A co2 dry ice cleaning process apparatus system

CN224600062UActive Publication Date: 2026-08-07SUZHOU EPITAXY ELECTRONIC MATERIALS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SUZHOU EPITAXY ELECTRONIC MATERIALS CO LTD
Filing Date
2025-08-18
Publication Date
2026-08-07

AI Technical Summary

Technical Problem

[0012]实用新型目的:为了克服以上不足,本实用新型的目的是提供一种CO2干冰清洗工艺设备系统,旨在解决传统高压清洗工艺存在诸多局限性,满足现代工业生产对清洗效率、产品质量和环保等方面的要求,应用前景广泛

Benefits of technology

本实用新型所述的CO2干冰清洗工艺设备系统,综合了吊装、清洗和吸尘等多个功能模块,通过合理的设计和配置,能够对各种类型的污垢进行有效清洗,干冰颗粒在高压下高速撞击物体表面,瞬间升华体积膨胀约800倍,产生“微爆炸”效应,同时低温使污垢脆化,更易清除,相比传统高压清洗,对顽固污渍、复杂结构缝隙中的污垢清洗效果更佳;CO2干冰清洗属于“软性”清洗,干冰颗粒硬度低,在撞击表面后迅速升华,不会对物体表面产生磨损、划痕等物理损伤,能更好地保护被清洗物体的完整性和原有性能,适用于对清洗精度要求高的场合,如电子元器件;以固态CO2为清洗介质,清洗过程中干冰直接升华成气态CO2,无二次污染物产生,不会对环境造成污染,且CO2本身是大气成分之一,相比使用化学清洁剂的传统工艺,对环境更加友好,符合当下绿色环保的发展理念,同时,无需大量水资源和化学清洁剂,降低了耗材成本;利用干冰的特性,能在短时间内达到良好的清洗效果,提高了生产线的运行效率,适配高速运转的现代化生产线;操作过程中无需额外的清洁或后处理步骤,减少了人工和时间成本;干冰本身不会对设备造成磨损或腐蚀,维护较为简单,长远来看维护成本更低;且减少了设备维修和更换频率,进一步降低了综合成本。

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224600062U_ABST
    Figure CN224600062U_ABST
Patent Text Reader

Abstract

A CO2 dry ice cleaning process equipment system, including: hoisting system, hoisting system is arranged above the cleaning area, hoisting system includes hanger, travelling crane, hanger is used for hanging cleaning object, travelling crane is used for lifting hanger and makes the cleaning object on hanger transfer in the cleaning area;Cleaning system, cleaning system is arranged at one side of cleaning area, and cleaning system includes dry ice storage tank, screw propeller, high pressure gas source device, spray gun / nozzle device;Dust collection system, dust collection system is arranged at one side of the end of cleaning area, and is used for surface dust collection to cleaning object after cleaning is completed. The utility model aims at providing a perfect, efficient CO2 dry ice cleaning process equipment system, solves many limitations existing in traditional high pressure cleaning process, satisfies the requirement of modern industrial production to cleaning efficiency, product quality and environmental protection and the like.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of cleaning equipment technology, specifically to a CO2 dry ice cleaning process equipment system. Background Technology

[0002] In modern industrial production, cleaning equipment technology plays a crucial role in ensuring product quality, improving production efficiency, and maintaining equipment performance. Especially in the field of precision cleaning and regeneration of dry equipment, the surface treatment quality of the upper electrode directly determines the equipment's operational efficiency and etching rate, making its importance self-evident.

[0003] In the dry process, the upper electrode component plays a critical role, and its performance directly affects the process quality. Because this component operates in a gaseous environment for extended periods, its surface is prone to physical or chemical degradation (PT). PT can lead to defects in customer products, such as decreased yield and performance instability. Therefore, surface treatment and cleaning of the upper electrode are essential to effectively eliminate potential risks, ensure stable and reliable product quality, and meet customer production requirements.

[0004] Meanwhile, during the coating process, unreacted paint, solvents, dust, oil, or other impurities may adhere to the coating surface or between the coating and the substrate. The presence of these impurities affects the adhesion between the coating and the substrate, leading to defects such as peeling and blistering, thereby reducing the coating's adhesion and durability. Cleaning can remove these impurities, improve the adhesion between the coating and the substrate, and enhance the coating's performance and service life.

[0005] Traditional high-pressure cleaning technology involves spraying deionized water (DI water) at high speed onto the workpiece surface, using the impact force of the high-pressure water stream to remove surface stains. However, this cleaning method has several significant limitations. Specifically: 1. Noise Pollution and Health Threats: Traditional high-pressure cleaning generates significant noise during operation, greatly disrupting the working environment. Prolonged exposure to such a high-noise environment can easily lead to tinnitus and other health problems for operators, seriously threatening their well-being.

[0006] 2. Inadequate cleaning effect: For stubborn stains and dirt in complex structural crevices, traditional high-pressure cleaning relies on the impact of high-pressure water jets, which often results in unsatisfactory cleaning effects. For example, when cleaning upper electrodes with delicate structures, the high-pressure water jets cannot penetrate into the crevices to completely remove the dirt, leaving residual stains on the electrodes after cleaning, affecting their performance and service life.

[0007] 3. Impact on Production Efficiency and Product Quality: Traditional high-pressure cleaning processes often result in coating PT (Potential Test) issues occurring within 2-3 months of the customer's equipment being put into use. This significantly extends the customer's product testing cycle (TT) and leads to a substantial decline in yield. This not only severely impacts production delivery efficiency but also reduces product quality stability. Furthermore, traditional high-pressure cleaning, due to its long operation cycle and low processing efficiency, is difficult to adapt to high-speed modern production lines, resulting in high time costs and further restricting capacity expansion.

[0008] 4. Resource Consumption and Cost Issues: Traditional high-pressure cleaning consumes a large amount of water and requires wastewater treatment equipment, increasing water consumption and wastewater treatment costs. Furthermore, the chemical cleaning agents used also incur procurement costs. In the long run, the accumulation of these costs becomes a significant burden for businesses.

[0009] 5. Environmental pollution issues: Traditional high-pressure cleaning processes often use large amounts of water. If the wastewater generated after cleaning contains pollutants such as oil and chemical cleaning agents, direct discharge without treatment will pollute the soil, water bodies, and other ecological environments. With increasingly stringent environmental protection requirements, this cleaning method is finding it increasingly difficult to meet environmental standards.

[0010] CO2 dry ice cleaning technology is an emerging cleaning technology with significant advantages over traditional high-pressure cleaning. It effectively removes various types of dirt, such as oil, carbon deposits, and paint, with high cleaning efficiency, quickly completing cleaning tasks and minimizing equipment downtime. Furthermore, CO2 dry ice cleaning is a "soft" cleaning method; the dry ice particles have low hardness and sublimate rapidly upon impact with the surface, causing no physical damage such as abrasion or scratches. This better protects the integrity and original properties of the cleaned object, making it suitable for applications requiring high cleaning precision, such as cleaning electronic components and cultural relics. In addition, CO2 dry ice cleaning requires no large amounts of water or chemical cleaning agents; dry ice can be repeatedly produced, reducing consumable costs. Moreover, during the cleaning process, the dry ice directly sublimates into gaseous CO2, producing no secondary pollutants and causing no environmental pollution, aligning with current green and environmentally friendly development principles.

[0011] In summary, traditional high-pressure cleaning processes have many limitations and can no longer meet the requirements of modern industrial production in terms of cleaning efficiency, product quality, and environmental protection. While CO2 dry ice cleaning technology has significant advantages, there is currently a lack of complete and efficient CO2 dry ice cleaning process equipment systems on the market. Therefore, developing a new CO2 dry ice cleaning process equipment system has important practical significance and market demand. Utility Model Content

[0012] Purpose of the utility model: In order to overcome the above shortcomings, the purpose of this utility model is to provide a CO2 dry ice cleaning process equipment system, which aims to solve the many limitations of traditional high-pressure cleaning processes, meet the requirements of modern industrial production for cleaning efficiency, product quality and environmental protection, and has broad application prospects.

[0013] Technical solution: A CO2 dry ice cleaning process equipment system, comprising: A hoisting system is installed above the cleaning area. The hoisting system includes a hanger and a crane. The hanger is used to suspend the object to be cleaned, and the crane is used to lift the hanger and transfer the object to be cleaned on the hanger within the cleaning area. A cleaning system is installed on one side of the cleaning area. The cleaning system includes a dry ice storage tank, a screw propeller, a high-pressure air source device, and a spray gun / nozzle device. The dry ice storage tank is used to store dry ice. The dry ice storage tank is connected to the spray gun / nozzle device through the screw propeller. The screw propeller evenly feeds the dry ice from the dry ice storage tank into the spray gun / nozzle device. The high-pressure air source device is connected to the spray gun / nozzle device and provides power for dry ice spraying through compressed air. The spray gun / nozzle device is positioned facing the object to be cleaned in the cleaning area. A vacuuming system is installed at one end of the cleaning area and is used to vacuum the surface of the cleaned object after cleaning is completed.

[0014] The CO2 dry ice cleaning process equipment system described in this utility model includes a hoisting system, a cleaning system, and a dust collection system. The hoisting system is positioned above the cleaning area, with a hanging device for suspending the object to be cleaned, and a crane for lifting the hanging device and transferring the object within the cleaning area. This allows the object to be easily transported to the cleaning area, improving operational convenience and safety. The cleaning system includes a dry ice storage tank, a screw propeller, a high-pressure air source device, and a spray gun / nozzle device. The dry ice storage tank stores dry ice, the screw propeller evenly feeds the dry ice into the spray gun / nozzle device, the high-pressure air source device provides power for the dry ice spray, and the spray gun / nozzle device is positioned towards the object to be cleaned. This design ensures that the dry ice can be stably and efficiently sprayed onto the surface of the object to be cleaned, utilizing the "micro-explosion" effect of dry ice cleaning and the characteristic of low-temperature embrittlement of dirt to effectively remove dirt, improving cleaning efficiency and effectiveness. The dust collection system is located at one end of the cleaning area and is used to vacuum the surface of the object after cleaning. It can promptly remove dirt fragments and residual dry ice particles generated during the cleaning process, ensuring the cleanliness of the surface of the object being cleaned, while also preventing the accumulation of dirt in the cleaning area and improving the working environment.

[0015] Furthermore, in the aforementioned CO2 dry ice cleaning process equipment system, the dry ice storage tank adopts a double-layer vacuum insulation structure and is equipped with a height monitoring device.

[0016] The double-layer vacuum insulation structure effectively reduces heat exchange between dry ice and the outside environment, slows down the sublimation rate of dry ice, reduces dry ice loss, and extends the storage time of dry ice, thereby reducing operating costs. The height monitoring device can monitor the remaining amount of dry ice in the storage tank in real time, allowing operators to replenish dry ice promptly and ensuring the continuity of cleaning operations.

[0017] Furthermore, in the aforementioned CO2 dry ice cleaning process equipment system, the spiral propeller is selected as a double spiral propeller.

[0018] The twin-helix propeller has the characteristics of strong conveying capacity and uniform delivery, which can more stably deliver dry ice from the storage tank into the spray gun / nozzle device, avoiding blockage or uneven delivery of dry ice during the delivery process, ensuring the stability of the dry ice spray volume, and further improving the consistency of the cleaning effect.

[0019] Furthermore, in the aforementioned CO2 dry ice cleaning process equipment system, the high-pressure air source device is a screw air compressor.

[0020] Screw air compressors offer advantages such as high efficiency, low noise, and good stability, providing stable and sufficient power for dry ice blasting. This ensures that dry ice particles impact object surfaces at high speed under high pressure, achieving excellent cleaning results. Compared to the high noise levels generated by traditional high-pressure cleaning equipment, screw air compressors reduce interference with the working environment and protect the health of operators.

[0021] Furthermore, in the aforementioned CO2 dry ice cleaning process equipment system, the spray gun / nozzle device is either a fan-shaped spray gun / nozzle or a circular spray gun / nozzle, and the angle is adjustable between 30° and 60°.

[0022] The spray gun / nozzle device can use either a fan-shaped or circular spray gun / nozzle, with the angle adjustable between 30° and 60°. Different shapes of spray guns / nozzles can be selected based on the shape of the object being cleaned and the distribution of dirt. Fan-shaped spray guns / nozzles are suitable for large-area cleaning, while circular spray guns / nozzles are suitable for small-area, high-precision cleaning. The adjustable angle allows the spray gun / nozzle to better target different parts of the object being cleaned, improving the targeting and effectiveness of the cleaning.

[0023] Furthermore, in the aforementioned CO2 dry ice cleaning process equipment system, the dust collection system uses a pulse bag dust collection device.

[0024] Pulse jet baghouse vacuum cleaners offer advantages such as high suction efficiency, excellent filtration, and convenient cleaning. They effectively collect dirt and residual dry ice particles generated during cleaning, ensuring a clean working environment. Furthermore, the pulse cleaning method allows for periodic cleaning of the dust bags, guaranteeing the continuous and efficient operation of the vacuum cleaner.

[0025] Furthermore, the aforementioned CO2 dry ice cleaning process equipment system also includes a control system, which is electrically connected to the overhead crane, dry ice storage tank, screw propeller, high-pressure air source device, spray gun / nozzle device, and dust collection system.

[0026] The control system uses a PLC control system. This system allows for centralized control and automated operation of the entire cleaning process. Based on factors such as the material and degree of dirt on the object being cleaned, it precisely adjusts parameters such as the traveling speed of the crane, the remaining dry ice level in the dry ice storage tank, the conveying speed of the screw propeller, the pressure of the high-pressure air source device, the spray volume and angle of the spray gun / nozzle device, and the working status of the dust collection system. This improves cleaning accuracy and efficiency while reducing errors and labor intensity caused by manual operation.

[0027] The beneficial effects of this utility model are as follows: The CO2 dry ice cleaning process equipment system described in this utility model integrates multiple functional modules such as hoisting, cleaning, and vacuuming. Through reasonable design and configuration, it can effectively clean various types of dirt. Dry ice particles, under high pressure and high speed, impact the surface of the object, instantly sublimating and expanding in volume by approximately 800 times, producing a "micro-explosion" effect. Simultaneously, the low temperature embrittles the dirt, making it easier to remove. Compared to traditional high-pressure cleaning, it is more effective at cleaning stubborn stains and dirt in complex structural crevices. CO2 dry ice cleaning is a "soft" cleaning method; the dry ice particles have low hardness and rapidly sublimate upon impact, causing no physical damage such as wear or scratches to the object's surface. It better protects the integrity and original performance of the cleaned object, making it suitable for applications requiring high cleaning precision, such as electronic components. Solid CO2... Using dry ice as the cleaning medium, the dry ice directly sublimates into gaseous CO2 during the cleaning process, producing no secondary pollutants and causing no environmental pollution. Furthermore, CO2 is a component of the atmosphere, making this process more environmentally friendly compared to traditional processes using chemical cleaning agents. This aligns with current green and environmentally friendly development concepts. Simultaneously, it eliminates the need for large amounts of water and chemical cleaning agents, reducing consumable costs. Utilizing the properties of dry ice, it achieves excellent cleaning results in a short time, improving production line operating efficiency and adapting to high-speed modern production lines. No additional cleaning or post-processing steps are required during operation, reducing labor and time costs. Dry ice itself does not cause wear or corrosion to equipment, making maintenance simpler and resulting in lower long-term maintenance costs. It also reduces the frequency of equipment repair and replacement, further lowering overall costs. Attached Figure Description

[0028] Figure 1 This is a front view of the layout of the CO2 dry ice cleaning process equipment system described in this utility model; Figure 2 This is a test layout diagram of the CO2 dry ice cleaning process equipment system described in this utility model; Figure 3 This is a control architecture diagram of the CO2 dry ice cleaning process equipment system described in this utility model; In the picture: 1. Hanging device; 2. Overhead crane; 3. Dry ice storage tank; 4. Spiral propeller; 5. High-pressure air source device; 6. Spray gun / nozzle device; 7. Dust collection system; 8. Control system. Detailed Implementation

[0029] The following is in conjunction with the appendix Figure 1 , 2 Examples 1 and 2 further illustrate this utility model.

[0030] Example 1 like Figure 1 , 2 As shown in Figures 1 and 3, the CO2 dry ice cleaning process equipment system of this utility model comprises the following components: (a) Lifting System The hoisting system is set above the cleaning area and includes a hanger 1 and a crane 2.

[0031] Hanging Fixture 1: Used for suspending the object to be cleaned. Hanging Fixture 1 utilizes existing technology, and its structure and material can be designed according to the shape, size, and weight of the upper electrode. For example, for large and heavy upper electrodes, a hanging fixture made of high-strength alloy steel can be used to ensure safety and reliability during hoisting; for upper electrodes with complex shapes, the design of the hanging fixture should be able to adapt to their special structure to ensure the stability of the installation.

[0032] Overhead crane 2: Used to lift hanger 1 and transfer the object to be cleaned on hanger 1 within the cleaning area. Overhead crane 2 utilizes existing technology; its lifting capacity and operating speed should be selected based on actual needs. The lifting capacity must be greater than the total weight of the upper electrode and hanger 1 to ensure safe lifting; the operating speed can be adjusted according to the production line rhythm to improve cleaning efficiency. Simultaneously, the overhead crane is electrically connected to the control system to achieve precise positioning and movement, ensuring the upper electrode accurately reaches the cleaning position.

[0033] (ii) Cleaning system The cleaning system is located on one side of the cleaning area and includes a dry ice storage tank 3, a spiral propeller 4, a high-pressure air source device 5, and a spray gun / nozzle device 4.

[0034] Dry ice storage tank 3: Used for storing dry ice, it has excellent insulation properties to prevent dry ice sublimation. Dry ice storage tank 3 adopts a double-layer vacuum insulation structure to reduce heat transfer and minimize dry ice loss. Simultaneously, dry ice storage tank 3 is equipped with a height monitoring device to monitor the dry ice storage level in real time for timely replenishment.

[0035] Propeller 4: Type: The existing twin-helix propeller is used, which has the advantages of high conveying efficiency and uniform material mixing. The twin-helix propeller can uniformly feed dry ice from the dry ice storage tank 3 into the spray gun / nozzle device 4, ensuring the stability and continuity of dry ice spraying.

[0036] Working principle: The dry ice granules are propelled forward along the spiral grooves by the rotation of two meshing spiral shafts, thus conveying the dry ice. The rotation speed of the spiral shafts can be adjusted according to the cleaning requirements to control the amount of dry ice conveyed.

[0037] High-pressure gas source device 5: Type: A screw air compressor, based on existing technology, is selected as the high-pressure air source device. Screw air compressors offer advantages such as high air output, stable pressure, and high reliability, providing stable power for dry ice injection.

[0038] Operating parameters: The operating pressure is adjustable to meet different cleaning needs. Meanwhile, the high-pressure air source unit 3 is equipped with an air dryer and filter to remove moisture and impurities from the compressed air, ensuring the quality of dry ice spraying.

[0039] Spray gun / nozzle device 4: Spray gun / nozzle type: Existing technology fan-shaped spray guns / nozzles or circular spray guns / nozzles can be selected. Fan-shaped spray guns / nozzles are suitable for cleaning large areas and can cover a large cleaning area; circular spray guns / nozzles are suitable for targeted cleaning of local dirt and can provide higher spray pressure and impact force.

[0040] Spray gun / nozzle angle: The angle of the spray gun / nozzle can be adjusted between 30° and 60°. Choose the appropriate angle according to the shape of the object being cleaned and the distribution of dirt. For example, for cleaning flat surfaces, a 45° angle can be selected to obtain the best cleaning effect; for cleaning crevices or recessed areas, the angle can be appropriately reduced to improve the targeting of the spray.

[0041] Spray gun / nozzle shape: The shape of the spray gun / nozzle can be designed according to cleaning needs, such as cylindrical, conical, etc. Cylindrical spray guns / nozzles are suitable for long-distance spraying, which can maintain the speed and impact force of dry ice particles; conical spray guns / nozzles are suitable for short-distance spraying, which can increase the dispersion of dry ice particles and improve the cleaning coverage.

[0042] (iii) Vacuuming system The vacuuming system 7 is located at one end of the cleaning area and is used to vacuum the surface of the cleaned object after cleaning is completed.

[0043] Type: Pulse bag vacuum system using existing technology, which has the advantages of high vacuuming efficiency, good filtration effect and convenient dust removal.

[0044] Specific components: It mainly consists of a dust collection hood, dust collection pipes, a pulse jet bag filter, and a fan. The dust collection hood is installed above the cleaning area to effectively collect dust generated during the cleaning process; the dust collection pipes transport the dust to the pulse jet bag filter; the pulse jet bag filter filters the dust through the filter bags, and the purified air is discharged through the fan; the pulse jet cleaning device regularly cleans the filter bags to ensure the normal operation of the dust collector.

[0045] (iv) Control System The control system 8 is connected to the crane 2, dry ice storage tank 3, screw propeller 4, high-pressure air source device 5, spray gun / nozzle device 6, and dust collection system 7 respectively, to realize parameter control of the entire cleaning process.

[0046] Control Functions: Utilizing a PLC control system based on existing technology, precise control can be achieved over parameters such as dry ice delivery volume, compressed air pressure, spray gun movement speed, and dust collection system operation. Operators can set cleaning parameters via the control panel, and the control system automatically adjusts the operating status of each device according to the set values, ensuring the stability and consistency of the cleaning process.

[0047] Example 2 Based on the structural foundation of Embodiment 1, the working process of the CO2 dry ice cleaning process equipment system of this utility model is as follows: (a) Cleaning formula Dry ice temperature: Maintain the temperature of the pressurized dry ice at -78.5℃ to ensure that the dry ice can sublimate rapidly during the spraying process, producing a "micro-explosion" effect and improving the cleaning effect.

[0048] Distance: The distance between the spray gun / nozzle of the spray gun / nozzle device 4 and the surface of the object to be cleaned is generally between 10cm and 50cm, and can be adjusted according to the material of the object to be cleaned, the degree of dirt, and the type of spray gun. For harder dirt or cleaning that requires higher impact force, the distance can be shortened appropriately; for more fragile objects to be cleaned or for situations requiring large-area cleaning, the distance can be increased appropriately.

[0049] Angle: The spray angle of the spray gun should be 30°-60° to achieve the best cleaning effect. In actual operation, it can be flexibly adjusted according to the shape of the object being cleaned and the distribution of dirt.

[0050] (II) Process Method Mounting procedure: Use hanger 1 to mount the upper electrode. After mounting, use crane 2 to lift the upper electrode. During mounting, ensure the upper electrode is securely installed to prevent shaking or falling during cleaning.

[0051] Dry Ice Procurement and Selection: Purchasing high-purity carbon dioxide dry ice is crucial, as the quality and particle size of the dry ice affect the cleaning effect. Generally, dry ice particles should be hard and high-purity, with particle size selected based on specific cleaning requirements, typically around 1-3 mm. A low-temperature grinding + vibrating sieving process can be used to grade and screen the dry ice particles, ensuring consistency in particle size.

[0052] Equipment Start-up and Parameter Adjustment: Load dry ice into the dry ice storage tank 3 of the cleaning machine, and start the screw propeller 4, high-pressure air source device 5, and spray gun / nozzle device 6. Adjust parameters such as pressure, dry ice spray volume, and spray gun movement speed according to factors such as the material and degree of dirt on the object being cleaned. For areas with stubborn dirt, the dry ice spray volume can be increased or the spray gun movement speed can be slowed down for targeted cleaning. Multiple sprays can also be used to gradually remove dirt. During parameter adjustment, precise adjustments can be made through the control system 8 to improve cleaning efficiency and quality. After cleaning, activate the vacuum system 7 to vacuum the surface of the cleaned object.

[0053] Post-cleaning inspection: After the dry ice has completely sublimated, conduct a thorough inspection of the cleaned surface. Check whether the surface has achieved the expected cleaning effect, and whether there is any residual dirt or uncleaned areas. If any problems are found, perform a touch-up cleaning or adjust the cleaning parameters in a timely manner to ensure cleaning quality.

[0054] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of the present utility model, and these improvements should also be considered within the protection scope of the present utility model.

Claims

1. A CO2 dry ice cleaning process equipment system, characterized in that, include: The hoisting system is set above the cleaning area. The hoisting system includes a hanger (1) and a crane (2). The hanger (1) is used to suspend the object to be cleaned, and the crane (2) is used to lift the hanger (1) and transfer the object to be cleaned on the hanger (1) within the cleaning area. A cleaning system is provided on one side of the cleaning area. The cleaning system includes a dry ice storage tank (3), a screw propeller (4), a high-pressure air source device (5), and a spray gun / nozzle device (6). The dry ice storage tank (3) is used to store dry ice. The dry ice storage tank (3) is connected to the spray gun / nozzle device (6) through the screw propeller (4). The screw propeller (4) evenly feeds the dry ice from the dry ice storage tank (3) into the spray gun / nozzle device (6). The high-pressure air source device (5) is connected to the spray gun / nozzle device (6) and provides power for dry ice spraying through compressed air. The spray gun / nozzle device (6) is set towards the object to be cleaned in the cleaning area. A vacuuming system (7) is provided at one end of the cleaning area and is used to vacuum the surface of the object to be cleaned after cleaning is completed.

2. The CO2 dry ice cleaning process equipment system according to claim 1, characterized in that, The dry ice storage tank (3) adopts a double-layer vacuum insulation structure and is equipped with a height monitoring device.

3. The CO2 dry ice cleaning process equipment system according to claim 1, characterized in that, The propeller (4) is a double propeller.

4. The CO2 dry ice cleaning process equipment system according to claim 1, characterized in that, The high-pressure air source device (5) is a screw air compressor.

5. The CO2 dry ice cleaning process equipment system according to claim 1, characterized in that, The spray gun / nozzle device (6) is a fan-shaped spray gun / nozzle or a circular spray gun / nozzle, and the angle is adjusted between 30° and 60°.

6. The CO2 dry ice cleaning process equipment system according to claim 1, characterized in that, The dust collection system (7) uses a pulse bag dust collection device.

7. The CO2 dry ice cleaning process equipment system according to claim 1, characterized in that, Also includes: The control system (8) is electrically connected to the trolley (2), dry ice storage tank (3), screw propeller (4), high pressure air source device (5), spray gun / nozzle device (6), and dust collection system (7).