Substrate warpage correction device

Abstract

The utility model provides a kind of substrate warping correction device, comprising: upper fixed plate and lower fixed plate;Lower fixed plate includes first baffle, second baffle and first bottom plate, and first baffle and second baffle are arranged at the two sides of first bottom plate, and upper fixed plate includes third baffle and fourth baffle, and third baffle and fourth baffle are arranged at the two sides of second bottom plate;First baffle and corresponding third baffle are each provided with recess and protrusion, second baffle and corresponding fourth baffle are each provided with recess and protrusion, recess and corresponding protrusion between each recess and each protrusion are concave-convex cooperation, first baffle and third baffle form self-locking structure, and second baffle and fourth baffle form self-locking structure, and substrate is firmly fixed between upper and lower fixed plate.The utility model passes through the self-locking structure formed by upper and lower fixed plate, bans traditional adhesive curing process, reaches the effect of product stress shaping and product frame protection, and makes double-effect contribution to quality improvement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging, and in particular to a substrate warpage correction device. Background Technology

[0002] Semiconductor packaging is a key process for encapsulating and protecting integrated circuit chips and connecting them to external circuits. Its technological evolution directly affects chip performance, integration level, and reliability.

[0003] The current packaging industry uses adhesive to bond the substrate and retaining ring, and then uses thermosetting to achieve the shaping effect of the retaining ring on the substrate. Although small-size packaging can achieve the expected reliability performance of substrate shaping, with the breakthrough of large-size advanced packaging technology, the product size is getting larger and larger, and the stress effect is becoming more obvious and difficult to control. For stress shaping correction of large-size advanced packaging, traditional retaining rings have the risk of breaking off. Therefore, it is necessary to find an alternative to traditional processes as soon as possible.

[0004] Therefore, how to provide a substrate warpage correction device that can improve the reliability of shaping has become one of the problems that urgently need to be solved in this field.

[0005] It should be noted that the above introduction to the technical background is only for the purpose of providing a clear and complete explanation of the technical solutions of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that these technical solutions are known to those skilled in the art simply because they have been described in the background section of this utility model. Utility Model Content

[0006] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a substrate warping correction device to solve the problem of low reliability of the substrate correction device in the prior art.

[0007] To achieve the above and other related objectives, this utility model provides a substrate warpage correction device, which includes at least: an upper fixing plate and a lower fixing plate; a substrate is fixed between the upper fixing plate and the lower fixing plate, and the middle area of ​​the upper fixing plate is hollowed out to expose the working area of ​​the substrate; the lower fixing plate includes a first stop bar, a second stop bar, and a first base plate; the first stop bar includes a first groove and a first protrusion formed from bottom to top, with the protrusion direction of the first protrusion facing downward; the second stop bar includes a second groove and a second protrusion formed from bottom to top, with the protrusion direction of the second protrusion facing downward; the first stop bar is located on a first side of the first base plate, and the second stop bar is located on the opposite side of the first base plate; The upper fixing plate includes a third stop strip, a fourth stop strip, and a second base plate; the third stop strip includes a third groove and a third protrusion formed from top to bottom, with the recessed direction of the third groove facing downwards; the fourth stop strip includes a fourth groove and a fourth protrusion formed from top to bottom, with the recessed direction of the fourth groove facing downwards; the third stop strip is located on the first side of the second base plate, and the fourth stop strip is located on the opposite side of the first side of the second base plate; the first stop strip corresponds to the third stop strip, and the first groove and the third protrusion, as well as the first protrusion and the third groove, each engage in a concave-convex fit; the second stop strip corresponds to the fourth stop strip, and the second groove and the fourth protrusion, as well as the second protrusion and the fourth groove, each engage in a concave-convex fit.

[0008] Optionally, the first base plate is a rectangular plate.

[0009] Optionally, the second base plate is a U-shaped plate.

[0010] Optionally, the middle area of ​​the first base plate is hollowed out, and the hollowed-out areas of the first base plate and the second base plate correspond to each other; the first side of the substrate is fixed in the space formed by the first base plate, the second base plate, the first baffle and the third baffle, and the opposite side of the first side is fixed in the space formed by the first base plate, the second base plate, the third baffle and the fourth baffle.

[0011] Alternatively, the first base plate is a U-shaped plate.

[0012] Optionally, the opening of the first groove faces the side of the substrate, and the opening of the second groove faces the side away from the substrate.

[0013] Optionally, the first groove and the second groove have the same shape.

[0014] Alternatively, the first protrusion may have the same shape as the second protrusion.

[0015] Optionally, the first groove is a trapezoidal groove or a rectangular groove, and / or the second groove is a trapezoidal groove or a rectangular groove.

[0016] Optionally, the first protrusion is a triangular protrusion, and / or the second protrusion is a triangular protrusion.

[0017] As described above, the substrate warpage correction device of this utility model has the following beneficial effects:

[0018] 1. This utility model has grooves and protrusions on the first stop strip of the lower fixed plate and the corresponding third stop strip of the upper fixed plate, and grooves and protrusions on the second stop strip of the lower fixed plate and the corresponding fourth stop strip of the upper fixed plate. This makes the first stop strip and the third stop strip form a self-locking structure, and the second stop strip and the fourth stop strip form a self-locking structure. Therefore, this utility model has the advantages of strong bonding while correcting the warping of the substrate, and has high shaping reliability. It is difficult for the upper and lower fixed plates to fall off, which can protect the edge of the substrate well. Attached Figure Description

[0019] Figure 1 The diagram shown is a structural schematic of the substrate correction device of this utility model.

[0020] Figure 2 The image shown is a perspective view of the substrate correction device in this utility model.

[0021] Figure 3 The diagram shown is a structural schematic of the first stop bar in this utility model.

[0022] Figure 4 The diagram shown is a structural schematic of the second stop bar in this utility model.

[0023] Figure 5 The diagram shown is a structural schematic of the third stop bar in this utility model.

[0024] Figure 6 The diagram shown is a structural schematic of the fourth stop bar in this utility model.

[0025] Figure 7 The diagram shows a combination of the first and third stop bars in this utility model.

[0026] Figure 8 The diagram shows a combination of the second and fourth baffles in this invention.

[0027] Component designation explanation

[0028] 1. Lower fixing plate

[0029] 2. Upper fixing plate

[0030] 3 substrate

[0031] 1a First base plate

[0032] 1b First stop bar

[0033] 1c Second gear

[0034] 11 First Groove

[0035] 12 First protrusion

[0036] 13 Second Groove

[0037] 14 Second protrusion

[0038] 2a Second base plate

[0039] 2b Third stop

[0040] 2c Fourth gear

[0041] 21 Third Groove

[0042] 22 Third protrusion

[0043] 23 Fourth Groove

[0044] 24 Fourth protrusion Detailed Implementation

[0045] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0046] Please see Figures 1-8 It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0047] Example 1

[0048] like Figure 1 As shown, this embodiment provides a substrate warping correction device, including: an upper fixing plate 2 and a lower fixing plate 1.

[0049] like Figure 1 As shown, a substrate 3 is fixed between the upper fixing plate 2 and the lower fixing plate 1. The middle area of ​​the upper fixing plate 2 is hollowed out to expose the working area of ​​the substrate 3.

[0050] Specifically, in this embodiment, such as Figure 1 As shown, the lower fixing plate 1 and the upper fixing plate 2 clamp the substrate 3, which can correct the warping of the substrate 3. In order not to affect the normal operation of the substrate 3, as follows: Figure 2 As shown, the middle area of ​​the upper fixing plate 2 is hollowed out, exposing the working area of ​​the substrate 3 in the hollowed-out area of ​​the upper fixing plate 2.

[0051] like Figure 1 As shown, the lower fixing plate 1 includes a first stop bar 1b, a second stop bar 1c, and a first base plate 1a; the first stop bar 1b includes a first groove 11 and a first protrusion 12 formed from bottom to top, with the protrusion direction of the first protrusion 12 facing downward; the second stop bar 1c includes a second groove 13 and a second protrusion 14 formed from bottom to top, with the protrusion direction of the second protrusion 14 facing downward; the first stop bar 1b is located on the first side of the first base plate 1a, and the second stop bar 1c is located on the opposite side of the first side of the first base plate 1a.

[0052] Specifically, in this embodiment, such as Figure 3 As shown, in the first stop bar 1b, the first protrusion 12 is formed above the first groove 11, as... Figure 4 As shown, in the second stop bar 1c, the second protrusion 14 is formed above the second groove 13, and to better achieve the fixing effect, the first stop bar 1b and the second stop bar 1c are arranged opposite each other based on the first base plate 1a. Further, to better fix the substrate 3 on the first base plate 1a, the lower fixing plate 1 may also include a fifth stop bar and a sixth stop bar; wherein, the first base plate 1a can be a rectangular plate, and the first base plate 1a can also have a hollowed-out middle area, and the hollowed-out areas of the first base plate 1a and the second base plate 2a correspond to each other; as an example, the first base plate 1a can be a U-shaped plate, and in practical applications, the specific shape of the first base plate 1a is determined according to needs, not limited to this embodiment. Furthermore, when the first base plate 1a is hollowed out, as... Figure 1 As shown, the first side of the substrate 3 is fixed in the space formed by the first base plate 1a, the second base plate 2a, the first baffle 1b and the third baffle 2b, and the opposite side of the first side of the substrate 3 is fixed in the space formed by the first base plate 1a, the second base plate 2a, the second baffle 1c and the fourth baffle 2c.

[0053] Specifically, in this embodiment, in order to more smoothly assemble the upper fixing plate 2 onto the lower fixing plate 1, as follows: Figure 3 As shown, the opening of the first groove 11 faces the side where the base plate 3 is located between the upper and lower fixing plates, and the protrusion direction of the first protrusion 12 points towards the opening side of the first groove 11, as shown. Figure 4As shown, the opening of the second groove 13 faces away from the position of the substrate 3 between the upper and lower fixing plates, and the protrusion direction of the second protrusion 14 points towards the opening of the second groove 13. Furthermore, the shape and size of the first groove 11 and the second groove 13 can be set to be the same, and the shape and size of the first protrusion 12 and the second protrusion 14 can be set to be the same. For example, as... Figure 3 and Figure 4 As shown, the first groove 11 is either a trapezoidal or rectangular groove (the upper and lower sides of the trapezoidal groove are not significantly different, allowing the third protrusion 22 to be inserted into the first groove 11 based on the material's toughness). The second groove 13 is also either a trapezoidal or rectangular groove (the upper and lower sides of the trapezoidal groove are not significantly different, allowing the fourth protrusion 24 to be inserted into the second groove 13 based on the material's toughness). The first protrusion 12 is a triangular protrusion, and the second protrusion 14 is a triangular protrusion. In practical applications, the specific shapes of the first and second grooves and the first and second protrusions are set according to actual needs and are not limited to this embodiment.

[0054] like Figure 1 As shown, the upper fixing plate 2 includes a third stop bar 2b, a fourth stop bar 2c, and a second base plate 2a; the third stop bar 2b includes a third groove 21 and a third protrusion 22 formed from top to bottom, with the recessed direction of the third groove 21 facing downward; the fourth stop bar 2c includes a fourth groove 23 and a fourth protrusion 24 formed from top to bottom, with the recessed direction of the fourth groove 23 facing downward; the third stop bar 2b is located on the first side of the second base plate 2a, and the fourth stop bar 2c is located on the opposite side of the first side of the second base plate 2a.

[0055] Specifically, in this embodiment, such as Figure 5 As shown, in the third stop bar 2b, the third protrusion 22 is formed below the third groove 21, as... Figure 6 As shown, in the fourth stop bar 2c, the fourth protrusion 24 is formed below the fourth groove 23, and to better achieve the fixing effect, the third stop bar 2b and the fourth stop bar 2c are arranged opposite each other based on the second base plate 2a. Furthermore, to better fix the substrate 3 between the first base plate 1a and the second base plate 2a, the upper fixing plate 2 may also include a seventh stop bar and an eighth stop bar. As an example, the second base plate 2a is a U-shaped plate; in practical applications, the specific shape of the second base plate 2a can be set as needed, and is not limited to this embodiment.

[0056] Specifically, in this embodiment, in order to cooperate Figure 3 and Figure 4 The first and second grooves and the first and second protrusions shown are, as Figure 5 and Figure 6As shown, the opening of the third groove 21 faces away from the position where the substrate 3 is located between the upper and lower fixing plates, the protrusion of the third protrusion 22 faces the opening of the third groove 21, the opening of the fourth groove 23 faces the position where the substrate 3 is located between the upper and lower fixing plates, and the protrusion of the fourth protrusion 24 faces the opening of the fourth groove 23. Furthermore, when the shapes and sizes of the first and second grooves are the same, the shapes and sizes of the third protrusion 22 and the fourth protrusion 24 are also the same; when the shapes and sizes of the first and second protrusions are the same, the shapes and sizes of the third groove 21 and the fourth groove 23 are also the same. As an example, such as... Figure 5 and Figure 6 As shown, the third groove 21 is a triangular groove, the fourth groove 23 is a triangular groove, the third protrusion 22 is either a rectangular protrusion or a trapezoidal protrusion, and the fourth protrusion 24 is either a rectangular protrusion or a trapezoidal protrusion. In practical applications, the specific shapes of the third and fourth grooves and the third and fourth protrusions are set according to actual needs and are not limited to this embodiment.

[0057] like Figure 1 As shown, the first stop bar 1b corresponds to the third stop bar 2b, and the first groove 11 and the third protrusion 22, and the first protrusion 12 and the third groove 21 are respectively in concave-convex fit; the second stop bar 1c corresponds to the fourth stop bar 2c, and the second groove 13 and the fourth protrusion 24, and the second protrusion 14 and the fourth groove 23 are respectively in concave-convex fit.

[0058] Specifically, in this embodiment, such as Figure 7 As shown, the first groove 11 corresponds to the third protrusion 22, and the first protrusion 12 corresponds to the third groove 21, as... Figure 8 As shown, the second groove 13 corresponds to the fourth protrusion 24, and the second protrusion 14 corresponds to the fourth groove 23. Through the mutual interlocking of the grooves and protrusions, the first stop bar 1b and the third stop bar 2b can be tightly joined together, and the second stop bar 1c and the fourth stop bar 2c can be tightly joined together, thus fixing the substrate 3 between the upper fixing plate 2 and the lower fixing plate 1. As an example, the lower fixing plate 1 also includes a cuboid fifth and sixth stop bar, with the first, second, fifth, and sixth stop bars connected end-to-end to enclose the first base plate 1a. The upper fixing plate 2 also includes a cuboid seventh and eighth stop bar, with the third, fourth, seventh, and eighth stop bars connected end-to-end to enclose the second base plate 2a. After the substrate 3 is placed on the first base plate 1a, the upper fixing plate 2 and the lower fixing plate 1 complete the fixing of the substrate 3 and correct any warping of the substrate 3 by inserting the groove and protrusion of the third stop bar 2b into the groove and protrusion of the first stop bar 1b, and by inserting the groove and protrusion of the fourth stop bar 2c into the groove and protrusion of the second stop bar 1c. In practical applications, the upper fixing plate 2 can be installed on the lower fixing plate 1 as needed, and is not limited to this embodiment.

[0059] In summary, the substrate warpage correction device of this utility model includes: an upper fixing plate and a lower fixing plate; the lower fixing plate includes a first stop bar, a second stop bar, and a first base plate, with the first and second stop bars disposed on both sides of the first base plate; the upper fixing plate includes a third stop bar and a fourth stop bar, with the third and fourth stop bars disposed on both sides of the second base plate; the first stop bar and the corresponding third stop bar are provided with grooves and protrusions, and the second stop bar and the corresponding fourth stop bar are also provided with grooves and protrusions. The grooves and protrusions fit together, forming a self-locking structure between the first and third stop bars, and a self-locking structure between the second and fourth stop bars, firmly fixing the substrate between the upper and lower fixing plates. This utility model, through the self-locking structure formed by the upper and lower fixing plates, eliminates the traditional adhesive bonding and curing process, achieving the effects of product stress shaping and product edge protection, making a dual contribution to quality improvement. Therefore, this utility model effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0060] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A substrate warpage correction device, characterized in that, The substrate warpage correction device includes at least: an upper fixing plate and a lower fixing plate; A substrate is fixed between the upper fixing plate and the lower fixing plate, and the middle area of ​​the upper fixing plate is hollowed out to expose the working area of ​​the substrate; The lower fixing plate includes a first stop bar, a second stop bar, and a first base plate; the first stop bar includes a first groove and a first protrusion formed from bottom to top, the protrusion direction of the first protrusion is downward; the second stop bar includes a second groove and a second protrusion formed from bottom to top, the protrusion direction of the second protrusion is downward; the first stop bar is located on a first side of the first base plate, and the second stop bar is located on the opposite side of the first base plate. The upper fixing plate includes a third stop bar, a fourth stop bar, and a second base plate; the third stop bar includes a third groove and a third protrusion formed from top to bottom, with the recessed direction of the third groove facing downward; the fourth stop bar includes a fourth groove and a fourth protrusion formed from top to bottom, with the recessed direction of the fourth groove facing downward; the third stop bar is located on the first side of the second base plate, and the fourth stop bar is located on the opposite side of the first side of the second base plate; The first stop bar corresponds to the third stop bar, and the first groove and the third protrusion, as well as the first protrusion and the third groove, are respectively in a concave-convex fit; the second stop bar corresponds to the fourth stop bar, and the second groove and the fourth protrusion, as well as the second protrusion and the fourth groove, are respectively in a concave-convex fit.

2. The substrate warpage correction device according to claim 1, characterized in that: The first base plate is a rectangular plate.

3. The substrate warpage correction device according to claim 1, characterized in that: The second base plate is a spiral-shaped plate.

4. The substrate warpage correction device according to claim 1, characterized in that: The middle area of ​​the first base plate is hollowed out, and the hollowed-out areas of the first base plate and the second base plate correspond to each other; the first side of the substrate is fixed in the space formed by the first base plate, the second base plate, the first baffle and the third baffle, and the opposite side of the first side is fixed in the space formed by the first base plate, the second base plate, the third baffle and the fourth baffle.

5. The substrate warpage correction device according to claim 4, characterized in that: The first base plate is a U-shaped plate.

6. The substrate warpage correction device according to claim 1, characterized in that: The opening of the first groove faces the side of the substrate, and the opening of the second groove faces the side away from the substrate.

7. The substrate warpage correction device according to claim 1, characterized in that: The first groove has the same shape as the second groove.

8. The substrate warpage correction device according to claim 7, characterized in that: The first protrusion has the same shape as the second protrusion.

9. The substrate warpage correction device according to claim 1, characterized in that: The first groove is a trapezoidal groove or a rectangular groove, and / or the second groove is a trapezoidal groove or a rectangular groove.

10. The substrate warpage correction device according to claim 1, characterized in that: The first protrusion is a triangular protrusion, and / or the second protrusion is a triangular protrusion.

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