An angle-adjustable electron beam irradiation sample carrier

Abstract

The utility model relates to electron microscope and electron beam processing equipment technical field, concretely relates to a kind of electron beam irradiation sample bearing platform of adjustable angle, including table body and the storage cavity being opened in table body, the top center of table body is rotatably installed with clamping seat, the top of clamping seat is opened with first clamping groove, the groove bottom center of first clamping groove is opened with second clamping groove, and the both opposite outer side walls of clamping seat are inserted with threaded head in screw thread, the upper of clamping seat is placed with placing tray, and the bottom center of placing tray is fixedly installed with clamping head, the utility model is designed with the cooperation of unique clamping seat and placing tray, is positioned and locked by double-layer clamping groove, and the replacement of sample tray can be completed within 10 seconds, more than 5 times higher than traditional screw fixing mode efficiency, the sponge pad in the utility model placing groove can be automatically deformed according to sample shape, provide uniform supporting force, avoid sample damage.

Description

Technical Field

[0001] This utility model relates to the technical field of electron microscopes and electron beam processing equipment, specifically to an adjustable-angle electron beam irradiation sample support stage. Background Technology

[0002] Electron beam irradiation is an important tool in modern materials science, nanotechnology, and biomedical research. In electron microscopy observation and electron beam processing, the sample stage is a key component, and its performance directly affects the accuracy and efficiency of experimental results. Currently, commonly available electron beam irradiation sample stages mainly suffer from the following technical problems: Low sample replacement efficiency: Traditional support stages mostly use screw fixing, and each time the sample is changed, the screws need to be removed, which is cumbersome and time-consuming, seriously affecting work efficiency in scientific research experiments that require frequent sample changes.

[0003] Poor sample adaptability: Different types of samples (such as metal films, biological slices, powder samples, etc.) require different fixation methods, but existing support stages can often only be adapted to a single type of sample and lack versatility.

[0004] Unstable sample fixation: During electron beam irradiation, the sample is prone to displacement due to vibration or electron beam impact, which affects the accuracy of observation and test results. Utility Model Content

[0005] The purpose of this invention is to provide an adjustable-angle electron beam irradiation sample stage, which solves the problems of inconvenient sample replacement, poor adaptability, and insufficient angle adjustment accuracy in the prior art, and realizes fast, accurate, and multifunctional sample carrying and observation.

[0006] To achieve the above objectives, this utility model provides the following technical solution: This utility model provides an adjustable-angle electron beam irradiation sample support stage, including a stage body and a storage cavity formed in the stage body. A snap-fit ​​seat is rotatably installed at the top center of the stage body. A first snap-fit ​​groove is formed at the top of the snap-fit ​​seat, and a second snap-fit ​​groove is formed at the bottom center of the first snap-fit ​​groove. Threaded heads are threaded into the two opposite outer walls of the snap-fit ​​seat. A placement tray is placed above the snap-fit ​​seat, and a snap-fit ​​connector is fixedly installed at the bottom center of the placement tray. The snap-fit ​​connector is adapted to be inserted into the first snap-fit ​​groove and the second snap-fit ​​groove. The two threaded heads are respectively threaded into the two opposite outer walls of the snap-fit ​​connector.

[0007] Furthermore, a motor is vertically fixedly installed at the bottom of the storage cavity, and a reducer is fixedly installed at the top of the storage cavity. The output shaft of the motor is fixedly connected to the rotating shaft through the reducer.

[0008] Furthermore, a dustproof net is embedded in the opening of the storage cavity, and several screws are installed between the dustproof net and the platform.

[0009] Furthermore, threaded holes are provided at the center of the two opposite outer side walls of the connector, and the heads of the two threaded heads are respectively threaded into the corresponding threaded holes.

[0010] Furthermore, the top of the placement tray has a placement groove, in which a sponge pad is embedded, and handles are vertically fixedly installed on both opposite outer walls of the placement tray.

[0011] The technical solution provided by this utility model has the following advantages compared with the known prior art: Compared with the prior art, the present invention has the following significant advantages: Modular quick-change system: Featuring a unique snap-fit ​​design that works with the tray, the sample tray can be replaced in 10 seconds through double-layer slot positioning and threaded head locking, which is more than 5 times more efficient than the traditional screw fixing method.

[0012] Equipped with a variety of dedicated placement trays, such as: TEM-specific tray: compatible with 3mm standard copper mesh, with a hollow center design; SEM bulk sample tray: with conductive adhesive fixing groove; Powder sample tray: Built-in microporous filter; Biological sample tray: integrated cryofixation device; Each tray has a specific placement slot structure, such as: Thin film sample tray: with elastic clamping mechanism; Irregular sample tray: Equipped with adjustable limit blocks; Liquid sample tray: Equipped with a leak-proof sealing ring; Intelligent sample fixation system: The sponge pad inside the placement slot can automatically deform according to the shape of the sample, providing uniform support and preventing sample damage.

[0013] Optimized fixation structures for different sample types: Brittle materials: Low-pressure elastic fixation is used; Conductive sample: Integrated grounding contact; Magnetic sample: equipped with an anti-magnetic interference shielding layer. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the overall structure of the present invention after the tray has been removed and placed. Figure 3 This is a schematic diagram of the tray placement structure of this utility model; Figure 4 This is a schematic cross-sectional view of the back of the platform of this utility model.

[0016] The labels in the diagram represent: 1. Platform; 11. Motor; 12. Reducer; 13. Rotating shaft; 14. Dustproof net; 2. Socket; 21. First slot; 22. Second slot; 23. Threaded head; 3. Place the tray; 31. Snap-fit ​​connector; 32. Handle. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0018] The present invention will be further described below with reference to the embodiments.

[0019] Example 1

[0020] Reference Figure 1-4 This is the first embodiment of the present invention, which discloses an adjustable-angle electron beam irradiation sample support stage, including a stage body 1 and a storage cavity opened in the stage body 1. The stage body 1 is made of high-strength aluminum alloy 6061-T6 and is anodized, and has the following characteristics: Density: 2.7 g / cm³; Tensile strength: 310 MPa; Coefficient of thermal expansion: 23.6 × 10⁻ 6 / ℃; Surface hardness: Vickers hardness ≥150HV (ISO 6507 standard); A locking seat 2 is rotatably mounted at the top center of the platform 1. The locking seat 2 is made of H62 brass and is precision machined. Conductivity: 28% IACS; Wear resistance: coefficient of friction 0.15-0.20; Corrosion resistance: No rust was observed after 96 hours of salt spray testing; The top of the card holder 2 is provided with a first card slot 21, and the center of the bottom of the first card slot 21 is provided with a second card slot 22. The first card slot 21 and the second card slot 22 are: Machining accuracy: ±0.01mm; Surface roughness: Ra 0.8 μm; Fit tolerance: H7 / g6; Both opposite outer walls of the snap-fit ​​seat 2 are threaded with threaded heads 23; Threaded head 23 is made of 304 stainless steel. Tensile strength: ≥515MPa; Thread specification: M4×0.7; Surface treatment: electropolishing; A tray 3 is placed on top of the card slot 2; Tray 3 is made of aerospace-grade magnesium alloy AZ31B. Density: 1.77 g / cm³; Elastic modulus: 45 GPa; Damping performance: 30 times that of aluminum alloy; A snap-fit ​​connector 31 is fixedly installed at the bottom center of the tray 3; Card connector 31: Clearance between the card slot and the card slot: 0.02-0.05mm; Surface nickel plating, thickness 5-8μm; Insertion / removal life: ≥5000 cycles; The card connector 31 is inserted into the first card slot 21 and the second card slot 22 in a matching manner, and the two threaded heads 23 are respectively threaded into the two opposite outer walls of the card connector 31.

[0021] The mating area between the clamp connector 31 and the threaded head 23 is coated with a molybdenum disulfide coating (2-3 μm thick) for cold welding protection in a vacuum environment. The first clamping groove 21 has a depth of 5 mm, and the second clamping groove 22 has a depth of 3 mm, forming a stepped positioning structure.

[0022] Example 2

[0023] Reference Figure 1-4This is the second embodiment of the present invention. The difference between this embodiment and the first embodiment is that a motor 11 is vertically fixedly installed at the bottom of the storage cavity. Motor 11 is a 57 series closed-loop stepper motor. Step angle: 1.8°; Holding torque: 1.2 N·m; Positioning accuracy: ±0.05°; Repeatability: ±0.02°; A speed reducer 12 is fixedly installed on the top of the storage cavity; Reducer 12 adopts a planetary gear structure: Reduction ratio: 10:1; Transmission efficiency: ≥92%; Return gap: ≤5 arcmin; Rated torque: 15 N·m; The output shaft of motor 11 is fixedly connected to the rotating shaft 13 via reducer 12; Rotary shaft 13 is made of bearing steel GCr15. Hardness: HRC60-62; Roundness error: ≤0.005mm; Surface chrome plating, thickness 10-15μm; A dustproof mesh 14 is embedded in the opening of the storage cavity; Dustproof mesh 14 is made of 316L sintered stainless steel mesh. Filtration accuracy: 5μm; Porosity: 35-40%; Temperature range: -200℃~+400℃; Several screws are installed between the dustproof net 14 and the platform 1; Threaded holes are provided at the center positions of the two opposite outer side walls of the snap connector 31; Requirements for threaded hole machining: Tapping accuracy: 6H grade; Thread depth: 5±0.1mm; Verticality: ≤0.02mm; The heads of the two threaded heads 23 are threaded into the corresponding threaded holes respectively. The top of the tray 3 is provided with a placement groove, and a sponge pad is embedded in the placement groove. The sponge pad is made of polyurethane foam. Density: 0.03 g / cm³; Compression set: ≤5%; Radiation resistance: can withstand 10 6 Gy dosage; Handles 32 are vertically fixedly installed on both opposite outer walls of the tray 3. Handle 32 is made of engineering plastic PEEK: Tensile strength: 100 MPa; Heat distortion temperature: 315℃; Vacuum outgassing rate: ≤10⁻ 6 Pa·m³ / s.

[0024] When the operating temperature exceeds 300℃, thread head 23 is replaced with nickel-based alloy 718, which has a high-temperature shear strength ≥600MPa (ASTM B637 standard). The sponge pad is replaced with a ceramic fiber pad, which can withstand temperatures up to 1200℃.

[0025] The remaining structure is the same as that in Example 1.

[0026] Explanation of the experimental procedure for an adjustable-angle electron beam irradiation sample support stage Experimental preparation stage Equipment inspection First, check if the vacuum system of the electron beam irradiation equipment is normal and confirm that the electron optical system has been calibrated. Check the power supply connection of motor 11 and test whether the rotation of the rotating shaft 13 is smooth and without jamming.

[0027] Environmental preparation Clean the lab bench surface and prepare a dust-free operating environment. Remove the dust filter 14 to check its cleanliness, and clean the surface with compressed gas if necessary.

[0028] Sample tray selection Select a dedicated placement tray 3 according to experimental requirements: For TEM thin film samples, a special tray with a 3mm copper mesh holder in the center should be used. For SEM bulk samples, use a special tray with conductive adhesive fixing grooves; For powder samples, use a special tray with a built-in microporous filter.

[0029] Sample loading process Sample fixation Place the sample to be tested into the placement slot of the selected placement tray 3: Thin film sample: Gently place the copper mesh carrying the sample on the sponge pad, and use its elasticity to automatically fix it; For block samples: Apply an appropriate amount of conductive adhesive to the fixing groove and gently press the sample to fix it; Powder sample: Sprinkle the powder evenly on the filter screen and tap the tray gently to remove loose particles.

[0030] tray mounting Hold the handles 32 on both sides of the tray 3, align the snap-fit ​​connector 31 with the first snap-fit ​​groove 21 and the second snap-fit ​​groove 22 of the snap-fit ​​base 2, and insert it vertically downwards until it is fully in place. Rotate the threaded heads 23 on both sides until they feel tight, ensuring that the tray is securely fixed.

[0031] Angle Adjustment Experiment Initial positioning The initial position of motor 11 is set by the control system, so that the rotating shaft 13 returns to zero. The initial imaging effect of the sample under the electron beam is observed.

[0032] Single-axis rotation experiment The motor 11 is set to rotate at a constant speed of 5° / s, and the speed is reduced to 0.5° / s by the reducer 12 and output to the rotating shaft 13. It rotates continuously within the range of 0° to 360°, and electron beam imaging data at each angle are recorded.

[0033] Fixed-point observation experiment Select a specific angle position (such as 0°, 45°, 90°, 135°, etc.), and use the control system to accurately position the device, pausing at each position for 30 seconds to collect data. Verify whether the angle positioning accuracy meets the design target of ±0.05°.

[0034] Dynamic tracking experiment The motor 11 was set to rotate continuously at different speeds (10 rpm, 30 rpm, 50 rpm) to test the stability of electron beam imaging under dynamic conditions and verify whether the radial runout of the rotating shaft 13 was less than 5 μm.

[0035] Sample replacement experiment Quick Replacement Test Record the entire process from the start of disassembly to the completion of the new tray installation: Loosen the threads on both sides of the thread head 23 approximately 2 turns; Hold handle 32 and lift upwards to place tray 3; Replace with a new dedicated placement tray 3; Retighten threaded head 23; Repeat the operation 10 times and calculate the average replacement time.

[0036] Location repeatability test The same tray was repeatedly disassembled and reassembled 5 times in the same position. After each installation, the position coordinates of the sample under the electron beam were recorded, and the position repeatability was calculated.

[0037] Stability test Vacuum environment testing The stage is inserted into the vacuum chamber of the electron beam equipment, and the vacuum is evacuated to 1×10⁻⁻⁻⁻⁴ ... 4 Pa, keep it for 4 hours and then test whether all functions are normal.

[0038] Long-run test The system was run continuously for 24 hours, and the rotational positioning accuracy and sample position stability data were recorded every hour.

[0039] Vibration test Under normal operating conditions, use a vibration tester to measure the vibration amplitude of various parts of the support platform to ensure that it meets the requirements of the electro-optical system.

[0040] Data collection and analysis Electron beam images under various experimental conditions were recorded using a high-resolution CCD camera; The sample position offset was measured using image analysis software. Use an angle measuring instrument to verify the consistency between the actual rotation angle and the set value; Collect data on sample replacement time and ease of operation; The effects of different specialized placement trays on the fixation of various types of samples were analyzed.

[0041] Experimental Precautions When operating the threaded head 23, the force should be moderate to avoid over-tightening and causing damage to the threads; When replacing tray 3, ensure that the connector 31 is fully aligned with the slot before inserting it. Regularly check the cleanliness of the dustproof net 14 and replace it if necessary; Tray 3 should be cleaned and placed between different experiments to prevent cross-contamination of samples; After the high-temperature experiment, the support platform must be allowed to cool to room temperature before proceeding with subsequent operations.

[0042] Performance test data: Sample replacement time test (n=10): TEM tray replacement: 8.5 ± 1.2 seconds; SEM tray replacement: 9.3 ± 1.5 seconds; Powder tray replacement: 11.2 ± 2.0 seconds; High-temperature operating condition test (400℃ / 24h): Radial runout variation of the rotating shaft: ≤0.003mm; Torque attenuation rate during threaded head disassembly: <8%.

[0043] Experimental conclusions Through the above-mentioned system experiments, it was verified that all performance indicators of the adjustable angle electron beam irradiation sample carrier stage meet the design requirements. The sample can be easily replaced and the angle can be precisely adjusted, which can meet the needs of various electron beam irradiation experiments.

[0044] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the protection scope of the technical solutions of the embodiments of this utility model.

Claims

1. An adjustable-angle electron beam irradiation sample support stage, comprising a stage body (1) and a storage cavity formed within the stage body (1), characterized in that, A snap-fit ​​seat (2) is rotatably installed at the top center of the platform (1). A first snap-fit ​​groove (21) is opened at the top of the snap-fit ​​seat (2). A second snap-fit ​​groove (22) is opened at the bottom center of the first snap-fit ​​groove (21). Threaded heads (23) are threaded into the two opposite outer walls of the snap-fit ​​seat (2). A placement tray (3) is placed above the snap-fit ​​seat (2). A snap-fit ​​connector (31) is fixedly installed at the bottom center of the placement tray (3). The snap-fit ​​connector (31) is inserted into the first snap-fit ​​groove (21) and the second snap-fit ​​groove (22) in a matching manner. The two threaded heads (23) are respectively threaded into the two opposite outer walls of the snap-fit ​​connector (31).

2. The adjustable-angle electron beam irradiation sample support stage according to claim 1, characterized in that, A motor (11) is vertically fixedly installed at the bottom of the storage cavity, and a reducer (12) is fixedly installed at the top of the storage cavity. The output shaft of the motor (11) is fixedly connected to the rotating shaft (13) through the reducer (12).

3. The adjustable-angle electron beam irradiation sample support stage according to claim 1, characterized in that, A dustproof net (14) is embedded in the opening of the storage cavity, and several screws are installed between the dustproof net (14) and the platform (1).

4. The adjustable-angle electron beam irradiation sample support stage according to claim 1, characterized in that, The two opposite outer walls of the snap connector (31) are provided with threaded holes, and the heads of the two threaded heads (23) are respectively threaded into the corresponding threaded holes.

5. The adjustable-angle electron beam irradiation sample support stage according to claim 1, characterized in that, The top of the placement tray (3) is provided with a placement groove, and a sponge pad is embedded in the placement groove. The two opposite outer walls of the placement tray (3) are vertically fixed with handles (32).

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