Film conveying dust removal mechanism and packaging device

Abstract

This invention provides a thin-film conveying dust removal mechanism and packaging device, relating to the field of semiconductor packaging technology. The thin-film conveying dust removal mechanism includes a first driver, a connecting seat, a first clamping seat, a second driver, a second clamping seat, and a dust collection component. The first driver is connected to the first clamping seat via the connecting seat and is configured to drive the connecting seat to move vertically up and down. The second driver is mounted on the connecting seat and connected to the second clamping seat, and is configured to drive the second clamping seat to move vertically up and down. The second clamping seat forms a clamping channel for clamping the film between one side of itself and the first clamping seat in the horizontal direction, and a dust collection component is installed on the other side. The thin-film conveying dust removal mechanism provided by this invention has clamping channels and a dust collection component located on both sides of the second clamping seat, resulting in high reliability in residue removal and ensuring the quality stability of subsequent coating processes.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, and in particular to a thin film conveying dust removal mechanism and packaging device. Background Technology

[0002] In semiconductor chip manufacturing, powder compression packaging is one of the key processing steps. This process typically requires coating the chip surface with a protective film to prevent contamination or damage during subsequent processing. The coating process places strict requirements on the cleanliness of the substrate surface.

[0003] Traditional substrate cleaning methods primarily employ brush cleaning technology, which removes residues through physical contact between mechanical brush bristles and the substrate surface. The specific operation involves a brush mechanism reciprocating along a predetermined path, using the physical friction of the bristles to peel particles off the substrate surface. However, in actual production, it has been found that the brush bristles gradually wear down with repeated use, leading to poor cleaning results and affecting the quality stability of subsequent lamination processes. Utility Model Content

[0004] The purpose of this invention is to provide a film conveying and dust removal mechanism, which has clamping channels and dust collection components located on both sides of the second clamping seat. This mechanism offers high reliability in residue removal and ensures the quality stability of subsequent coating processes. Additionally, a packaging device incorporating the aforementioned film conveying and dust removal mechanism is also provided.

[0005] To achieve the above objectives, this utility model provides the following technical solution: In a first aspect, this utility model provides a film conveying dust removal mechanism, including a first driver, a connecting seat, a first clamping seat, a second driver, a second clamping seat, and a dust collection component; The first driver is connected to the first clamping seat via a connecting seat, and the first driver is configured to drive the connecting seat to move up and down in the vertical direction via the connecting seat; The second driver is mounted on the connector and connected to the second clamping seat. The second driver is configured to drive the second clamping seat to move up and down in the vertical direction. The second clamping seat forms a clamping channel for clamping the film between one side of the second clamping seat and the first clamping seat in the horizontal direction, and the dust collection assembly is mounted on the other side.

[0006] In an optional embodiment, the vacuuming assembly includes a housing connected to the side of the second clamping seat opposite to the clamping channel, the housing having a vacuum port disposed vertically downwards.

[0007] In an optional embodiment, the suction port is flush with the bottom surface of the second clamping seat.

[0008] In an optional embodiment, the first driver, the connecting seat, and the first clamping seat are arranged sequentially from top to bottom in a vertical direction, and a sealing strip is provided on the side of the first clamping seat opposite to the connecting seat.

[0009] In an optional embodiment, one of the first clamping seat and the sealing strip is provided with a groove, and the other is provided with a protrusion that extends into and connects to the groove.

[0010] In an optional embodiment, the second driver is connected to the connector, and at least a portion of the structure extends to the side of the connector opposite to the first clamp, the second clamp being connected vertically to the top of the second driver.

[0011] In an optional embodiment, the second clamping seat includes a transmission plate and a mounting plate. The mounting plate is connected to the top end of the second driver via the transmission plate. The mounting plate has a bent portion at its bottom end in the vertical direction, and the bent portion forms the clamping channel with the sealing strip. The dust collection assembly is mounted on the mounting plate.

[0012] In an optional embodiment, the film conveying dust removal mechanism further includes a third driver and a movable frame, wherein the first driver is connected to the third driver through the movable frame, and the third driver is used to drive the movable frame to reciprocate in the horizontal direction.

[0013] In an optional embodiment, a fourth driver and a bracket are further connected between the movable frame and the first driver. The fourth driver is mounted on the movable frame, and the bracket is connected between the fourth driver and the first driver. The fourth driver is used to drive the first driver to move up and down in the vertical direction via the bracket.

[0014] Secondly, this utility model provides a packaging device, including a film conveying and dust removal mechanism as described in any of the foregoing embodiments.

[0015] The film conveying and dust removal mechanism and packaging device provided by this utility model can produce the following beneficial effects: Compared with the prior art, the second clamping seat in the film conveying and dust removal mechanism provided by the first aspect of this utility model forms a clamping channel on one side for clamping the film, and the dust collection component installed on the other side can remove the residue on the base plate. The residue removal is highly reliable and ensures the quality stability of the subsequent coating process.

[0016] The packaging device provided in the second aspect of this utility model includes the film conveying and dust removal mechanism provided in the first aspect of this utility model, thereby having all the beneficial effects of the film conveying and dust removal mechanism provided in the first aspect of this utility model. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 A three-dimensional structural schematic diagram of a film conveying dust removal mechanism (without a cover) provided for an embodiment of this utility model; Figure 2 for Figure 1 A magnified view of part A; Figure 3 A three-dimensional structural schematic diagram of a thin-film conveying dust removal mechanism provided in an embodiment of this utility model from a first perspective; Figure 4 This is a three-dimensional structural diagram of a film conveying and dust removal mechanism provided in an embodiment of the present invention, viewed from a second perspective.

[0019] Icons: 1-First driver; 2-Connecting seat; 3-First clamping seat; 31-Groove; 4-Second driver; 5-Second clamping seat; 51-Transmission plate; 52-Mounting plate; 521-Bending part; 6-Dust collection assembly; 61-Cover; 611-Dust collection port; 7-Clamping channel; 8-Sealing strip; 81-Protrusion; 9-Third driver; 10-Moving frame; 101-Sliding table; 011-Guide rail; 012-Fourth driver; 013-Bracket. Detailed Implementation

[0020] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0024] The first aspect of this utility model is to provide a thin-film conveying dust removal mechanism, such as... Figures 1 to 3 As shown, it includes a first driver 1, a connecting base 2, a first clamping base 3, a second driver 4, a second clamping base 5, and a vacuuming assembly 6; The first driver 1 is connected to the first clamping seat 3 via the connecting seat 2. The first driver 1 is configured to drive the connecting seat 2 to move up and down in the vertical direction via the connecting seat 2. The second driver 4 is mounted on the connector 2 and connected to the second clamping seat 5. The second driver 4 is configured to drive the second clamping seat 5 to move up and down in the vertical direction. The second clamping seat 5 forms a clamping channel 7 for clamping the film between one side of the horizontal direction and the first clamping seat 3, and a dust collection component 6 is installed on the other side.

[0025] In use, the first driver 1 drives the first clamping seat 3 to move down through the connecting seat 2, and the second driver 4 drives the second clamping seat 5 to move up. The first clamping seat 3 and the second clamping seat 5 can cooperate to clamp the film. Then the first driver 1 drives the connecting seat 2 to move up. Since the second driver 4 is installed on the connecting seat 2, it will synchronously drive the second driver 4 and the second clamping seat 5 connected to the second driver 4 to move up synchronously. After moving up to the position, the dust collection component 6 starts to collect dust and remove the residue on the bottom plate.

[0026] In the film conveying dust removal mechanism provided in the above embodiment, a clamping channel 7 for clamping the film is formed on one side of the second clamping seat 5, and a dust suction component 6 installed on the other side can remove residues on the base plate. Compared with dust removal by using a brush, the residue removal reliability is strong, which is conducive to ensuring the quality stability of the subsequent coating process.

[0027] It should be noted that any structure capable of removing residue from the bottom plate can be the dust collection component 6 mentioned in the above embodiments. For example, the dust collection component 6 may include one or more dust collection ports on one side of the second clamping seat 5, and the dust collection ports may be connected to an external dust collection device through a flexible hose; or the dust collection component 6 may integrate a dust collection head and a small fan, with the fan installed inside or on the side of the second clamping seat 5, the dust collection head facing the surface of the bottom plate, and negative pressure dust collection generated by the fan.

[0028] In alternative implementations, such as Figure 3 As shown, the vacuuming assembly 6 includes a housing 61, which is connected to the side of the second clamping seat 5 away from the clamping channel 7. The housing 61 has a vacuuming port 611 arranged vertically downward, so that the residue on the bottom plate can be effectively removed.

[0029] Specifically, the cover 61 is connected to the side wall of the second clamping seat 5 by conventional fixing methods such as screwing, snap-fitting or welding, to ensure that it maintains structural stability and reliability of vacuuming operation during lifting and lowering.

[0030] The cover 61 has a hollow shell structure, and its shape can be rectangular, trapezoidal or other adaptable structure. The length direction of the suction port 611 is perpendicular to the conveying direction of the film, and the bottom plate is covered in the above direction. The shape of the suction port 611 can be rectangular, circular or polygonal, and can be designed according to the actual cleaning area and suction efficiency requirements.

[0031] In actual operation, after the first clamping seat 3 and the second clamping seat 5 clamp the film and rise to the preset height, the dust collection component 6 rises synchronously with the second clamping seat 5 to the working position. At this time, the dust collection port 611 is directly facing the bottom plate below. The dust collection component 6 generates a negative pressure airflow through an external negative pressure device (such as a fan or a central dust removal system), which causes the air in the area below the dust collection port 611 and the entrained dust, debris and other pollutants to be sucked into the housing 61 and discharged through the connecting pipe, thereby achieving effective cleaning of the surface of the conveyor platform.

[0032] In an optional embodiment, the suction port 611 is flush with the bottom surface of the second clamping seat 5.

[0033] The above design ensures that the vacuuming assembly 6 can get as close as possible to the bottom plate when vacuuming up residue on the bottom plate, without obstructing the downward movement of the second clamping seat 5.

[0034] In alternative implementations, such as Figure 1 As shown, the first driver 1, the connecting seat 2, and the first clamping seat 3 are arranged in sequence from top to bottom along the vertical direction.

[0035] Specifically, such as Figure 1 As shown, the first driver 1 is fixedly mounted on the bracket 013 at the top of the mechanism, and its output end is connected to the connecting seat 2 through a connecting structure, thereby driving the connecting seat 2 to move up and down in the vertical direction. The connecting seat 2 serves as an intermediate transmission component, and its lower part is fixedly connected to the first clamping seat 3, so that the first clamping seat 3 moves up and down synchronously with the connecting seat 2.

[0036] Based on the above embodiments, a sealing strip 8 is provided on the side of the first clamping seat 3 opposite to the connecting seat 2. The sealing strip 8 is preferably a flexible material with a certain elasticity, such as rubber or silicone strip, which is fixedly installed on the lower end face of the first clamping seat 3 and forms the upper end face of the clamping channel 7, thereby forming a good sealing contact with the film to be clamped.

[0037] The sealing strip 8 can be installed by bonding, snap-fitting, or screw fixing, depending on the actual assembly process and material characteristics. As long as it can maintain a stable connection during repeated lifting and clamping operations, it is acceptable.

[0038] In an optional embodiment, one of the first clamping seat 3 and the sealing strip 8 is provided with a groove 31, and the other is provided with a protrusion 81 that extends into and connects to the groove 31.

[0039] like Figure 2 As shown, the first clamping seat 3 is provided with a groove 31, and the sealing strip 8 is provided with a protrusion 81 corresponding to the groove 31. The shape and size of the protrusion 81 are adapted to the groove 31, so that the protrusion 81 can be inserted into the groove 31, and the sealing strip 8 and the first clamping seat 3 are fixedly connected by interference fit or snap fit.

[0040] The cross-sectional shape of the groove 31 can be rectangular, trapezoidal or dovetail, etc., and the shape of the protrusion 81 matches it to ensure the stability and sealing of the connection structure.

[0041] It should be noted that any structure that can drive the connecting seat 2 to move up and down in the vertical direction through the connecting seat 2 can be the first driver 1 mentioned in the above embodiments, and any structure that can drive the second clamping seat 5 to move up and down in the vertical direction can be the second driver 4 mentioned in the above embodiments. For example, the first driver 1 and the second driver 4 can be cylinders, hydraulic cylinders or linear motors, etc.

[0042] Preferably, both the first driver 1 and the second driver 4 are thin-walled cylinders.

[0043] In an optional embodiment, the second driver 4 is connected to the connecting seat 2, and at least part of the structure extends to the side of the connecting seat 2 away from the first clamping seat 3. The second clamping seat 5 is connected to the top of the second driver 4 in a vertical direction, which makes the structure of the film conveying dust removal mechanism more compact.

[0044] The second clamping seat 5 can be fixedly connected to the top of the second driver 4 through a connector. The connection method can be a conventional mechanical connection method such as threaded connection, flange connection or snap-fit ​​connection to ensure the stability of the clamping action.

[0045] In alternative implementations, such as Figure 4 As shown, the second clamping base 5 includes a transmission plate 51 and a mounting plate 52. The transmission plate 51 extends horizontally, with one end connected to the output end of the second driver 4. Specifically, the transmission plate 51 is fixedly connected to the top of the second driver 4, for example, through a threaded connection or flange connection, ensuring a stable connection and transmission efficiency. The other end of the transmission plate 51 is fixedly connected to the top of the mounting plate 52, thereby enabling the second driver 4 to drive the mounting plate 52.

[0046] The mounting plate 52 extends vertically and has a bent portion 521 at its bottom edge. The bottom end of the bent portion 521 extends horizontally towards the direction directly below the first clamping seat 3, forming a curved structure facing the first clamping seat 3. The end of the bent portion 521 is positioned opposite to the sealing strip 8 provided on the first clamping seat 3, and a clamping channel 7 for clamping the film is formed between the two.

[0047] In this embodiment, as Figure 2 As shown, the shape of the bending portion 521 is preferably L-shaped, so as to form a good contact surface with the sealing strip 8, enhance the adsorption and fixation effect of the film during the clamping process, and reduce damage to the film surface.

[0048] In alternative implementations, such as Figure 4 As shown, the film conveying dust removal mechanism also includes a third driver 9 and a moving frame 10. The first driver 1 is connected to the third driver 9 through the moving frame 10. The third driver 9 is used to drive the moving frame 10 to reciprocate in the horizontal direction.

[0049] When the vacuuming assembly 6 starts vacuuming, the third drive 9 drives the moving frame 10 to move horizontally, thereby realizing the vacuuming of the base plate and the film laying operation.

[0050] The third drive 9 can be a combination of a slide rail cylinder, an electric cylinder, or a servo motor and a lead screw module. One end of the drive 9 is connected to the moving frame 10, and the other end is fixed to the equipment frame or other stable support structure. After the drive end of the third drive 9 is connected to the moving frame 10, it can drive the moving frame 10 to perform reciprocating linear motion in the horizontal direction according to the control signal. This horizontal direction can be the same as the film conveying direction, and can be set according to the actual production line layout.

[0051] Preferably, the third actuator 9 is a slide rail cylinder.

[0052] In alternative implementations, such as Figure 3 As shown, the film conveying dust removal mechanism also includes a guide rail 011. The extension direction of the guide rail 011 is parallel to the reciprocating motion direction of the moving frame 10. The moving frame 10 and the guide rail 011 are slidably engaged, thereby ensuring that the moving frame 10 moves stably and accurately in the horizontal direction.

[0053] The guide rail 011 is fixedly installed on the base or support structure of the equipment. The cross-sectional shape of the guide rail 011 can be a conventional structure such as T-shaped, V-shaped or rectangular. Its material is preferably wear-resistant metal or high-strength engineering plastic to ensure structural stability and motion accuracy under long-term operation.

[0054] The bottom of the movable frame 10 is provided with a sliding table 101 that matches the guide rail 011. The sliding table 101 may be provided with a slider, roller or slide groove structure, so that the movable frame 10 can slide smoothly along the guide rail 011.

[0055] In alternative implementations, such as Figure 3 As shown, a fourth driver 012 is also connected between the movable frame 10 and the first driver 1. The fourth driver 012 is installed on the movable frame 10. A bracket 013 is connected between the fourth driver 012 and the first driver 1. The fourth driver 012 drives the first driver 1 to move up and down in the vertical direction through the bracket 013.

[0056] During operation, when the height of the first clamping seat 3 and the second clamping seat 5 holding the film needs to be adjusted or reset, the fourth driver 012 is activated. Through the bracket 013, the first driver 1 and its connected connecting seat 2 and the entire structure on the connecting seat 2 are driven to rise or fall vertically, thereby realizing the adjustment of the clamping position or the working height of the dust collection component 6.

[0057] The above-described implementation not only improves the overall flexibility of the mechanism, but also enhances the adaptability and controllability of the dust removal process, which is conducive to improving the efficiency and quality of film conveying and dust removal operations.

[0058] It should be noted that any structure that can drive the first driver 1 to move up and down in the vertical direction via the bracket 013 can be the four driver 012 mentioned in the above embodiments. For example, the fourth driver 012 can be a cylinder, a hydraulic cylinder, or a linear motor.

[0059] Preferably, the fourth actuator 012 is a thin cylinder.

[0060] A second aspect of this utility model provides a packaging device, which includes the aforementioned film conveying and dust removal mechanism.

[0061] The packaging device provided in the second aspect of this utility model has the film conveying and dust removal mechanism provided in the first aspect of this utility model, and thus has all the beneficial effects of the film conveying and dust removal mechanism provided in the first aspect of this utility model.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A film conveying dust removal mechanism, characterized in that, It includes a first driver (1), a connecting seat (2), a first clamping seat (3), a second driver (4), a second clamping seat (5), and a vacuuming assembly (6); The first driver (1) is connected to the first clamping seat (3) via a connecting seat (2), and the first driver (1) is configured to drive the connecting seat (2) to move up and down in the vertical direction via the connecting seat (2); The second driver (4) is mounted on the connecting seat (2). The second driver (4) is connected to the second clamping seat (5). The second driver (4) is configured to drive the second clamping seat (5) to move up and down in the vertical direction. The second clamping seat (5) forms a clamping channel (7) for clamping the film between one side of the horizontal direction and the first clamping seat (3). The dust collection assembly (6) is mounted on the other side.

2. The film conveying and dust removal mechanism according to claim 1, characterized in that, The vacuuming assembly (6) includes a housing (61) connected to the side of the second clamping seat (5) away from the clamping channel (7), and the housing (61) has a vacuuming port (611) arranged vertically downward.

3. The film conveying and dust removal mechanism according to claim 2, characterized in that, The suction port (611) is flush with the bottom surface of the second clamping seat (5).

4. The film conveying dust removal mechanism according to claim 1, characterized in that, The first driver (1), the connecting seat (2) and the first clamping seat (3) are arranged in sequence from top to bottom in the vertical direction. The first clamping seat (3) is provided with a sealing strip (8) on the side away from the connecting seat (2).

5. The film conveying and dust removal mechanism according to claim 4, characterized in that, One of the first clamping seat (3) and the sealing strip (8) is provided with a groove (31), and the other is provided with a protrusion (81) that extends into the groove (31) and is connected to the groove (31).

6. The film conveying dust removal mechanism according to claim 4, characterized in that, The second driver (4) is connected to the connector (2), and at least part of its structure extends to the side of the connector (2) away from the first clamp (3), and the second clamp (5) is connected to the top of the second driver (4) in a vertical direction.

7. The film conveying dust removal mechanism according to claim 6, characterized in that, The second clamping seat (5) includes a transmission plate (51) and a mounting plate (52). The mounting plate (52) is connected to the top of the second driver (4) through the transmission plate (51). The mounting plate (52) has a bent portion (521) at the bottom in the vertical direction. The bent portion (521) and the sealing strip (8) form the clamping channel (7). The dust collection assembly (6) is mounted on the mounting plate (52).

8. The film conveying and dust removal mechanism according to any one of claims 1-7, characterized in that, The film conveying dust removal mechanism also includes a third driver (9) and a moving frame (10). The first driver (1) is connected to the third driver (9) through the moving frame (10). The third driver (9) is used to drive the moving frame (10) to reciprocate in the horizontal direction.

9. The film conveying dust removal mechanism according to claim 8, characterized in that, A fourth driver (012) and a bracket (013) are also connected between the movable frame (10) and the first driver (1). The fourth driver (012) is installed on the movable frame (10), and the bracket (013) is connected between the fourth driver (012) and the first driver (1). The fourth driver (012) is used to drive the first driver (1) to move up and down in the vertical direction through the bracket (013).

10. A packaging device, characterized in that, Includes the film conveying dust removal mechanism as described in any one of claims 1-9.

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