A high-low temperature probe station test device

Abstract

The application relates to the technical field of probe station testing, in particular to a high-low temperature probe station testing device, which comprises a high-low temperature testing box and screws. A moving mechanism with a linear module moving function is arranged on the high-low temperature testing box. The moving mechanism comprises a sliding bar. The sliding end of the linear module is fixedly connected with a placing plate. The corresponding two sides of the placing plate are fixedly connected with the sliding bar. The sliding bar is slidingly connected into the sliding groove I. The rotating crankshaft drives the moving plate to contact the other end of the to-be-tested piece. Meanwhile, the to-be-tested piece is clamped between the moving plate and the fixed plate. The positioning mechanism is locked by tightening the screws, so that the to-be-tested piece can keep the fixed position during the testing process, the testing error caused by mechanical vibration or temperature change is reduced, and the flexible performance of the crankshaft fixing is better, and the to-be-tested piece with different lengths can be adapted.

Description

Technical Field

[0001] This application relates to the field of probe station testing technology, and in particular to a high and low temperature probe station testing device. Background Technology

[0002] High and low temperature probe stations are key equipment in the semiconductor testing field, used to perform electrical performance testing on chips, wafers or packaged devices in extreme temperature environments (such as -70℃ to 300℃).

[0003] A search revealed Chinese Patent Publication No. CN219417519U, which discloses a probe device for a low-temperature testing stage. The device includes a sample stage with a placement slot for placing the sample. By placing the sample in the slot, the sample is fixed in place by bolts, threaded holes, and a fixing plate, preventing positional shift when the sample aligns with the probe. A ball screw drives a nut to move up and down. The nut, through the meshing of a first driven rack, a drive gear, and a second driven rack, drives a second guide block to move vertically. The second guide block, through a traction rod and a third guide block, drives a ring block to move vertically downward. The ring block, through the first guide block, drives a connecting rod to move vertically up and down, thereby adjusting the height of the probe. The horizontal position of the probe can be adjusted by the interaction of a slider and a groove. The angle of the probe can be adjusted by rotating a rotating rod.

[0004] Regarding the aforementioned technologies, the inventors have discovered the following deficiencies in this patent:

[0005] The fixing plate and the sample are moved and abutted by the cooperation of the bolts and threaded holes, thereby fixing the sample and preventing the sample from shifting position during low temperature testing. However, the positioning process requires manual tightening of multiple bolts in sequence, which makes the fixing process relatively rigid and reduces its flexibility.

[0006] Therefore, in response to the above problems, the applicant provides a high and low temperature probe station testing device. Utility Model Content

[0007] To address the problems mentioned in the background section, this application provides a high and low temperature probe station testing device.

[0008] This application provides a high and low temperature probe station testing device, which adopts the following technical solution:

[0009] A high and low temperature probe station testing device includes a high and low temperature test chamber and screws. The high and low temperature test chamber is provided with a moving mechanism with a linear module moving function. The moving mechanism includes a slider. The sliding end of the linear module is fixedly connected to a placement plate. Sliders are fixedly connected to corresponding sides of the placement plate. The sliders are slidably connected to a slide groove.

[0010] The placement plate is provided with a positioning mechanism with crankshaft positioning function. The positioning mechanism includes a spring. The crankshaft is rotatably connected to the rotating shaft. The crankshaft contacts the moving plate. One side of the moving plate contacts the spring.

[0011] Optionally, the high and low temperature test chamber is hinged with a door, the door has a slot, an observation window is embedded in the slot, and a controller is fixedly installed on the top surface of the high and low temperature test chamber.

[0012] Optionally, the high and low temperature test chamber is hinged with a door, the door has a slot, an observation window is embedded in the slot, and a controller is fixedly installed on the top surface of the high and low temperature test chamber.

[0013] Optionally, the two ends of a linear module are fixedly connected to the corresponding sides of the door, a placement plate is fixedly connected to the sliding end of the linear module, a fixing plate is fixedly connected to the top surface of the placement plate, the part to be tested is placed on the placement plate, and the linear module is wired to a controller.

[0014] Optionally, the placement plate has two sliding grooves, and a slider is slidably connected to each of the two sliding grooves. The fixing plate and the slider together hold the part to be tested.

[0015] Optionally, a spring is fixedly installed on one side of each of the two slide grooves, the spring contacts the slider, a limit groove is formed on the moving plate, and the crankshaft contacts the limit groove.

[0016] Optionally, a limiting post and a rotating shaft are fixedly connected to the placement plate. An arc-shaped groove and a through hole are vertically passed through the crankshaft. A throttle is provided at one end of the crankshaft. A threaded hole is opened on the throttle. The limiting post is located in the arc-shaped groove. The rotating shaft is located in the through hole. The screw is threadedly connected to the threaded hole.

[0017] In summary, this application includes the following beneficial technical effects:

[0018] 1. This utility model uses a rotating crankshaft to drive a moving plate to contact the other end of the workpiece under test. At the same time, the workpiece under test is clamped between the moving plate and the fixed plate. The positioning mechanism is locked by tightening screws, which ensures that the workpiece under test can maintain a fixed position during the test, reducing test errors caused by mechanical vibration or temperature changes. At the same time, the crankshaft fixation makes it more flexible and can be adapted to workpieces under test of different lengths.

[0019] 2. This utility model uses a linear module to move the test piece on the fixed plate and the moving plate, so that test pieces of different sizes can be aligned with the probes on the probe station device. The linear module also moves the placement plate, thus improving its adaptability. Attached Figure Description

[0020] Figure 1 This is a schematic diagram showing the disassembled structure of the slider, placement plate, and positioning mechanism in an embodiment of this application;

[0021] Figure 2 This is a schematic diagram of the internal structure of the high and low temperature test chamber in the embodiments of this application;

[0022] Figure 3 This is a schematic diagram of the overall structure in an embodiment of this application;

[0023] Figure 4 This is a schematic diagram of the internal structure of the high and low temperature test chamber after the door is rotated in the embodiment of this application;

[0024] Figure 5 This is a schematic diagram of the positioning mechanism structure in the embodiments of this application;

[0025] Figure 6 This is a schematic diagram of the positioning mechanism and placement plate structure in the embodiments of this application.

[0026] Reference numerals in the attached diagram: 1. High and low temperature test chamber; 100. Slide 1; 2. Chamber door; 3. Observation window; 4. Controller; 5. Electric push rod; 6. Probe station device; 7. Linear module; 8. Placement plate; 80. Slide 2; 9. Fixing plate; 10. Slider; 11. Moving plate; 110. Limiting groove; 12. Spring; 13. Crankshaft; 130. Arc groove; 131. Through hole; 132. Threaded hole; 14. Limiting post; 15. Rotating shaft; 16. Screw; 160. Protrusion; 17. Slide bar. Detailed Implementation

[0027] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0028] This application discloses a high and low temperature probe station testing device.

[0029] like Figure 1-6 As shown, a high and low temperature probe station testing device includes a high and low temperature test chamber 1 and screws 16. The high and low temperature test chamber 1 is provided with a moving mechanism with a linear module 7 moving function. The moving mechanism includes a slider 17. The sliding end of the linear module 7 is fixedly connected to a placement plate 8. The corresponding two sides of the placement plate 8 are fixedly connected to sliders 17. The sliders 17 are slidably connected to a slide groove 100.

[0030] The placement plate 8 is provided with a positioning mechanism that has a crankshaft 13 positioning function. The positioning mechanism includes a spring 12. The crankshaft 13 is rotatably connected to the rotating shaft 15. The crankshaft 13 contacts the moving plate 11. One side of the moving plate 11 contacts the spring 12.

[0031] Please see Figure 3 The high and low temperature test chamber 1 is hinged with a door 2, and a slot is opened on the door 2. An observation window 3 is embedded in the slot. A controller 4 is fixedly installed on the top surface of the high and low temperature test chamber 1. The observation window 3 allows the operator to observe the internal testing conditions of the high and low temperature test chamber 1. At the same time, the door 2 is used to replace the test piece and the probe station device 6.

[0032] Please see Figure 2 The top inner wall of the box door 2 is fixedly connected to the top surface of the input end of the electric push rod 5, and the output end of the electric push rod 5 is fixedly connected to the probe station device 6. The probe station device 6 consists of a probe, a circuit board, a support structure, and a calibration and positioning structure. The electric push rod 5 is electrically connected to the controller 4. The electric push rod 5 is externally powered and its up and down movement is controlled by the controller 4. The probe station device 6 is existing technology, and its specific structure and working principle will not be described in detail here.

[0033] Please see Figure 2 The door 2 is fixedly connected to both ends of the linear module 7 on both sides. The sliding end of the linear module 7 is fixedly connected to the placement plate 8. The top surface of the placement plate 8 is fixedly connected to the fixing plate 9. The part to be tested is placed on the placement plate 8. The linear module 7 is wired to the controller 4. The working stroke of the placement plate 8 is controlled by the controller 4. By moving the placement plate 8 left and right, it is matched with the installation position of the probe station device 6 so that the probe station device 6 and the part to be tested on the placement plate 8 are aligned.

[0034] Please see Figure 1 The placement plate 8 has two sliding grooves 80, and a slider 10 is slidably connected to each of the two sliding grooves 80. The fixing plate 9 and the slider 10 together hold the part to be tested.

[0035] Please see Figure 1 A spring 12 is fixedly installed on one side of each of the two slide grooves 80. The spring 12 contacts the slider 10. A limit groove 110 is formed on the moving plate 11. The crankshaft 13 contacts the limit groove 110.

[0036] Please see Figure 5 and Figure 6The placement plate 8 is fixedly connected to a limiting post 14 and a rotating shaft 15. The crankshaft 13 has a vertically penetrating arc groove 130 and a through hole 131. One end of the crankshaft 13 is provided with a throttle, and the throttle has a threaded hole 132. The limiting post 14 is located in the arc groove 130, and the rotating shaft 15 is located in the through hole 131. The screw 16 is threaded into the threaded hole 132. When the throttle is rotated, the crankshaft 13 rotates around the rotating shaft 15. The crankshaft 13 contacts the limiting groove 110 and moves it. The moving plate 11 drives the slider 10 to slide in the sliding groove 80. The spring 12 is compressed and contacts the slider 10, so that the slider 10 is limited.

[0037] Please see Figure 5 and Figure 6 The bottom of the screw 16 is fixedly connected with a plurality of array-shaped protrusions 160, which contact the top surface of the placement plate 8. The high and low temperature test chamber 1 has a sliding groove 100 on both sides. The protrusions 160 are mainly designed to increase the contact area with the placement plate 8.

[0038] The implementation principle of a high and low temperature probe station testing device in this application is as follows:

[0039] Open the door 2, place the part to be tested on one side of the fixed plate 9, turn the handle, the crankshaft 13 rotates around the shaft 15, the crankshaft 13 moves the limiting groove 110 toward the fixed plate 9, and at the same time the slider 10 moves in the limiting groove 80. When the moving plate 11 contacts one side of the part to be tested, stop turning the handle, and turn the screw 16 downwards so that the protrusion 160 contacts the top surface of the placement plate 8 to complete the positioning.

[0040] When different test pieces are placed on the placement plate 8, the corresponding probe station device 6 needs to be replaced. In order to align the test pieces on the placement plate 8 with the probes on the probe station device 6, the alignment can be achieved by controlling the movement of the linear module 7 through the controller 4.

[0041] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A high-low temperature probe station test apparatus, characterized by: Includes a high and low temperature test chamber (1) and screws (16). The high and low temperature test chamber (1) is provided with a moving mechanism with a linear module (7) moving function. The moving mechanism includes a slide bar (17). The sliding end of the linear module (7) is fixedly connected to a placement plate (8). The corresponding sides of the placement plate (8) are fixedly connected to slide bars (17). The slide bars (17) are slidably connected to the slide groove (100). The placement plate (8) is provided with a positioning mechanism that has a crankshaft (13) positioning function. The positioning mechanism includes a spring (12). The crankshaft (13) is rotatably connected to the rotating shaft (15). The crankshaft (13) contacts the moving plate (11). One side of the moving plate (11) contacts the spring (12).

2. The high-low temperature probe station test apparatus of claim 1, wherein: The high and low temperature test chamber (1) is hinged with a door (2), and a slot is provided on the door (2). An observation window (3) is embedded in the slot. A controller (4) is fixedly installed on the top surface of the high and low temperature test chamber (1).

3. The high-low temperature probe station test apparatus of claim 2, wherein: The top inner wall of the box door (2) is fixedly connected to the top surface of the input end of the electric push rod (5), and the output end of the electric push rod (5) is fixedly connected to the probe station device (6). The probe station device (6) consists of a probe, a circuit board, a support structure and a calibration and positioning structure. The electric push rod (5) is electrically connected to the controller (4).

4. The high-low temperature probe station test apparatus of claim 2, wherein: The two ends of the linear module (7) are fixedly connected to the corresponding sides of the door (2). A placement plate (8) is fixedly connected to the sliding end of the linear module (7). A fixing plate (9) is fixedly connected to the top surface of the placement plate (8). The test piece is placed on the placement plate (8). The linear module (7) is wired to a controller (4).

5. The high-low temperature probe station test apparatus of claim 4, wherein: The placement plate (8) has two sliding grooves (80), and sliders (10) are slidably connected in the two sliding grooves (80). The fixing plate (9) and the sliders (10) together hold the part to be tested.

6. The high-low temperature probe station test apparatus of claim 5, wherein: A spring (12) is fixedly installed on one side of the two slide grooves (80), the spring (12) contacts the slider (10), a limiting groove (110) is opened on the moving plate (11), and the crankshaft (13) contacts the limiting groove (110).

7. The high-low temperature probe station test apparatus of claim 1, wherein: The placement plate (8) is fixedly connected to a limiting post (14) and a rotating shaft (15). The crankshaft (13) has a vertically penetrating arc groove (130) and a through hole (131). One end of the crankshaft (13) is provided with a throttle, and the throttle is provided with a threaded hole (132). The limiting post (14) is located in the arc groove (130), the rotating shaft (15) is located in the through hole (131), and the screw (16) is threaded into the threaded hole (132).

8. The high-low temperature probe station test apparatus of claim 1, wherein: The bottom of the screw (16) is fixedly connected with a plurality of array-shaped protrusions (160), the protrusions (160) contact the top surface of the placement plate (8), and the high and low temperature test chamber (1) has a sliding groove (100) on both sides.

Images