Dual-arm robot

Abstract

The utility model provides a kind of double-arm manipulator, including two arm assemblies, each arm assembly includes at least one arm body and one end effector component, the end effector component of two arm assemblies is adjacent along vertical direction and has spacing.Pivot connection part is formed with a accommodating cavity, the accommodating cavity is built-in with a pulley, pulley transmission connection is in end effector component, pulley is formed with first assembly part on the side away from end effector component along its axial direction, reference inner wall is formed with second assembly part along pulley axial direction, first assembly part and second assembly part are configured as complementary fitting structure, shape adaptation makes the two axial direction partial fitting, to form space avoidance between pulley and reference inner wall, increase the vertical installation spacing between two end effector components, reserve anti-interference structure clearance for end effector component load droop, avoid scratch on end effector component and / or wafer surface in retracted state and extension rotation process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a dual-arm robotic hand. Background Technology

[0002] In the semiconductor manufacturing industry, wafer transfer is a critical step in the chip processing flow, and its transfer accuracy, stability, and surface cleanliness directly affect the chip yield and performance. As semiconductor processes advance towards higher integration levels, higher demands are placed on the reliability of transfer equipment.

[0003] Dual-arm robotic arms, as a highly efficient wafer transfer device, can significantly improve wafer transfer efficiency through the coordinated actions of upper and lower double-layer robotic fingers (such as simultaneous picking and placing or alternating transfer), and are therefore widely used in equipment for key processes such as photolithography, etching, and deposition.

[0004] In practical applications, existing dual-arm robotic arms typically have a small initial design spacing between their upper and lower layers of robotic fingers. This is usually limited by the need for a compact overall robotic arm structure. Since the robotic fingers often employ a long cantilever structure, when carrying a wafer, the fingers are prone to sagging and deforming along their length due to their own weight and the wafer load. This sagging further reduces the actual distance between the upper and lower layers of fingers, and in severe cases, the fingers may rub against each other, causing scratches on the finger surface or wafer edge. Such scratches not only contaminate the wafer surface but may also cause wafer breakage or process defects, directly affecting chip manufacturing yield and equipment operational stability.

[0005] In view of this, it is necessary to propose a dual-arm robotic hand to solve the above problems. Utility Model Content

[0006] The purpose of this utility model is to provide a dual-arm robotic hand to solve the technical problem that the upper and lower layers of mechanical fingers in a dual-arm robotic hand used for wafer transfer are too small in the initial design. When carrying the wafer, the fingers are prone to drooping and deforming due to their own weight and load, which further reduces the actual distance between the upper and lower layers of fingers and causes scratches on the fingers or wafer surface.

[0007] This invention provides a dual-arm robotic hand, comprising two arm assemblies. Each arm assembly includes components arranged along a predetermined extension direction and configured to independently perform operational tasks. Each arm assembly includes at least one arm body and an end effector assembly. The end effector assembly is pivotally connected to the arm body via a pivot connection integrally formed at the distal end of the arm body and is rotatable relative to the arm body about a pivot axis. The end effector assemblies of the two arm assemblies are adjacent in the vertical direction and have a gap; The pivot connection portion forms a receiving cavity, and a pulley is built into the receiving cavity. The pulley is driven to the end effector assembly to drive the end effector assembly to rotate about the pivot axis. A first fitting is formed on the side of the pulley away from the end effector assembly along its axial direction. A second fitting is formed on the reference inner wall of the receiving cavity facing the other arm assembly along the axial direction of the pulley. The first fitting and the second fitting are constructed as complementary fitting structures. By adapting their shapes, they partially fit together along the axial direction to create a space clearance between the pulley and the reference inner wall, increasing the vertical installation distance between the two end effector assemblies and reserving an anti-interference structural gap for the load sag of the end effector assembly.

[0008] In one possible embodiment, the pulley has a first clearance area on the side away from the end effector assembly and forms a first fitting around the first clearance area, the first fitting being a first convex ring and the second fitting being a first annular groove.

[0009] In one possible embodiment, the reference inner wall has a second clearance area along the pulley axis and forms a second fitting surrounding the second clearance area, the second fitting being a second convex ring and the first fitting being a second annular groove.

[0010] In one possible embodiment, a mandrel is formed by protruding from the middle of the reference inner wall into the receiving cavity, and the pulley is provided with a mounting hole through its axial direction, and the pulley is rotatably sleeved on the mandrel through the mounting hole. In one possible embodiment, the pulley is rotatably mounted on the spindle via a bearing. In one possible embodiment, the mandrel includes a stepped portion located in the middle of the reference inner wall and a shaft portion located at one end of the stepped portion away from the reference inner wall. The bearing is sleeved on the shaft portion and the end of the bearing is located on the stepped portion. The stepped portion is used to form a gap between the pulley and the reference inner wall. In one possible embodiment, a locking portion is formed at the end of the mounting hole away from the end effector assembly, protruding toward the center of the mounting hole. The locking portion is located at the end of the bearing away from the end effector assembly.

[0011] In one possible embodiment, the locking portion is annular; or, the locking portion consists of several portions spaced apart circumferentially along the mounting hole. In one possible embodiment, the end effector assembly has a groove at one end near the arm body, and the pulley has a protrusion on one side near the end effector assembly, the protrusion being inserted and fixed in the groove. In one possible embodiment, the pulley has a weight-reduction area on the side near the end effector assembly. The beneficial effects of the dual-arm manipulator provided by this utility model are as follows: the first and second assembly parts complement and fit together, realizing the staggered assembly of the pulley and the arm body, effectively shortening the axial space occupied. This design, without changing the thickness of the arm body and the pulley, reduces the distance between the side of the arm body away from the end effector assembly and the side of the end effector assembly away from the arm body, increases the vertical installation distance between the two end effector assemblies, and reserves an anti-interference structural gap for the end effector assembly to droop. This avoids the technical problem of scratches on the end effector assembly and / or wafer surface caused by the end effector assembly drooping and deforming due to its own weight and / or load during the arm body's retracted state and during extension and rotation. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the dual-arm robotic arm of this utility model in its retracted state.

[0013] Figure 2 This is a schematic diagram of the extended dual-arm robotic arm of this utility model.

[0014] Figure 3 This is another schematic diagram of the dual-arm robotic arm of this utility model in its retracted state.

[0015] Figure 4 This is a cross-sectional schematic diagram of the two end effector components of the dual-arm robotic arm of this utility model in the retracted state.

[0016] Figure 5 This is a cross-sectional schematic diagram of the pivot connection part of the dual-arm robotic arm of this utility model.

[0017] Figure 6 This is a cross-sectional schematic diagram of the pulley in the double-arm robotic arm of this utility model.

[0018] Explanation of reference numerals in the attached drawings: 100, arm assembly; 110, arm body; 1101, pivot connection; 111, receiving cavity; 1111, reference inner wall; 1112, first annular groove; 1113, spindle; 11131, step portion; 11132, shaft portion; 112, pulley; 1121, first clearance area; 1122, first convex ring; 1123, mounting hole; 1124, locking portion; 1125, protrusion portion; 1126, weight reduction area; 113, bearing; 114, gap; 120, end effector assembly; 121, groove; 122, main body; 123, finger; 130, vertical mounting spacing. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0020] To address the problems existing in the prior art, embodiments of this utility model provide a dual-arm robotic hand, see [link to relevant documentation]. Figure 1 , Figure 2 and Figure 3 The dual-arm robotic arm includes two arm assemblies 100. Each arm assembly 100 is arranged along a predetermined extension direction and configured to independently perform an operation task. Each arm assembly 100 includes at least one arm body 110 and an end effector assembly 120. The end effector assembly 120 is pivotally connected to the at least one arm body 110 via a pivot connection 1101 integrally formed at the distal end of the at least one arm body 110. The end effector assembly 120 is rotatable relative to the arm body 110 about a pivot axis. The end effector assemblies 120 of the two arm assemblies 100 are adjacent in the vertical direction and have a spacing between them. See also Figure 4 The pivot connection 1101 forms a receiving cavity 111, and a pulley 112 is built into the receiving cavity 111. The pulley 112 is driven to the end effector assembly 120 to drive the end effector assembly 120 to rotate around the pivot axis. A first fitting is formed on the side of the pulley 112 away from the end effector assembly 120 along its axial direction. A second fitting is formed on the reference inner wall 1111 of the receiving cavity 111 facing the other arm assembly 100 along the axial direction of the pulley 112. The first fitting and the second fitting are constructed as a complementary fitting structure. By adapting their shapes, they partially fit together along the axial direction to form a space clearance between the pulley 112 and the reference inner wall 1111, increasing the vertical installation distance 130 between the two end effector assemblies 120 and reserving an anti-interference structural gap for the load sag of the end effector assembly 120.

[0021] like Figure 1 and Figure 3As shown, even if the end effector assembly 120 does not sag, the distance between the two end effector assemblies 120 is small when they overlap in the vertical projection in the retracted state. However, in the actual manufacturing process, the end effector assembly 120 is prone to sag due to its own weight and / or load. At this time, whether the arm body 110 is retracted or in the process of the arm body 110 being extended and rotated, as long as the two end effector assemblies 120 at different height levels overlap in the vertical direction, they are prone to rubbing against each other, which will cause scratches on the end effector assembly 120 or the wafer surface.

[0022] In this embodiment, see Figure 4 A first fitting is formed on the side of the pulley 112 away from the end effector assembly 120, and a second fitting is correspondingly formed on the reference inner wall 1111 of the receiving cavity 111. The first and second fittings complement each other, realizing the staggered assembly of the pulley 112 and the arm 110. Without changing the thickness of the arm 110 and the pulley 112, the axial space occupancy is reduced, significantly improving the structural compactness of the robotic arm joint. By reducing the distance between the side of the arm 110 away from the end effector assembly 120 and the side of the end effector assembly 120 away from the arm 110, the vertical installation distance 130 between the two end effector assemblies 120 is increased. This provides a clearance for the end effector assembly 120 to prevent interference when it sags. Even if the end effector assembly 120 sags and deforms, the risk of motion interference caused by the small distance is effectively eliminated during the retracted state and the extension and rotation of the arm 110. While optimizing the movement distance, the initial installation reference plane distance is maintained to ensure compatibility with the original robotic arm system. Modular replacement can be achieved without adjusting the overall assembly dimension chain. The physical space isolation design fundamentally avoids scratches and prevents scratches on the end effector assembly 120 or the wafer surface.

[0023] The specific configuration of the first and second assemblies will be explained in detail below.

[0024] In the first embodiment, see Figure 4 A first clearance area 1121 is provided on the side of the pulley 112 away from the end effector assembly 120, and a first fitting is formed around the first clearance area 1121. The first fitting is a first protruding ring 1122, and the second fitting is a first annular groove 1112.

[0025] By creating a first clearance area 1121 on the pulley 112, a first protruding ring 1122 is formed around the first clearance area 1121. The first protruding ring 1122 on the pulley 112 is inserted into a first annular groove 1112 on the reference inner wall 1111. By utilizing the space clearance between the first annular groove 1112 and the first protruding ring 1122 of the pulley 112, an interlaced assembly of the pulley 112 and the arm body 110 is achieved, effectively shortening the axial space occupied. At the same time, the matching design of the first protruding ring 1122 and the first annular groove 1112 ensures that the pulley 112 can still rotate within the arm body 110.

[0026] In the second embodiment, the reference inner wall 1111 has a second clearance area and forms a second fitting around the second clearance area. The second fitting is a second protruding ring, and the first fitting is a second annular groove.

[0027] By creating a second clearance area on the pulley 112, a second convex ring is formed around the second clearance area. The second convex ring on the pulley 112 is inserted into a second annular groove on the reference inner wall 1111. The second annular groove provides space clearance for the second convex ring on the pulley 112, achieving an interlaced assembly of the pulley 112 and the arm body 110, effectively reducing the axial space occupied. Simultaneously, the design of the second convex ring and the second annular groove ensures that the pulley 112 can still rotate within the arm body 110.

[0028] The specific configuration of pulley 112 will be explained in detail below.

[0029] In one embodiment, see Figure 4 A mandrel 1113 protrudes from the center of the inner wall 1111 into the receiving cavity 111. The mandrel 1113 is integrally formed with the inner wall 1111. A mounting hole 1123 is provided through the pulley 112 along its axial direction. The pulley 112 is rotatably fitted onto the mandrel 1113 through the mounting hole 1123. The mandrel 1113 serves as the mounting shaft for the pulley 112, making the installation of the pulley 112 more secure and improving the stability of the overall structure. Further, see Figure 4 The pulley 112 is rotatably mounted on the spindle 1113 via the bearing 113. The bearing 113 reduces the friction between the pulley 112 and the spindle 1113, ensuring smoother rotation of the pulley 112. In one embodiment, see Figure 5The spindle 1113 includes a stepped portion 11131 located in the middle of the reference inner wall 1111 and a shaft portion 11132 located at the end of the stepped portion 11131 away from the reference inner wall 1111. The diameter of the stepped portion 11131 is larger than the diameter of the shaft portion 11132. A bearing 113 is sleeved on the shaft portion 11132, and the end of the bearing 113 is located on the stepped portion 11131. The stepped portion 11131 forms a gap 114 between the pulley 112 and the reference inner wall 1111. The shaft portion 11132 is used to sleeve and install the bearing 113. The stepped portion 11131 separates the pulley 112 from the reference inner wall 1111 and forms an isolating gap 114, preventing the pulley 112 from contacting, rubbing, or scraping against the reference inner wall 1111 during rotation. In one embodiment, see Figure 4 , Figure 5 and Figure 6 A locking portion 1124 is formed at the end of the mounting hole 1123 away from the end effector assembly 120, protruding towards the center of the mounting hole 1123. The locking portion 1124 is located at the end of the bearing 113 away from the end effector assembly 120, and the vertical thickness of the locking portion 1124 is less than the vertical thickness of the step portion 11131. On the one hand, the locking portion 1124 secures the pulley 112 to the bearing 113, enhancing the stability of the installation between the pulley 112 and the bearing 113. On the other hand, since the vertical thickness of the locking portion 1124 is less than the vertical thickness of the step portion 11131, the locking portion 1124 will not affect the gap 114 between the pulley 112 and the reference inner wall 1111.

[0030] In one specific embodiment, see Figure 6 The locking part 1124 is annular, which increases the fixed connection area between the pulley 112 and the bearing 113 and enhances the fixing effect.

[0031] In another specific embodiment, see Figure 6 The locking parts 1124 are a plurality of those distributed at circumferential intervals along the mounting holes 1123. The locking parts 1124 are block-shaped, which can enhance the locking and fixing effect while reducing the weight of the pulley 112. In one possible embodiment, see Figure 6 A weight-reduction area 1126 is provided on the side of the pulley 112 near the end effector assembly 120 to reduce the weight of the pulley 112. Further, see Figure 6 The weight reduction area 1126 is annular and surrounds the mounting hole 1123 to increase the weight reduction effect.

[0032] The specific settings of the end effector component 120 are explained in detail below.

[0033] In one embodiment, see Figure 4 The end effector assembly 120 has a groove 121 at one end near the arm body 110, and the pulley 112 has a protruding part 1125 on one side near the end effector assembly 120, which is inserted and fixed in the groove 121. On the one hand, by inserting and fixing the protruding part 1125 into the groove 121, the end effector assembly 120 can be quickly and accurately assembled into the preset assembly position on the pulley 112; on the other hand, the cooperation between the protruding part 1125 and the groove 121 can achieve horizontal limiting and fixing between the end effector assembly 120 and the pulley 112.

[0034] In another embodiment, see Figure 1 , Figure 2 and Figure 3 The end effector assembly 120 includes a U-shaped body 122 and a pair of U-shaped fingers 123. The body 122 includes a pair of integrally formed and symmetrically arranged connecting segments. The connection point of the pair of connecting segments is pivotally connected to the pivot connection portion 1101. The pair of fingers 123 are respectively located at the ends of the pair of connecting segments away from the arm body 110.

[0035] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0036] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0038] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A dual-arm robotic hand, comprising two arm assemblies (100), each arm assembly (100) comprising an arm body (110) disposed along a predetermined extension direction and configured to independently perform an operation task, each arm assembly (100) comprising at least one arm body (110) and an end effector assembly (120), the end effector assembly (120) being pivotally connected via a pivot connection (1101) integrally formed at the distal end of the arm body (110), and being rotatable relative to the arm body (110) about a pivot axis, characterized in that, The end effector assemblies (120) of the two arm assemblies (100) are adjacent in the vertical direction and have a gap; The pivot connection (1101) forms a receiving cavity (111), and a pulley (112) is built into the receiving cavity (111). The pulley (112) is motive-connected to the end effector assembly (120) to drive the end effector assembly (120) to rotate about the pivot axis. A first fitting is formed on the side of the pulley (112) away from the end effector assembly (120) along its axial direction. The receiving cavity (111) faces the other arm assembly (100). The reference inner wall (1111) of the first assembly (112) is provided with a second fitting along the axial direction of the pulley (112). The first fitting and the second fitting are constructed as complementary fitting structures. By adapting their shapes, they are partially fitted along the axial direction to form a space clearance between the pulley (112) and the reference inner wall (1111), thereby increasing the vertical installation distance (130) between the two end effector assemblies (120) and reserving an anti-interference structure gap for the load sag of the end effector assembly (120).

2. The dual-arm robotic hand according to claim 1, characterized in that, The pulley (112) has a first clearance area (1121) on the side away from the end effector assembly (120) and forms the first fitting around the first clearance area (1121). The first fitting is a first convex ring (1122), and the second fitting is a first annular groove (1112).

3. The dual-arm robotic hand according to claim 1, characterized in that, The reference inner wall (1111) has a second clearance area along the axial direction of the pulley (112) and forms a second fitting around the second clearance area. The second fitting is a second convex ring and the first fitting is a second annular groove.

4. The dual-arm robotic hand according to claim 1, characterized in that, A mandrel (1113) is formed by protruding from the middle of the reference inner wall (1111) into the receiving cavity (111). The pulley (112) is provided with a mounting hole (1123) through it along its axial direction. The pulley (112) is rotatably sleeved on the mandrel (1113) through the mounting hole (1123).

5. The dual-arm robotic hand according to claim 4, characterized in that, The pulley (112) is rotatably mounted on the spindle (1113) via a bearing (113).

6. The dual-arm robotic hand according to claim 5, characterized in that, The spindle (1113) includes a stepped portion (11131) located in the middle of the reference inner wall (1111) and a shaft portion (11132) located at one end of the stepped portion (11131) away from the reference inner wall (1111). The bearing (113) is sleeved on the shaft portion (11132) and the end of the bearing (113) is located on the stepped portion (11131). The stepped portion (11131) is used to form a gap (114) between the pulley (112) and the reference inner wall (1111).

7. The dual-arm robotic hand according to claim 5, characterized in that, The mounting hole (1123) has a locking part (1124) extending from the end of the hole wall away from the end effector assembly (120) toward the center of the mounting hole (1123). The locking part (1124) is located at the end of the bearing (113) away from the end effector assembly (120).

8. The dual-arm robotic hand according to claim 7, characterized in that, The locking part (1124) is annular; or, the locking part (1124) is a plurality of parts and is distributed circumferentially along the mounting hole (1123).

9. The dual-arm manipulator according to any one of claims 1-8, characterized in that, The end effector assembly (120) has a groove (121) at one end near the arm body (110), and the pulley (112) has a protrusion (1125) on one side near the end effector assembly (120), and the protrusion (1125) is inserted and fixed in the groove (121).

10. The dual-arm manipulator according to any one of claims 1-8, characterized in that, The pulley (112) has a weight-reduction area (1126) on the side near the end effector assembly (120).

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