outer layer of the crucible, and a feeding hopper is installed in the inner cavity of the melting furnace.

[0013] Preferably, the molten metal casting guide unit further includes a moving part, which includes a guide rail. The guide rail is embedded in the bottom of the feeding chamber. A cavity is provided at the bottom of the smelting furnace. One end of the guide rail is inserted into the bottom of the cavity. A moving plate is installed on the moving end of the guide rail. A fixed arm is provided on the top of the moving plate. An electric rotating shaft is embedded in the surface of the fixed arm. A flange is installed on the rotating end of the electric rotating shaft. The copper mold is fixed to the rotating end of the electric rotating shaft through the flange.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] 1. During use, the inner layer of the crucible is composed of high-purity graphite, and the outer layer of the crucible is composed of porous graphite. A vacuum cavity is set between the outer layer and the inner layer of the crucible. The vacuum cavity is filled with an argon gas insulation layer, which can effectively reduce the heat loss of the inner layer of the crucible. At the same time, the outer layer of the crucible composed of porous graphite has low thermal conductivity, which can further ensure the heat storage of the inner layer of the crucible and ensure the melting and casting temperature of the metal material inside the crucible.

[0016] 2. During use, the copper mold will first be cooled by air through the heat dissipation chamber and the exhaust fan installed on the top of the heat dissipation chamber at the bottom of the heat dissipation top cover. When the temperature of the copper mold drops to a suitable gradient, auxiliary heat dissipation liquid medium is added to the I-shaped water tank. The heat accumulated in the bottom area of ​​the I-shaped water tank is circulated away through two sets of circulating water tanks and external water pumps on the circulation pipeline, so as to accelerate the cooling of the copper mold, meet the gradient cooling effect of the copper mold, and ensure the melting and casting of the metal material inside the copper mold. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall device of this utility model;

[0018] Figure 2 This is a schematic diagram of the feeding chamber and guide rail in this utility model;

[0019] Figure 3 This is a schematic diagram of the circulating water tank, heat dissipation chamber, and copper mold in this utility model;

[0020] Figure 4 This is a schematic diagram of the heat-insulating connecting rod and the inner layer of the crucible in this utility model;

[0021] Figure 5 This is a schematic diagram of the movable plate, fixed arm, and electric rotating shaft in this utility model;

[0022] Figure 6 This is a schematic diagram of the outer layer of the crucible and the induction coil in this utility model.

[0023] In the diagram: 1. Smelting furnace; 11. Feed hopper; 2. Discharge platform; 21. Discharge chamber; 22. Guide rail; 23. Moving plate; 24. Fixed arm; 25. Electric rotating shaft; 3. Heat dissipation top cover; 4. Electric rotating seat; 41. Heat insulation connecting rod; 5. Inner layer of crucible; 51. Outer layer of crucible; 52. Induction coil; 6. I-shaped water tank; 7. Circulating water tank; 71. Circulation pipeline; 8. Heat dissipation chamber; 9. Copper mold. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figure 1-6 This utility model provides a technical solution:

[0026] Example 1: A metal casting apparatus for manufacturing metal sputtering targets: including a melting furnace 1, a feeding platform 2, a heat dissipation top cover 3, a composite crucible, and a metal casting homogenization cooling unit. The feeding platform 2 has a feeding cavity 21 on its surface, which is connected to the interior of the melting furnace 1. The composite crucible includes an inner crucible layer 5 and an outer crucible layer 51, with the outer crucible layer 51 covering the outer surface of the inner crucible layer 5. The surface of the outer crucible layer 51 is porous. The heat dissipation top cover 3 is installed on one side of the surface of the feeding cavity 21. The metal casting homogenization cooling unit is located on the heat dissipation top cover 3 and is used to cool and shape the metal casting mold.

[0027] The metal casting homogeneous cooling unit includes a heat dissipation section, which includes a heat dissipation chamber 8. The heat dissipation chamber 8 is configured as two sets, and the two sets of heat dissipation chamber 8 are symmetrically installed on the surface of the heat dissipation top cover 3. An I-shaped water tank 6 is installed through the heat dissipation top cover 3 between the two sets of heat dissipation chamber 8. The bottom of the I-shaped water tank 6 is inserted into the heat dissipation top cover 3. An exhaust fan is added to the surface of the heat dissipation chamber 8.

[0028] The metal melting and casting homogeneous cooling unit also includes a circulation section, which includes a circulating water tank 7. The circulating water tank 7 is symmetrically installed in two sets, and the two sets of circulating water tank 7 are connected in one direction through a conduit. A circulation pipe 71 is installed on the top of the circulating water tank 7, and multiple sets of circulation pipes 71 are arranged in an array. The circulating water tank 7 is connected to the I-shaped water tank 6 through the circulation pipe 71.

[0029] In this embodiment, the copper mold 9 is first cooled by air through the heat dissipation chamber 8 and the exhaust fan installed on the top of the heat dissipation chamber 8 at the bottom of the heat dissipation top cover 3. When the temperature of the copper mold 9 drops to a suitable gradient, the I-shaped water tank 6 adds auxiliary heat dissipation liquid medium, and the heat accumulated in the bottom area of ​​the I-shaped water tank 6 is circulated away through the two sets of circulating water tanks 7 and the external water pump on the circulating pipeline 71, so as to accelerate the cooling of the copper mold 9, meet the gradient cooling effect of the copper mold 9, and ensure the casting of the metal material inside the copper mold 9.

[0030] Example 2:

[0031] Based on Embodiment 1, this embodiment takes into account that if there is a lack of guidance for the molten metal during the casting process, it may lead to spillage of the molten metal. At the same time, in order to ensure that the copper mold 9 can perform effective gradient cooling and molding, a molten metal casting guide unit is provided in this embodiment to avoid the above-mentioned problems.

[0032] A metal molten liquid casting guide unit is provided at the bottom of the outer layer 51 of the crucible.

[0033] The molten metal casting guide unit includes a guide part, which includes an electric rotating seat 4. The electric rotating seat 4 is installed on the inner cavity of the melting furnace 1. A heat-insulating connecting rod 41 is installed on the rotating end of the electric rotating seat 4. One end of the heat-insulating connecting rod 41 is fixed to the outer layer 51 of the crucible. A feeding hopper 11 is installed in the inner cavity of the melting furnace 1.

[0034] The molten metal casting guide unit also includes a moving part, which includes a guide rail 22. The guide rail 22 is embedded in the bottom of the feeding chamber 21. A cavity is provided at the bottom of the melting furnace 1. One end of the guide rail 22 is inserted into the bottom of the cavity. A moving plate 23 is installed on the moving end of the surface of the guide rail 22. A fixed arm 24 is provided on the top of the moving plate 23. An electric rotating shaft 25 is embedded in the surface of the fixed arm 24. A flange is installed on the rotating end of the electric rotating shaft 25. The copper mold 9 is fixed to the rotating end of the electric rotating shaft 25 through the flange.

[0035] In this embodiment, after the metal material has been melted, the electric rotating seat 4 can drive the heat insulation connecting rod 41 to rotate the composite crucible and pour the material. The molten metal enters the copper mold 9 through the feeding hopper 11. When the copper mold 9 is full, the composite crucible is reset. Then, the electric rotating shaft 25 is driven to rotate the copper mold 9 to the bottom of the parallel feeding chamber 21. Then, the guide rail 22 is controlled to drive the moving plate 23 and the copper mold 9 into the bottom area of ​​the heat dissipation top cover 3 for gradient cooling.

[0036] Working principle: The operator pours the required raw materials into the inner layer 5 of the composite crucible. To ensure uniform heating of the materials, the raw materials are laid flat or spread out when placing them. After the raw materials are added, the output power of the induction coil 52 is increased. Since the induction coil 52 is set in segments and each group of induction coils 52 is controlled by an independent temperature controller, the real-time temperature supply of each group of induction coils 52 can be effectively controlled, reducing the problem of excessive temperature difference. The outer surface of the inner layer 5 of the crucible is provided with an outer layer 51. The inner layer 5 of the crucible is composed of high-purity graphite, and the outer layer 51 of the crucible is composed of porous graphite. A vacuum cavity is provided between the outer layer 51 of the crucible and the inner layer 5 of the crucible. The vacuum cavity is filled with an argon gas insulation layer, which can effectively reduce the heat loss of the inner layer 5 of the crucible. At the same time, the outer layer 51 of the crucible, composed of porous graphite, has low thermal conductivity, which can further ensure the heat storage of the inner layer 5 of the crucible and ensure the melting and casting temperature of the metal material inside the crucible.

[0037] After the metal material is melted, the electric rotating seat 4 drives the heat-insulating connecting rod 41 to rotate the composite crucible and pour the material. The molten metal enters the copper mold 9 through the feeding hopper 11. When the copper mold 9 is full, the composite crucible is reset. Then, the electric rotating shaft 25 drives the copper mold 9 to rotate to the bottom of the parallel feeding chamber 21. Then, the guide rail 22 drives the moving plate 23 and the copper mold 9 into the bottom area of ​​the heat dissipation top cover 3 for gradient cooling. The copper mold 9 will first be cooled by air through the heat dissipation chamber 8 and the exhaust fan installed on the top of the heat dissipation chamber 8. When the temperature of the copper mold 9 drops to a suitable gradient, the I-shaped water tank 6 adds auxiliary heat dissipation liquid medium. The heat accumulated in the bottom area of ​​the I-shaped water tank 6 is circulated away by the two sets of circulating water tanks 7 and the external water pump on the circulating pipeline 71 to accelerate the cooling of the copper mold 9, meet the gradient cooling effect of the copper mold 9, and ensure the casting of the metal material inside the copper mold 9.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A metal casting apparatus for manufacturing metal sputtering targets, characterized in that: The system includes a smelting furnace (1), a feeding platform (2), a heat dissipation top cover (3), a composite crucible, and a metal casting homogenization cooling unit. The feeding platform (2) has a feeding cavity (21) on its surface, which is connected to the interior of the smelting furnace (1). The composite crucible includes an inner crucible layer (5) and an outer crucible layer (51). The outer crucible layer (51) covers the outer surface of the inner crucible layer (5), and the surface of the outer crucible layer (51) is porous. The heat dissipation top cover (3) is installed on one side of the surface of the feeding cavity (21). The metal casting homogenization cooling unit is located on the heat dissipation top cover (3) and is used to cool and form the metal casting mold.

2. A metal casting apparatus for manufacturing a metal sputtering target according to claim 1, wherein: The metal casting homogeneous cooling unit includes a heat dissipation section, which includes a heat dissipation chamber (8). The heat dissipation chamber (8) is configured in two groups, and the two groups of heat dissipation chambers (8) are symmetrically installed on the surface of the heat dissipation top cover (3). An I-shaped water tank (6) is installed through the two groups of heat dissipation chambers (8) on the surface of the heat dissipation top cover (3). The bottom of the I-shaped water tank (6) is inserted into the heat dissipation top cover (3). An exhaust fan is added to the surface of the heat dissipation chamber (8).

3. A metal sputtering target material manufacturing apparatus using metal casting, according to claim 2, wherein: The metal casting homogeneous cooling unit also includes a circulation section, which includes a circulating water tank (7). The circulating water tank (7) is symmetrically installed in two groups, and the two groups of circulating water tanks (7) are connected in one direction through a conduit. A circulation pipeline (71) is installed on the top of the circulating water tank (7). Multiple groups of circulation pipelines (71) are arranged in an array. The circulating water tank (7) is connected to the I-shaped water tank (6) through the circulation pipeline (71).

4. The metal sputtering target manufacturing apparatus for metal casting according to claim 1, wherein: The bottom of the outer layer (51) of the crucible is provided with a metal molten liquid casting guide unit.

5. A metal casting apparatus for manufacturing a metal sputtering target according to claim 4, wherein: The molten metal casting guide unit includes a guide part, which includes an electric rotating seat (4). The electric rotating seat (4) is installed on the inner cavity of the smelting furnace (1). A heat-insulating connecting rod (41) is installed on the rotating end of the electric rotating seat (4). One end of the heat-insulating connecting rod (41) is fixed to the outer layer (51) of the crucible. A feeding hopper (11) is installed in the inner cavity of the smelting furnace (1).

6. A metal sputtering target material manufacturing apparatus using metal casting, according to claim 5, wherein: The molten metal casting guide unit also includes a moving part, which includes a guide rail (22). The guide rail (22) is embedded in the bottom of the feeding chamber (21). A cavity is provided at the bottom of the smelting furnace (1). One end of the guide rail (22) is inserted into the bottom of the cavity. A moving plate (23) is installed on the moving end of the guide rail (22). A fixed arm (24) is provided on the top of the moving plate (23). An electric rotating shaft (25) is embedded in the surface of the fixed arm (24). A flange is installed on the rotating end of the electric rotating shaft (25). The copper mold (9) is fixed to the rotating end of the electric rotating shaft (25) through the flange.

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