A multifunctional probe card holder for semiconductor testing

Abstract

The utility model relates to the technical field of semiconductor test equipment discloses a multifunctional probe card fixing frame for semiconductor test, including support frame, bearing frame, closed box, push assembly and support component, support frame is square, lower bearing frame, upper interface closed box, bearing frame is equipped with through groove and sliding groove, is used for component sliding direction finding, built -in push assembly in closed box, its hydraulic telescopic cylinder drives sliding board and the movement of sliding block with inclined surface, support component contains buffer component, moving block, and the upper end inclined surface of moving block cooperates with sliding block, and the lower end is connected extruding head through connecting rod, and both sides stabilizer bar enhances sliding stability, and extruding head sets up square and arc clamping groove, can adapt to different shape probe card, and the closed box is equipped with support arm and connecting plate with mounting hole, and the whole fixedly, this fixing frame realizes multidirectional synchronous clamping through inclined plane transmission, has the buffer function simultaneously, and the adaptability is strong, can stably fix all kinds of probe card, improves semiconductor test efficiency and precision.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, specifically a multifunctional probe card holder for semiconductor testing. Background Technology

[0002] In the field of semiconductor testing, probe cards are key components that connect test equipment to semiconductor chips, and their stability directly affects test accuracy and efficiency.

[0003] A search revealed existing technology (application number: CN202222127394.X), which describes a "detachable probe card for semiconductor testing." While this utility model can achieve the function of detaching and assembling probe cards, in practical applications, when faced with probe cards of different shapes, it is necessary to replace parts of corresponding sizes to complete the limiting and fixing, which is cumbersome, labor-intensive, and time-consuming, resulting in poor flexibility and versatility. At the same time, traditional fixing frames often lack a buffer structure during clamping, making it easy to damage precision components such as probe cards due to rigid compression. Furthermore, the drive and transmission structure design of some fixing frames is unreasonable, making it difficult to achieve multi-directional synchronous and stable clamping, which is prone to clamping deviation and affects testing accuracy. In addition, the installation structure of some fixing frames is complex, making it inconvenient to quickly adapt to various testing equipment and reducing work efficiency.

[0004] Therefore, there is an urgent need for a multifunctional probe card holder that is highly versatile, has stable clamping performance, provides buffer protection, and is easy to install, in order to solve the above-mentioned problems in the existing technology. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a multifunctional probe card holder for semiconductor testing.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a multifunctional probe card holder for semiconductor testing, comprising a support frame, the support frame having a square frame structure and the lower surface of the support frame connecting to the upper surface of a carrier frame, a deep groove provided above the carrier frame, the upper surface of the support frame connecting to the lower surface of a closed box, the lower interior of the closed box being hollow and having an mounting groove provided above, a pushing component provided inside the closed box, the pushing component being used to push the support component to compress, a support component being provided inside the support frame and above the closed box, the support component being used to compress the probe card, the closed box being used to close the pushing component and facilitate the sliding of the pushing component, four through grooves being provided on the bottom surface of the carrier frame, and sliding grooves being provided on both sides of the through grooves on the bottom surface of the carrier frame.

[0007] As a further description of the above technical solution:

[0008] The pushing assembly includes a hydraulic telescopic cylinder, a guide rod, and a sliding plate. The hydraulic telescopic cylinder is installed in a mounting slot above the enclosed box, and the telescopic end of the hydraulic telescopic cylinder is connected to the upper surface of the sliding plate. Guide rods are provided around the telescopic end of the hydraulic telescopic cylinder. The upper end of the guide rod slides around the hydraulic telescopic cylinder, and the lower end is connected to the upper surface of the sliding plate.

[0009] As a further description of the above technical solution:

[0010] The lower surface of the sliding plate is connected to the upper surface of the sliding block, and multiple sliding blocks are provided, with the lower surface of the sliding block being an inclined surface.

[0011] As a further description of the above technical solution:

[0012] The support component includes a buffer component and a movable block. The buffer component is disposed inside the support frame and includes a spring and a damper. One end of the buffer component is connected to the inner wall of the support frame and the other end is connected to the movable block. The lower end of the movable block is connected to the inner bottom surface of the bearing frame and the upper end is an inclined surface. The inclined surface of the upper end of the movable block is consistent with the inclined surface of the lower surface of the sliding block.

[0013] As a further description of the above technical solution:

[0014] The lower middle of the movable block is connected to the upper end of the connecting rod, which passes through the bearing frame and slides in the through groove on the bottom surface of the bearing frame. The lower end of the connecting rod is connected to the extrusion head. Stabilizing rods are provided on both sides above the connecting rod. The upper ends of the stabilizing rods are connected to the lower sides of the movable block, and the lower ends slide in the sliding groove on the bottom surface of the bearing frame.

[0015] As a further description of the above technical solution:

[0016] The extrusion head has a deep groove on one side above it. The deep groove of the extrusion head has a square clamping groove and an arc-shaped clamping groove. The square clamping groove is right-angled and the arc-shaped clamping groove is arc-shaped.

[0017] As a further description of the above technical solution:

[0018] Support arms are provided around the upper perimeter of the outer wall of the enclosed box. The lower end of the support arm is connected to the outer wall of the enclosed box and the upper end is connected to the lower surface of the connecting plate. The connecting plate is provided with multiple mounting holes.

[0019] This utility model has the following beneficial effects:

[0020] First, the extrusion head is equipped with both square and arc-shaped clamping slots, which can be adapted to probe cards of different shapes such as square and arc, respectively. It can meet a variety of testing needs without changing the fixing frame, thus improving the versatility of the equipment.

[0021] The cushioning components (springs and dampers) in the support assembly provide cushioning during clamping, preventing rigid compression from damaging the probe card and protecting the precision components.

[0022] Second, by using the hydraulic drive of the component to push the inclined plane transmission of the sliding block and the moving block, multi-directional synchronous extrusion is achieved to ensure that the probe is stably positioned during the test.

[0023] Meanwhile, the stabilizer bar slides along the sliding groove, which enhances the motion stability of the moving block and the extrusion head and reduces clamping offset.

[0024] The support arm on the outer wall of the enclosed enclosure works with the connecting plate with mounting holes to facilitate the quick installation of the mounting bracket onto various testing equipment, simplifying the installation process and improving work efficiency. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0026] Figure 2 This is a schematic diagram of the internal structure of the present invention;

[0027] Figure 3 This is an exploded view of the connection structure between the pushing component and the supporting component of this utility model;

[0028] Figure 4 This is a cross-sectional view of the support component structure of this utility model.

[0029] Legend:

[0030] 1. Support frame; 2. Bearing frame; 3. Enclosed box; 4. Support arm; 5. Connecting plate; 6. Pushing assembly; 7. Supporting assembly; 601. Hydraulic telescopic cylinder; 602. Guide rod; 603. Sliding plate; 604. Sliding block; 701. Buffer assembly; 702. Moving block; 703. Connecting rod; 704. Extrusion head; 705. Stabilizing rod; 706. Square clamping groove; 707. Arc-shaped clamping groove. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The utility model will be further described in detail below with reference to the accompanying drawings.

[0033] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] Example 1:

[0035] like Figures 1 to 4 As shown in the figure, this embodiment provides a multifunctional probe card holder for semiconductor testing, including a support frame 1. The support frame 1 has a square frame structure, and its lower surface is connected to the upper surface of a carrier frame 2. A deep groove is provided on the upper surface of the carrier frame 2. The upper surface of the support frame 1 is connected to the lower surface of a closed box 3. The lower interior of the closed box 3 is hollow, and an installation groove is provided on its upper surface. A pushing component 6 is provided inside the closed box 3. The pushing component 6 is used to push a support component 7 to compress it. The support component 7 is provided inside the support frame 1 and on top of the closed box 3. The support component 7 is used to compress the probe card. The closed box 3 is used to close the pushing component 6 and facilitate the sliding of the pushing component 6. Four through grooves are provided on the bottom surface of the carrier frame 2. Sliding grooves are also provided on both sides of the through grooves on the bottom surface of the carrier frame 2.

[0036] In this embodiment, the support frame 1, the pushing component 6, and the support component 7 constitute a multifunctional probe card holder for semiconductor testing according to this application.

[0037] It should also be noted that the probe card holder in this application can be used for any application that requires probe card fixing, and this application does not limit the specific type of probe card.

[0038] Specifically, the pushing component 6 includes a hydraulic telescopic cylinder 601, a guide rod 602, and a sliding plate 603. The hydraulic telescopic cylinder 601 is installed in the mounting groove above the enclosed box 3, and the telescopic end of the hydraulic telescopic cylinder 601 is connected to the upper surface of the sliding plate 603. The guide rod 602 is provided around the telescopic end of the hydraulic telescopic cylinder 601. The upper end of the guide rod 602 slides around the hydraulic telescopic cylinder 601, and the lower end is connected to the upper surface of the sliding plate 603.

[0039] In this embodiment, there are four guide rods 602 in the pushing component 6, which are distributed around the telescopic end of the hydraulic telescopic cylinder 601. The telescopic cylinder 601 drives the sliding plate 603 to move up and down. The guide rods 602 restrict the direction of movement of the sliding plate, so as to realize the stable up and down movement of the sliding plate 603 and provide power for subsequent transmission.

[0040] Specifically, the lower surface of the sliding plate 603 is connected to the upper surface of the sliding block 604, and multiple sliding blocks 604 are provided, with the lower surface of the sliding block 604 being an inclined surface.

[0041] In a preferred embodiment, there are four sliding blocks 604, which can be made of hard alloy. The sliding plate 603 drives the sliding blocks 604 to move up and down synchronously, and the vertical motion is converted into horizontal thrust through the inclined structure.

[0042] Example 2:

[0043] A support component 7 is provided based on embodiment 1.

[0044] Specifically, the support component 7 includes a buffer component 701 and a moving block 702. The buffer component 701 is disposed inside the support frame 1 and includes a spring and damping. One end of the buffer component 701 is connected to the inner wall of the support frame 1 and the other end is connected to the moving block 702. The lower end of the moving block 702 is connected to the inner bottom surface of the bearing frame 2 and the upper end is an inclined surface. The upper inclined surface of the moving block 702 is consistent with the lower surface inclined surface of the sliding block 604.

[0045] In this embodiment, the number of buffer components 701 in the support component 7 is four. When the sliding block 604 moves down, it squeezes the moving block 702 through the inclined surface. The buffer component 701 is compressed and generates a reaction force. The moving block 702 moves in the horizontal direction. The buffer component 701 provides buffering force to avoid rigid collision.

[0046] Specifically, the lower middle of the moving block 702 is connected to the upper end of the connecting rod 703, and the connecting rod 703 passes through the bearing frame 2 and slides in the through groove on the bottom surface of the bearing frame 2. The lower end of the connecting rod 703 is connected to the extrusion head 704. Stable rods 705 are provided on both sides above the connecting rod 703. The upper ends of the stable rods 705 are connected to both sides of the lower end of the moving block 702, and the lower ends slide in the sliding groove on the bottom surface of the bearing frame 2.

[0047] With this configuration, the horizontal movement of the moving block 702 drives the connecting rod 703 and the stabilizing rod 705 to move. The stabilizing rod 705 slides along the sliding groove, and the connecting rod 703 drives the extrusion head 704 to move synchronously. The stabilizing rod 705 enhances the movement stability of the moving block 702 and prevents it from deviating.

[0048] Specifically, the extrusion head 704 has a deep groove on the upper side of the opposite side, and the deep groove of the extrusion head 704 has a square clamping groove 706 and an arc-shaped clamping groove 707. The square clamping groove 706 is right-angled and the arc-shaped clamping groove 707 is arc-shaped.

[0049] After the extrusion head 704 moves, the square clamping groove 706 and the arc-shaped clamping groove 707 can contact and clamp probe cards of different shapes respectively, which can be adapted to probe cards of different shapes such as square and round, and achieve stable clamping.

[0050] Specifically, a support arm 4 is provided around the upper perimeter of the outer wall of the enclosed box 3. The lower end of the support arm 4 is connected to the outer wall of the enclosed box 3 and the upper end is connected to the lower surface of the connecting plate 5. The connecting plate 5 is provided with multiple mounting holes.

[0051] In this embodiment, there are four support arms 4 around the upper part of the outer wall of the sealed box 3. They are connected to external testing equipment through the mounting holes of the connecting plate 5. The support arms 4 provide support and enable the quick installation of the fixed frame and various testing equipment, thereby improving installation efficiency.

[0052] In actual use, the device is first installed on the testing equipment through the mounting holes on the connecting plate 5. Then, the hydraulic telescopic cylinder 601 is activated. Guided by the guide rod 602, the telescopic end of the hydraulic telescopic cylinder 601 stably pushes the sliding plate 603 downward. The sliding plate 603 slides inside the sealed box 3 and pushes the sliding block 604 downward. The inclined surface of the lower surface of the sliding block 604 contacts the inclined surface of the upper end of the buffer assembly 701. The lifting and lowering of the sliding block 604 causes the moving block 702 to move outward. As the moving block 702 moves, it compresses the buffer assembly 701 and drives the connecting rod 703 along the inner bottom surface of the bearing frame 2. The sliding block 702 moves stably through the sliding groove via the stabilizing rods 705 on both sides of the connecting rod 703 in the sliding groove on the bottom surface of the bearing frame 2. The sliding of the connecting rod 703 causes the extrusion heads 704 to move away from each other. Then, the probe card is placed in the deep groove above the extrusion head 704. Depending on the shape of the probe card, it is secured by the square clamping groove 706 or the arc-shaped clamping groove 707. Then, the hydraulic telescopic cylinder 601 drives the sliding plate 603 and the sliding block 604 to rise and fall. At this time, the spring and damping in the buffer assembly 701 push the moving block 702 to reset, thereby causing the extrusion head 704 to press the probe card for stabilization.

[0053] It should be noted that all electrical components mentioned in this article are connected to an external main controller and 220V AC mains power. The main controller can be a conventional known device that can be controlled by a computer or other means. The detailed description of known functions and known components is omitted in the specific implementation of this disclosure. In order to ensure the compatibility of the device, the operating methods used are consistent with the parameters of commercially available instruments.

[0054] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A multifunctional probe card holder for semiconductor testing, characterized in that: The system includes a support frame (1), which is a square frame structure and the lower surface of the support frame (1) is connected to the upper surface of the support frame (2). The upper surface of the support frame (1) is connected to the lower surface of the closed box (3). An installation groove is provided on the upper part of the closed box (3). A pushing component (6) is provided inside the closed box (3). The pushing component (6) is used to push the support component (7) to squeeze. The support component (7) is provided inside the support frame (1) and above the closed box (3). The support component (7) is used to squeeze the probe card. Four through grooves are provided on the bottom surface of the inside of the support frame (2). Sliding grooves are also provided on both sides of the through grooves on the bottom surface of the inside of the support frame (2).

2. The multifunctional probe card holder for semiconductor testing according to claim 1, characterized in that: The pushing assembly (6) includes a hydraulic telescopic cylinder (601), which is installed in the mounting groove above the enclosed box (3) and the telescopic end of the hydraulic telescopic cylinder (601) is connected to the upper surface of the sliding plate (603). Guide rods (602) are provided around the telescopic end of the hydraulic telescopic cylinder (601). The upper end of the guide rods (602) slides around the hydraulic telescopic cylinder (601) and the lower end is connected to the upper surface of the sliding plate (603).

3. A multifunctional probe card holder for semiconductor testing according to claim 2, characterized in that: The lower surface of the sliding plate (603) is connected to the upper surface of the sliding block (604), and multiple sliding blocks (604) are provided, with the lower surface of the sliding block (604) being an inclined surface.

4. A multifunctional probe card holder for semiconductor testing according to claim 3, characterized in that: The support component (7) includes a buffer component (701), which is disposed inside the support frame (1) and includes a spring and a damper. One end of the buffer component (701) is connected to the inner wall of the support frame (1) and the other end is connected to a moving block (702). The lower end of the moving block (702) is connected to the inner bottom surface of the bearing frame (2) and the upper end is an inclined surface. The upper inclined surface of the moving block (702) is consistent with the lower surface inclined surface of the sliding block (604).

5. A multifunctional probe card holder for semiconductor testing according to claim 4, characterized in that: The lower middle of the moving block (702) is connected to the upper end of the connecting rod (703), and the connecting rod (703) passes through the bearing frame (2) and slides in the through groove on the bottom surface of the bearing frame (2). The lower end of the connecting rod (703) is connected to the extrusion head (704). Stable rods (705) are provided on both sides above the connecting rod (703). The upper end of the stable rod (705) is connected to both sides of the lower end of the moving block (702), and the lower end slides in the sliding groove on the bottom surface of the bearing frame (2).

6. A multifunctional probe card holder for semiconductor testing according to claim 5, characterized in that: The extrusion head (704) has a deep groove on one side above it. The extrusion head (704) has a square clamping groove (706) and an arc-shaped clamping groove (707) inside the deep groove. The square clamping groove (706) is right-angled and the arc-shaped clamping groove (707) is arc-shaped.

7. A multifunctional probe card holder for semiconductor testing according to claim 6, characterized in that: Support arms (4) are provided around the upper perimeter of the outer wall of the enclosed box (3). The lower end of the support arm (4) is connected to the outer wall of the enclosed box (3) and the upper end is connected to the lower surface of the connecting plate (5). The connecting plate (5) is provided with multiple mounting holes.

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