A novel gap measuring device

By placing the battery externally on the casing, the gap measuring device solves the battery power problem, enables rapid replacement and efficient maintenance, improves measurement accuracy and production efficiency, and meets the measurement needs of semiconductor component miniaturization.

CN224593899UActive Publication Date: 2026-08-04SHANGHAI GND ETECH CO LTD
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Patent Information

Application Number
CN202521252941.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-06-18
Publication Date
2026-08-04
Estimated Expiration
2035-06-18

AI Technical Summary

Technical Problem

Existing methods for measuring gaps and parallelism suffer from battery power issues, resulting in high maintenance costs, low production efficiency, and limited measurement accuracy, failing to meet the demands for miniaturized semiconductor components.

Method used

A novel gap measuring device is designed, which places the battery outside the casing, forms a capacitor with the target conductor through the electrode component, measures the gap using a processing module, and is powered by an external power supply circuit. This simplifies the internal wiring, avoids heat and electromagnetic noise interference, and supports quick battery replacement.

Benefits of technology

It enables battery replacement without disassembling the casing, reducing downtime, improving measurement accuracy and production efficiency, simplifying internal wiring, and reducing maintenance costs.

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Abstract

The utility model provides a novel gap measuring device for measuring the gap between the bearing base and target conductor part belongs to the semiconductor integrated circuit manufacturing technology and industrial measurement field in high -end equipment manufacturing industry is used for placing on the bearing base in the vacuum cavity, including shell (7), circuit board (1), electrode part (2), processing module (3) and power supply circuit (8). Electrode part (2) and processing module (3) are all electrically connected on the circuit board (1), and electrode part (2) is electrically connected with processing module (3) through the circuit board (1), and electrode part (2) forms a capacitor with the target conductor part;At least power supply circuit (8) is arranged on the surface of shell (7), and power supply circuit (8) is at least electrically connected with electrode part (2) and processing module (3) respectively and supplies power to them.
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