An anti-airflow disturbance mechanism for multi-jet ultrasonic spraying

Abstract

The utility model discloses an anti -air current perturbation mechanism for many spray head ultrasonic wave spraying, including spraying mechanism, and spraying mechanism includes gantry, mounting panel and ultrasonic wave spray head, sets up many groups ultrasonic wave spray head on mounting panel, and ultrasonic wave spray head whole interval array distribution, and ultrasonic wave spray head specifically includes ultrasonic wave spray head body, and sets up power connector, and ultrasonic wave spray head body top sets up liquid inlet connector, and below sets up mist outlet, and ultrasonic wave spray head bottom mist outlet both sides still set up oblique pair of blow -out, and both sides oblique pair of blow -out respectively inwards and obliquely downward to the direction, and after the gas is introduced to the drainage gas connector, and is obliquely downward to the blow -out from oblique pair of blow -out, and the fan -shaped flow guiding of pair of blow -out makes the directionality of mist drop, and the airflow balanced fan -shaped arrangement, and the disturbance between the spray head is suppressed, makes the mist drop form fan -shaped, and controls the deposition track, and the mist drop position and speed are more controlled, and the film layer edge neatness, thickness uniformity are improved.

Description

Technical Field

[0001] This utility model relates to the field of ultrasonic spraying equipment technology, and in particular to an anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying. Background Technology

[0002] With the continuous improvement in the efficiency of perovskite solar cells (PSCs), their large-scale application in the photovoltaic industry is rapidly advancing. To meet the needs of fabricating large-area, highly uniform devices, the research and industrial sectors have developed various solution processing deposition technologies. Among them, ultrasonic spraying, due to its advantages such as simple structure, high speed, strong adaptability, low cost, and high fault tolerance, has gradually become an important candidate process for the fabrication of flexible and large-size perovskite modules. This technology uses ultrasonic waves to drive liquid atomization and uses compressed air or nitrogen to uniformly deposit droplets onto the substrate surface, enabling non-contact, low-loss continuous coating with good scalability and material compatibility.

[0003] However, the widespread application of multi-nozzle ultrasonic spraying equipment still faces a series of key challenges. In particular, the problem of airflow disturbance interference between nozzles is becoming increasingly prominent during the parallel spraying process of multi-nozzle arrays. Since each nozzle requires auxiliary airflow to stably deliver droplets to the substrate, when multiple nozzles are arranged close together, their ejected airflows are prone to cross-interference or vortex structures in space. This leads to droplet trajectory deviation, overlapping or detachment of deposition areas, resulting in uneven film thickness, edge buildup, and inconsistent device performance, severely restricting the stability of large-area film formation in multi-nozzle systems.

[0004] Furthermore, to adapt to different substrate sizes and process requirements, the nozzles need to have a high degree of adjustability to achieve staggered arrangement and spray direction control. However, most existing ultrasonic spraying equipment only adopts a fixed or simplified two-dimensional structure, lacking a precise three-dimensional adjustment mechanism. This makes it difficult to flexibly achieve rapid fine-tuning of the angle, height, and distance between nozzles, limiting its adaptability in complex production line environments. At the same time, existing systems do not effectively control the shape and flow boundary of the disturbed airflow itself, failing to fundamentally eliminate the aerodynamic coupling problem between nozzles.

[0005] Therefore, there is an urgent need to develop an anti-airflow disturbance design scheme for multi-nozzle ultrasonic spraying equipment. Through structural optimization and arrangement strategies, this scheme should effectively suppress airflow interference between adjacent nozzles, stabilize droplet deposition trajectories, and improve film thickness consistency and edge quality without affecting spraying efficiency, providing reliable support for the preparation of large-area perovskite thin films. Simultaneously, the design should possess modularity, three-dimensional adjustability, and low-cost feasibility, making it suitable for large-scale integration and widespread application in industrial production lines. Utility Model Content

[0006] This invention provides an anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying. After the gas is introduced by the gas guide connector, it blows obliquely downward from the inclined air outlet. The fan-shaped guiding effect of the air outlet helps the droplets maintain their directionality, and the airflow is evenly distributed in a fan shape, suppressing disturbance between nozzles, making the droplets form a fan shape, and controlling the deposition trajectory. The position and speed of the droplets are more controlled, improving the neatness of the film edge and the uniformity of the thickness, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: an anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying. It includes a spraying mechanism, which consists of a gantry, a mounting plate, and ultrasonic nozzles; Multiple ultrasonic nozzles are installed on the mounting plate, and the ultrasonic nozzles are distributed in an array with spacing. The ultrasonic nozzle specifically includes an ultrasonic nozzle body, an ultrasonic vibration chamber in the middle of the ultrasonic nozzle body, a power connector, a liquid inlet connector at the top of the ultrasonic nozzle body, and a mist outlet at the bottom. The spraying liquid entering the liquid inlet connector by the liquid supply pump is formed into fine droplets through the ultrasonic vibration chamber and sprayed out from the mist outlet.

[0008] Preferably, the ultrasonic nozzle is provided with inclined blowing ports on both sides of the bottom mist outlet. The inclined blowing ports on both sides face inward and downward, and the cross-section of the blowing port is a long strip. A side gas guide connector is provided at the top of the inclined blowing port. After the gas is introduced by the gas guide connector, it blows downward from the inclined blowing port. A cooling gas connector is integrated on one side of the liquid inlet connector. This connector is connected to an external cooling gas source and guides the cooling gas into the nozzle housing through a confined air passage.

[0009] Preferably, the ultrasonic nozzle is mounted on the mounting plate via a multi-axis slide, realizing a three-dimensional path dynamic control system for the spraying mechanism. The nozzle is mounted on a multi-axis slide with Z-axis lifting function.

[0010] Preferably, multiple independently controllable ultrasonic nozzles are staggered on a three-dimensional adjustable support. The staggered arrangement of adjacent nozzles prevents interference between the airflow from adjacent nozzles. At the same time, the staggered arrangement of the nozzles also forms an airflow channel between adjacent nozzles.

[0011] Preferably, an integrated anti-turbulence hood is set around the spray head array area. The hood adopts an upper closed structure. The hood has directional exhaust ports that connect to the interior at intervals on the top and bottom of each side wall. Multiple exhaust ports on the side together form an exhaust system. The directional exhaust ports are connected by 12 air exhaust distributors and then the waste liquid is treated in a closed loop through off-site waste recycling equipment.

[0012] Preferably, the nozzle of this device maintains a working distance of 10–15 cm between itself and the substrate. This working distance, combined with the airflow channel, provides greater tolerance to external vibrations and substrate flatness.

[0013] Preferably, a row of linear high-brightness auxiliary light strips is designed on the rear side of the nozzle misting area to enhance the visual contrast of the mist droplets in the air, thereby enabling visual observation of the mist droplets and auxiliary identification of defects.

[0014] Preferably, the nozzle system consists of multiple independent units, each unit including: nozzle body, solenoid valve, speed control valve, pressure gauge and connecting pipeline, and connected to the main liquid supply pressure system through a standardized interface; The entire machine adopts a parallel liquid supply structure, with all nozzles receiving liquid from a unified total pressure channel. The liquid supply pressure of each channel is precisely controlled by a speed control valve and a pressure gauge.

[0015] Compared with the prior art, the beneficial effects of this utility model are: 1. This equipment, through the overall precision coordination and optimization of the transmission mechanism, spraying mechanism, and other systems, combined with the array of ultrasonic nozzles, has strong vibration adaptability during the spraying process and achieves large-area uniform spraying.

[0016] 2. Spraying environment stability and droplet control structure: An anti-turbulence hood is set around the nozzle area, and a directional exhaust port is opened in the hood to stabilize the local airflow, prevent interference between nozzles, reduce the diffusion pollution of atomized substances to the environment, and improve the cleanliness and safety of spraying.

[0017] 3. After the gas is introduced through the gas inlet, it blows downwards at an angle from the inclined air inlet. The fan-shaped airflow of the air inlet helps the droplets maintain their directionality, and the airflow is evenly distributed in a fan shape. This suppresses disturbances between nozzles, causes the droplets to form a fan shape, and controls the deposition trajectory. The position and velocity of the droplets are more controlled, improving the neatness of the film edge and the uniformity of the thickness.

[0018] 4. The nozzle of this equipment maintains a working distance of 10–15 cm between itself and the substrate. Compared with the gap of less than 100 μm in slit coating, it has a higher tolerance for external vibration and substrate flatness, reduces the dependence on cleanrooms and high-precision platforms, thereby reducing the cost of line construction and improving deployment flexibility.

[0019] 5. Multiple independently controllable ultrasonic nozzles are staggered on a three-dimensional adjustable support. The airflow between adjacent nozzles does not interfere with each other. At the same time, the staggered layout of the nozzles also forms an airflow channel between adjacent nozzles, preventing all fan-shaped droplets from forming a barrier on one surface, and facilitating the extraction of subsequent spraying exhaust gas from the gap between adjacent nozzles.

[0020] 6. A row of linear high-brightness auxiliary light strips is installed behind the misting area of ​​the nozzle (in the direction of spray) to enhance the visual contrast of the droplets in the air, realize the visual observation of the droplets and the auxiliary identification of defects. The light strip uses short-wave blue light to enhance the visual contrast of the droplets, has a pulse dimming function synchronized with the spray frequency, supports dynamic spray freezing capture, and is structurally integrated with the slide table and has splash-proof and corrosion-proof performance. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the nozzle mounting structure of this utility model; Figure 3 This is a schematic diagram of the nozzle structure of this utility model; Figure 4 This is a side view of the nozzle structure of this utility model; Figure 5 This is a schematic diagram of the independent liquid supply structure of the nozzle of this utility model; Figure 6 for Figure 2 A magnified structural diagram at point A; Figure 7 This is a schematic diagram of the nozzle height misalignment structure of this utility model; Figure 8 This is a schematic diagram of the anti-turbulence fairing structure of this utility model; Figure 9 This is a schematic diagram of the nozzle system structure of this utility model.

[0022] Explanation of reference numerals in the attached drawings: 9. Gantry frame; 10. Mounting plate; 11. Nozzle; 1101. Ultrasonic nozzle body; 1102. Power connector; 1103. Liquid inlet connector; 1104. Mist outlet; 1105. Inclined cross-blowing nozzle; 1106. Side gas diversion connector; 1107. Cooling gas connector; 1108. Opening; 12. Multi-axis slide; 1201. Spiral fine-tuning knob; 13. Anti-turbulence shroud; 1301. Directional exhaust port; 1302. 12-way air diverter; 14. LED strip; 15. Solenoid valve; 16. Speed ​​control valve; 17. Pressure gauge. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Example 1, please refer to Figures 1-2 This utility model provides an anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying. The system includes a spraying mechanism, which comprises a gantry 9, a mounting plate 10, and a spray nozzle 11. The gantry 9 is arranged along the X-axis and is used to raise the spraying mechanism to a certain height, so that the moving mechanism passes under the gantry 9 and moves the substrate and the perovskite cell substrate under the spraying mechanism for spraying.

[0025] Multiple sets of nozzles 11 are installed on the mounting plate 10. The nozzles 11 are arranged in an array with spacing between them. The specific number and spacing can be flexibly set according to the needs of the substrate. The nozzles 11 are ultrasonic nozzles. The substrate on the spraying platform 2 is driven backward at a constant speed by the transmission mechanism. When it passes the set position below the spraying mechanism, the positioning sensor recognizes that it has reached the position, and the ultrasonic nozzles 11 start spraying. Customized nozzles (single spraying width ≥ 15cm) are used, and a multi-nozzle array structure is adopted to support the fabrication of large-area components of 1m and above. This enables large-area uniform spraying in one go, avoiding the recrystallization phenomenon of film layer caused by repeated spraying, and adapting to the large-area film formation requirements of perovskite solar cells.

[0026] This equipment utilizes a highly optimized system with precise coordination of the transmission mechanism and spraying mechanism, combined with an array of ultrasonic nozzles, resulting in strong vibration adaptability during the spraying process and enabling large-area, uniform, and efficient spraying.

[0027] Please see Figures 3-5 As an embodiment of this utility model, the ultrasonic nozzle 11 specifically includes an ultrasonic nozzle body 1101. An ultrasonic vibration cavity is provided in the middle of the ultrasonic nozzle body 1101, and a power connector 1102 is provided to realize the ultrasonic vibration of the ultrasonic nozzle 11. A liquid inlet connector 1103 is provided at the top of the ultrasonic nozzle body 1101. The liquid inlet connector 1103 is used for adding the spraying liquid and is connected to an external liquid supply pump. The liquid supply pump supplies liquid independently and is controlled independently by an external controller. A mist outlet 1104 is provided at the bottom. The spraying liquid entering the liquid inlet connector 1103 of the liquid supply pump is formed into fine mist droplets through the ultrasonic vibration cavity and sprayed out from the mist outlet 1104.

[0028] The ultrasonic nozzle 11 atomizes the liquid into micron-sized fine droplets. However, these droplets are lightweight and have low inertia, making them easily deflected by external airflow disturbances. To address this, inclined air outlets 1105 are provided on both sides of the bottom outlet of the ultrasonic nozzle. These inclined air outlets 1105 face inward and downward at an angle, and their cross-sections are elongated strips. A side-guided gas connector 1106 is provided on the upper part of the inclined air outlet 1105. After the gas is introduced by the gas connector 1106, it is blown downward at an angle from the inclined air outlet 1105. The fan-shaped guiding effect of the air outlets helps the droplets maintain their directionality, ensuring a balanced fan-shaped airflow distribution. This suppresses disturbances between nozzles, allowing the droplets to form a fan shape and controlling their deposition trajectory. During the droplet descent within a certain working interval (10–15 cm), their position and velocity are more controlled, improving the edge neatness and thickness uniformity of the film layer.

[0029] A cooling gas connector 1107 is integrated on one side of the liquid inlet connector 1103. This connector is connected to an external cooling gas source and guides the cooling gas into the nozzle housing through a constrained air passage. The constrained air passage is directly cast into the housing, allowing the cooling gas to flow along a predetermined path inside the nozzle, achieving localized cooling of the ultrasonic atomizer and the liquid supply pipeline. The cooling gas exits through the air passage from the openings 1108 on both sides of the nozzle at the bottom of the nozzle, forming a stable airflow path that does not interfere with spraying and avoids high temperatures affecting liquid stability, effectively extending the atomizer's service life and ensuring temperature control stability and film formation consistency during long-term spraying.

[0030] Please see Figure 6 As an embodiment of this utility model, the ultrasonic nozzle 11 is mounted on the mounting plate 10 via a multi-axis slide 12 to realize a three-dimensional path dynamic control system for the spraying mechanism: the nozzle 11 is mounted on a multi-axis slide 12 with Z-axis lifting function, and combined with an intelligent trajectory planning module, it supports dynamic adjustment of spraying height and angle according to the difference in substrate thickness or solution characteristics (such as viscosity), thereby improving film uniformity and edge consistency.

[0031] The multi-axis slide table 12 in this invention adopts a modular design, integrating adjustment components for fine-tuning in the X, Y, and Z axes. Specifically, the slide table consists of three sets of orthogonally superimposed linear guide rails and adjustment seats, with independent helical fine-tuning knobs 1201 for each of the X, Y, and Z axes. By rotating the corresponding fine-tuning knob, the lead screw can be driven to move the platform precisely linearly along that axis. Each axial slider is equipped with a limit and locking structure to ensure accurate positioning and stability after adjustment. The modules are connected by dovetail grooves or guide rail slider plug-in methods, achieving high-precision fit and quick assembly / disassembly. This facilitates maintenance and replacement, and allows for flexible combination and adjustment of the relative position of the nozzle and substrate according to process requirements, improving the overall adaptability and operational accuracy of the machine.

[0032] The intelligent trajectory planning module includes a host computer control system running on the Windows platform that is配套 with the spraying equipment. The core control logic is written in C# to achieve precise coordinated control of the multi-axis slide platform and the spraying process. This control system mainly includes the following key functional modules: Graphical human-machine interface (HMI): The system has a visual process setting interface. Users can set spraying parameters (such as trajectory path, spraying speed, nozzle power, air pressure and flow rate, etc.) through the host computer, support process recipe calling, parameter saving and process monitoring. The operation is simple and flexible. These are well-known technologies and will not be described in detail.

[0033] Multi-axis precision motion control: The C# control program is linked with the motion control card through a standard industrial bus protocol (such as Modbus or EtherCAT) to achieve position, speed and synchronous operation control of the X / Y / Z axis slide tables. The system supports micron-level positioning accuracy to ensure the trajectory consistency and stability of the nozzle during high-speed operation over a large area. These are well-known technologies and will not be described in detail.

[0034] System expansion and remote access capabilities: The platform reserves a variety of communication interfaces (serial port, Ethernet, IO expansion port, etc.), supports docking with the MES system or the host computer network, and can achieve remote task distribution, process monitoring, data collection and warning upload. At the same time, it has the integration ability with external modules such as vision detection systems and environmental sensors, providing system support for subsequent online detection, AI image recognition and automatic closed-loop adjustment. These are well-known technologies and will not be described in detail.

[0035] Multi-nozzle coordinated one-pass forming, with a spraying speed of ≥50 cm / s, much higher than slit coating (2–5 cm / s) and traditional multi-pass spraying (about 10 cm / s), significantly improving the production line rhythm, meeting the requirements of high-speed continuous production. One-pass coverage deposition effectively avoids the problem of film recrystallization caused by traditional multi-pass spraying, and adapts to the rapid preparation needs of large-area components.

[0036] Please refer to Figure 7 , as an embodiment of the present utility model, multiple independently controllable ultrasonic nozzles are arranged in a staggered manner on a three-dimensional adjustable bracket. The adjacent nozzles are staggered, that is, the heights of adjacent nozzles in the z-axis direction are different, and the front and rear positions of adjacent nozzles in the Y-axis direction are错开, so that the counter-blowing airflows of adjacent nozzles do not interfere with each other. At the same time, the staggered layout structure of the nozzles also forms an air flow channel between the adjacent nozzles, avoiding all fan-shaped droplets from forming a barrier on one surface, and facilitating the subsequent extraction of spraying waste gas from the gaps between adjacent nozzles.

[0037] This structure features directional air nozzles on both sides of each nozzle, ejecting a tilted, expanding fan-shaped airflow. This airflow is then amplified by staggered ultrasonic nozzles, creating multiple symmetrical, interleaved low-turbulence airflow channels beneath the nozzle array. These channels flow stably along the substrate, either parallel or slightly inclined, providing a stable deposition environment for the droplets.

[0038] Synergistic mechanism with ultrasonic atomization: In ultrasonic spraying, droplets are small in size and easily disturbed. The counter-blowing structure stabilizes the droplet movement path by guiding the airflow, reducing the influence of external disturbances and improving deposition accuracy and film uniformity. On the other hand, it alleviates the cross-interference of airflow between multiple nozzles and avoids droplet deviation, convergence, or backflow.

[0039] Please see Figure 8 As an embodiment of this utility model, an integrated anti-turbulence hood 13 is set around the spray head array area. The hood adopts an upper closed structure. This hood design can effectively isolate the turbulent airflow around the atomization area during the spraying process.

[0040] The hood has directional exhaust ports 1301 at intervals at the bottom of each side wall, which connect to the interior. Multiple exhaust ports on the sides together form an exhaust system. The directional exhaust ports 1301 are connected by a 12-way exhaust distributor 1302 and then the waste liquid is treated in a closed loop through an off-site waste recycling device. This creates a stable negative pressure airflow field inside the hood, and the exhaust gas is first guided to the sides to avoid interfering with the interior, causing airflow turbulence, affecting the spraying, and enhancing the efficiency of synchronous exhaust gas extraction.

[0041] A single exhaust port can easily lead to dead zones or airflow stagnation areas inside the enclosure, especially causing localized accumulation during spraying. This design utilizes multi-point dispersed air extraction, particularly the directional exhaust ports around the perimeter, to effectively break up eddies and accumulation, ensuring rapid removal of solvent droplets. The precise orientation of each exhaust port ensures that the internal airflow flows orderly from the spray source outwards, effectively suppressing the overflow of solvent and particulate matter towards the enclosure openings, thus improving environmental friendliness and safety.

[0042] The side exhaust vents can be flexibly configured in terms of the number and airflow to open, depending on the substrate size and spraying method, enhancing adaptability and modular expansion capabilities. They guide auxiliary airflow during the spraying process (including nozzle-driven airflow and surrounding diversion airflow) to exit in an orderly manner along a predetermined path, avoiding the formation of vortices or backflow zones inside the enclosure.

[0043] The anti-turbulence hood and the nozzle array form a semi-enclosed space. By setting directional exhaust ports 1301 on the side, the opposing airflows generated by the multiple nozzles 11 do not interfere with each other. Instead, they are guided within the hood to be rapidly discharged towards the side exhaust ports, effectively controlling the directionality and laminar flow of the airflow. This not only improves the stability of the overall airflow field but also significantly enhances the controllability of the droplet deposition path, suppresses random drift, scattering, and convergence of droplets in the spraying area, and improves deposition efficiency and film uniformity.

[0044] Meanwhile, the structure has a pollution control function, which can reduce the diffusion of atomized materials in the working environment, reduce the impact of organic solvent or precursor residues on operators and equipment, and further improve the safety and cleanliness of the spraying process.

[0045] Please see Figure 7 As one embodiment of this utility model, the nozzle of this device maintains a working distance of 10–15 cm from the substrate.

[0046] For spray widths exceeding 15cm, airflow balance must be considered: When a single nozzle has a spray width ≥15cm, the droplet settling path is long, the coverage area is large, and the sensitivity to edge disturbances is enhanced. When multiple nozzles work together, airflow interference and droplet offset are significantly aggravated. Without a reasonable airflow guiding structure, problems such as insufficient edge film thickness and central interference bands can easily occur, seriously affecting film consistency and film quality. When multiple large nozzles are working, the superposition effect of airflow below them is stronger. Without a counter-blowing structure to guide the airflow, "droplet offset zones" or "central film interference bands" will appear between nozzles. The requirements for high-consistency film formation are increased: Perovskite solar cells have extremely high requirements for large-area uniformity, density, and edge integrity. Without good airflow management, a width of 15cm+ can easily affect device performance.

[0047] Therefore, integrating a symmetrical counter-blowing airflow channel structure into a spray nozzle structure with a width of 15cm or more has become a key measure to improve spraying consistency, achieve controllable deposition, and expand the engineering of equipment. Compared with the structure of slit coating blades with a gap of less than 100μm, maintaining a working distance of 10–15 cm, combined with the counter-blowing airflow channel, has a higher tolerance for external vibration and substrate flatness, reduces the dependence on cleanrooms and high-precision platforms, thereby reducing line construction costs and improving deployment flexibility.

[0048] Integrating symmetrical counter-blowing airflow channels into nozzle structures with widths of 15cm and above helps stabilize airflow guidance and atomized particle deposition paths while maintaining a nozzle-substrate distance of 10–15cm. Compared to the 100μm-level blade gap in slot coating, this larger gap significantly reduces the equipment's sensitivity to minor substrate height variations or vibrations. On one hand, the counter-blowing airflow forms a controllable and stable airflow channel below the nozzle, enhancing droplet alignment and orientation before deposition. On the other hand, this gap avoids uneven film thickness or nozzle damage caused by substrate unevenness or local deformation, thereby improving tolerance to production environment disturbances and substrate dimensional deviations, meeting the requirements for stable film formation and industrialization under more complex operating conditions.

[0049] To enhance the visualization and control of the spraying process and the assessment of film uniformity, a row of linear high-brightness auxiliary light strips was installed behind the nozzle's misting area (in the direction of spraying) to enhance the visual contrast of the droplets in the air, enabling visual observation of the droplets and auxiliary identification of defects.

[0050] The light strip uses short-wave blue light to enhance the visual contrast of the mist droplets, has a pulse dimming function synchronized with the spray frequency, supports dynamic spray freezing and capture, and is structurally integrated with the slide table and has splash-proof and corrosion-resistant properties.

[0051] Please see Figure 6 As an embodiment of this utility model, in order to improve the visualization control and film uniformity assessment during the spraying process, a row of linear high-brightness auxiliary light strips 14 are installed behind the misting area of ​​the nozzle (in the spraying direction) to enhance the visual contrast of the droplets in the air and realize the visualization observation of the droplets and the auxiliary identification of defects.

[0052] The light strip 14 uses short-wave blue light to enhance the visual contrast of the mist droplets, has a pulse dimming function synchronized with the spray frequency, supports dynamic spray freezing and capture, and is structurally integrated with the slide table and has splash-proof and corrosion-proof properties.

[0053] Please see Figure 6 , Figure 9 As one embodiment of this utility model, the overall structure adopts a modular nozzle bracket and liquid supply component design, which can flexibly increase or decrease the number of nozzles according to the substrate size and production needs, realize the rapid expansion of the spraying width and enhance the equipment adaptability, and meet the preparation requirements of perovskite components of different specifications.

[0054] The nozzle system consists of multiple independent units, each including: a nozzle body, a solenoid valve 15, a speed control valve 16, a pressure gauge 17, and connecting pipelines, and is connected to the main liquid supply system through a standardized interface. This design realizes the modularization and integration of the functions of each nozzle, facilitating configuration and maintenance as needed.

[0055] Each nozzle assembly can be installed or removed independently as a "plug-and-play" module, facilitating adjustments to the number of nozzles based on the substrate width. Designed as a standardized modular unit, each nozzle assembly is mounted on a slide rail or mounting base of the spraying platform, achieving "plug-and-play" functionality through a quick-release structure. The nozzle bottom features positioning pins and limiting holes, automatically achieving precise alignment after insertion into the mounting slot; it also incorporates spring locks or side screw clamping devices for quick locking and removal. The air and hydraulic interfaces utilize self-sealing connectors, automatically connecting without leakage upon insertion, allowing for nozzle replacement without repeated calibration. This simplifies maintenance and adjustments to the nozzle array configuration, significantly improving system modularity and operational efficiency.

[0056] The module achieves precise alignment through mechanical limiting structures such as positioning pins and guide rail grooves, ensuring uniform and consistent overlapping areas of spraying; the combination of solenoid valves and speed control valves provides independent flow and on / off control for each nozzle, avoiding uneven liquid supply or gas-liquid mismatch caused by multiple nozzles working together.

[0057] Width Expansion and Precision Guarantee Mechanism: The whole machine adopts a parallel liquid supply structure, with all nozzles diverting from a unified total pressure channel. The liquid supply pressure of each channel is precisely controlled by speed control valves and pressure gauges. When increasing or decreasing the number of nozzles, there is no need to rebuild the liquid supply system, which can quickly expand the spraying area.

[0058] Even during rapid line changes or cross-specification component switching, configuration updates can be completed simply by plugging and unplugging standardized interfaces and setting control parameters, resulting in fast response and high system stability. The modules are arranged in a compact manner to minimize the "blind spots" between nozzles, enabling wide-area, one-pass deposition and meeting the continuous spraying needs from small-sized solar cells to large-area components.

[0059] This structure is particularly suitable for the fabrication of perovskite solar cells in various specifications. Users can flexibly configure the nozzle array according to different substrate widths (such as 156 mm, 210 mm, 500 mm or more than 1 m) to achieve a high-efficiency, high-uniformity and high-consistency spraying deposition process.

[0060] Working principle: The transmission mechanism drives the spraying base 2 to the processing station along the Y-axis. The substrate on the spraying base 2 moves backward at a constant speed through the transmission mechanism. When it passes the set position below the spraying mechanism, the position sensor recognizes that it has reached the position, and the ultrasonic nozzle performs the spraying work. The array structure with multiple nozzles 11 supports the fabrication of large-area modules of 1m and above, enabling large-area uniform spraying in one go, avoiding the recrystallization phenomenon of film layer caused by repeated spraying, and adapting to the large-area film formation requirements of perovskite solar cells. During spraying, the ultrasonic nozzle 11 has two inclined air outlets 1105 on both sides of the bottom mist outlet 1104 facing inward and downward towards the opposing airflow. The fan-shaped guiding effect of the air outlets helps the droplets maintain their directionality, and the airflow is evenly arranged in a fan shape, suppressing disturbances between nozzles and allowing the droplets to form a fan shape. During spraying, the nozzle 11 is adjusted to a staggered layout, forming an airflow channel between adjacent nozzles, avoiding the formation of a barrier on one side by all the fan-shaped droplets, and facilitating the extraction of subsequent spraying exhaust gas from the gap between adjacent nozzles. The nozzle 11 is mounted on a multi-axis slide 12 with Z-axis lifting function. Combined with the intelligent trajectory planning module, it supports dynamic adjustment of spraying height and angle according to the difference in substrate thickness or solution characteristics (such as viscosity), thereby improving film uniformity and edge consistency. The whole machine structure adopts a modular nozzle support and liquid supply component design, which can flexibly increase or decrease the number of nozzles according to the substrate size and production needs, so as to realize the rapid expansion of spraying width and enhance equipment adaptability, and meet the preparation requirements of perovskite components of different specifications. After the coating is completed, the transmission mechanism uses the Y-axis direction to return the perovskite solar cell substrate to the loading and unloading station.

[0061] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A mechanism for preventing airflow disturbance in multi-nozzle ultrasonic spraying, characterized in that, It includes a spraying mechanism, which includes a gantry (9), a mounting plate (10), and an ultrasonic nozzle (11). Multiple ultrasonic nozzles (11) are installed on the mounting plate (10), and the ultrasonic nozzles (11) are distributed in an overall spaced array. The ultrasonic nozzle (11) specifically includes an ultrasonic nozzle body (1101), an ultrasonic vibration cavity is provided in the middle of the ultrasonic nozzle body (1101), and a power connector (1102) is provided. A liquid inlet connector (1103) is provided at the top of the ultrasonic nozzle body (1101), and a mist outlet (1104) is provided at the bottom. The spraying liquid that enters the liquid inlet connector (1103) through the liquid supply pump is formed into fine mist droplets through the ultrasonic vibration cavity and sprayed out from the mist outlet (1104).

2. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, The ultrasonic nozzle (11) is provided with inclined air outlets (1105) on both sides of the bottom mist outlet (1104). The inclined air outlets (1105) on both sides face inward and downward, and the cross-section of the air outlet is a long strip. A side gas guide connector (1106) is provided on the upper part of the inclined air outlet (1105). After the gas is introduced by the gas guide connector (1106), it blows downward from the inclined air outlet (1105). A cooling gas connector (1107) is integrated on one side of the liquid inlet connector (1103). This connector is connected to an external cooling gas source and introduces the cooling gas into the nozzle housing through a confined air passage.

3. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, The ultrasonic nozzle (11) is mounted on the mounting plate (10) via a multi-axis slide (12) to realize the three-dimensional path dynamic control system of the spraying mechanism. The nozzle (11) is mounted on the multi-axis slide (12) with Z-axis lifting function.

4. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, Multiple independently controllable ultrasonic nozzles (11) are staggered on a three-dimensional adjustable support. The staggered arrangement of adjacent nozzles prevents interference between the airflow of adjacent nozzles. At the same time, the staggered arrangement of the nozzles also forms an airflow channel between adjacent nozzles.

5. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, An integrated anti-turbulence hood (13) is set around the area of ​​the spray head array. The hood adopts an upper closed structure. The hood has directional exhaust ports (1301) that connect to the interior at intervals on the top and bottom of each side wall. Multiple exhaust ports on the side together form an exhaust system. The directional exhaust ports (1301) are connected by a 12-way air exhaust distributor (1302) and then the waste liquid is treated in a closed loop through an off-site waste recycling device.

6. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, This device maintains a working distance of 10–15 cm between the nozzle and the substrate. Combined with the opposing airflow channel, it has a higher tolerance for external vibration and substrate flatness.

7. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, A row of linear high-brightness auxiliary light strips (14) is designed on the rear side of the nozzle mist area to enhance the visual contrast of the mist droplets in the air and realize the visual observation of the mist droplets and the auxiliary identification of defects.

8. The anti-airflow disturbance mechanism for multi-nozzle ultrasonic spraying according to claim 1, characterized in that, The nozzle system consists of multiple independent units, each of which includes: nozzle body, solenoid valve (15), speed control valve (16), pressure gauge (17) and connecting pipeline, and is connected to the main liquid supply pressure system through a standardized interface; The whole machine adopts a parallel liquid supply structure. All nozzles are diverted from a unified total pressure channel, and the liquid supply pressure of each channel is finely controlled by a speed regulating valve (16) and a pressure gauge (17).

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