A sample holder

Abstract

The utility model discloses a kind of sample fixing devices, comprising: sample stage and first clamping component being installed on the sample stage, at least part of the first clamping component is movably arranged, to adjust the size of the first clamping gap of the first clamping component along the first direction;Second clamping component is detachably arranged on the sample stage and is located in the first clamping gap, and the second clamping component includes multiple clamping pieces, and multiple clamping pieces enclose second clamping gap, wherein, the outer contour shape enclosed by the first clamping gap is different from the outer contour shape enclosed by the second clamping gap.The utility model is fixed when the different sample to be measured of different shape or specification difference is larger, without complex modification to fixing device, also without changing the position of optical testing instrument, to improve the versatility of device, adapt to the sample demand of diversification.

Description

Technical Field

[0001] This utility model relates to the field of optical analysis and testing equipment technology, and in particular to a sample fixing device. Background Technology

[0002] Performance testing of optical components (such as wafers and optical thin films) (including but not limited to transmittance and reflectance) typically requires precise control under controlled conditions. However, existing optical testing equipment generally suffers from the following problems and shortcomings: inefficient sample clamping and replacement; when changing to samples of different types, sizes, or shapes, it is often necessary to completely disassemble the existing clamps, or even replace the entire rotary table or design specialized tooling. This process is time-consuming and labor-intensive, especially in scenarios requiring rapid switching between multiple samples for batch testing, severely impacting testing efficiency. Furthermore, multiple complex clamping devices are needed when testing different samples. Utility Model Content

[0003] The present invention aims to at least solve the technical problem in the prior art that multiple complex clamping devices are required when testing samples of different shapes.

[0004] Therefore, one objective of this utility model is to provide a sample fixing device for fixing a sample to be tested, the fixing device comprising:

[0005] A sample stage and a first clamping member mounted on the sample stage, at least a portion of the first clamping member being movably disposed to adjust the size of a first clamping gap of the first clamping member along a first direction;

[0006] The second clamping component is detachably disposed on the sample stage and located within the first clamping gap. The second clamping component includes a plurality of clamping members that form the second clamping gap. The outer contour shape formed by the first clamping gap is different from the outer contour shape formed by the second clamping gap.

[0007] In some embodiments, the clamping member engages with the sample stage.

[0008] In some embodiments, the first clamping member includes a first limiting member and a second limiting member, the second limiting member being movably disposed relative to the first limiting member, and the first clamping gap being formed between the first limiting member and the second limiting member.

[0009] In some embodiments, a first driving assembly is provided on the sample stage. The first driving assembly includes a support frame, a first driving device, a driving worm gear, and a driving worm. The support frame is disposed on the sample stage. The driving worm is rotatably disposed with the support frame and the second limiting member. The first driving device is connected to the driving worm through the driving worm gear to drive the second limiting member to move.

[0010] In some embodiments, the fixing device further includes:

[0011] A third clamping component is disposed on the sample stage, at least a portion of which is movably disposed to adjust the size of the first clamping gap along a second direction, wherein the first direction and the second direction extend in different directions.

[0012] In some embodiments, the third clamping component includes a plurality of third limiting members spaced apart along the second direction, and a first sliding portion is provided on the sample stage. The movable third limiting member cooperates with the first sliding portion to move the movable third limiting member.

[0013] In some embodiments, at least a portion of the first clamping member is provided with a second sliding portion, and a second driving assembly is provided on the side of the movable third limiting member. The second driving assembly includes a limiting arm and a second driving device. The limiting arm is rotatably disposed on the sample stage, and the second driving device drives the limiting arm to cooperate with the second sliding portion to swing the limiting arm to drive at least a portion of the third clamping member to move.

[0014] In some embodiments, a first pressure sensor is provided at the output terminal of the first drive component.

[0015] In some embodiments, a second pressure sensor is provided at the output end of the second drive component.

[0016] In some embodiments, the fixing device further includes a purging assembly, which includes a support base and a purging nozzle disposed on the support base, the purging nozzle being used to purge the first clamping gap and the second clamping gap.

[0017] In some embodiments, the fixing device further includes a base plate, which is rotatably disposed with respect to the sample stage.

[0018] In some embodiments, the fixing device further includes a sample stage driving assembly for driving the sample stage to rotate on the base plate; the sample stage driving assembly includes: a sample stage driving device, a first gear and a second gear, the sample stage driving device is directly fixed to the bottom of the base plate by a mounting bracket, the output end of the sample stage driving device is provided with a first gear, the second gear is provided on a cylindrical rotating shaft at the bottom of the sample stage, and the first gear and the second gear mesh with each other, the sample stage driving device drives the first gear to drive the second gear to rotate.

[0019] In some embodiments, the outer contour cross-sectional shape formed by the first clamping gap is rectangular, and the outer contour cross-sectional shape formed by the second clamping gap is circular.

[0020] The sample fixing device provided in this embodiment of the utility model has the following beneficial effects:

[0021] This invention adjusts the size of the first clamping gap by setting a first clamping component, and sets a second clamping component that is detachably connected to the sample stage within the first clamping gap. When fixing different test samples with different shapes or specifications, the first and second clamping components do not require complex modifications to the fixing device or changes to the position of the optical testing instruments, thereby improving the versatility of the device and adapting to diverse sample requirements.

[0022] When the first and second clamping components of this invention clamp samples of different shapes or specifications, they both clamp the non-optical testing surfaces of the sample, such as the sides or sidewalls, without damaging the surface of the sample. Furthermore, when the first clamping component clamps the sample for fixed positioning using a fixed first limiting component and a movable second limiting component, and when the third limiting component partially moves to clamp the sample for fixed positioning, the pressure sensors on the sample-contacting side of the second and third limiting components will send a signal to the drive assembly to stop driving after touching the sample, ensuring the safe movement of the limiting device and avoiding damage to the sample due to low mechanical strength or excessive clamping pressure.

[0023] This invention utilizes a purging assembly to purge any dirt that may be present on the surface of the sample by using a large flow of nitrogen gas, and to create a locally stable inert gas environment around the sample by using a stable airflow, thereby eliminating interference from factors such as oxygen on optical measurements and achieving the effect of cleaning while performing optical detection.

[0024] This invention enables multi-angle and multi-directional testing of samples by setting a base plate under the sample stage, fixing the base plate, and rotating the sample stage around a specific axis at a precise angle. For some samples that require testing on both sides, after testing the optical parameters of one side of the sample, it can be rotated 180° by a rotating device to test the other side, thereby avoiding problems such as position and angle deviations caused by picking up and placing samples. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a first-view perspective perspective view of the sample fixing device in an embodiment of this utility model;

[0027] Figure 2 This is a front view of the sample fixing device in an embodiment of this utility model;

[0028] Figure 3 This is a top view of the sample fixing device in an embodiment of this utility model;

[0029] Figure 4 This is a second-view perspective perspective view of the sample fixing device in an embodiment of this utility model;

[0030] Figure 5 This is a schematic diagram of the structure of the second clamping component in an embodiment of this utility model.

[0031] Figure label:

[0032] 1. Sample stage; 11. Second positioning part; 12. First sliding part; 13. Second sliding part; 2. Base plate; 3. First clamping component; 31. First limiting component; 32. Second limiting component; 4. Second clamping component; 41. Clamping component; 5. Sample stage drive assembly; 51. Sample stage drive device; 52. First gear; 53. Second gear; 6. First drive assembly; 61. First drive device; 62. Drive worm gear; 63. Drive worm; 64. Support frame; 65. First pressure sensor; 7. Second drive assembly; 71. Limiting arm; 72. Guide part; 8. Third clamping component; 81. Third limiting component; 9. Purge assembly; 91. Support base; 92. Purge nozzle; 100. First sample to be tested; 200. Second sample to be tested; 300. First clamping gap; 400. Second clamping gap. Detailed Implementation

[0033] Various embodiments and features of this utility model are described herein with reference to the accompanying drawings.

[0034] It should be understood that various modifications can be made to the embodiments described herein. Therefore, the above description should not be considered as limiting, but merely as an example of embodiments. Other modifications within the scope and spirit of this invention will be apparent to those skilled in the art.

[0035] The accompanying drawings, which are included in and form part of this specification, illustrate embodiments of the present invention and, together with the general description of the present invention given above and the detailed description of the embodiments given below, serve to explain the principles of the present invention.

[0036] These and other features of the present invention will become apparent from the following description of preferred forms of embodiments given as non-limiting examples, with reference to the accompanying drawings.

[0037] It should also be understood that although the present invention has been described with reference to some specific examples, those skilled in the art can certainly implement many other equivalent forms of the present invention, which have the features described in the claims and are therefore all within the scope of protection defined herein.

[0038] The above and other aspects, features and advantages of the present invention will become more apparent when taken in conjunction with the accompanying drawings and in view of the following detailed description.

[0039] Specific embodiments of the present invention will now be described with reference to the accompanying drawings; however, it should be understood that the claimed embodiments are merely examples of the present invention, which may be implemented in various ways. Well-known and / or repeated functions and structures have not been described in detail to avoid unnecessary or redundant details that could obscure the present invention. Therefore, the specific structural and functional details claimed herein are not intended to be limiting, but merely to serve as the basis and representative basis for the claims to teach those skilled in the art to use the present invention in a variety of substantially any suitable detailed structures.

[0040] The first embodiment of this utility model provides a sample fixing device for fixing the sample to be tested, such as... Figures 1-5As shown, the fixing device includes a base plate 2, on which a sample stage 1 is rotatably mounted. The base plate 2 provides support for the sample stage 1, which is used to hold the sample to be tested. Specifically, the base plate 2 and the sample stage 1 are rotatably connected by a bearing. The base plate 2 has a through hole, and the outer ring of the bearing is fixedly mounted above the base plate 2. A cylindrical rotating shaft is fixedly mounted at the bottom of the sample stage 1, which is inserted through the inner ring of the bearing and cooperates with the outer ring of the bearing. Further, the fixing device includes a sample stage driving assembly 5, which drives the sample stage 1 to rotate on the base plate 2. This solution, by fixing the base plate 2 to other supports and rotating the sample stage 1 around the cylindrical rotating shaft via the bearing, can realize multi-angle and multi-directional testing of the sample to be tested. Since some samples need to be tested on both sides, after testing the optical parameters of the first side, the sample stage 1 can be rotated 180° by the sample stage driving assembly 5 to test the second side, thereby avoiding position and angle errors caused by multiple pick-and-place operations when testing different sides of the sample.

[0041] like Figure 2 As shown, the sample stage drive assembly 5 includes a sample stage drive device 51, a first gear 52, and a second gear 53. The sample stage drive device 51 is directly fixed to the bottom of the base plate 2 via a mounting bracket. The output end of the sample stage drive device 51 is provided with the first gear 52, and the second gear 53 is provided on the cylindrical rotating shaft at the bottom of the sample stage 1. The first gear 52 and the second gear 53 mesh with each other. The sample stage drive device 51 drives the first gear 52 to drive the second gear 53 to rotate, thereby driving the cylindrical rotating shaft at the bottom of the sample stage 1 to rotate, thus realizing the rotation of the sample stage 1. The sample stage drive device 51 can be selected as a motor, preferably a high-precision, low-vibration stepper motor or servo motor as the power source. The first gear 52 and the second gear 53 can also be replaced with other transmission structures, such as pulleys. In some embodiments, the sample stage drive device 51 can also be directly connected to the cylindrical rotating shaft at the bottom of the sample stage 1. The sample stage drive device 51 is directly fixed to a preset position on the base plate 2 via a mounting bracket, thereby ensuring the rigidity and stability of the rotation axis.

[0042] like Figure 1As shown, a first clamping member 3 is provided on the sample stage 1. At least a portion of the first clamping member 3 is movably disposed (for example, the second limiting member 32 is movably disposed relative to the first limiting member 31) to adjust the size of the first clamping gap 300 of the first clamping member 3 along a first direction. Specifically, the first clamping member 3 includes a first limiting member 31 and a second limiting member 32, and the first limiting member 31 and the second limiting member 32 form the first clamping gap 300. Here, the first direction is the length direction of the sample stage 1, and the first limiting member 31 and the second limiting member 32 can move relative to each other to clamp the sample to be tested along the first direction. In this embodiment, the first limiting member 31 is a fixed baffle, and the second limiting member 32 is a movable limiting plate. The two are arranged in parallel. A sample slot is provided in the first clamping gap 300. In this way, the first sample to be tested 100 can be installed in the sample slot. Then, by adjusting the second limiting member 32, the first sample to be tested 100 is clamped between the first limiting member 31 and the second limiting member 32, thereby limiting the position of the first sample to be tested 100. During the optical test, the position of the first sample to be tested 100 is not easily changed, thus ensuring the accuracy of the test results.

[0043] like Figure 1 and Figure 2 As shown, a first driving assembly 6 is provided on the sample stage 1. The first driving assembly 6 is located on the side of the second limiting member 32 away from the first clamping gap 300. The first driving assembly 6 is used to abut against the second limiting member 32 and drive the second limiting member 32 to move closer to or away from the sample to be tested, so that the second limiting member 32 and the first limiting member 31 stably clamp and fix the sample to be tested. Specifically, the first driving assembly 6 includes a support frame 64, a first driving device 61, a driving worm gear 62, and a driving worm 63. The support frame 64 is provided on the sample stage 1 and is used to support the driving worm 63. The first driving device 61 can be provided on the sample stage 1 and can be selected as a motor. The driving worm 63 is rotatably arranged with the support frame 64 and the second limiting member 32. The first driving device 61 is connected to the driving worm 63 through the driving worm gear 62 to drive the second limiting member 32 to move. After the first driving device 61 is started, it drives the driving worm gear 62 to rotate, which in turn drives the worm 63 to move along the first direction, pushing the second limiting member 32 toward or away from the first test sample 100. In this application, the first driving component 6 is provided, and the position of the second limiting member 32 can be continuously adjusted through the driving worm gear 62 and the driving worm 63, and the moving distance of the second limiting member 32 can be precisely controlled to achieve stable clamping of the first test sample 100.

[0044] Furthermore, a first pressure sensor 65 is provided at the end of the drive worm gear 63. The first pressure sensor 65 is configured to stop the first drive device 61 when the second limiting member 32 contacts the sample to be tested. Then, when the first pressure sensor 65 contacts the first sample to be tested 100, the feedback signal from the first pressure sensor 65 causes the second limiting member 32 to move to a specific position, clamping and fixing the first sample to be tested 100 with the first limiting member 31. In this solution, the second limiting member 32 automatically stops moving after the first pressure sensor 65 touches the first sample to be tested 100, preventing damage to the first sample to be tested 100 due to excessive clamping pressure. The surface of the first pressure sensor 65 is provided with multiple protrusions, making it less likely for the first pressure sensor 65 to damage the sample to be tested.

[0045] like Figure 1 and Figure 2 As shown, the fixing device also includes a third clamping component 8 disposed on the sample stage 1. At least a portion of the third clamping component 8 is movably disposed to adjust the size of the first clamping gap 300 along a second direction, wherein the first direction and the second direction have different extension directions. Specifically, the third clamping component 8 is provided with at least two third limiting members 81 sequentially along the second direction of the base plate 2, where the second direction refers to the width direction of the sample stage 1. Multiple sets of the third limiting members 81 can be provided, with each set having two third limiting members 81. The two third limiting members 81 of each set are disposed on both sides of the first sample to be tested 100 to clamp it from both sides, ensuring the stability of clamping the first sample to be tested 100. In this embodiment, the first direction and the second direction are perpendicular to each other. The first limiting member 31 and the second limiting member 32 arranged in sequence along the first direction and the two third limiting members 81 arranged in sequence along the second direction fix and clamp the first sample to be tested 100 along the length direction and the width direction of the sample stage 1, respectively, which improves the accuracy of the position of the sample to be tested and thus improves the accuracy of the test results.

[0046] Furthermore, at least one of the plurality of third limiting members 81 is a movable third limiting member 81. The sample stage 1 is provided with a first sliding part 12, which can be configured as a first sliding groove. The movable third limiting member 81 cooperates with the first sliding groove to move it closer to or further away from the first test sample 100, thereby achieving clamping and fixing of the first test sample 100 along the second direction.

[0047] Furthermore, a second driving assembly 7 is provided on the side of the movable third limiting member 81. A second sliding portion 13 is provided on at least one of the first limiting member 31 and the second limiting member 32, depending on the position of the movable third limiting member 81. Specifically, the second sliding portion 13 is a second sliding groove. The second driving assembly 7 includes a limiting arm 71 and a second driving device. The limiting arm 71 is rotatably disposed on the sample stage 1. The second driving device drives the limiting arm 71 to move along the second sliding groove, thereby driving at least a portion of the third clamping member 8 (the movable third limiting member 81) to move in a second direction. The limiting arm 71 has a guide portion 72 that cooperates with the second sliding groove. When the second driving limiting arm 71 swings, the guide portion 72 slides in the second sliding groove to ensure the smooth movement of the limiting arm 71.

[0048] Furthermore, a second pressure sensor is provided at the end of the limiting arm 71. This second pressure sensor is configured to stop the second driving device when the movable third limiting member 81 contacts the first sample 100. Then, when the second pressure sensor contacts the first sample 100, a feedback signal from the second pressure sensor causes the movable third limiting member 81 to move to a specific position, clamping and fixing the first sample 100. In this design, the second pressure sensor prevents damage to the first sample 100 due to excessive clamping pressure. The surface of the second pressure sensor has multiple protrusions, making it less likely for the second pressure sensor to damage the first sample 100.

[0049] In some embodiments, such as Figure 3 and Figure 5As shown, a second clamping component 4 is also provided on the base plate 2. The second clamping component 4 includes a plurality of clamping elements 41, which form a second clamping gap 400. The second clamping gap 400 is used to accommodate the second sample to be tested 200. The second clamping component 4 is detachably connected to the sample stage 1. Specifically, since the second clamping component 4 is detachably connected to the sample stage 1, when testing different samples, for example, changing the sample to be tested from the first sample 100 to the second sample 200, the first sample 100 is removed from the sample slot, and then multiple second clamping components 4 are sequentially installed on the sample stage 1, with the second sample 200 then accommodated in the second clamping gap 400. Because the outer contour shape formed by the first clamping gap 300 is different from the outer contour shape formed by the second clamping gap 400, different shapes of samples can be clamped through the first clamping gap 300 and the second clamping gap 400 respectively, such as a cube-shaped first sample 100 and a cylindrical second sample 200. Furthermore, clamping different shapes of second samples 200 can be achieved by replacing different second clamping components 4, requiring only that the second clamping gap 400 matches the shape and size of the corresponding second sample 200, without requiring complex modifications to the fixing device, thus improving the versatility and testing efficiency of the fixing device.

[0050] In some embodiments, the outer contour cross-sectional shape enclosed by the first clamping gap 300 is rectangular, and the outer contour cross-sectional shape enclosed by the second clamping gap 400 is circular.

[0051] Furthermore, such as Figure 3 and Figure 5 As shown, the sample stage 1 is provided with a first positioning part, which can be a protrusion. The clamping member 41 is provided with a second positioning part 11, which can be a through hole located at the end of the clamping member 41. The through hole can be of various shapes, such as triangle, rectangle, or hexagon. When the clamping member 41 is installed on the sample stage, the protrusion on the sample stage and the through hole on the clamping member 41 cooperate with each other.

[0052] like Figure 2As shown, the fixing device further includes a purging assembly 9, which includes a support base 91 and a purging nozzle 92 disposed on the support base 91. The purging nozzle 92 is used to purge the first clamping gap 300 and the second clamping gap 400. Here, the purging nozzle 92 can purge the surface of the sample to be tested. The support base 91 can be slidably disposed on the sample stage 1, which allows the position of the purging nozzle 92 to be changed. The nitrogen curtain generated by the purging nozzle 92 effectively covers the surface of the sample to be tested and the key optical path area. The position change of the purging nozzle 92 can also be achieved by providing a rotary joint between the purging nozzle 92 and the support frame 64.

[0053] Furthermore, the purging assembly 9 also includes a control valve and a gas flow meter. The control valve is used to control the on / off state of the purging airflow, and the gas flow meter is used to monitor the flow rate of the purging airflow. The purging assembly 9 uses a large flow of nitrogen to purge any dirt that may be present on the surface of the sample to be tested, and uses a stable airflow to create a locally stable inert gas environment around the sample to eliminate interference from factors such as oxygen on optical measurements.

[0054] The second embodiment of this utility model provides an optical analysis instrument, including the sample fixing device described above.

[0055] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0056] In the description of this utility model, "first feature" and "second feature" may include one or more of the features.

[0057] In the description of this utility model, "multiple" means two or more.

[0058] In the description of this utility model, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0059] In the description of this utility model, the terms "above", "over" and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0060] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0061] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A sample fixing device for fixing a sample to be tested, characterized in that, The fixing device includes: A sample stage (1) and a first clamping member (3) mounted on the sample stage (1), at least a portion of the first clamping member (3) being movably disposed to adjust the size of a first clamping gap (300) of the first clamping member (3) along a first direction; The second clamping component (4) is detachably disposed on the sample stage (1) and located within the first clamping gap (300). The second clamping component (4) includes a plurality of clamping members (41), which together form the second clamping gap (400). The outer contour shape formed by the first clamping gap (300) is different from the outer contour shape formed by the second clamping gap (400).

2. The sample holder of claim 1, wherein The first clamping component (3) includes a first limiting member (31) and a second limiting member (32), the second limiting member (32) being movably disposed relative to the first limiting member (31), and the first clamping gap (300) being formed between the first limiting member (31) and the second limiting member (32).

3. The sample holder of claim 2, wherein, The sample stage (1) is provided with a first driving assembly (6), which includes a support frame (64), a first driving device (61), a driving worm gear (62), and a driving worm (63). The support frame (64) is disposed on the sample stage (1), and the driving worm (63) is rotatably disposed with the support frame (64) and the second limiting member (32). The first driving device (61) is connected to the driving worm (63) through the driving worm gear (62) to drive the second limiting member (32) to move.

4. The sample holder of claim 3, wherein The fixing device also includes: A third clamping component (8) is disposed on the sample stage (1), at least a portion of which is movably disposed to adjust the size of the first clamping gap (300) along a second direction, wherein the first direction and the second direction extend in different directions; and / or The third clamping component (8) includes a plurality of third limiting members (81) spaced apart along the second direction. The sample stage (1) is provided with a first sliding part (12). The movable third limiting member (81) cooperates with the first sliding part (12) to move the movable third limiting member (81).

5. The sample holder of claim 4, wherein, At least a portion of the first clamping member (3) is provided with a second sliding portion (13), and a second driving assembly (7) is provided on the side of the movable third limiting member (81). The second driving assembly (7) includes a limiting arm (71) and a second driving device. The limiting arm (71) is rotatably disposed on the sample stage (1). The second driving device drives the limiting arm (71) to cooperate with the second sliding portion (13) to make the limiting arm (71) swing to drive at least a portion of the third clamping member (8) to move.

6. The sample holder of claim 5, wherein The first drive assembly (6) is provided with a first pressure sensor (65) at its output terminal; and / or The output end of the second drive component (7) is provided with a second pressure sensor.

7. The sample holder of claim 1, wherein The fixing device further includes a purging assembly (9), which includes a support base (91) and a purging nozzle (92) disposed on the support base (91). The purging nozzle (92) is used to purge the first clamping gap (300) and the second clamping gap (400).

8. The sample holder of claim 1, wherein, The fixing device also includes a base plate (2), which is rotatably disposed with respect to the sample stage (1).

9. The sample holder of claim 8, wherein, The fixing device also includes a sample stage driving assembly (5) for driving the sample stage (1) to rotate on the base plate (2); the sample stage driving assembly (5) includes: a sample stage driving device (51), a first gear (52) and a second gear (53). The sample stage driving device (51) is directly fixed to the bottom of the base plate (2) by a mounting bracket. The output end of the sample stage driving device (51) is provided with a first gear (52). The second gear (53) is provided on a cylindrical rotating shaft at the bottom of the sample stage (1). The first gear (52) and the second gear (53) mesh with each other. The sample stage driving device (51) drives the first gear (52) to drive the second gear (53) to rotate.

10. The sample holder of claim 1, wherein, The outer contour cross-sectional shape enclosed by the first clamping gap (300) is rectangular, and the outer contour cross-sectional shape enclosed by the second clamping gap (400) is circular.

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