Position checking device for a servo motor

Abstract

The application discloses a position checking device of a servo motor, which comprises a programmable controller, a servo motor, a home position sensor and an upper computer. The servo motor is connected with the programmable controller in communication and is used for executing a control signal issued by the programmable controller to perform a production operation and return to a home position from a forward working position, and sends current position information of the servo motor to the programmable controller. The home position sensor is connected with the programmable controller in communication and is used for sending a pulse signal to the programmable controller. The upper computer is connected with the programmable controller in communication and is used for receiving fault information issued by the programmable controller. The application can reduce the risk of deviation accumulation between actual position information of the servo motor and the home position after multiple production operations, thereby ensuring the precision of product quality in subsequent production operations.

Description

Technical Field

[0001] This utility model relates to the field of motor control technology, and in particular to a position verification device for a servo motor. Background Technology

[0002] In semiconductor equipment, motors are widely used as actuators in motion mechanisms. These devices require extremely high motion precision, especially during product transfer, where certain mechanisms must be precisely positioned at the origin, with deviations controlled to the millimeter level. High-precision motion control is crucial for ensuring the quality and production efficiency of semiconductor products. However, traditional motor control systems have limitations in terms of precision and reliability, making it difficult to meet the requirements of modern semiconductor manufacturing processes.

[0003] The complexity and precision of semiconductor manufacturing processes pose extremely high challenges to the motion control of equipment. For example, in critical processes such as photolithography, etching, and thin-film deposition, robotic arms and transfer mechanisms need to operate within extremely small deviations. In photolithography, for instance, the positioning accuracy of the wafer directly affects the pattern transfer quality of the chip; any minute positional deviation can lead to performance degradation or even chip failure. Furthermore, semiconductor equipment typically needs to maintain high precision while operating at high speeds, which places higher demands on the dynamic response and control algorithms of motors. Traditional motor control systems often suffer from positional deviations, vibrations, and overshoot when handling high-speed, high-precision tasks, impacting production efficiency and product quality.

[0004] Currently, the position verification device for servo motors still needs improvement. Utility Model Content

[0005] The problem solved by this utility model embodiment is to provide a position verification device for a servo motor, thereby improving the stability and reliability of the servo device.

[0006] To address the aforementioned problems, this utility model provides a servo motor position verification device, comprising: a programmable controller; a servo motor, communicatively connected to the programmable controller, used to execute control signals issued by the programmable controller to perform production operations and return from the forward working position to the origin position, and to send the current position information of the servo motor to the programmable controller; an origin position sensor, communicatively connected to the programmable controller, used to send pulse signals to the programmable controller; and a host computer, communicatively connected to the programmable controller, used to receive fault information issued by the programmable controller.

[0007] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0008] The servo motor position verification device provided in this embodiment of the utility model has a servo motor communicatively connected to the programmable controller (PLC). The servo motor executes control signals issued by the PLC to perform production operations and returns from the forward working position to the origin position. It also sends the current position information of the servo motor to the PLC. An origin position sensor is communicatively connected to the PLC and sends pulse signals to the PLC. A host computer is communicatively connected to the PLC and receives fault information issued by the PLC. In other words, during each production operation, a trigger signal and temporarily stored position information are used to determine whether the servo motor has stopped running and returned to the origin position. This promptly detects deviations between the actual position and the origin position of the servo motor and issues fault information as a warning, thereby reducing the impact on product accuracy in subsequent production operations. Furthermore, by detecting the deviation between the actual position and the origin position of the servo motor during each production operation, and issuing fault information when the deviation exceeds a preset fault range, the device allows the user to troubleshoot the servo motor. This reduces the risk of accumulated deviations between the actual position information and the origin position of the servo motor after multiple production operations, thus ensuring the accuracy of product quality in subsequent production operations and improving the stability and reliability of the servo device. Attached Figure Description

[0009] Figure 1 The device topology diagram of the servo motor position verification device of this utility model is shown. Detailed Implementation

[0010] As can be seen from the background technology, the position verification device for servo motors still needs improvement. After multiple production operations, the servo motor is prone to accumulated deviations from the origin, which affects the precision control of product quality.

[0011] To address the aforementioned technical problems, this utility model provides a servo motor position verification device, comprising: a programmable controller; a servo motor, communicatively connected to the programmable controller, used to execute control signals issued by the programmable controller to perform production operations and return from the forward working position to the origin position, and to send the current position information of the servo motor to the programmable controller; an origin position sensor, communicatively connected to the programmable controller, used to send pulse signals to the programmable controller; and a host computer, communicatively connected to the programmable controller, used to receive fault information issued by the programmable controller.

[0012] The servo motor position verification device provided in this embodiment of the utility model has a servo motor communicatively connected to the programmable controller (PLC). The servo motor executes control signals issued by the PLC to perform production operations and returns from the forward working position to the origin position. It also sends the current position information of the servo motor to the PLC. An origin position sensor is communicatively connected to the PLC and sends pulse signals to the PLC. A host computer is communicatively connected to the PLC and receives fault information issued by the PLC. In other words, during each production operation, a trigger signal and temporarily stored position information are used to determine whether the servo motor has stopped running and returned to the origin position. This promptly detects deviations between the actual position and the origin position of the servo motor and issues fault information as a warning, thereby reducing the impact on product accuracy in subsequent production operations. Furthermore, by detecting the deviation between the actual position and the origin position of the servo motor during each production operation, and issuing fault information when the deviation exceeds a preset fault range, the device allows the user to troubleshoot the servo motor. This reduces the risk of accumulated deviations between the actual position information and the origin position of the servo motor after multiple production operations, thus ensuring the accuracy of product quality in subsequent production operations and improving the stability and reliability of the servo device.

[0013] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0014] This utility model provides a position verification device for a servo motor. Among other things, Figure 1 The device topology diagram of the servo motor position verification device of this utility model is shown.

[0015] The servo motor position verification device includes: a programmable controller; a servo motor, which is communicatively connected to the programmable controller and is used to execute control signals issued by the programmable controller to perform production operations and return from the forward working position to the origin position, and to send the current position information of the servo motor to the programmable controller; an origin position sensor, which is communicatively connected to the programmable controller and is used to send pulse signals to the programmable controller; and a host computer, which is communicatively connected to the programmable controller and is used to receive fault information issued by the programmable controller.

[0016] Specifically, the servo motor is communicatively connected to the programmable controller (PCC) to execute control signals issued by the PCC for production operations and to return from the forward working position to the origin position. It also sends the current position information of the servo motor to the PCC. The origin position sensor is communicatively connected to the PCC and sends pulse signals to the PCC. The host computer is communicatively connected to the PCC and receives fault information from the PCC. In other words, during each production operation, trigger signals and temporary position information are used to determine whether the servo motor has stopped and returned to the origin position. This allows for timely detection of deviations between the actual position of the servo motor and the origin position, and the issuance of fault information as a warning, thereby reducing the impact on product accuracy in subsequent production operations. Furthermore, detecting the deviation between the actual position of the servo motor and the origin position during each production operation, and issuing fault information when the deviation exceeds a preset fault range, allows the user to troubleshoot the servo motor. This reduces the risk of accumulated deviations between the actual position information of the servo motor and the origin position after multiple production operations, thus ensuring the accuracy of product quality in subsequent production operations and improving the stability and reliability of the servo device.

[0017] Specifically, the programmable controller is used to issue control signals to control the servo motor to complete multiple production operations, enabling the servo motor to perform multiple tasks set by the user.

[0018] For example, production operations include the transport of wafers.

[0019] In this embodiment, the programmable controller includes a Beckhoff programmable controller.

[0020] It should be noted that the EtherCAT bus has high-speed data transmission performance, ensuring that Beckhoff PLC can receive and process trigger signals from the origin position sensor and position feedback information from the servo motor in real time. Furthermore, Beckhoff PLC is deeply integrated with the EtherCAT bus, enabling seamless connection to various automation equipment and servo systems.

[0021] In this embodiment, the programmable controller includes a rising edge detection logic unit, which is used to read the pulse signal at a preset scan period, capture the rising edge pulse signal in the pulse signal, and mark the rising edge pulse signal as the trigger signal of the origin.

[0022] Specifically, the programmable controller captures the trigger signal of the origin position with a preset scan cycle, ensuring that it can accurately identify whether the servo motor has successfully returned to the origin position in the subsequent process of determining whether the servo motor has returned to the origin position. At the same time, the preset scan cycle can ensure the timeliness and accuracy of the trigger signal capture, avoiding position judgment errors caused by omissions.

[0023] It should be noted that the rising edge pulse signal refers to the instant when the pulse signal at the origin changes from a low level to a high level. In other words, the rising edge pulse signal represents a specific trigger point. When the servo motor reaches the origin, the rising edge pulse signal can serve as a precise trigger signal, indicating that the servo motor has reached the origin. Furthermore, the pulse signal at the origin may vibrate due to mechanical vibration, causing the pulse signal to be unstable. The rising edge pulse signal can avoid false triggering caused by jitter.

[0024] Specifically, the rising edge pulse signal is marked as the trigger signal for the origin position. In the subsequent step of determining whether the servo motor has returned to the origin position, the trigger signal can serve as a clear indicator that the servo motor has reached the origin position, thereby determining whether the servo motor has returned to the origin position.

[0025] In this embodiment, the programmable controller includes a position reading logic unit, which is used to read the current position information of a servo motor that is synchronized with a trigger signal at a preset scanning cycle.

[0026] Specifically, the scanning cycle determines the sampling frequency of the servo system, which also means that the scanning cycle represents the response delay of the servo system. When the rising edge pulse signal of the origin position is detected, the servo system needs a certain amount of time to process the signal. During this time period, the servo motor continues to move a certain distance. Therefore, by compensating the displacement of the servo motor within the preset scanning cycle into the current position information, the temporary position information of the servo motor can be obtained more accurately, thereby obtaining the actual position of the servo motor more accurately, which in turn improves the accuracy of subsequent deviation acquisition and makes the position verification of the servo motor more precise.

[0027] Correspondingly, by acquiring the temporary position information, when the servo motor stops running and a trigger signal is fed back, the temporary position information can be compared with the actual position information of the servo motor to obtain the deviation between the actual position of the servo motor and the origin position. Then, it can be determined whether the deviation exceeds the preset fault range, so that the fault information of the servo system can be issued in a timely manner, ensuring the accuracy of product quality in subsequent production operations and improving the stability and reliability of the servo system.

[0028] It should be noted that the servo motor has an encoder, which can acquire the current position information of the servo motor and feed it back to the controller, thereby enabling the servo motor to read the current position information synchronized with the trigger signal at a preset scan cycle.

[0029] The programmable controller includes a data processing logic unit, which is used to compensate the displacement of the servo motor within a preset scanning cycle into the current position information, and to use the compensated current position information as temporary position information.

[0030] In this embodiment, the temporary position information Xn of the servo motor is X1 + V*T / 1000; where X1 refers to the current position information; V refers to the running speed of the servo motor; and T refers to the preset scanning cycle.

[0031] In this embodiment, the programmable controller includes: a judgment logic unit, used to determine whether the servo motor has stopped running and returned to the origin position; if the servo motor stops and there is no trigger signal, and the actual position information after the servo motor stops running is less than or equal to the origin position, then a fault information is issued; if the servo motor stops and there is no trigger signal, and the actual position information after the servo motor stops running is greater than or equal to the origin position, then the servo motor is controlled to perform the next production operation; if the servo motor stops and a trigger signal is fed back, then the actual position information after the servo motor stops running is compared with the temporary position information, and if the deviation exceeds the preset fault range, then a fault information is issued.

[0032] It should be noted that by determining whether the servo motor has stopped running and returned to its origin, deviations between the actual position of the servo motor and its origin can be detected in a timely manner, and fault information can be issued as a prompt. This reduces the impact on product accuracy in subsequent production operations. Furthermore, by performing servo motor position verification in each production operation, production can be carried out without affecting the operation, and there is no need to stop the entire production line for a return-to-origin operation. This improves the safety and sustainability of the servo system operation.

[0033] In some embodiments, if the servo motor stops running and there is no trigger signal, and the actual position information after the servo motor stops running is less than or equal to the origin position, a fault information is issued.

[0034] Specifically, the origin position is usually represented by zero, and the actual position information after the servo motor stops running is usually a positive value, a negative value, or zero. The positive and negative values ​​represent the positive and negative positions relative to the origin position, respectively.

[0035] The forward and reverse positions are defined relative to the origin and are used to indicate the direction of the servo motor at the origin. The forward working position is within the range of the forward position.

[0036] It should be noted that if the servo motor stops running and there is no trigger signal, and the actual position information after the servo motor stops running is less than or equal to the origin position, it means that the servo motor has not yet reached the origin position and has stopped running, or that the servo motor has reached the origin position, but the origin position sensor has malfunctioned, resulting in the inability to mark the rising edge pulse signal, thereby issuing a fault information for the user to perform fault elimination processing on the servo motor and improve the product accuracy of the next production operation.

[0037] In some embodiments, if the servo motor stops running and there is no trigger signal, and the actual position information after the servo motor stops running is greater than or equal to the original position, then the servo motor is controlled to perform the next production operation.

[0038] Specifically, if the servo motor stops running and there is no trigger signal, and the actual position information of the servo motor after stopping is greater than or equal to the origin position, it means that the servo motor has overshoot due to inertia. In other words, the actual stopping position of the servo motor exceeds the origin position. Therefore, by controlling the servo motor to perform the next production operation, the servo motor is made to return from the positive working position to the origin position, thereby re-verifying the position of the servo motor.

[0039] In some embodiments, if the servo motor stops running and a trigger signal is received, it means that the servo motor has stopped running and returned to its original position normally. At this time, comparing the actual position information after the servo motor stops running with the temporary position information can further verify the position of the servo motor accurately.

[0040] Specifically, if the deviation exceeds the preset fault range, a fault message is issued, allowing the user to troubleshoot the servo motor. This reduces the risk of cumulative deviations between the actual position information of the servo motor and the origin position after multiple production operations, thereby ensuring the accuracy of product quality in subsequent production operations and improving the stability and reliability of the servo system.

[0041] In this embodiment, the judgment logic unit includes: a confirmation subunit, used to stop the servo motor if the speed information fed back by the servo motor is zero and the duration reaches a set threshold.

[0042] It should be noted that the speed information fed back by the servo motor is zero and the duration reaches the set threshold. This accurately determines whether the servo motor has completely stopped, avoiding misjudgments caused by instantaneous speed fluctuations. Setting the threshold ensures that subsequent operations are only performed after the servo motor has truly stopped, thus improving the reliability of the servo system.

[0043] In this embodiment, the step of comparing the actual position information with the temporary position information after the servo motor stops running includes: based on the actual position information and the temporary position information, using absolute value calculation to obtain the deviation between the actual position information and the temporary position information.

[0044] Specifically, using absolute value calculation can simplify the deviation calculation process, directly reflect the deviation between the actual position and the temporary position, and facilitate subsequent judgment and processing of the deviation.

[0045] In this embodiment, the position reading logic unit is used to read the output value fed back by the encoder and convert the read output value into the actual position information of the servo motor.

[0046] In this embodiment, the host computer includes: a fault reporting unit for receiving fault information from the programmable controller; a preset fault range unit for dynamically adjusting the preset fault range according to different production processes and equipment states, and sending the adjusted preset fault range to the programmable controller; a confirmation unit for confirming the faulty servo motor based on the fault information; a return-to-source control unit for performing a return-to-source operation on the faulty servo motor; and a fault reset unit for resetting the fault information and restoring the operation of the servo motor.

[0047] It should be noted that the preset fault range can be dynamically adjusted according to different production processes and equipment statuses to adapt to different production needs and equipment operating conditions, ensuring that the servo system can effectively identify and handle position deviations under various conditions, thereby improving production flexibility and adaptability.

[0048] It should also be noted that the confirmation unit, the return-to-source control unit, and the fault reset unit can realize automatic fault diagnosis and recovery, reduce manual intervention, improve the automation level and operating efficiency of the servo system, and quickly restore the normal operation of the servo motor by performing a return-to-source operation and reset on the faulty motor, reducing downtime and improving production efficiency.

[0049] In this embodiment, the origin point sensor is connected to the programmable controller via an EtherCat bus.

[0050] Specifically, the EtherCat bus has high-speed data transmission capabilities, enabling rapid data exchange. For example, in semiconductor equipment, the origin-point position sensor can quickly transmit the detected rising edge pulse signal to the PLC, ensuring real-time capture and processing of the trigger signal, and improving the system's response speed and control accuracy.

[0051] In this embodiment, the host computer communicates with the programmable controller via the EtherCat bus.

[0052] Specifically, the EtherCat bus supports high-speed data transmission, enabling it to quickly send control commands and parameter settings from the host computer to the PLC, and feed back the PLC's status information and data to the host computer. This allows the position verification system to respond in real time, improving production efficiency and control accuracy.

[0053] In this embodiment, the servo motor is connected to the programmable controller via an EtherCat bus.

[0054] Specifically, the EtherCat bus supports high-speed data transmission, enabling the rapid transfer of large amounts of data between servo motors and PLCs. For example, in semiconductor manufacturing equipment, the position, speed, and status information of servo motors can be transmitted in real time, ensuring that the position verification system can respond promptly.

[0055] In this embodiment, the origin position sensor includes one or both of a proximity switch sensor and a photoelectric sensor.

[0056] It should be noted that proximity switch sensors typically use electromagnetic induction or capacitance changes to detect the proximity of the servo motor; while photoelectric sensors detect the position of the servo motor by blocking or reflecting light, thereby verifying the position of the servo motor.

[0057] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A position verification device for a servo motor, characterized in that, include: Programmable Logic Controller (PLC); A servo motor is communicatively connected to the programmable controller (PLC) and is used to execute control signals issued by the PLC to perform production operations and return from the forward working position to the origin position. The servo motor also sends its current position information to the PLC. The origin position sensor is communicatively connected to the programmable controller and is used to send pulse signals to the programmable controller; The host computer is connected to the programmable controller and is used to receive fault information sent by the programmable controller.

2. The position verification device for a servo motor as set forth in claim 1, wherein The programmable controller includes: a rising edge detection logic unit, configured to read the pulse signal at a preset scan period, capture the rising edge pulse signal in the pulse signal, and mark the rising edge pulse signal as the trigger signal of the origin bit; A position reading logic unit is used to read the current position information of the servo motor synchronized with the trigger signal at a preset scanning cycle; The data processing logic unit is used to compensate the displacement of the servo motor in a preset scanning cycle into the current position information, and to use the compensated current position information as temporary position information. The judgment logic unit is used to determine whether the servo motor has stopped running and returned to the origin position. If the servo motor stops and there is no trigger signal, and the actual position information after the servo motor stops running is less than or equal to the origin position, a fault information is issued. If the servo motor stops and there is no trigger signal, and the actual position information after the servo motor stops running is greater than or equal to the origin position, the servo motor is controlled to perform the next production operation. If the servo motor stops and a trigger signal is fed back, the actual position information after the servo motor stops running is compared with the temporary position information. If the deviation exceeds the preset fault range, a fault information is issued.

3. The servo motor position verification device as described in claim 2, characterized in that, The operating speed range of the servo motor is 1 mm / s to 5 mm / s; The preset scan period ranges from 1ms to 10ms.

4. The servo motor position verification device as described in claim 1, characterized in that, The origin point sensor is connected to the programmable controller via an EtherCat bus. The host computer is connected to the programmable controller via an EtherCat bus. The servo motor is connected to the programmable controller via an EtherCat bus.

5. The servo motor position verification device as described in claim 1, characterized in that, The origin position sensor includes one or both of the following: a proximity switch sensor or a photoelectric sensor.

6. The servo motor position verification device as described in claim 1, characterized in that, The host computer includes: a fault reporting unit, used to receive fault information sent by the programmable controller; The preset fault range unit is used to dynamically adjust the preset fault range according to different production processes and equipment states, and to send the adjusted preset fault range to the programmable controller. The confirmation unit is used to confirm the faulty servo motor based on the fault information. The source return control unit is used to perform a source return operation on the faulty servo motor. The fault reset unit is used to reset the fault information and restore the operation of the servo motor.

7. The servo motor position verification device as described in claim 1, characterized in that, The programmable controller includes Beckhoff programmable controllers.

8. The servo motor position verification device as described in claim 2, characterized in that, The judgment logic unit includes: a confirmation subunit, used to stop the servo motor if the speed information fed back by the servo motor is zero and the duration reaches a set threshold.

9. The servo motor position verification device as described in claim 2, characterized in that, The servo motor has an encoder.

10. The servo motor position verification device as described in claim 9, characterized in that, The position reading logic unit is used to read the output value fed back by the encoder and convert the read output value into the actual position information of the servo motor.

11. The servo motor position verification device as described in claim 9, characterized in that, The encoder includes an absolute encoder or an incremental encoder.

Images