A wind speed measuring device for a washing machine

Abstract

The utility model discloses a wind speed measuring device for cleaning machine, from bottom to top, in proper order include base, support mechanism, adjusting mechanism and storage mechanism, adjusting mechanism includes adjusting head and measuring rod, be equipped with buckle on measuring rod for fixing anemometer measuring head, adjusting head includes clamping block and locking piece, clamping block is used for clamping measuring rod, and locking piece includes two kinds of conditions of loosening and locking, when locking piece is loosening condition, can adjust the inclination and the length of extension of measuring rod, when locking piece is locking condition, measuring rod is located, storage mechanism is used for placing anemometer control end. The present application reduces the task of 3 people to only one person to complete measurement, and can guarantee the fixed position of measuring head unmoved in the measurement process, and can long time continuous measurement, make the wind speed value of measurement more accurate, in addition, the measuring device is measured through the measuring rod into the inside measuring of machine platform, avoids the safety risk problem that personnel directly enters the inside of machine platform can appear.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a wind speed measuring device for a cleaning machine. Background Technology

[0002] Semiconductor wafer cleaning is a critical step in semiconductor manufacturing, designed to remove contaminants (such as particles, metal ions, organic matter, and oxide layers) from the wafer surface to ensure the precision and yield of subsequent processes such as photolithography, etching, and thin film deposition. The equipment used in this process is a cleaning machine. Many technical parameters are involved in the cleaning process, among which the airflow velocity of the FFU (Fan Filter Unit) is a key parameter. The FFU, typically installed at the top of the cleaning machine, primarily ensures a high level of cleanliness—dust-free and sterile—through forced airflow and filtration. Therefore, the FFU's airflow velocity must meet stringent process requirements to ensure the airflow effectively removes impurities generated during cleaning. Furthermore, the airflow velocity needs to be remeasured quarterly or after equipment maintenance.

[0003] In current technology, measuring the airflow velocity of an FFU (Fan Filter Unit) in a cleaning machine typically requires three people. Specifically, one person holds the anemometer probe under the FFU, another controls the anemometer, and yet another records the airflow velocity and measurement position. However, because the anemometer probe is held by hand, the distance between the probe and the FFU cannot be guaranteed to be accurate or consistent. This leads to measured airflow velocities that are either too high or too low compared to the actual value. Subsequent adjustments to the FFU airflow velocity based on this data will only exacerbate the error, resulting in a significant deviation in the final airflow velocity. If the final airflow velocity is too low, airflow will stagnate, making it easier for impurities to deposit on the wafer surface. If it is too high, turbulence will occur, increasing the risk of impurity suspension and also increasing the equipment's energy consumption and noise. Furthermore, when personnel are inside the cleaning machine taking measurements, there is an increased safety risk of collisions with the machine or accidental contact with chemicals.

[0004] Therefore, further improvements are needed to the FFU wind speed measurement process, and a wind speed measurement device specifically designed for cleaning machines is required. Utility Model Content

[0005] The purpose of this invention is to provide a wind speed measuring device for a cleaning machine to address the shortcomings of existing technologies.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A wind speed measuring device for a cleaning machine, comprising, from bottom to top, a movable base, a support mechanism located on the base, an adjustment mechanism, and a storage mechanism;

[0008] The height of the support mechanism can be adjusted, and the support mechanism is used to support the adjustment mechanism.

[0009] The adjustment mechanism includes an adjustment head and a measuring rod; the measuring rod is provided with a buckle for fixing the anemometer probe; the adjustment head includes a clamping block and a locking component, the clamping block is used to clamp the measuring rod, and the locking component has two states: loose and locked. When the locking component is in the loose state, the tilt and extension length of the measuring rod can be adjusted; when the locking component is in the locked state, the measuring rod is limited.

[0010] The storage mechanism is located on the base, the support mechanism, or the adjustment mechanism, and is used to house the anemometer control terminal.

[0011] Preferably, the base is a cross-shaped base.

[0012] Preferably, the support mechanism is located at the center of the cross-shaped base.

[0013] Preferably, the bottom of the cross-shaped base is provided with movable wheels with braking function in all four directions.

[0014] Preferably, the support mechanism includes a hollow first support rod, a second support rod with its bottom sleeved inside the first support rod, and a first locking screw; the first locking screw has two states: loose and locked. When the first locking screw is in the loose state, the second support rod can extend and retract along the first support rod, thereby adjusting the height of the adjustment mechanism; when the first locking screw is in the locked state, the second support rod is limited.

[0015] Preferably, the storage mechanism is a storage box, which is located on the first support rod.

[0016] Preferably, the top of the second support rod is provided with a connecting block, and the adjusting head is fixed to the connecting block.

[0017] Preferably, the adjusting head further includes a fixing block, the locking element is a second locking screw, and the clamping block is fixed to the fixing block by the second locking screw.

[0018] Preferably, the clamping block includes a middle block and an outer block, and semi-circular holes are provided radially on the opposite surfaces of the middle block and the outer block. The two semi-circular holes form clamping holes for clamping the measuring rod, and the fixing block, the middle block and the outer block are provided with axial holes for the second locking screw to pass through.

[0019] Preferably, the buckle is located at the end of the measuring rod.

[0020] This application further improves the FFU wind speed measurement process, providing a wind speed measurement device for cleaning machines. Using this device, the task that previously required three people can be reduced to one person. Simultaneously, the probe position remains fixed during measurement, allowing for continuous measurement over extended periods, resulting in more accurate wind speed readings. Furthermore, the device uses a measuring rod extending into the machine, avoiding the safety risks associated with personnel directly entering the machine. Therefore, the wind speed measurement device provided in this application has significant practical value and technological improvement implications in semiconductor wafer processing and cleaning processes. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the front side of the measuring device provided in this application;

[0022] Figure 2 This is a schematic diagram of the rear of the measuring device;

[0023] Figure 3 This is a top view of the measuring device;

[0024] Figure 4 This is a partial schematic diagram of the upper part of the measuring device;

[0025] Figure 5 yes Figure 4 A diagram from another perspective;

[0026] Figure 6 This is a schematic diagram of the probe installation of the measuring device;

[0027] Figure 7 This is a structural diagram of the adjusting head and measuring rod;

[0028] Figure 8 This is a schematic diagram of the adjustment head.

[0029] Explanation of reference numerals in the attached figures:

[0030] 1-Anemometer probe; 2-Measuring rod; 3-Anemometer control end; 4-First support rod; 5-Base; 6-Moving wheel; 7-Connecting cable; 8-Storage box; 9-Second support rod; 10-Snap fastener; 11-Connecting block; 12-First locking screw; 13-Adjusting head; 131-Fixing block; 132-Middle block; 133-Outer block; 14-Second locking screw. Detailed Implementation

[0031] In existing technology, anemometers mainly consist of three parts: anemometer control terminal 3, connecting cable 7, and anemometer probe 1. The anemometer control terminal 3 is used to operate the anemometer for power on / off, starting and ending measurements, and data display. During use, the anemometer probe 1 needs to be placed at a certain distance below the FFU (Fan Filter Unit).

[0032] The wind speed measuring device for a cleaning machine provided in this application, such as Figures 1 to 8 As shown, from bottom to top, it includes a movable base 5, a support mechanism located on the base, an adjustment mechanism, and a storage mechanism.

[0033] The base 5 is located at the bottom of the device and supports the entire measuring device. Preferably, the base 5 is cross-shaped, with the support mechanism located at the center of the cross-shaped base. The bottom of the cross-shaped base is equipped with casters 6 with brake functions in four directions. When the measuring device needs to be moved, the brakes are released; when the device is in position, the brakes are pressed down to keep it fixed, facilitating wind speed measurement.

[0034] The support mechanism is located in the middle of the entire measuring device and supports the upper adjustment mechanism. The height of the support mechanism is adjustable, allowing it to be positioned appropriately below the FFU.

[0035] The height adjustment mechanism can employ existing technology; this application provides a preferred structure, such as... Figures 1-2 As shown, the support mechanism includes a hollow first support rod 4, a second support rod 9 with its bottom sleeved inside the first support rod, and a first locking screw 12. The first locking screw 12 has two states: loose and locked. When the first locking screw 12 is in the loose state, the second support rod 9 can move telescopically along the first support rod 4, thereby adjusting the height of the adjustment mechanism. When the first locking screw 12 is in the locked state, the second support rod 9 is limited and cannot move further. The first locking screw 12 is preferably located on the upper part of the first support rod 4.

[0036] Preferably, the base 5 has a threaded hole at its center, and the bottom of the first support rod 4 is installed in the threaded hole.

[0037] The adjustment mechanism is mainly used to adjust the position and angle of the anemometer probe 1. Specifically, the adjustment mechanism includes an adjustment head 13 and a measuring rod 2. The measuring rod 2 is provided with a buckle 10 for fixing the anemometer probe 1, eliminating the need to hold it by hand. Preferably, the buckle 10 is located at the end of the measuring rod 2.

[0038] The adjusting head 13 includes a clamping block and a locking element. The clamping block is used to clamp the measuring rod, and the locking element has two states: loose and locked. When the locking element is in the loose state, the angle and extension length of the measuring rod can be adjusted to ensure that the position of the anemometer probe 1 is appropriate. When the locking element is in the locked state, the measuring rod 2 is limited and cannot move further.

[0039] Preferably, the top of the second support rod 9 is provided with a connecting block 11, and the adjusting head 13 is fixed on the connecting block 11.

[0040] Preferably, the adjusting head further includes a fixing block 131, which is fixed to the connecting block 11. The locking element is a second locking screw 14, and the clamping block is fixed to the fixing block by the second locking screw 14. The clamping block and the fixing block are preferably cylindrical. The clamping block includes a middle block 132 and an outer block 133. Semicircular holes are provided radially on the opposite surfaces of the middle block and the outer block. The two semicircular holes form a clamping hole for clamping the measuring rod 2. The fixing block, the middle block, and the outer block are provided with axial holes for the second locking screw to pass through.

[0041] When the second locking screw is not tightened, the three blocks of the adjusting head become loose, and the clamping hole enlarges. Therefore, the measuring rod can move left and right and up and down slightly within the clamping hole, thereby adjusting the extension length and tilt of the measuring rod 2. When the measuring rod needs to be limited after adjustment, one end of the second locking screw passes through the axial holes of the outer block, the middle block, and the fixed block, thereby limiting the clamping block.

[0042] More preferably, the surfaces of the intermediate block and the fixed block corresponding to each other are machined into a serrated shape to increase friction and ensure the stability of the measuring rod angle.

[0043] The storage mechanism can be located on the base 5, the support mechanism, or the adjustment mechanism, and is used to place the anemometer control terminal 3, so that it no longer needs to be held by hand.

[0044] The storage mechanism preferably adopts a storage box 8, and the anemometer control terminal 3 can be placed directly inside the storage box 8. Since there is a certain length of connecting line 7 between the anemometer probe 1 and the anemometer control terminal 3, for ease of use, the storage box 8 is preferably located on the first support rod 4.

[0045] When measuring the wind speed of the FFU, first place the anemometer control terminal 3 inside the storage box 8, and fix the anemometer probe 1 to the measuring rod 2 using the clip 10. Then move the measuring device to the side of the FFU and activate the wheel brake to prevent the measuring device from moving. Next, loosen the first locking screw 12, adjust the height of the second support rod 9, and tighten the first locking screw 12 after adjusting it to a suitable position. Then loosen the second locking screw 14, adjust the angle and extension length of the measuring rod 2, and then adjust the angle and position of the anemometer probe 1 so that the anemometer probe 1 extends into the machine and is placed at the target position below the FFU. Finally, measure the FFU wind speed through the anemometer control terminal 3 in the storage box and record the wind speed value to complete the measurement of the wind speed of the cleaning machine FFU. The entire process can be completed by only one person.

[0046] Therefore, this application further improves the FFU wind speed measurement process to provide a wind speed measuring device for a cleaning machine. Using this device, the task that previously required three people can be reduced to one person. At the same time, the probe position can be kept fixed during the measurement process, and continuous measurement can be performed for a long time, making the measured wind speed value more accurate. In addition, the measuring device uses a measuring rod to extend into the machine to measure, avoiding the safety risks that would occur if personnel directly enter the machine. Therefore, the wind speed measuring device provided by this application has good practical value and technical improvement significance in semiconductor wafer processing and cleaning processes.

[0047] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if these modifications and modifications of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include these modifications and modifications.

Claims

1. A wind speed measuring device for a cleaning machine, characterized in that, From bottom to top, it includes a movable base, a support mechanism located on the base, an adjustment mechanism, and a storage mechanism. The height of the support mechanism can be adjusted, and the support mechanism is used to support the adjustment mechanism. The adjustment mechanism includes an adjustment head and a measuring rod; the measuring rod is provided with a buckle for fixing the anemometer probe; the adjustment head includes a clamping block and a locking component, the clamping block is used to clamp the measuring rod, and the locking component has two states: loose and locked. When the locking component is in the loose state, the tilt and extension length of the measuring rod can be adjusted; when the locking component is in the locked state, the measuring rod is limited. The storage mechanism is located on the base, the support mechanism, or the adjustment mechanism, and is used to house the anemometer control terminal.

2. The wind speed measuring device for a cleaning machine as described in claim 1, characterized in that, The base is a cross-shaped base.

3. The wind speed measuring device for a cleaning machine as described in claim 2, characterized in that, The support mechanism is located at the center of the cross-shaped base.

4. The wind speed measuring device for a cleaning machine as described in claim 2, characterized in that, The bottom of the cross-shaped base is equipped with casters with braking function in all four directions.

5. The wind speed measuring device for a cleaning machine as described in claim 1, characterized in that, The support mechanism includes a hollow first support rod, a second support rod with its bottom sleeved inside the first support rod, and a first locking screw. The first locking screw has two states: loose and locked. When the first locking screw is in the loose state, the second support rod can move telescopically along the first support rod, thereby adjusting the height of the adjustment mechanism. When the first locking screw is in the locked state, the second support rod is limited.

6. The wind speed measuring device for a cleaning machine as described in claim 5, characterized in that, The storage mechanism is a storage box, which is located on the first support rod.

7. The wind speed measuring device for a cleaning machine as described in claim 5, characterized in that, The second support rod has a connecting block at its top, and the adjusting head is fixed to the connecting block.

8. The wind speed measuring device for a cleaning machine as described in claim 1, characterized in that, The adjusting head also includes a fixing block, and the locking element is a second locking screw. The clamping block is fixed to the fixing block by the second locking screw.

9. The wind speed measuring device for a cleaning machine as described in claim 8, characterized in that, The clamping block includes a middle block and an outer block. Semicircular holes are provided radially on the opposite surfaces of the middle block and the outer block. The two semicircular holes form clamping holes for clamping the measuring rod. The fixing block, the middle block and the outer block are provided with axial holes for the second locking screw to pass through.

10. The wind speed measuring device for a cleaning machine as described in claim 1, characterized in that, The buckle is located at the end of the measuring rod.

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