Cooling structure of differential pressure coating machine
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- DEKEMO HUADA MECHANICAL DONGGUAN
- Filing Date
- 2025-08-04
- Publication Date
- 2026-08-07
AI Technical Summary
[0006]但是上述这种冷却方式会存在如下缺陷:对反应腔上的加热管进行吹风冷却,其不可避免的会吸尘和扬尘,其不可避免导致压差披覆机外部产生灰尘,从而容易导致灰尘落入到膜片底部的粘胶上,从而导致披覆质量差
[0019]1.本实用新型的通过反应仓装置和工作台装置闭合设置,在反应腔内形成一个密闭空间,在反应腔的第一加热管一侧空间内(该一侧空间内,膜片是朝上设置,朝上的膜片处没有粘胶),然后在该一侧空间内,通过冷却气源通入,使得第一加热管温度下降,其具有如下两个优点:
Smart Images

Figure CN224602295U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of differential pressure coating machines, and in particular to a cooling structure for a differential pressure coating machine. Background Technology
[0002] The working principle of the differential pressure coating machine is as follows: During the coating production, in the reaction chamber formed by the mold closing: 1. There is adhesive at the bottom of the film; 2. Vacuum treatment is performed on the upper and lower ends of the film; 3. The film is heated and kept warm for a certain period of time; 4. High pressure gas is introduced into the upper end of the film to form a pressure difference, and the film is coated onto the surface of the workpiece through the pressure difference.
[0003] For example, the patent document number for this differential pressure coating machine is CN115339090A; the patent title is: Chinese invention patent application for a differential pressure coating machine.
[0004] Currently, after the differential pressure coating machine completes the current coating operation, although the heating tubes on the machine are turned off, they are not cooled down and remain at a high temperature in the reaction chamber. When the differential pressure coating machine needs to perform the next coating operation, the membrane to be coated will be exposed to the high-temperature environment first, which can easily cause the surface temperature of the membrane to rise and be detected by the temperature control sensor in advance, thus completing the differential pressure coating operation early. However, in reality, the membrane needs a certain heating range and heating time to ensure the coating quality. Because no cooling is performed, the coating quality is likely to be poor.
[0005] Therefore, in the existing technology, the conventional cooling method is adopted in the market, that is, after the differential pressure coating machine completes the current coating work, the heating tube on the reaction chamber is directly cooled by blowing air through the air.
[0006] However, the cooling method described above has the following drawbacks: blowing air to cool the heating tubes on the reaction chamber will inevitably draw in and disperse dust, which will inevitably cause dust to be generated outside the differential pressure coating machine. This dust will easily fall onto the adhesive at the bottom of the membrane, resulting in poor coating quality. Utility Model Content
[0007] The present invention discloses a cooling structure for a differential pressure coating machine. The purpose of this invention is to overcome the aforementioned defects in the prior art and provide a cooling structure for a differential pressure coating machine. When the reaction chamber device and the worktable device are closed, a cooling gas source is introduced into the sealed reaction chamber to directly contact and cool the first heating tube inside the reaction chamber. The cooling gas source is then drawn in by a vacuum suction component, thereby forming a cooling cycle in the sealed reaction chamber. This achieves cooling of the first heating tube on the reaction chamber while avoiding dust accumulation, thus preventing dust from affecting the membrane coating process and ensuring coating quality.
[0008] To achieve the above objectives, this utility model provides a cooling structure for a differential pressure coating machine, including a frame, a reaction chamber device mounted on the frame, and a worktable device that is openable and closable relative to the reaction chamber device. The reaction chamber device is equipped with a plurality of air blowing valves for connecting to a cooling air source. A reaction chamber is opened inside the reaction chamber device, and a vacuum suction assembly is installed on the reaction chamber. A first heating pipe is installed at one end of the reaction chamber. A flow channel plate and a perforated plate are sequentially arranged between the first heating pipe and the corresponding end of the reaction chamber. The plurality of air blowing valves are sequentially connected to the reaction chamber end, the flow channel plate, the perforated plate, and the reaction chamber.
[0009] Preferably, several of the air blowing valves are installed on the top of the reaction chamber device, and the flow channel plate, the air hole plate and the first heating tube are sequentially arranged on the top of the reaction chamber.
[0010] Preferably, the flow channel plate has several flow channel areas corresponding to the number of air blowing valves, and the several flow channel areas are connected to the several air blowing valves one by one.
[0011] Preferably, the flow channel area includes a flow channel hole connected to the air blowing valve, a first main flow channel on one side of the flow channel hole and a second main flow channel on the other side of the flow channel hole. One end of the first main flow channel is connected to a first branch flow channel, and one end of the second main flow channel is connected to a second branch flow channel. The first branch flow channel and the second branch flow channel are respectively connected to the air orifice plate.
[0012] Preferably, the first branch channel includes four first H-shaped sub-channels that are respectively connected to one end of the first main channel, and the first H-shaped sub-channels are provided with four first sub-channel holes that are connected to the orifice plate. The second branch channel is provided with four second H-shaped sub-channels that are respectively connected to one end of the second main channel, and the second H-shaped sub-channels are provided with four second sub-channel holes that are connected to the orifice plate.
[0013] Preferably, the perforated plate has a plurality of evenly arranged air holes that are connected to the flow channel plate.
[0014] Preferably, the first heating tube includes a plurality of heating tubes that are evenly distributed and arranged in a serpentine bend.
[0015] Preferably, the reaction chamber includes an upper reaction chamber and a lower reaction chamber located at the bottom of the upper reaction chamber, with the flow channel plate, the vent plate and the first heating tube located on the upper reaction chamber.
[0016] Preferably, the device further includes a high-pressure air intake assembly installed on the upper reaction chamber; the high-pressure air intake assembly includes a high-pressure air valve installed on the reaction chamber device and used to connect to a high-pressure air source, and a high-pressure air hole opened on the upper reaction chamber, wherein the high-pressure air valve is connected to the high-pressure air hole; the vacuum suction assembly includes a vacuum suction valve installed on the reaction chamber device, an upper suction hole opened on the upper reaction chamber, and a lower suction hole opened on the lower reaction chamber, wherein the vacuum suction valve is connected to the upper suction hole and the lower suction hole respectively.
[0017] Preferably, the workbench device is equipped with a workpiece placement platform and a membrane placement platform installed above the workpiece placement platform. The reaction chamber is equipped with a temperature control sensor for temperature control detection of the membrane on the membrane placement platform. The top of the reaction chamber device is equipped with a first drive module for driving the reaction chamber device to reciprocate up and down. The bottom of the workpiece placement platform is equipped with a second drive module for driving the workpiece placement platform to reciprocate up and down.
[0018] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0019] 1. This utility model, through the closed arrangement of the reaction chamber device and the worktable device, forms a sealed space within the reaction chamber. In the space on one side of the first heating tube of the reaction chamber (where the diaphragm is facing upwards and there is no adhesive on the upward-facing diaphragm), cooling gas is introduced to lower the temperature of the first heating tube. This has the following two advantages:
[0020] A. This avoids poor membrane coating quality caused by an initial temperature rise on the upper surface of the membrane, and provides the membrane with a wider heating range and a certain heating time;
[0021] B. Cooling gas is introduced into the space on one side of the reaction chamber, and the vacuum suction component recovers the cooling gas, so as to complete the cooling cycle in the closed space of the reaction chamber and avoid the situation where dust is raised due to the circulation of cooling air, which affects the quality of membrane coating.
[0022] 2. This utility model enables the vacuum suction component of the differential pressure coating machine to simultaneously perform vacuum suction and cooling gas source recovery functions, without the need to set up a cooling gas source recovery structure on the differential pressure coating machine structure. This facilitates manufacturing, effectively saves manufacturing costs, and effectively saves manufacturing space.
[0023] 3. This utility model has a large cooling area for the first heating tube, uniform cooling, direct cooling contact, and a large adjustable cooling rate, thereby achieving rapid cooling and improving production efficiency.
[0024] 4. The blower valve of this utility model can adjust the air volume of the cooling air source, and will not generate dust inside the reaction chamber, thus having no impact on the high requirements of dust point forming of the coated workpiece. Attached Figure Description
[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0026] Figure 1 This is a schematic diagram of the cooling structure of a differential pressure coating machine provided in Embodiment 1 of this utility model;
[0027] Figure 2 This is an exploded structural diagram of the cooling structure (frame omitted) of a differential pressure coating machine provided in Embodiment 1 of this utility model;
[0028] Figure 3 This is a schematic diagram of the reaction chamber device (the first drive module is omitted) provided in Embodiment 1 of this utility model;
[0029] Figure 4 This is an exploded structural diagram of the reaction chamber device (with the first drive module omitted) provided in Embodiment 1 of this utility model;
[0030] Figure 5 This is a structural schematic diagram of the top of the reaction chamber device (the first drive module is omitted) provided in Embodiment 1 of this utility model from one perspective;
[0031] Figure 6 This is a structural schematic diagram of the top of the reaction chamber device (with the first drive module omitted) provided in Embodiment 1 of this utility model from another perspective;
[0032] Figure 7 This is a schematic diagram of the structure of the perforated plate provided in Embodiment 1 of this utility model;
[0033] Figure 8 This is a schematic diagram of the structure of the first heating tube provided in Embodiment 1 of this utility model;
[0034] Figure 9 This is a schematic diagram of the reaction chamber provided in Embodiment 1 of this utility model.
[0035] The diagram includes:
[0036] 1. Frame; 2. Reaction chamber assembly; 20. Inlet valve; 21. Blowing valve; 22. Reaction chamber; 221. Upper reaction chamber; 222. Lower reaction chamber; 23. Flow channel plate; 230. Flow channel area; 2300. Flow channel hole; 2301. First main flow channel; 2302. Second main flow channel; 2303. First branch flow channel; 2304. Second branch flow channel; 2305. First H-shaped sub-flow channel; 2306. Second H-shaped sub-flow channel; 2307. ... 1. Sub-flow channel hole; 2308. Second sub-flow channel hole; 24. Vent plate; 240. Air blowing hole; 251. First heating tube; 252. Second heating tube; 26. Vacuum suction assembly; 260. Vacuum suction valve; 261. Upper suction hole; 262. Lower suction hole; 272. High pressure air hole; 28. Temperature control sensor; 3. Worktable device; 31. Workpiece placement stage; 32. Diaphragm placement stage; 4. First drive module; 5. Second drive module. Detailed Implementation
[0037] The technical solution of this embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiment is one embodiment of the present invention, and not all embodiments thereof. Based on this embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0038] Example 1:
[0039] Please see Figures 1 to 9 Embodiment 1 of this utility model provides a cooling structure for a differential pressure coating machine, including a frame 1, a reaction chamber device 2 mounted on the frame 1, and a workbench device 3 that is openable and closable relative to the reaction chamber device 2. The reaction chamber device 2 is equipped with a plurality of air blowing valves 21 for connecting to a cooling gas source. A reaction chamber 22 is provided inside the reaction chamber device 2. A vacuum suction assembly 26 is mounted on the reaction chamber 22. A first heating pipe 251 is installed at one end of the reaction chamber 22. A flow channel plate 23 and a perforated plate 24 are sequentially arranged between the first heating pipe 251 and the corresponding end of the reaction chamber 22. The plurality of air blowing valves 21 are sequentially connected to the above-mentioned end of the reaction chamber 22, the flow channel plate 23, the perforated plate 24 and the reaction chamber 22.
[0040] The reaction chamber device 2 is equipped with several air inlet valves 20 corresponding to the number of air blowing valves 21. The air inlet valves 20 are connected between the cooling air source and the air blowing valves 21.
[0041] The cooling gas source (not shown in the attached figure) is existing technology. The cooling gas source can be nitrogen or cold air, etc., and the cooling gas source can be stored in a gas storage tank (not shown in the attached figure).
[0042] Several air blowing valves 21 are installed on the top of the reaction chamber device 2, and the flow channel plate 23, the air hole plate 24 and the first heating pipe 251 are sequentially arranged on the top of the reaction chamber 22. The reaction chamber 22 is equipped with a second heating pipe 252 around its perimeter.
[0043] The flow channel plate 23 is located at one end of the reaction chamber 22. The flow channel plate 23 is integrally formed with one end of the reaction chamber 22 or is designed to be assembled separately. The vent plate 24 is installed at one end of the flow channel plate 23. In addition, the vent plate 24 can also be made of reflective material, and the vent plate 24 can have reflective properties to uniformly reflect the heat radiated by the first heating tube 251.
[0044] The flow channel plate 23 has several flow channel areas 230 corresponding to the number of air blowing valves 21, and the several flow channel areas 230 are connected to the several air blowing valves 21 one by one.
[0045] Each flow channel region 230 includes a flow channel hole 2300 connected to the air blowing valve 21, a first main flow channel 2301 on one side of the flow channel hole 2300, and a second main flow channel 2302 on the other side of the flow channel hole 2300. One end of the first main flow channel 2301 is connected to a first branch flow channel 2303, and one end of the second main flow channel 2302 is connected to a second branch flow channel 2304. The first branch flow channel 2303 and the second branch flow channel 2304 are respectively connected to the air vent plate 24.
[0046] The first branch channel 2303 includes four first H-shaped sub-channels 2305 that are respectively connected to one end of the first main channel 2301. The first H-shaped sub-channels 2305 are provided with four first sub-channel holes 2307 that are connected to the vent plate 24. The second branch channel 2304 is provided with four second H-shaped sub-channels 2306 that are respectively connected to one end of the second main channel 2302. The second H-shaped sub-channels 2306 are provided with four second sub-channel holes 2308 that are connected to the vent plate 24.
[0047] The perforated plate 24 has a plurality of uniformly arranged air holes 240 that are connected to the flow channel plate 23. Further, the number of air holes 240 corresponds to the sum of the number of (a plurality of first sub-flow channel holes 2307 and a plurality of second sub-flow channel holes 2308), and each first sub-flow channel hole 2307 has a corresponding air hole 240 connected to it, and each second sub-flow channel hole 2308 has a corresponding air hole 240 connected to it.
[0048] The reaction chamber 22 includes an upper reaction chamber 221 and a lower reaction chamber 222 located at the bottom of the upper reaction chamber 221. The flow channel plate 23, the vent plate 24 and the first heating tube 251 are located on the upper reaction chamber 221.
[0049] The first heating tube 251 includes several heating tubes that are evenly distributed and arranged in a serpentine pattern. The serpentine arrangement of the heating tubes facilitates uniform heating of the upper reaction chamber 221.
[0050] The cooling structure of the differential pressure coating machine according to Embodiment 1 of this utility model further includes a high-pressure air intake assembly installed on the upper reaction chamber 221.
[0051] The high-pressure air intake assembly includes a high-pressure air valve (not shown in the attached drawings) installed on the reaction chamber device 2 and used to connect to a high-pressure air source, and a high-pressure air port 272 opened on the upper reaction chamber 221. The high-pressure air valve is connected to the high-pressure air port 272.
[0052] The vacuum suction assembly 26 includes a vacuum suction valve 260 installed on the reaction chamber device 2, an upper suction port 261 opened on the upper reaction chamber 221, and a lower suction port 262 opened on the lower reaction chamber 222. The vacuum suction valve 260 is connected to the upper suction port 261 and the lower suction port 262 respectively.
[0053] The high-pressure gas source is existing technology and can be nitrogen or other gases. It can be stored in a high-pressure gas storage tank (not shown in the attached diagram). The vacuum extraction valve 260 can be connected to a recovery gas tank (not shown in the attached diagram) for gas recovery, or it can be connected to the outside to discharge the gas outdoors.
[0054] The workbench device 3 is equipped with a workpiece placement platform 31 and a membrane placement platform 32 installed above the workpiece placement platform 31. The reaction chamber 22 is equipped with a temperature control sensor 28 for temperature control detection of the membrane on the membrane placement platform 32. The top of the reaction chamber device 2 is equipped with a first drive module 4 for driving the reaction chamber device 2 to reciprocate up and down. The bottom of the workpiece placement platform 31 is equipped with a second drive module 5 for driving the workpiece placement platform 31 to reciprocate up and down.
[0055] The first drive module 4 and the second drive module 5 mentioned above are existing technologies of differential pressure coating machines, and will not be described in detail here.
[0056] The working principle of the cooling structure of the differential pressure coating machine in Embodiment 1 of this utility model is as follows:
[0057] S1: Closing stage: The first drive module 4 drives the reaction chamber device 2 to descend, so that the reaction chamber device 2 and the worktable device 3 are closed. During the closing stage, the membrane placement stage 32 is located between the upper reaction chamber 221 and the lower reaction chamber 222, that is, the membrane placement stage 32 separates the upper reaction chamber 221 and the lower reaction chamber 222 into two independent spaces (the airflow is not flowing between these two independent spaces), and the workpiece placement stage 31 is located in the lower reaction chamber 222.
[0058] S2: Simultaneous Vacuuming and Cooling Stage: Vacuum evacuation valve 260 evacuates air from the upper evacuation port 261 of the upper reaction chamber 221 and the lower evacuation port 262 of the lower reaction chamber 222, causing the upper and lower reaction chambers 221 to reach a certain vacuum state. Simultaneously, a cooling gas source is introduced into the upper reaction chamber 221: i.e., cooling gas source -> inlet valve 20 -> blowing valve 21 -> one end of reaction chamber 22 (blowing valve 21 is inserted into one end of reaction chamber 22) -> flow channel plate 23 (first flows into flow channel hole 2300 -> first main flow channel 2301, second main flow channel 2302 -> first branch flow channel 2303, second branch flow channel 2304 -> four first H-shaped sub-flow channels 2305). Four second H-shaped sub-channels 2306 -> first sub-channel hole 2307, second sub-channel hole 2308 -> air blowing hole 240 of vent plate 24 -> first heating tube 251 and second heating tube 252 of reaction chamber 22, thereby effectively cooling the first heating tube 251, the second heating tube 252 (which are the main heat sources and will still retain a certain amount of heat after the previous coating work) and the reaction chamber 22 (secondary heat source) uniformly and directly contact cooling, thereby effectively reducing the surface temperature of the film on the film placement stage 32, thus providing a wider heating range and more heating time for film heating in the following S3 step, thereby making the coating forming effect better;
[0059] S3: Heating stage: When both the upper reaction chamber 221 and the lower reaction chamber 222 reach a certain vacuum state, the cooling gas supply is stopped, the vacuum pumping valve 260 is closed, and the first heating tube 251 and the second heating tube 252 are started to heat the membrane on the membrane placement stage 32.
[0060] S4: Coating Stage: Temperature sensor 28 detects the temperature of the membrane on membrane placement stage 32. When the membrane reaches a certain temperature, the first heating tube 251 and the second heating tube 252 stop heating. The second drive module 5 drives the workpiece placement stage 31 to move upward and closer to the membrane placement stage 32, so that the top of the workpiece abuts the bottom of the membrane. Finally, the high-pressure gas valve opens, and the high-pressure gas source enters the upper reaction chamber 221 through the high-pressure gas port 272. At this time, the upper reaction chamber 221 is under high pressure, and the lower reaction chamber 222 is under vacuum. The high-pressure gas source coats the membrane onto the workpiece.
[0061] The advantages of the cooling structure of the differential pressure coating machine in Embodiment 1 of this utility model are as follows: During the coating operation, before heating the membrane, the first heating tube 251 and the second heating tube 252 in the sealed upper reaction chamber 221 are cooled down. This has two advantages: First, it avoids the membrane coating quality being poor due to the initial temperature rise of the upper surface of the membrane, and provides the membrane with a wider heating range and a certain heating time. Second, in the sealed upper reaction chamber 221, the cooling gas source is introduced, and the vacuum suction component 26 recovers the cooling gas source, realizing the cooling cycle within the sealed upper reaction chamber 221, and avoiding the situation where dust is stirred up due to the air circulation during the cooling cycle, affecting the membrane coating quality.
[0062] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.
Claims
1. A cooling structure for a differential pressure coating machine, comprising a frame (1), characterized in that, It also includes a reaction chamber device (2) mounted on the frame (1) and a workbench device (3) that is open and closed relative to the reaction chamber device (2). The reaction chamber device (2) is equipped with a plurality of air blowing valves (21) for connecting to a cooling gas source. The reaction chamber device (2) has a reaction chamber (22) inside. The reaction chamber (22) is equipped with a vacuum suction assembly (26). A first heating tube (251) is installed at one end of the reaction chamber (22). A flow channel plate (23) and a vent plate (24) are sequentially arranged between the first heating tube (251) and the corresponding end of the reaction chamber (22). The plurality of air blowing valves (21) are sequentially connected to the reaction chamber (22), the flow channel plate (23), the vent plate (24) and the reaction chamber (22).
2. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, Several of the aforementioned air blowing valves (21) are installed on the top of the reaction chamber device (2), and the flow channel plate (23), the air hole plate (24) and the first heating pipe (251) are sequentially arranged on the top of the reaction chamber (22).
3. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, The flow channel plate (23) has a number of flow channel areas (230) corresponding to the number of air blowing valves (21), and the number of flow channel areas (230) are connected to the number of air blowing valves (21) one by one.
4. The cooling structure of a differential pressure coating machine according to claim 3, characterized in that, The flow channel area (230) includes a flow channel hole (2300) connected to the air blowing valve (21), a first main flow channel (2301) on one side of the flow channel hole (2300) and a second main flow channel (2302) on the other side of the flow channel hole (2300). One end of the first main flow channel (2301) is connected to a first branch flow channel (2303), and one end of the second main flow channel (2302) is connected to a second branch flow channel (2304). The first branch flow channel (2303) and the second branch flow channel (2304) are respectively connected to the air vent plate (24).
5. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, The first branch channel (2303) includes four first H-shaped sub-channels (2305) that are respectively connected to one end of the first main channel (2301). The first H-shaped sub-channels (2305) are provided with four first sub-channel holes (2307) that are connected to the vent plate (24). The second branch channel (2304) is provided with four second H-shaped sub-channels (2306) that are respectively connected to one end of the second main channel (2302). The second H-shaped sub-channels (2306) are provided with four second sub-channel holes (2308) that are connected to the vent plate (24).
6. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, The perforated plate (24) has a number of uniformly arranged air holes (240) that are connected to the flow channel plate (23).
7. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, The first heating tube (251) includes several heating tubes that are evenly distributed and arranged in a serpentine bend.
8. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, The reaction chamber (22) includes an upper reaction chamber (221) and a lower reaction chamber (222) located at the bottom of the upper reaction chamber (221). The flow channel plate (23), the vent plate (24) and the first heating tube (251) are located on the upper reaction chamber (221).
9. The cooling structure of a differential pressure coating machine according to claim 8, characterized in that, It also includes a high-pressure air intake assembly (27) installed on the upper reaction chamber (221); The high-pressure air intake assembly (27) includes a high-pressure air valve (271) installed on the reaction chamber device (2) and used to connect with a high-pressure air source, and a high-pressure air hole (272) opened on the upper reaction chamber (221). The high-pressure air valve (271) is connected to the high-pressure air hole (272). The vacuum suction assembly (26) includes a vacuum suction valve (260) installed on the reaction chamber device (2), an upper suction port (261) opened on the upper reaction chamber (221), and a lower suction port (262) opened on the lower reaction chamber (222). The vacuum suction valve (260) is connected to the upper suction port (261) and the lower suction port (262) respectively.
10. The cooling structure of a differential pressure coating machine according to claim 1, characterized in that, The workbench device (3) is equipped with a workpiece placement platform (31) and a membrane placement platform (32) installed above the workpiece placement platform (31). The reaction chamber (22) is equipped with a temperature control sensor (28) for temperature control detection of the membrane on the membrane placement platform (32). The top of the reaction chamber device (2) is equipped with a first drive module (4) for driving the reaction chamber device (2) to reciprocate up and down. The bottom of the workpiece placement platform (31) is equipped with a second drive module (5) for driving the workpiece placement platform (31) to reciprocate up and down.
Citation Information
Patent Citations
Differential pressure coating machine
CN115339090A