An electronic grade gas distribution valve cleanliness test device

Abstract

The utility model discloses a kind of electronic grade gas distribution valve cleanliness test device, it is related to gas distribution valve detection technical field.The utility model includes work bin, gas pipe, transfer bin, air detector and inner door, the top of work bin is fixedly connected with air inlet shell, air filter element is fixed in work bin upper portion, import and export are arranged in the front side of work bin, inner door is rotatably connected on import and export inner wall, one side of work bin is provided with gas pipe, the peripheral side of gas pipe movably connected with sealing ring, the side of work bin away from gas pipe is fixed with conveying pipe, conveying pipe is fixedly connected with transfer bin at the end away from work bin, air detector is arranged on the side of transfer bin away from work bin.The utility model is through setting work bin, gas pipe, transfer bin, air detector and inner door, solve the gas distribution valve test needs additional purification structure to purify inside, work is not enough convenient, and the problem that the compatibility of different distribution valves is not enough high.

Description

Technical Field

[0001] This utility model belongs to the field of gas distribution valve testing technology, and in particular relates to an electronic-grade gas distribution valve cleanliness testing device. Background Technology

[0002] The electronic-grade gas distribution valve cleanliness testing device is a highly specialized testing system. Its core function is to quantitatively assess the level of contaminants inside gas distribution valves used in critical fields such as semiconductor manufacturing, ensuring that the valves meet extremely high cleanliness standards. This device primarily determines valve quality by measuring indicators such as particulate matter contamination, non-volatile residues (NVR), and moisture or oxygen content. Even trace amounts of contaminants can lead to defects in integrated circuits; therefore, this testing step is crucial for ensuring semiconductor production yield. However, the electronic-grade gas distribution valve cleanliness testing device still has the following drawbacks in practical use: The electronic-grade gas distribution valve cleanliness testing device requires an additional purification structure to purify the tested equipment during the testing process. During the purification process, multiple devices work together, which requires a lot of equipment and is not convenient to operate. Secondly, the electronic-grade gas distribution valve cleanliness test device is installed directly using the installation equipment. However, the distance between the two ends of different test devices is different, making the installation and operation inconvenient and the adaptability to different distribution valves insufficient. Utility Model Content

[0003] The purpose of this invention is to provide an electronic-grade gas distribution valve cleanliness testing device. By setting up a working chamber, gas delivery pipe, transfer chamber, air detector and inward door, it solves the problems that gas distribution valve testing requires an additional purification structure to purify the interior, which is not convenient to operate and has insufficient adaptability to different distribution valves.

[0004] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution: This utility model relates to an electronic-grade gas distribution valve cleanliness testing device, comprising a working chamber, a gas supply pipe, a transfer chamber, an air detector, and an inner door. An air inlet shell is fixedly connected to the top of the working chamber. An air filter element is fixedly installed in the upper part of the working chamber. An inlet and outlet are opened on the front side of the working chamber. An inner door is rotatably connected to the inner wall of the inlet and outlet, with its edge positioned outside the inlet and outlet. A gas supply pipe is installed on one side of the working chamber, and a sealing ring is movably connected to its periphery. The sealing ring is fixedly installed through one side of the working chamber. A delivery pipe is fixedly installed through the side of the working chamber away from the gas supply pipe. The end of the delivery pipe away from the working chamber is fixedly connected to a transfer chamber. The top of the transfer chamber is fixedly connected to an elastic airbag. An air detector is installed on the side of the transfer chamber away from the working chamber. The working chamber is a closed testing environment. High-pressure air is introduced into the top through an air inlet shell. An internal air filter ensures that the incoming air is clean. There are inlets and outlets in front of the chamber, which are sealed and opened and closed by an inward-opening door. The air delivery pipe is connected to one side of the working chamber through a sealing ring to deliver high-purity air to the gas distribution valve under test. The other side introduces waste gas into the transfer chamber through the delivery pipe. The elastic airbag on the top of the transfer chamber plays a buffering and pressure stabilizing role. It is then connected to an air detector for analyzing gas quality.

[0005] Furthermore, an air intake pipe is fixedly connected to the top center of the air intake shell, and exhaust ports are opened at the lower parts of the front and rear sides of the working chamber. The air intake pipe is connected to a high-pressure air source to the air intake shell. After being filtered, the air enters the working chamber and is finally discharged from the bottom exhaust port, forming a continuous airflow and keeping the chamber clean.

[0006] Furthermore, the gas supply pipe and the delivery pipe are both fixed with mounting plates at their respective ends that are close to each other. The transfer chamber is fixedly connected to an exhaust pipe on the side away from the delivery pipe. Both the gas supply pipe and the delivery pipe are equipped with mounting plates for connecting to the inlet and outlet of the gas distribution valve to be tested. The transfer chamber sends the pressure-stabilized gas into the air detector through the exhaust pipe.

[0007] Furthermore, an air inlet hose is fixedly connected to the end of the gas supply pipe away from the mounting plate. The air inlet hose is located outside the working chamber, and the gas supply pipe is connected to the air inlet hose to connect to an external high-pressure gas source, thereby enhancing the system's flexibility.

[0008] Furthermore, the end of the exhaust pipe furthest from the transfer chamber is fixedly connected to the input end of the air detector, and the exhaust pipe is directly connected to the input end of the air detector to ensure seamless gas introduction into the detection unit.

[0009] Furthermore, the front side of the inward-opening door is rotatably connected to an elastic rotating frame, and a handle is fixed on the side of the elastic rotating frame away from the inward-opening door. The inward-opening door can be pressed closed and opened conveniently through the elastic rotating frame with the handle, which facilitates the installation and replacement of the gas distribution valve under test.

[0010] This utility model has the following beneficial effects: This invention solves the problem of inconvenient operation caused by the need for additional purification structures to clean the internal parts of gas distribution valves during testing, by setting up a working chamber, air supply pipe, transfer chamber, air detector, and an inward-opening door. After the gas distribution valve to be tested is installed in the working chamber, during equipment installation, the air inlet pipe delivers high-pressure air to the air inlet shell, and then to the working chamber, and then to the air filter. After being filtered by the air filter, the air is delivered to the working chamber. The gas passing through the working chamber ensures that the gas distribution valve to be tested is fully purged during the test, and the gas is discharged through the exhaust port of the working chamber. This ensures the surface cleanliness of the gas distribution valve to be tested during operation, and the gas entering the working chamber is purified by the airflow within the working chamber.

[0011] This invention solves the problem of insufficient adaptability of the gas distribution valve cleanliness testing device to different distribution valves by setting up a working chamber, gas supply pipe, and inner opening door. During the testing and installation of the gas distribution valve to be tested, first hold the handle and rotate the elastic rotating frame until it is fully rotated to the inlet and outlet positions of the working chamber. Then push the elastic rotating frame to open the inner opening door. The gas distribution valve to be tested then enters through the inlet and outlet of the working chamber. Adjust the positions of the gas supply pipe and delivery pipe so that the mounting plate aligns with the interface of the gas distribution valve to be tested, and then install and fix it. After installation via the mounting plate, the installation equipment is stably set in the working chamber, resulting in a higher adaptability of the gas distribution valve cleanliness testing device to different distribution valves. Attached Figure Description

[0012] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 A three-dimensional view of a partially cut-out structure of an electronic-grade gas distribution valve cleanliness testing device; Figure 2 This is a three-dimensional structural diagram of the working compartment; Figure 3 A three-dimensional structural diagram of a gas pipeline; Figure 4 This is a 3D structural diagram of the transit warehouse; Figure 5 This is a three-dimensional structural diagram of an air detector; Figure 6 A three-dimensional structural diagram of an inward-opening door; Figure 7This is a three-dimensional view of the assembly structure of an electronic-grade gas distribution valve cleanliness testing device.

[0014] Figure label: 1. Working compartment; 101. Air filter; 102. Inlet / outlet; 103. Exhaust port; 104. Inlet housing; 105. Inlet pipe; 2. Air delivery pipe; 201. Inlet hose; 202. Sealing ring; 203. Mounting plate; 3. Transfer compartment; 301. Elastic airbag; 302. Delivery pipe; 303. Exhaust pipe; 4. Air detector; 5. Inward opening door; 501. Elastic rotating frame; 502. Handle. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model. Specific Implementation Example 1

[0016] Please see Figure 1-7This utility model is an electronic-grade gas distribution valve cleanliness testing device, including a working chamber 1, a gas supply pipe 2, a transfer chamber 3, an air detector 4, and an inner door 5. The top of the working chamber 1 is fixedly connected to an air inlet shell 104. During operation, the corresponding gas distribution valve to be tested is installed within the working chamber 1. An air filter element 101 is fixedly installed in the upper part of the working chamber 1, through which air is supplied to the working chamber 1. An inlet / outlet 102 is provided on the front side of the working chamber 1, providing a channel for the gas distribution valve to enter and exit the working chamber 1. An inner door 5 is rotatably connected to the inner wall of the inlet / outlet 102. The inner door 5 opens by pushing inward and closes the inlet / outlet 102 of the working chamber 1 after closing. The edge of the inner door 5 is located outside the inlet / outlet 102. A gas supply pipe 2 is provided on one side of the working chamber 1, supplying high-pressure gas for testing. Clean air is delivered to the equipment installed in the working chamber 1. A sealing ring 202 is movably connected to the periphery of the air supply pipe 2. The sealing ring 202 is fixed to one side of the working chamber 1. The air supply pipe 2 seals the gap between the air supply pipe 2 and the working chamber 1 through the sealing ring 202. A delivery pipe 302 is fixed to the side of the working chamber 1 away from the air supply pipe 2. The delivery pipe 302 delivers the air that has passed through the equipment under test to the transfer chamber 3. The end of the delivery pipe 302 away from the working chamber 1 is fixedly connected to the transfer chamber 3. The transfer chamber 3 transfers the air that has passed through the equipment under test. An elastic airbag 301 is fixedly connected to the top of the transfer chamber 3. The elastic airbag 301 buffers the air entering the transfer chamber 3 and prevents the air from rushing into the air detector 4. An air detector 4 is installed on the side of the transfer chamber 3 away from the working chamber 1. The air detector 4 detects the air in the gas distribution valve of the gas under test.

[0017] Specifically, an air inlet pipe 105 is fixedly connected to the top center of the air inlet shell 104, and exhaust ports 103 are provided on the lower parts of the front and rear sides of the working chamber 1. The top end of the air inlet pipe 105 is connected to the output end of the equipment that transports high-pressure air and transports high-pressure air into the air inlet shell 104. The air passing through the working chamber 1 is discharged through the exhaust port 103.

[0018] Furthermore, mounting plates 203 are fixed at the ends of the gas supply pipe 2 and the delivery pipe 302 that are close to each other. An exhaust pipe 303 is fixedly connected to the side of the transfer chamber 3 away from the delivery pipe 302. The gas supply pipe 2 and the delivery pipe 302 are connected to the input and output ends of the gas distribution valve to be tested through the mounting plates 203. The pressure-stabilized air in the transfer chamber 3 is delivered to the air detector 4 through the exhaust pipe 303.

[0019] Furthermore, the end of the air supply pipe 2 away from the mounting plate 203 is fixedly connected to the air inlet hose 201. The air inlet hose 201 is located outside the working chamber 1. The end of the air inlet hose 201 away from the air supply pipe 2 is connected to the high-pressure air entering the air supply pipe 302.

[0020] The operation process of this embodiment is as follows: During operation, after the gas distribution valve to be tested is installed in the working chamber 1, during equipment installation, the air inlet pipe 105 delivers high-pressure air to the air inlet shell 104, and then delivers it to the working chamber 1, and then to the air filter element 101. After being filtered by the air filter element 101, it is delivered to the working chamber 1. After passing through the gas in the working chamber 1, the gas distribution valve to be tested is fully purged during the test, and the gas is delivered to the gas distribution valve to be tested and discharged through the exhaust port 103 of the working chamber 1, so that the surface cleanliness of the gas distribution valve to be tested is well guaranteed during the operation. Specific Implementation Example 2

[0021] Please see Figure 1 , 2 3, 6, 7. Based on the specific embodiment one, the end of the exhaust pipe 303 away from the transfer chamber 3 is fixedly connected to the input end of the air detector 4. The gas in the transfer chamber 3 is transported to the air detector 4 through the exhaust pipe 303 to detect the cleanliness of the gas distribution valve.

[0022] Specifically, the front side of the inward-opening door 5 is rotatably connected to an elastic rotating frame 501. A handle 502 is fixed on the side of the elastic rotating frame 501 away from the inward-opening door 5. After the inward-opening door 5 is pressed against the front side of the working chamber 1 by the elastic rotating frame 501, the inward-opening door 5 and the working chamber 1 are pressed together. By holding the handle 502, the elastic rotating frame 501 is installed.

[0023] The operation process of this embodiment is as follows: During the operation, when it is necessary to test the installation of the gas distribution valve under test, first hold the handle 502 and rotate the elastic rotating frame 501 so that the elastic rotating frame 501 is fully rotated to the position of the inlet and outlet 102 of the working chamber 1. After pushing the elastic rotating frame 501, the inner door 5 is opened. Then, the gas distribution valve under test enters from the inlet and outlet 102 of the working chamber 1. Adjust the position of the gas delivery pipe 2 and the delivery pipe 302 so that the mounting plate 203 is aligned with the interface of the gas distribution valve under test. Then install and fix it. After installation through the mounting plate 203, the installation equipment is stably set in the working chamber 1.

[0024] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0025] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An electronic grade gas distribution valve cleanliness test device, comprising a working bin (1), a gas conveying pipe (2), a transfer bin (3), an air detector (4) and an inner opening door (5), characterized in that: The top of the working chamber (1) is fixedly connected to an air inlet shell (104). An air filter element (101) is fixedly installed in the upper part of the working chamber (1). An inlet and outlet (102) are opened on the front side of the working chamber (1). An inner door (5) is rotatably connected to the inner wall of the inlet and outlet (102). The edge of the inner door (5) is located outside the inlet and outlet (102). An air supply pipe (2) is provided on one side of the working chamber (1). A sealing ring (202) is movably connected to the periphery of the air supply pipe (2). The sealing ring (202) is fixedly fixed to one side of the working chamber (1). A conveying pipe (302) is fixedly connected to the side of the working chamber (1) away from the air supply pipe (2). A transfer chamber (3) is fixedly connected to the end of the conveying pipe (302) away from the working chamber (1). An elastic airbag (301) is fixedly connected to the top of the transfer chamber (3). An air detector (4) is provided on the side of the transfer chamber (3) away from the working chamber (1).

2. The electronic grade gas distribution valve cleanliness test apparatus of claim 1, wherein: An air intake pipe (105) is fixedly connected to the top center of the air intake shell (104), and an exhaust port (103) is provided on the lower part of the front and rear sides of the working chamber (1).

3. The electronic grade gas distribution valve cleanliness test apparatus of claim 1, wherein: The gas supply pipe (2) and the delivery pipe (302) are both fixed with an installation plate (203) at their respective ends, and the transfer chamber (3) is fixedly connected to an exhaust pipe (303) on the side away from the delivery pipe (302).

4. An electronic grade gas distribution valve cleanliness test apparatus as defined in claim 3, wherein: The end of the gas supply pipe (2) away from the mounting plate (203) is fixedly connected to the air inlet hose (201), and the air inlet hose (201) is located outside the working chamber (1).

5. The electronic-grade gas distribution valve cleanliness testing device according to claim 3, characterized in that: The end of the exhaust pipe (303) away from the transfer chamber (3) is fixedly connected to the input end of the air detector (4).

6. The electronic-grade gas distribution valve cleanliness testing device according to claim 1, characterized in that: The front side of the inward-opening door (5) is rotatably connected to an elastic rotating frame (501), and a handle (502) is fixed on the side of the elastic rotating frame (501) away from the inward-opening door (5).

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