A material cleaning device

Abstract

The utility model relates to the field of semiconductor equipment manufacturing especially relates to a material powder cleaning device. Including base, be provided with cleaning assembly and carrier on the base, the cleaning assembly has the cleaning end, the cleaning end can abut with material and carry out relative motion to clean material, the cleaning assembly includes first cleaning mechanism and second cleaning mechanism, correspond to the outer surface of the material in the state of carrying respectively and the bottom surface of contact with the carrier, carrier, the material runs in the station corresponding first cleaning mechanism and second cleaning mechanism, and has the clamping jaw that can fix material in the carrying end. The device is through the second cleaning mechanism and material lifting assembly cooperation, in the carrier operation process, the material is adsorbed and lifts to make its bottom surface expose, and the vertical brush is completed cleaning.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment manufacturing, and in particular to a material cleaning device. Background Technology

[0002] In the manufacturing process of precision materials such as inductors, surface dust directly affects product performance and yield. Traditional dust removal devices can usually only clean the exposed surfaces of the material (such as the top and sides), while the bottom surface of the material, due to its close contact with the carrier, forms a cleaning blind spot, requiring secondary manual processing or an additional flipping process, resulting in low efficiency and increased costs. Utility Model Content

[0003] The purpose of this invention is to provide a material cleaning device to solve the problem of difficult operation of cleaning the bottom surface of an inductor in the prior art.

[0004] The technical solution of this utility model is: a material cleaning device, including a base, on which a cleaning component and a carrier are provided; the cleaning component has a cleaning end, which can come into contact with the material and move relative to it, thereby cleaning the material; the cleaning component includes a first cleaning mechanism and a second cleaning mechanism, which respectively clean the outer surface of the material in the mounted state and the bottom surface in contact with the carrier.

[0005] The carrier carries materials and operates in the workstations corresponding to the first and second cleaning mechanisms, and has grippers that can fix the materials to the carrying end.

[0006] Preferably, the cooperating vehicle is provided with a vehicle driving mechanism, the vehicle driving mechanism includes a vehicle guide rail arranged along a first direction, the vehicle is arranged on the vehicle guide rail and runs along the first direction under the drive of the vehicle driver.

[0007] Preferably, a material lifting component is provided in conjunction with the second cleaning mechanism. The material lifting component is used to lift and separate the material from the carrier, so that the bottom surface where the material is connected to the carrier is exposed.

[0008] The material lifting assembly includes a lifting base connected to a base, and a lifting device is slidably disposed on the lifting base along a first direction. The lifting device can connect to the top of the material and lift the material to drive the material to run along the first direction.

[0009] Preferably, the lifting device includes a magnetic component and a spacer disposed on the lifting base. The magnetic component can attract materials through the spacer, and the magnetic component can move toward or away from the spacer under the drive of the magnetic actuator.

[0010] Preferably, the lifter is connected to a lifting drive mechanism, the lifting drive mechanism including a lifting guide rail fixed on the lifting base along a first direction, the lifter cooperating with the lifting guide rail and sliding along the lifting guide rail under the drive of the lifting driver.

[0011] Preferably, the cleaning component is provided with an adsorption mechanism, which includes a negative pressure generator connected to an adsorption tube. The end of the adsorption tube away from the negative pressure generator is provided with the first cleaning mechanism and the second cleaning mechanism.

[0012] Preferably, the first cleaning mechanism includes a cleaning mounting base fixed on a base, a cleaning driver is provided on the cleaning mounting base, a brush is connected to the actuating end of the cleaning driver, the carrier carries the material and abuts against the cleaning end, and the cleaning end moves relative to the material under the drive of the cleaning driver.

[0013] Preferably, a portion of the first cleaning mechanism is inclined relative to the material, such that the cleaning end corresponds to the step of the material.

[0014] Preferably, the cleaning end is made of ceramic fiber material, and part or all of the cleaning end forms a conical structure so that it does not come into direct contact with the material during the cleaning action.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] This device, through the coordinated action of the second cleaning mechanism and the material lifting component, adsorbs and lifts the material during the carrier's operation, exposing its bottom surface, where it is cleaned by vertical brushes. Simultaneously, in conjunction with the multi-station first cleaning mechanism, the entire material, its sides, and top are cleaned sequentially, achieving fully automated, all-around powder removal of the material's outer and bottom surfaces in a single pass, significantly improving efficiency. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0018] Figure 1 This is a top view of the material cleaning device described in this utility model;

[0019] Figure 2 This is a first-view structural diagram of the material cleaning device described in this utility model;

[0020] Figure 3 This is a second-view structural diagram of the material cleaning device described in this utility model;

[0021] Figure 4 This is a structural diagram of the first cleaning mechanism of this utility model;

[0022] Figure 5This is a structural diagram of the material lifting component described in this utility model;

[0023] Figure 6 This is a structural diagram of the lifter described in this utility model;

[0024] Figure 7 This is a schematic diagram of the material cleaning step at the cleaning end of this utility model;

[0025] The components are: 1. Base, 2. Carrier, 3. Carrier drive mechanism, 31. Carrier guide rail, 32. Carrier driver, 4. First cleaning mechanism, 41. Cleaning mounting base, 42. Cleaning driver, 43. Cleaning end, 5. Second cleaning mechanism, 6. Material lifting assembly, 61. Lifting base, 62. Lifter, 621. Magnetic component, 622. Spacer, 623. Magnetic driver, 63. Lifting drive mechanism, 631. Lifting guide rail, 632. Lifting driver, 7. Adsorption mechanism, 8. Feeding mechanism. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to specific embodiments:

[0027] like Figure 1 - Figure 3 As shown, a material cleaning device is used to clean dust from manufactured materials (specifically, inductors in this application). It includes a base 1, on which a cleaning component and a carrier 2 are mounted. The cleaning component has a cleaning end 43, which can contact and move relative to the material, thereby removing dust from the material's surface. In practical applications, the bottom surface of the material, which is in contact with the carrier 2, cannot be directly cleaned. Therefore, the cleaning component in this application includes a first cleaning mechanism 4 and a second cleaning mechanism 5, respectively cleaning the outer surface of the material when it is mounted and separately cleaning the bottom surface of the material in contact with the carrier 2.

[0028] Specifically, the material is placed into the carrier 2 via the feeding mechanism 8. The carrier 2 carries the material and runs along the first direction to the workstation corresponding to the first cleaning mechanism 4 and the second cleaning mechanism 5. It is equipped with grippers capable of fixing the material at the carrying end. A carrier drive mechanism 3 is provided in conjunction with the carrier 2. The carrier drive mechanism 3 includes a carrier guide rail 31 arranged along the first direction. The carrier 2 is mounted on the carrier guide rail 31 and runs along the first direction under the drive of the carrier driver 32. In this embodiment, the carrier driver 32 consists of a motor and a lead screw.

[0029] The first cleaning mechanism 4 is configured in multiple parts, each used for cleaning the material as a whole, cleaning the two sides, and cleaning the top, such as... Figure 4As shown, any first cleaning mechanism 4 includes a cleaning mounting base 41 fixed on the base 1. A cleaning actuator 42 is mounted on the cleaning mounting base 41, and the actuating end of the cleaning actuator 42 is connected to a brush that is set as a cleaning end 43. When the carrier 2 carries material and stops at the workstation corresponding to the first cleaning mechanism 4, the cleaning actuator 42 drives the cleaning end 43 to rotate, thereby cleaning the material through relative movement with the material. Depending on the different installation positions and angles of the cleaning actuator 42 and the cleaning mounting base 41, the corresponding first cleaning mechanism 4 can clean the entire material, its sides, and its top.

[0030] The second cleaning mechanism 5 is located downstream of the first cleaning mechanism 4 in the first direction and includes brushes arranged vertically. A material lifting assembly 6 is provided in conjunction with the second cleaning mechanism 5. The material lifting assembly 6 is used to lift and separate the material from the carrier 2, exposing the bottom surface of the material connected to the carrier 2. Figure 5 and Figure 6 As shown, the material lifting assembly 6 includes a lifting base 61 fixed to the base 1. A lifting device 62 is provided on the lifting base 61. The lifting device 62 can connect to the top of the material and lift the material. Under the drive of the lifting drive mechanism 63, the material is driven to run in the first direction, so that the bottom of the material slides over the second cleaning mechanism 5, thereby cleaning the bottom.

[0031] The lifting drive mechanism 63 includes a lifting guide rail 631 fixed on the lifting base 61 along a first direction. The lifting device 62 cooperates with the lifting guide rail 631 and slides along the lifting guide rail 631 under the drive of the lifting driver 632. In this embodiment, the lifting driver 632 consists of a motor and a lead screw.

[0032] In this embodiment, the lifter 62 includes a magnetic component 621 and a spacer 622 disposed on the lifting base 61. The spacer 622 is disposed at the end of the magnetic component 621 near the material. The magnetic component 621 is connected to the lifting base 61 via a magnetic actuator 623 and can move towards or away from the spacer 622, and has an adsorption station and a detachment station accordingly. When the magnetic component 621 is in the adsorption station, the magnetic force of the magnetic component 621 can adsorb the material onto the spacer 622. After the second cleaning mechanism 5 completes the cleaning of the bottom end of the material, the magnetic component 621 moves towards the detachment station in the direction away from the spacer 622, simultaneously increasing the gap between the material and the magnetic component 621, reducing the magnetic force, and thus causing the material to fall off.

[0033] In addition, in order to collect the dust detached from the material by the cleaning components, this application as follows Figure 1 - Figure 3As shown, the corresponding cleaning component is provided with an adsorption mechanism 7. The adsorption mechanism 7 includes a negative pressure generator, which is connected to an adsorption tube. The end of the adsorption tube away from the negative pressure generator is provided with the first cleaning mechanism 4 and the second cleaning mechanism 5.

[0034] In a preferred embodiment of this application, reference is made to Figure 7 As shown, a portion of the first cleaning mechanism 4 is inclined to correspond to the material and is used to clean dust deposited on the material steps. Furthermore, in order to achieve a better cleaning effect, the cleaning end 43 of this portion of the first cleaning mechanism 4 is made of ceramic fiber structure, and the cleaning end 43 is arranged in a brush-shaped conical structure, which can penetrate into the material step structure to peel off the dust while avoiding damage to the material body by the relatively hard cleaning end 43.

[0035] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. It is obvious to those skilled in the art that this utility model is not limited to the details of the above exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and therefore, all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within this utility model.

Claims

1. A material cleaning device, characterized in that, Includes a base (1), on which a cleaning component and a carrier (2) are provided; the cleaning component has a cleaning end (43), which can come into contact with the material and move relative to it, thereby cleaning the material; the cleaning component includes a first cleaning mechanism (4) and a second cleaning mechanism (5), which respectively clean the outer surface of the material in the mounting state and the bottom surface in contact with the carrier (2); The carrier (2) carries materials and operates in the workstations corresponding to the first cleaning mechanism (4) and the second cleaning mechanism (5), and has grippers that can fix the materials to the carrying end.

2. The material cleaning device according to claim 1, characterized in that, The vehicle (2) is equipped with a vehicle drive mechanism (3), which includes a vehicle guide rail (31) arranged along a first direction. The vehicle (2) is arranged on the vehicle guide rail (31) and runs along the first direction under the drive of the vehicle driver (32).

3. The material cleaning device according to claim 2, characterized in that, The second cleaning mechanism (5) is equipped with a material lifting component (6), which is used to lift and separate the material from the carrier (2) so that the bottom surface of the material connected to the carrier (2) is exposed; The material lifting assembly (6) includes a lifting base (61) connected to the base (1). A lifting device (62) is slidably disposed on the lifting base (61) along a first direction. The lifting device (62) can connect to the top of the material and lift the material to drive the material to run along the first direction.

4. The material cleaning device according to claim 3, characterized in that, The lifting device (62) includes a magnetic component (621) and a spacer (622) disposed on the lifting base (61). The magnetic component (621) can adsorb materials through the spacer (622), and the magnetic component (621) can move toward or away from the spacer (622) under the drive of the magnetic driver (623).

5. The material cleaning device according to claim 3, characterized in that, The lifter (62) is connected to a lifting drive mechanism (63), which includes a lifting guide rail (631) fixed on the lifting base (61) along a first direction. The lifter (62) cooperates with the lifting guide rail (631) and slides along the lifting guide rail (631) under the drive of the lifting driver (632).

6. The material cleaning device according to claim 1, characterized in that, The corresponding cleaning component is provided with an adsorption mechanism (7), which includes a negative pressure generator. The negative pressure generator is connected to an adsorption tube, and the end of the adsorption tube away from the negative pressure generator is provided with the first cleaning mechanism (4) and the second cleaning mechanism (5).

7. The material cleaning device according to claim 1, characterized in that, The first cleaning mechanism (4) includes a cleaning mounting base (41) fixed on the base (1), a cleaning driver (42) is provided on the cleaning mounting base (41), a brush is connected to the execution end of the cleaning driver (42), the carrier (2) carries the material and abuts against the cleaning end (43), and the cleaning end (43) moves relative to the material under the drive of the cleaning driver (42).

8. A material cleaning device according to claim 7, characterized in that, Part of the first cleaning mechanism (4) is inclined relative to the material, so that the cleaning end (43) corresponds to the step of the material.

9. A material cleaning device according to claim 8, characterized in that, The cleaning end (43) is made of ceramic fiber material, and part or all of the cleaning end (43) forms a conical structure so that it does not come into direct contact with the material during the cleaning action.

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