Cleaning tank and spraying mechanism for robot

Abstract

The utility model belongs to the technical field of equipment cleaning, specifically relates to a kind of cleaning tank and spraying mechanism for manipulator, and the device includes: outer tank, its inside symmetry is provided with a pair of inner tank to accommodate the two gripper of manipulator;A pair of spraying mechanism is respectively arranged in outer tank and is located above corresponding inner tank;Each spraying mechanism includes internally hollow spraying plate, and the outer part of the spraying plate is respectively provided with liquid outlet, liquid inlet;Wherein the liquid inlet is connected with liquid supply pipe to be suitable for guiding cleaning fluid into the inside of spraying plate through liquid supply pipe and discharging through liquid outlet to flush gripper;By being provided with independent spraying mechanism above inner tank, it is washed to corresponding gripper by being poured into spraying plate inside by liquid supply pipe and being washed out by several liquid outlets opened on the surface of spraying plate, avoid directly immersing gripper in cleaning tank to cause mixed pollution to cleaning tank inner medicine liquid by gripper surface residual medicine liquid.

Description

Technical Field

[0001] This utility model belongs to the field of equipment cleaning technology, specifically relating to a cleaning tank and spraying mechanism for a robotic arm. Background Technology

[0002] In semiconductor manufacturing, cleaning and etching are among the core processes that directly determine chip yield and performance. Common wafer cleaning and etching equipment includes single-wafer and batch processing equipment. Batch processing equipment can process multiple wafers simultaneously, significantly increasing throughput.

[0003] In batch processing equipment, robotic arms typically carry wafers and place them in cleaning tanks containing different cleaning solutions for the cleaning process. This exposes the robotic arms to different solutions, and because these solutions have different chemical properties, residual solutions on the robotic arms are very likely to cause cross-contamination of the solutions in the cleaning tanks, resulting in chemical reactions and economic losses.

[0004] Therefore, a cleaning tank and spraying mechanism for robotic arms are designed to solve the technical problem in the prior art where the residual medicine on the surface of the grippers from the previous cleaning process cross-contaminates with the current soaking medicine when the robotic arm is immersed in the cleaning tank.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one cleaning tank and spraying mechanism for robotic arms.

[0007] In a first aspect, embodiments of this disclosure provide a cleaning tank for a robotic arm, comprising: The outer groove is U-shaped, and a pair of inner grooves are symmetrically arranged inside to accommodate the two grippers of the robot arm; A pair of spraying mechanisms are respectively installed in the outer tank and located above the corresponding inner tank; Each of the aforementioned spraying mechanisms includes a hollow spray plate, and the exterior of the spray plate is respectively provided with a liquid outlet and a liquid inlet; wherein The inlet is connected to the supply pipe to allow cleaning fluid to be introduced into the interior of the spray plate through the supply pipe and discharged through the outlet to rinse the grippers.

[0008] In one optional embodiment, both ends of the spray plate are connected to the outer wall of the inner tank; The number of liquid outlets is several, and each of the liquid outlets is arranged in an array along the length of the spray plate.

[0009] In one optional embodiment, the liquid supply pipe includes a liquid supply port and two connection ports; wherein Each of the aforementioned connection ports is connected to its corresponding liquid inlet; and The liquid supply port penetrates the outer wall of the outer tank.

[0010] In one optional embodiment, a pair of air-blowing mechanisms are provided inside the outer groove, each of the air-blowing mechanisms comprising: A pair of hollow connecting plates, both connected to the inner wall of the outer groove; Several air intake pipes are symmetrically distributed between the two connecting plates, and several air outlets are opened on the opposite side of each pair of symmetrically distributed air intake pipes; and At least one of the connecting plates has an air inlet on its outer wall; wherein The air inlet is adapted to introduce external air into the interior of the connecting plate and each air inlet pipe and discharge it through each air outlet to blow air and dry the grippers.

[0011] In one optional embodiment, an air supply pipe is provided inside the outer tank; wherein The air supply pipe penetrates the outer wall of the outer groove, and one end of the air supply pipe is connected to the air inlet, while the other end is provided with an air supply port.

[0012] In one optional embodiment, a flow equalization mesh plate is provided at the bottom of the inner tank so that the cleaning liquid deposited in the inner tank passes through the flow equalization mesh plate and enters the outer tank. The bottom of the outer tank is connected to an outlet via a pipe to discharge the cleaning fluid from the outer tank.

[0013] On the other hand, this disclosure also provides a spraying mechanism, including: Several spray plates, the number corresponding to the number of grippers in the robotic arm, and each spray plate has a liquid outlet and a liquid inlet on its exterior; wherein The inlet is connected to the supply pipe to allow cleaning fluid to be introduced into the interior of the spray plate through the supply pipe and discharged through the outlet to rinse the grippers.

[0014] In one optional embodiment, both ends of each of the spray plates are connected to the outer wall of the inner tank; The spray plates have a number of liquid outlets, and the liquid outlets are arranged in an array along the length of the spray plate.

[0015] In one optional embodiment, the liquid supply pipe includes a liquid supply port and two connection ports; wherein Each of the aforementioned connection ports is connected to its corresponding liquid inlet; and The liquid supply port penetrates the outer wall of the outer tank.

[0016] The beneficial effect of this utility model is that the cleaning tank has an independent spraying mechanism set above the inner tank. The cleaning liquid is poured into the inside of the spray plate through the liquid supply pipe and flows out from several liquid outlets on the surface of the spray plate to rinse the corresponding claws. This avoids directly immersing the claws in the cleaning tank, which would cause residual liquid on the surface of the claws to mix and contaminate the liquid in the cleaning tank.

[0017] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description, claims, and drawings.

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the overall three-dimensional structure provided in the embodiments of this disclosure; Figure 2 This is a top view of the cleaning tank provided in an embodiment of the present disclosure; Figure 3 A three-dimensional structural diagram of the inner groove and its surrounding components provided in an embodiment of this disclosure; Figure 4 This is a three-dimensional structural diagram of the spray plate provided in an embodiment of this disclosure; Figure 5 This is a three-dimensional structural diagram of the air blowing mechanism provided in an embodiment of this disclosure.

[0021] In the picture: 1. Cleaning tank; 10. Outer tank; 11. Inner tank; 110. Flow equalization screen; 2. Air blowing mechanism; 20. Air inlet pipe; 21. Connecting plate; 22. Air outlet; 23. Air inlet; 3. Gas inlet; 30. Gas supply pipe; 4. Liquid supply port; 40. Liquid supply pipe; 400. Connection port; 5. Liquid outlet; 6. Spraying mechanism; 60. Spray plate; 61. Liquid inlet; 62. Liquid outlet. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of the components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0024] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0025] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0026] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0027] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0028] Research has found that cleaning and etching is one of the core processes in semiconductor manufacturing, directly determining chip yield and performance. Common wafer cleaning and etching equipment includes single-wafer equipment and batch equipment. Batch equipment can process multiple wafers simultaneously, greatly increasing throughput. In batch equipment, a robotic arm typically carries the wafers and places them in cleaning tanks containing different cleaning solutions for the cleaning process. This exposes the robotic arm to different solutions. Due to the different chemical properties of these solutions, residual solutions on the robotic arm may cause cross-contamination of the solutions in the cleaning tanks, resulting in chemical reactions and economic losses.

[0029] Based on the above research, this disclosure provides a cleaning tank for a robotic arm. By setting an independent spraying mechanism above the inner tank, cleaning liquid is poured into the inside of the spray plate through a liquid supply pipe, and flows out from several liquid outlets on the surface of the spray plate to rinse the corresponding grippers. This avoids directly immersing the grippers in the cleaning tank, which would cause residual liquid on the gripper surface to mix and contaminate the liquid in the cleaning tank.

[0030] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0032] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] In some embodiments, such as Figure 1 and Figure 2 As shown, the distance between the two inner grooves 11 symmetrically arranged inside the outer groove 1 is equal to the distance between the two grippers 70 in the robot arm 7. When the two grippers 70 need to be cleaned, the operator controls the robot arm 7 to move along the F1 direction until the two grippers 70 are inserted into the corresponding inner grooves 11, and the spray mechanism 6 is used to spray and rinse the surface of the two grippers 70.

[0034] In some embodiments, such as Figures 2 to 4 As shown, the liquid supply port 4 is connected to the cleaning liquid storage tank (not shown in the figure). The cleaning liquid enters the liquid supply pipe 40 through the liquid supply port 4, and is introduced into the corresponding spray plate 60 through the two connection ports 400. Finally, it is sprayed out from the several liquid outlets 62 opened on the surface of each spray plate 60. As the corresponding gripper 70 moves, the surface of the gripper 70 is sprayed and cleaned.

[0035] In some embodiments, such as Figure 3 and Figure 5 As shown, the two connecting plates 21 in the air blowing mechanism 2 are set on the inner wall of the outer groove 10 and located above the corresponding spray plate 60. A gap is left between several air inlet pipes 20 symmetrically arranged between the two connecting plates 21 so that the gripper 70 can pass through. When the gripper 70 is reset after being sprayed and cleaned, the external air source (not shown in the figure) is connected to the air supply port 3. The gas enters the interior of the connecting plate 21 through the air supply pipe 30. The air inlet pipe 20 is hollow and connected to the interior of the connecting plate 21. After the gas enters the air inlet pipe 20, it is discharged through the air outlet 22 to blow air onto the surface of the gripper 70, so as to avoid residual cleaning liquid on the surface of the gripper 70 and contamination of the wafer to be gripped later.

[0036] In some embodiments, such as Figures 1 to 3As shown, a flow equalization screen 110 is provided at the bottom of the inner tank 11. The flow equalization screen 110 is detachable. Depending on the cleaning conditions required for the surface of the gripper 70, when the gripper 70 holds the wafer and is placed in a cleaning tank with different cleaning solutions, the flow equalization screen 110 is placed at the bottom of the inner tank 11 for cleaning the gripper 70 under these conditions. The cleaning solution flowing out of the outlet 62 sprays onto the surface of the gripper 70 and falls into the inner tank 11, then flows through the flow equalization screen 110 to the outer tank 10. The flow equalization screen 110 promotes the circulation and renewal of the cleaning solution, preventing impurities from accumulating at the bottom of the inner tank 11. When the gripper 70 holds the wafer and is placed in a cleaning tank with different cleaning solutions, the flow equalization screen 110 is placed at the bottom of the inner tank 11. For cleaning the grippers 70 in the same solution, the flow equalization plate 110 is replaced with a square base plate and placed at the bottom of the inner tank 11, so that the bottom of the inner tank 11 is closed and the cleaning solution flowing out of the outlet 62 is deposited in the inner tank 11. The grippers 70 are immersed in the cleaning solution in the inner tank 11 for soaking and cleaning, saving the use of cleaning solution. Several guide grooves 110 are started on the upper end face of the inner tank 11. When the grippers 70 are immersed in the inner tank 11, the overflowing cleaning solution can be guided through the guide grooves 110 to overflow the inner tank 11 and enter the inner tank 10, and finally discharged from the outlet 5 set at the bottom of the outer tank 10.

[0037] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0038] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0039] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0040] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0041] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A cleaning tank for a robotic arm, characterized in that, include: The outer groove (10) is U-shaped, and a pair of inner grooves (11) are symmetrically arranged inside to accommodate the two grippers (70) of the robot arm (7). A pair of spraying mechanisms (6) are respectively installed in the outer tank (10) and located above the corresponding inner tank (11); Each of the spraying mechanisms (6) includes a hollow spray plate (60), and the outside of the spray plate (60) is provided with a liquid outlet (62) and a liquid inlet (61); wherein The inlet (61) is connected to the supply pipe (40) to allow the cleaning fluid to be introduced into the interior of the spray plate (60) through the supply pipe (40) and discharged through the outlet (62) to rinse the gripper (70).

2. The cleaning tank for a robotic arm as described in claim 1, characterized in that, Both ends of the spray plate (60) are connected to the outer wall of the inner tank (11); The number of liquid outlets (62) is several, and each of the liquid outlets (62) is arranged in an array along the length direction of the spray plate (60).

3. The cleaning tank for a robotic arm as described in claim 2, characterized in that, The liquid supply pipe (40) includes a liquid supply port (4) and two connection ports (400); wherein Each of the aforementioned connection ports (400) is connected to a corresponding liquid inlet (61); and The liquid supply port (4) penetrates the outer wall of the outer tank (10).

4. The cleaning tank for a robotic arm as described in claim 1, characterized in that, The outer groove (10) is provided with a pair of air blowing mechanisms (2), each of the air blowing mechanisms (2) including: A pair of hollow connecting plates (21) are both connected to the inner wall of the outer groove (10); Several air intake pipes (20) are symmetrically distributed between the two connecting plates (21), and several air outlets (22) are opened on the opposite side of each pair of symmetrically distributed air intake pipes (20); and At least one of the connecting plates (21) has an air inlet (23) on its outer wall; wherein The air inlet (23) is adapted to introduce external air into the interior of the connecting plate (21) and each air inlet pipe (20) and discharge it through each air outlet (22) to blow air onto the gripper (70) for drying.

5. The cleaning tank for a robotic arm as described in claim 4, characterized in that, An air supply pipe (30) is provided inside the outer tank (10); wherein The air supply pipe (30) penetrates the outer wall of the outer groove (10), and one end of the air supply pipe (30) is connected to the air inlet (23), while the other end is provided with an air supply port (3).

6. The cleaning tank for a robotic arm as described in claim 1, characterized in that, The bottom of the inner tank (11) is provided with a flow equalization mesh plate (110) so that the cleaning liquid deposited in the inner tank (11) can pass through the flow equalization mesh plate (110) and enter the outer tank (10); The bottom of the outer tank (10) is connected to a liquid outlet (5) via a pipe to discharge the cleaning liquid in the outer tank (10).

7. A spraying mechanism, characterized in that, include: A number of spray plates (60) are provided, the number of which corresponds to the number of grippers (70) in the robotic arm (7), and each of the spray plates (60) is provided with an outlet (62) and an inlet (61) on its exterior; wherein The inlet (61) is connected to the supply pipe (40) to allow the cleaning fluid to be introduced into the interior of the spray plate (60) through the supply pipe (40) and discharged through the outlet (62) to rinse the gripper (70).

8. The spraying mechanism as described in claim 7, characterized in that, Both ends of each of the spray plates (60) are connected to the outer wall of the inner tank (11); The number of liquid outlets (62) opened on each of the spray plates (60) is several, and each of the liquid outlets (62) is arranged in an array along the length direction of the spray plate (60).

9. The spraying mechanism as described in claim 8, characterized in that, The liquid supply pipe (40) includes a liquid supply port (4) and two connection ports (400); wherein Each of the aforementioned connection ports (400) is connected to a corresponding liquid inlet (61); and The liquid supply port (4) penetrates the outer wall of the outer tank (10).

Images