A cylinder joint plug replacement device

Abstract

The utility model provides a gas cylinder joint plug replacement device relates to the technical field of semiconductor manufacturing, including horizontal movement mechanism, longitudinal movement mechanism and joint plug dismounting and mounting mechanism, joint plug dismounting and mounting mechanism installs in the longitudinal movement end of longitudinal movement mechanism, longitudinal movement mechanism installs in the horizontal movement end of horizontal movement mechanism. The utility model discloses by adopting automation, intelligent equipment replacement worker, realizes the plug and joint of automatic change gas cylinder, thereby reduces the artificial cost, reduces the working strength, improves the economic benefit. Avoid the high risk of valve interface exposure in the process of manual replacement, the artificial operation pollution gas purity, the larger dead volume and the operation failure risk. The health hidden danger when replacing the plug and joint of gas cylinder, guarantee the more safely of replacement, also avoid the gas leakage risk due to the negligence in the process of artificial operation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a gas cylinder connector plug replacement device. Background Technology

[0002] Electronic specialty gases are an important branch of specialty gases, and are indispensable raw materials in the production of electronic products such as integrated circuits, flat panel displays, and solar cells. Approximately 100 types of electronic gases are used in IC manufacturing, with about 30 commonly found in core processes. These gases, through different manufacturing processes, give silicon wafers semiconductor properties, and in turn determine the performance, integration density, and yield of integrated circuits. Even an excess of a single specific impurity can lead to serious quality defects. In severe cases, the diffusion of substandard gases can contaminate the entire production line, even causing a complete production shutdown. Therefore, electronic gases are key basic materials in the electronic manufacturing process, truly the "blood" of the electronics industry.

[0003] In the semiconductor manufacturing industry, chip production involves hundreds of processes, which require a large amount of specialty gases. Most of these specialty gases are flammable, explosive, highly toxic, or corrosive. To ensure the safe transport and use of these hazardous gases, semiconductor plants install electronic specialty gas systems, equipped with specialized equipment such as electronic specialty gas cabinets, gas distribution boxes, and specialty gas leak monitoring alarms.

[0004] Steel gas cylinders are containers used to store gases. In the semiconductor manufacturing industry, chip production involves hundreds of processes, requiring large quantities of specialized gases. These specialized gases need to be stored in cylinders. Most of these gases are flammable, explosive, highly toxic, or corrosive. To ensure the safe transport and use of these hazardous gases, semiconductor plants are equipped with specialized equipment such as electronic specialized gas cabinets and gas distribution boxes. Gas cylinders are housed in this specialized equipment to provide the specialized gases for semiconductor production. The flammability, explosiveness, toxicity, and corrosiveness of these gases mean that manual replacement operations pose risks, particularly the manual installation and removal of cylinder plugs and connectors. Furthermore, there are risks of using the wrong type of cylinder and gas leaks.

[0005] Manual disassembly / installation inevitably exposes valve interfaces to the workshop environment. Operator gloves, tools, and actions can all introduce particulate or molecular contaminants (AMCs) into the piping system. Replacement processes may introduce more air into the dead volume, requiring longer and higher-flow-rate purging to achieve the desired purity. Incorrect valve closing / opening sequences or loose connections can lead to leaks or backflow. Every operation carries potential risks (operational errors, improper tool use, inadequate personal protective equipment), increased risk of exposure to hazardous gases, and significant manpower costs. Utility Model Content

[0006] To address the problems existing in the prior art, at least one embodiment of this utility model provides a gas cylinder connector plug replacement device, avoiding the high risk of valve interface leakage, human error contamination of gas purity, larger dead volume, and operational errors during manual replacement. It eliminates the health hazards associated with replacing gas cylinder plugs and connectors, ensuring safer replacement and avoiding the risk of gas leakage.

[0007] This utility model embodiment proposes a gas cylinder connector plug replacement device, including a lateral moving mechanism, a longitudinal moving mechanism, and a connector plug disassembly and installation mechanism. The connector plug disassembly and installation mechanism is installed at the longitudinal moving end of the longitudinal moving mechanism, and the longitudinal moving mechanism is installed at the lateral moving end of the lateral moving mechanism. The connector plug disassembly and installation mechanism includes a plug installation and disassembly part, a connector installation and disassembly part, a first rotating mechanism, and a second rotating mechanism. The rotating end of the first rotating mechanism is connected to the plug installation and disassembly part, and the rotating end of the second rotating mechanism is connected to the connector installation and disassembly part.

[0008] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model includes a base for a lateral movement mechanism. The base is provided with a lateral guide rail, a lateral movement seat, and a lateral movement drive mechanism. A longitudinal movement mechanism is installed on the lateral movement seat. Lateral movement pairs are respectively connected to the bottom two sides of the lateral movement seat. The lateral movement pairs are connected to the lateral guide rail. The drive end of the lateral movement drive mechanism is connected to the lateral movement seat.

[0009] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model includes a lateral drive mechanism comprising a first engagement transmission mechanism mounting base, a second engagement transmission mechanism mounting base, a lateral lead screw, and a lateral moving block. The first engagement transmission mechanism mounting base is connected to the upper part of the base, and the second engagement transmission mechanism mounting base is connected to the lower part of the base. The lateral moving block is connected to the lateral lead screw and is connected to the lateral moving base. The first engagement transmission mechanism mounting base is provided with a rotatable first engagement transmission mechanism, which is connected to the lateral lead screw. The second engagement transmission mechanism mounting base is provided with a rotatable second engagement transmission mechanism and a first rotary power source. The second engagement transmission mechanism is connected to the rotation shaft of the first rotary power source, and the first engagement transmission mechanism and the second engagement transmission mechanism are connected by a synchronous belt.

[0010] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model has a limiting block on one side of the mounting base of the first meshing transmission mechanism.

[0011] In some embodiments, the gas cylinder connector plug replacement device provided by the present invention has a first position sensor on one side of the first meshing transmission mechanism mounting base for detecting the movement position of the lateral moving pair.

[0012] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model includes a mounting plate as the longitudinal moving mechanism. The mounting plate is provided with a longitudinal guide rail, a longitudinal moving seat, and a longitudinal moving drive mechanism. The connector plug disassembly and installation mechanism is installed on the longitudinal moving seat. The bottom two sides of the longitudinal moving seat are respectively connected to longitudinal moving pairs. The longitudinal moving pairs are connected to the longitudinal guide rail. The drive end of the longitudinal moving drive mechanism is connected to the longitudinal moving seat.

[0013] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model includes a longitudinal drive mechanism comprising a longitudinal lead screw, a longitudinal moving block, and a second rotary power source. The longitudinal lead screw is connected to the rotating shaft of the second rotary power source, the longitudinal moving block is connected to the longitudinal lead screw, and the longitudinal moving block is connected to the longitudinal moving seat.

[0014] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model has a second position sensor on one side of the mounting plate for detecting the movement position of the longitudinal moving pair.

[0015] In some embodiments, the mounting plate 21 is provided with a third position sensor for detecting the position of the gas cylinder outlet.

[0016] In some embodiments, the gas cylinder connector plug replacement device provided by this utility model has an angle sensor for detecting the rotation angle of the first rotating mechanism and the second rotating mechanism in the connector plug disassembly and installation mechanism.

[0017] As can be seen, the gas cylinder connector plug replacement device of this utility model replaces workers with automated and intelligent equipment, realizing the automatic replacement of gas cylinder plugs and connectors, thereby reducing labor costs, reducing labor intensity, and improving economic efficiency. It avoids the high risks of valve interface leakage, human error leading to gas purity contamination, larger dead volume, and operational errors that occur during manual replacement. It eliminates the health hazards associated with replacing gas cylinder plugs and connectors, ensuring safer replacement and avoiding the risk of gas leakage due to negligence during human operation. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 The diagram shown is a structural schematic of a gas cylinder connector plug replacement device according to an embodiment of this utility model.

[0020] Figure 2 The image shown is a front view of a gas cylinder connector plug replacement device according to an embodiment of this utility model.

[0021] The reference numerals in the accompanying drawings are as follows:

[0022] Lateral movement mechanism 1, base 11, lateral guide rail 12, lateral movement seat 13, lateral movement drive mechanism 14, first meshing transmission mechanism mounting seat 141, first meshing transmission mechanism 1411, limit block 1412, second meshing transmission mechanism mounting seat 142, second meshing transmission mechanism 1421, first rotational power source 1422, lateral lead screw 143, synchronous belt 144, lateral movement pair 15, longitudinal movement mechanism 2, mounting plate 21, longitudinal guide rail 22, longitudinal movement seat 23, longitudinal movement drive mechanism 24, connector plug disassembly and installation mechanism 3, plug installation and disassembly part 31, connector installation and disassembly part 32, first position sensor 4, second position sensor 5, third position sensor 6, angle sensor 7. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. In this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0025] In existing technologies, chip manufacturing in the semiconductor industry involves hundreds of processes, requiring the use of large quantities of specialized gases. These specialized gases need to be stored in cylinders. Most of these gases are flammable, explosive, highly toxic, or corrosive. To ensure the safe transport and use of these hazardous gases, semiconductor plants are equipped with specialized equipment such as electronic specialized gas cabinets and gas distribution boxes. Gas cylinders can be housed in such specialized equipment to provide the specialized gases for semiconductor production. However, the manual replacement of these flammable, explosive, highly toxic, and corrosive gases poses risks, particularly the manual installation and removal of cylinder plugs and connectors. Furthermore, there are risks associated with using the wrong type of cylinder and gas leakage. This embodiment provides the following solution:

[0026] like Figures 1 to 2 As shown, this embodiment provides a gas cylinder connector plug replacement device, including a lateral moving mechanism 1, a longitudinal moving mechanism 2, and a connector plug disassembly and installation mechanism 3. The connector plug disassembly and installation mechanism 3 is installed on the longitudinal moving end of the longitudinal moving mechanism 2, and the longitudinal moving mechanism 2 is installed on the lateral moving end of the lateral moving mechanism 1. The connector plug disassembly and installation mechanism 3 includes a plug installation and disassembly part 31, a connector installation and disassembly part 32, a first rotating mechanism, and a second rotating mechanism. The rotating end of the first rotating mechanism is connected to the plug installation and disassembly part 31, and the rotating end of the second rotating mechanism is connected to the connector installation and disassembly part 32.

[0027] It should be noted that the lateral direction of the connector plug removal and installation mechanism 3 is adjusted by the lateral moving mechanism 1, and the longitudinal direction is adjusted by the longitudinal moving mechanism 2. This allows the plug installation and removal part 31 and the connector installation and removal part 32 to be aligned with the gas cylinder, enabling the removal, installation, and replacement of the plug and connector on the gas cylinder. Both the first and second rotating mechanisms can use rotary transmission to rotate the plug installation and removal part 31 and the connector installation and removal part 32 respectively. Furthermore, the rotational power source can be a conventional power source such as an electric motor, hydraulic motor, or pneumatic motor, or a special power source assembled from conventional power sources using these mechanisms.

[0028] In some embodiments, the lateral moving mechanism 1 includes a base 11, which is provided with a lateral guide rail 12, a lateral moving seat 13, and a lateral moving drive mechanism 14. The longitudinal moving mechanism 2 is mounted on the lateral moving seat 13, and lateral moving pairs 15 are respectively connected to the bottom sides of the lateral moving seat 13. The lateral moving pairs 15 are connected to the lateral guide rail 12, and the drive end of the lateral moving drive mechanism 14 is connected to the lateral moving seat 13.

[0029] It should be noted that the transverse moving seat 13 is driven to move laterally on the transverse guide rail 12 by the transverse moving drive mechanism 14, thereby enabling the longitudinal moving mechanism 2 to adjust its lateral movement, and consequently, the joint plug disassembly and installation mechanism 3 to adjust its lateral movement. Furthermore, the transverse moving drive mechanism 14 can also be a linear module, a Cartesian coordinate robot, a linear slide, or a linear guide rail, etc.

[0030] In some embodiments, a first position sensor 4 for detecting the movement position of the lateral moving pair is provided on one side of the first meshing transmission mechanism mounting base 141.

[0031] Understandably, the first position sensor 4 can detect the movement position of the transverse sliding pair 15 on the transverse guide rail 12. After detecting its position, it sends a signal to the control terminal, thereby enabling more accurate control of the movement position of the transverse sliding pair 15 and increasing the accuracy of the joint plug disassembly and installation mechanism 3 in operating the gas cylinder.

[0032] In some embodiments, the lateral drive mechanism 14 includes a first engagement transmission mechanism mounting base 141, a second engagement transmission mechanism mounting base 142, a transverse lead screw 143, and a transverse moving block. The first engagement transmission mechanism mounting base 141 is connected to the upper part of the base 11, and the second engagement transmission mechanism mounting base 142 is connected to the lower part of the base 11. The transverse moving block is connected to the transverse lead screw 143 and is connected to the transverse moving seat 13. The first engagement transmission mechanism mounting base 141 is provided with a rotatable first engagement transmission mechanism 1411, which is connected to the transverse lead screw 143. The second engagement transmission mechanism mounting base 142 is provided with a rotatable second engagement transmission mechanism 1421 and a first rotary power source 1422. The second engagement transmission mechanism 1421 is connected to the rotation shaft of the first rotary power source 1422, and the first engagement transmission mechanism 1411 and the second engagement transmission mechanism 1421 are connected by a synchronous belt 144.

[0033] It should be noted that after the first rotary power source 1422 drives the second meshing transmission mechanism 1421 to rotate, it drives the first meshing transmission mechanism 1411 to rotate. The first meshing transmission mechanism 1411 drives the transverse lead screw 143 to rotate, thereby causing the transverse moving block to move laterally on the transverse lead screw 143, which in turn drives the transverse moving seat 13 to move laterally. In addition, the meshing transmission mechanism includes, but is not limited to, gear transmission, worm gear transmission, and chain transmission.

[0034] In some embodiments, a limiting block 1412 is provided on one side of the first engagement transmission mechanism mounting base 141. It is understood that the limiting block 1412 can limit the maximum movement distance of the lateral moving pair 15, prevent accidents, and thus increase the safety of the entire device.

[0035] In some embodiments, the longitudinal moving mechanism 2 includes a mounting plate 21, which is provided with a longitudinal guide rail 22, a longitudinal moving seat 23, and a longitudinal moving drive mechanism 24. A connector plug removal and installation mechanism 3 is installed on the longitudinal moving seat 23. Longitudinal moving pairs 25 are respectively connected to the bottom two sides of the longitudinal moving seat 23. The longitudinal moving pairs 25 are connected to the longitudinal guide rail 22. The drive end of the longitudinal moving drive mechanism 24 is connected to the longitudinal moving seat 23.

[0036] It should be noted that the longitudinal drive mechanism 24 drives the longitudinal moving seat 23 to move longitudinally on the longitudinal guide rail 22, thereby enabling the joint plug disassembly and installation mechanism 3 to move longitudinally and adjust. In addition, the longitudinal drive mechanism 24 can also be a linear module, a Cartesian coordinate robot, a linear slide or a linear guide rail.

[0037] In some embodiments, the longitudinal drive mechanism 24 includes a longitudinal lead screw, a longitudinal moving block, and a second rotary power source. The longitudinal lead screw is connected to the rotation shaft of the second rotary power source, the longitudinal moving block is connected to the longitudinal lead screw, and the longitudinal moving block is connected to the longitudinal moving seat 23.

[0038] It should be noted that after the second rotary power source drives the longitudinal lead screw, the longitudinal moving block moves longitudinally on the longitudinal lead screw, thereby driving the longitudinal moving seat 23 to move longitudinally.

[0039] In some embodiments, a second position sensor 5 for detecting the movement position of the longitudinal sliding pair is provided on one side of the mounting plate 21.

[0040] Understandably, the second position sensor 5 can detect the movement position of the longitudinal sliding pair 25 on the transverse guide rail 12. After detecting its position, it sends a signal to the control terminal, thereby enabling more accurate control of the movement position of the longitudinal sliding pair 25 and increasing the accuracy of the joint plug disassembly and installation mechanism 3 in operating the gas cylinder.

[0041] In some embodiments, the mounting plate 21 is provided with a third position sensor 6 for detecting the position of the gas cylinder outlet, thereby enabling the connector plug removal and installation mechanism 3 to more accurately align the position of the gas cylinder plug and connector, increasing the accuracy of disassembly, installation and replacement.

[0042] In some embodiments, the connector plug removal and installation mechanism 3 is provided with an angle sensor 7 for detecting the rotation angle of the first rotating mechanism and the second rotating mechanism.

[0043] Understandably, the angle sensor 7 can detect the rotation parameters of the first and second rotating mechanisms to ensure that the first and second rotating mechanisms will not damage the gas cylinder connector due to excessive rotation.

[0044] Using this device can reduce costs and improve economic efficiency. It reduces the number of operators and the skill requirements for workers, freeing up manpower and reducing operator hours and workload, enabling 24-hour on-call transport. Operating in a closed or controlled environment, the valve interfaces are exposed to the environment for a very short time or almost zero during the switching process. This avoids contamination of high-purity gases by personnel contact, particles introduced by tools, skin oils, exhaled gases, and other pollutants. The optimized piping design of the dedicated switching panel results in a small dead volume, allowing for faster and more thorough purging after switching, reducing residual gas mixing. Switching can be completed quickly with minimal impact on pressure and flow fluctuations in downstream GC analyzers, ensuring the continuity and stability of analytical data. It saves significant time for technicians to travel and operate. It reduces the frequency of personnel contact with high-pressure gas cylinders and valves, lowering the risk of direct exposure to physical injuries (e.g., accidental valve opening, cylinder tipping) and gas leaks (e.g., corrosive, toxic, flammable gases). It also reduces the risk of joint damage, gasket damage, and incomplete sealing caused by inconsistent torque during manual operation. Reduce the risk of leakage caused by human operation, reduce the risk of personal injury caused by leakage during human operation, and reduce the losses from repeated operations caused by improper pressure holding and leak detection during human operation.

[0045] In summary, the embodiments of this utility model provide a gas cylinder connector plug replacement device. By employing automated and intelligent equipment to replace workers, it achieves automatic replacement of gas cylinder plugs and connectors, thereby reducing labor costs, decreasing workload, and improving economic efficiency. It avoids the high risks associated with manual replacement, such as valve interface leakage, contamination of gas purity due to human error, increased dead volume, and operational errors. It eliminates the health hazards associated with replacing gas cylinder plugs and connectors, ensuring safer replacement and preventing gas leakage risks due to negligence during human operation.

[0046] The above description is merely a specific embodiment of this application, and the scope of protection of this application is not limited thereto. Those skilled in the art can make changes or substitutions within the technical scope disclosed in this application, and all such changes or substitutions should be within the scope of protection of this application.

[0047] Those skilled in the art will understand that although some embodiments described herein include certain features included in other embodiments but not others, combinations of features from different embodiments are meant to be within the scope of this invention and form different embodiments.

[0048] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A gas cylinder connector plug replacement device, characterized in that, It includes a lateral moving mechanism (1), a longitudinal moving mechanism (2), and a connector plug disassembly and installation mechanism (3). The connector plug disassembly and installation mechanism (3) is installed on the longitudinal moving end of the longitudinal moving mechanism (2), and the longitudinal moving mechanism (2) is installed on the lateral moving end of the lateral moving mechanism (1). The connector plug disassembly and installation mechanism (3) includes a plug installation and disassembly part (31), a connector installation and disassembly part (32), a first rotating mechanism, and a second rotating mechanism. The rotating end of the first rotating mechanism is connected to the plug installation and disassembly part (31), and the rotating end of the second rotating mechanism is connected to the connector installation and disassembly part (32).

2. The gas cylinder connector plug replacement device according to claim 1, characterized in that, The lateral moving mechanism (1) includes a base (11), which is provided with a lateral guide rail (12), a lateral moving seat (13), and a lateral moving drive mechanism (14). The longitudinal moving mechanism (2) is installed on the lateral moving seat (13). The bottom sides of the lateral moving seat (13) are respectively connected to lateral moving pairs (15). The lateral moving pairs (15) are connected to the lateral guide rail (12). The driving end of the lateral moving drive mechanism (14) is connected to the lateral moving seat (13).

3. The gas cylinder connector plug replacement device according to claim 2, characterized in that, The lateral drive mechanism (14) includes a first engagement transmission mechanism mounting base (141), a second engagement transmission mechanism mounting base (142), a transverse lead screw (143), and a transverse moving block. The first engagement transmission mechanism mounting base (141) is connected above the base (11), and the second engagement transmission mechanism mounting base (142) is connected below the base (11). The transverse moving block is connected to the transverse lead screw (143) and is connected to the transverse moving seat (13). The first engagement transmission mechanism mounting base (141)... 1) A rotatable first meshing transmission mechanism (1411) is provided, which is connected to the transverse lead screw (143); the second meshing transmission mechanism mounting base (142) is provided with a rotatable second meshing transmission mechanism (1421) and a first rotary power source (1422), the second meshing transmission mechanism (1421) is connected to the rotation shaft of the first rotary power source (1422), and the first meshing transmission mechanism (1411) and the second meshing transmission mechanism (1421) are connected by a synchronous belt (144).

4. The gas cylinder connector plug replacement device according to claim 3, characterized in that, A limiting block (1412) is provided on one side of the first meshing transmission mechanism mounting base (141).

5. The gas cylinder connector plug replacement device according to claim 3, characterized in that, A first position sensor (4) for detecting the movement position of the lateral moving pair is provided on one side of the first meshing transmission mechanism mounting base (141).

6. The gas cylinder connector plug replacement device according to claim 1, characterized in that, The longitudinal moving mechanism (2) includes a mounting plate (21), which is provided with a longitudinal guide rail (22), a longitudinal moving seat (23), and a longitudinal moving drive mechanism (24). The connector plug disassembly and installation mechanism (3) is installed on the longitudinal moving seat (23). The longitudinal moving seat (23) has longitudinal moving pairs (25) connected to both sides of its bottom. The longitudinal moving pairs (25) are connected to the longitudinal guide rail (22). The driving end of the longitudinal moving drive mechanism (24) is connected to the longitudinal moving seat (23).

7. The gas cylinder connector plug replacement device according to claim 6, characterized in that, The longitudinal drive mechanism (24) includes a longitudinal lead screw, a longitudinal moving block, and a second rotary power source. The longitudinal lead screw is connected to the rotation shaft of the second rotary power source. The longitudinal moving block is connected to the longitudinal lead screw and is connected to the longitudinal moving seat (23).

8. The gas cylinder connector plug replacement device according to claim 6, characterized in that, A second position sensor (5) for detecting the movement position of the longitudinal sliding pair is provided on one side of the mounting plate (21).

9. The gas cylinder connector plug replacement device according to claim 6, characterized in that, The mounting plate (21) is equipped with a third position sensor (6) for detecting the position of the gas cylinder outlet.

10. The gas cylinder connector plug replacement device according to claim 1, characterized in that, The connector plug disassembly and installation mechanism (3) is equipped with an angle sensor (7) for detecting the rotation angle of the first rotating mechanism and the second rotating mechanism.

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