Reaction chamber device with cooling function and differential pressure coating machine thereof

Abstract

The utility model discloses a reaction bin device with cooling function and pressure difference coating machine, it includes: one: reaction bin device with cooling function, including reaction bin casing and reaction cavity, be equipped with heating assembly on reaction cavity, reaction bin casing includes first board piece and second board piece, first board piece inside is provided with first internal circulation cooling flow channel and / or at least one second board piece inside is provided with second internal circulation cooling flow channel, be equipped with first inlet and outlet valve assembly on reaction bin casing and / or be equipped with second inlet and outlet valve assembly on reaction bin casing, and first inlet and outlet valve assembly includes first inlet valve and first outlet valve, and second inlet and outlet valve assembly includes second inlet valve and second outlet valve, two: pressure difference coating machine, including above -mentioned reaction bin device with cooling function, placement platform, first elevating gear, advantage: avoid the influence of the cooling medium source of leakage to the forming quality of diaphragm and workpiece.

Description

Technical Field

[0001] This utility model relates to the technical field of reaction chamber devices and differential pressure coating machines, and particularly to a reaction chamber device with cooling function and a differential pressure coating machine. Background Technology

[0002] A differential pressure coating machine, as the name suggests, has a diaphragm at the top and a workpiece at the bottom. The air pressure at the top of the diaphragm is greater than the air pressure at the bottom of the workpiece, thus causing the diaphragm to be coated onto the workpiece. For the specific structure of the differential pressure coating machine, please refer to the Chinese invention patent application with patent document number CN115339090A and patent title: A Differential Pressure Coating Machine.

[0003] After the differential pressure coating work is completed, the reaction chamber in the reaction chamber of the differential pressure coating machine needs to be cooled down to facilitate the next process and ensure the quality of the next process.

[0004] The current market method for cooling the reaction chamber is as follows: after the differential pressure coating work of the differential pressure coating machine is completed, the reaction chamber device and the placement platform are opened, and then air is blown into the reaction chamber by a blower or other equipment to achieve air exchange and achieve a cooling effect. However, the drawback of using a blower or other equipment to blow air into the reaction chamber is that when the blower blows air to exchange air, airflow is formed near the placement platform. The airflow easily attracts dust, causing dust particles to fall or adhere to the bottom adhesive of the membrane, resulting in poor molding quality and a high scrap rate in the next process. Utility Model Content

[0005] The purpose of this invention is to overcome the above-mentioned defects in the prior art and provide a reaction chamber device with a cooling function and its differential pressure coating machine. It has a cooling function to dissipate heat from the inside of the reaction chamber on the reaction chamber shell. At the same time, heat dissipation is carried out through the first internal circulation cooling channel and / or the second internal circulation cooling channel. The cooling medium used for heat dissipation will not leak out of the outside of the reaction chamber shell or the inside of the reaction chamber, thereby avoiding the leakage of cooling medium source from affecting the forming of the membrane and the workpiece, thus ensuring the forming quality of the membrane and the workpiece in the next process and resulting in a high yield.

[0006] To achieve the above objectives, this utility model is accomplished through the following two aspects:

[0007] In a first aspect, this utility model provides a reaction chamber device with a cooling function, including a reaction chamber shell and a reaction chamber opened inside the reaction chamber shell. The reaction chamber is equipped with a heating component. The reaction chamber shell includes a first plate installed on the top of the reaction chamber and a second plate installed around the reaction chamber. The first plate has a first internal circulation cooling channel and / or at least one of the second plates has a second internal circulation cooling channel. The reaction chamber shell is equipped with a first inlet / outlet valve assembly and / or the reaction chamber shell is equipped with a second inlet / outlet valve assembly corresponding to the number of second internal circulation cooling channels. The first inlet / outlet valve assembly includes a first inlet valve connected to one end of the first internal circulation cooling channel and a first outlet valve connected to the other end of the first internal circulation cooling channel. The second inlet / outlet valve assembly includes a second inlet valve connected to one end of the second internal circulation cooling channel and a second outlet valve connected to the other end of the second internal circulation cooling channel.

[0008] Preferably, the heating assembly includes a first heating tube installed inside the first plate and / or at least one second heating tube installed inside the second plate, wherein the number of the second heating tubes corresponds to the number of the second internal circulation cooling channels.

[0009] Preferably, a first reflector is installed between the first plate and the first heating tube, and a second reflector is installed between the second plate and the second heating tube.

[0010] Preferably, the reaction chamber shell further includes an outer shell, the outer shell having a first cavity and a second cavity at the bottom of the first cavity, four second plates forming an inner annular plate, the inner annular plate being fitted onto the first cavity, the first plates being mounted on the top of the first cavity, the reaction chamber including an upper reaction chamber and a lower reaction chamber at the bottom of the upper reaction chamber, the area formed between the inner annular plate and the first plates being the upper reaction chamber, and the second cavity being the lower reaction chamber.

[0011] Preferably, the first inlet valve is inserted into one side wall of the first plate and connected to one end of the first internal circulation cooling channel; the first outlet valve is inserted into the other side wall of the first plate and connected to the other end of the first internal circulation cooling channel; the second inlet valve is inserted into one side of the top of the first plate and connected to one end of the second internal circulation cooling channel; and the second outlet valve is inserted into the other side of the top of the first plate and connected to the other end of the second internal circulation cooling channel.

[0012] Preferably, the first internal circulation cooling channel and the second internal circulation cooling channel are respectively in the form of a serpentine continuous structure.

[0013] Preferably, the first inlet valve and the second inlet valve are respectively connected to the cooling medium source, and the first outlet valve and the second outlet valve are respectively connected to the medium collector.

[0014] Secondly, this utility model provides a differential pressure coating machine, including a reaction chamber device with cooling function as described in the first aspect and a placement platform installed below the reaction chamber device. The top of the reaction chamber device with cooling function is equipped with a first lifting device, which is used to drive the reaction chamber device with cooling function to move up and down reciprocally so as to realize the closing or separation of the reaction chamber device and the placement platform.

[0015] Preferably, the reaction chamber shell is equipped with a vacuum pump, the reaction chamber has a vacuum suction port connected to the vacuum pump, the reaction chamber shell is equipped with a high-pressure air pump, the reaction chamber has a high-pressure air port connected to the high-pressure air pump, and the reaction chamber is equipped with a temperature sensor for measuring the temperature of the diaphragm on the placement stage.

[0016] Preferably, the placement platform includes a first placement seat for placing a workpiece, a second placement seat mounted above the first placement seat for placing a diaphragm, and a second lifting device mounted at the bottom of the first placement seat for driving the first placement seat to reciprocate up and down along the direction of the second placement seat.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0018] 1. This utility model discloses a reaction chamber device with cooling function and its differential pressure coating machine. It achieves cooling and heat dissipation of the corresponding first plate by introducing cooling medium through a first inlet valve, allowing the cooling medium to flow into a first internal circulation cooling channel, and recovering the cooling medium through a first outlet valve. Alternatively, it achieves cooling and heat dissipation of the corresponding second plate by introducing cooling medium through a second inlet valve, allowing the cooling medium to flow into a second internal circulation cooling channel, and recovering the cooling medium through a second outlet valve. Ultimately, this cools and dissipates heat to the reaction chamber inside the reaction chamber shell. During this process, the cooling medium used for heat dissipation will not leak out of the reaction chamber shell or the reaction chamber, thus preventing leaked cooling medium from affecting the molding of the membrane and workpiece. This ensures the molding quality of the membrane and workpiece in the next process, resulting in a high yield rate.

[0019] 2. Further analysis shows that the first plate and / or the second plate are located in the upper reaction chamber of the reaction chamber, the first heating pipe is installed inside the first plate and / or the second heating pipe is installed inside the second plate, and the main heat-generating area is in the upper reaction chamber. The reaction chamber device with cooling function and its differential pressure coating machine of this utility model cool and dissipate heat to the upper reaction chamber through the first internal circulation cooling channel and / or the second internal circulation cooling channel, so that the cooling is more concentrated, the cooling range is smaller, the cooling efficiency is higher, and the energy saving is greater.

[0020] 3. Further analysis shows that the first inlet valve, the first outlet valve, the second inlet valve, and the second outlet valve are all installed on the first plate of the reaction chamber shell (located on the outside of the first plate), which effectively prevents the cooling medium from leaking into the reaction chamber, thereby eliminating the impact of the cooling medium leaking into the reaction chamber on the molding process.

[0021] 4. Further analysis shows that when the reaction chamber device with cooling function of this utility model is performing cooling work, the placement platform of its differential pressure coating machine is not affected by airflow, thus having no impact on the high requirements of dust-free forming of the coated workpiece. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of a differential pressure coating machine provided in Embodiment 2 of this utility model;

[0024] Figure 2 This is a schematic diagram of the placement platform provided in Embodiment 2 of this utility model;

[0025] Figure 3 This is a schematic diagram of the reaction chamber device and the first lifting device provided in Embodiment 2 of this utility model;

[0026] Figure 4 These are schematic diagrams of the reaction chamber device provided in Embodiments 1 and 2 of this utility model;

[0027] Figure 5 This is a schematic diagram of the decomposed structure of the reaction chamber device provided in Embodiment 1 and Embodiment 2 of this utility model;

[0028] Figure 6 This is a schematic diagram of the exploded structure of the reaction chamber device provided in Embodiment 1 and Embodiment 2 of this utility model, showing another exploded state.

[0029] Figure 7 This is a structural schematic diagram of the top of the reaction chamber shell from one of the perspectives provided in Embodiment 1 and Embodiment 2 of this utility model;

[0030] Figure 8 This is a structural schematic diagram of the top of the reaction chamber shell provided in Embodiment 1 and Embodiment 2 of this utility model from another perspective;

[0031] Figure 9 It is about Figure 7 A schematic diagram of the sectioning of the first plate 14 by the central sectioning line AA;

[0032] Figure 10 These are schematic diagrams of the inner annular plate provided in Embodiment 1 and Embodiment 2 of this utility model;

[0033] Figure 11 It is about Figure 10 A schematic diagram of the sectioning of the second plate 15 by the central sectioning line BB;

[0034] Figure 12 These are schematic diagrams of the outer shell provided in Embodiment 1 and Embodiment 2 of this utility model.

[0035] The diagram includes:

[0036] 1. Reaction chamber assembly; 10. Reaction chamber shell; 101. Outer shell; 102. Inner annular plate; 11. First inlet / outlet valve assembly; 111. First inlet valve; 112. First outlet valve; 12. Second inlet / outlet valve assembly; 121. Second inlet valve; 122. Second outlet valve; 13. Reaction chamber; 131. Upper reaction chamber; 132. Lower reaction chamber; 135. First reflector; 136. Second reflector; 139. Pin hole; 14. First plate; 15, Second plate; 17, First internal circulation cooling channel; 18, Second internal circulation cooling channel; 191, First heating tube; 192, Second heating tube; 2, Placement platform; 21, First placement seat; 22, Second placement seat; 3, First lifting device; 4, Second lifting device; 60, Vacuum pump; 61, Vacuum suction port; 611, Upper vacuum suction port; 612, Lower vacuum suction port; 70, High-pressure air port; 80, Temperature sensor. Detailed Implementation

[0037] The technical solution of this embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiment is one embodiment of the present invention, and not all embodiments thereof. Based on this embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] Example 1:

[0039] Please see Figures 4 to 12 Embodiment 1 of this utility model provides a reaction chamber device with a cooling function, including a reaction chamber shell 10 and a reaction cavity 13 formed inside the reaction chamber shell 10. A heating assembly is installed on the reaction cavity 13. The reaction chamber shell 10 includes a first plate 14 installed on the top of the reaction cavity 13 and a second plate 15 installed around the reaction cavity 13. A first internal circulation cooling channel 17 is formed inside the first plate 14 and / or at least one second internal circulation cooling channel 18 is formed inside the second plate 15. A first internal circulation cooling channel 17 is formed on the reaction chamber shell 10. A first inlet / outlet valve assembly 11 and / or a reaction chamber housing 10 are equipped with a second inlet / outlet valve assembly 12 corresponding to the number of second internal circulation cooling channels 18. The first inlet / outlet valve assembly 11 includes a first inlet valve 111 connected to one end of the first internal circulation cooling channel 17 and a first outlet valve 112 connected to the other end of the first internal circulation cooling channel 17. The second inlet / outlet valve assembly 12 includes a second inlet valve 121 connected to one end of the second internal circulation cooling channel 18 and a second outlet valve 122 connected to the other end of the second internal circulation cooling channel 18.

[0040] The heating assembly includes a first heating tube 191 installed inside the first plate 14 and / or at least one second heating tube 192 installed inside the second plate 15, the number of second heating tubes 192 corresponding to the number of second internal circulation cooling channels 18.

[0041] A first reflector 135 is installed between the first plate 14 and the first heating tube 191, and a second reflector 136 is installed between the second plate 15 and the second heating tube 192. The function of the first reflector 135 and the second reflector 136 is to reflect the heat light from the first heating tube 191 and / or the second heating tube 192, so that the heat inside the reaction chamber 13 is uniform.

[0042] The reaction chamber housing 10 further includes an outer housing 101. A first cavity is provided inside the outer housing 101, and a second cavity is provided at the bottom of the first cavity. Four second plate members 15 surround and form an inner annular plate 102. The inner annular plate 102 is sleeved on the first cavity. The first plate member 14 is installed at the top of the first cavity. The reaction chamber 13 includes an upper reaction chamber 131 and a lower reaction chamber 132 provided at the bottom of the upper reaction chamber 131. The area formed between the inner annular plate 102 and the first plate member 14 is the upper reaction chamber 131, and the second cavity is the lower reaction chamber 132.

[0043] The first inlet valve 111 is inserted into one side wall of the first plate member 14 and is connected to one end of the first internal circulation cooling flow channel 17 of the first plate member 14. The first outlet valve 112 is inserted into the other side wall of the first plate member 14 and is connected to the other end of the first internal circulation cooling flow channel 17 of the first plate member 14. The second inlet valve 121 is inserted into one side of the top of the first plate member 14 and is connected to one end of the second internal circulation cooling flow channel 18 of the second plate member 15. The second outlet valve 122 is inserted into the other side of the top of the first plate member 14 and is connected to the other end of the second internal circulation cooling flow channel 18 of the second plate member 15.

[0044] The first internal circulation cooling flow channel 17 and the second internal circulation cooling flow channel 18 are respectively in a serpentine continuous structure. Among them, the manufacturing method of the first internal circulation cooling flow channel 17 is the same as that of the second internal circulation cooling flow channel 18. The manufacturing method of the second internal circulation cooling flow channel 18 is described as follows:

[0045] First: First, take a second plate member 15, drill a number of longitudinally arranged longitudinal holes on its longitudinal side wall, and respectively drill upper transverse holes and lower transverse holes on the transverse side walls at both ends. The longitudinal holes, upper transverse holes and lower transverse holes are arranged vertically and horizontally to form an arranged "mouth" shape.

[0046] Second: Then, block one ends of the upper transverse holes on the transverse side walls at both ends, one ends of the lower transverse holes on the transverse side walls at both ends, and the tops of a number of longitudinal holes in the middle of the longitudinal side wall respectively (only two longitudinal holes at both ends of the longitudinal side wall are kept open, and these two longitudinal holes are respectively used to be connected to the second inlet valve 121 and the second outlet valve 122). The blocking can be realized by a blocking rubber head, a blocking pin or a threaded plug (the blocking is a prior art and will not be elaborated here).

[0047] Third: Inside the second plate member 15, a series of arranged "square" shapes are formed. Then, pin holes 139 are drilled on adjacent and staggered flow channels, pins are inserted (or rubber plugs, screw plugs are blocked), welded, and sealant is applied to form a water channel barrier, so that the second internal circulation cooling flow channel 18 forms a serpentine continuous structure, ensuring that the cooling medium of the second internal circulation cooling flow channel 18 flows unidirectionally on the serpentine continuous structure and ensuring flow uniformity. Moreover, the contact area between the second internal circulation cooling flow channel 18 and the inside of the second plate member 15 is relatively large, thus ensuring uniform heat dissipation of the second plate member 15 by the second internal circulation cooling flow channel 18.

[0048] The first inlet valve 111 and the second inlet valve 121 are respectively connected to a cooling medium source (not shown in the drawings). The first outlet valve 112 and the second outlet valve 122 are respectively connected to a medium collector (not shown in the drawings). Among them, the cooling medium source can be a cooling gas source, such as cooling nitrogen, cooling air, etc., or a cooling liquid, such as liquid nitrogen, cooling water, etc. The cooling medium source is respectively connected to the first inlet valve 111 and the second inlet valve 121 through a cooling medium storage tank (not shown in the drawings) and a pipeline (not shown in the drawings). The medium collector can be a collection tank.

[0049] Furthermore, second internal circulation cooling channels 18 are respectively provided inside the four second plate members 15. The number of the second inlet and outlet valve assemblies 12 is four, and the four second inlet and outlet valve assemblies 12 are respectively inserted around the top of the first plate member 14.

[0050] The working principle and advantages of a reaction chamber device with a cooling function in Embodiment 1 of the present invention will be described together in Embodiment 2 below.

[0051] Embodiment 2:

[0052] Please refer to Figures 1 to 12 , a differential pressure coating machine in Embodiment 2 of the present invention includes a reaction chamber device 1 with a cooling function in Embodiment 1 and a placement table 2 installed below the reaction chamber device 1. A first lifting device 3 is installed on the top of the reaction chamber device 1 with a cooling function, and the first lifting device 3 is used to drive the reaction chamber device 1 with a cooling function to move up and down reciprocally to achieve the closing or separation of the reaction chamber device 1 and the placement table 2.

[0053] A vacuum pump 60 is installed on the reaction chamber housing 10. A vacuum suction port 61 connected to the vacuum pump 60 is opened on the reaction chamber 13. A high-pressure air pump (not shown in the drawings) is installed on the reaction chamber housing 10. A high-pressure air port 70 connected to the high-pressure air pump is opened on the reaction chamber 13. A temperature sensor 80 for measuring the temperature of the diaphragm on the placement table 2 is installed on the reaction chamber 13. Among them, the high-pressure air pump is connected to a high-pressure gas source.

[0054] Furthermore, the vacuum suction port 61 includes an upper vacuum suction port 611 and a lower vacuum suction port 612. The upper vacuum suction port 611 is located on the upper reaction chamber 131, the lower vacuum suction port 612 is located on the lower reaction chamber 132, and the high-pressure gas port 70 is located on the upper reaction chamber 131.

[0055] The placement table 2 includes a first placement seat 21 for placing workpieces, a second placement seat 22 mounted above the first placement seat 21 for placing diaphragms, and a second lifting device 4 mounted at the bottom of the first placement seat 21 for driving the first placement seat 21 to reciprocate up and down along the direction of the second placement seat 22.

[0056] The first lifting device 3 and the second lifting device 4 mentioned above are existing technologies of differential pressure coating machines, and will not be described in detail here.

[0057] The working principle of the differential pressure coating machine according to Embodiment 2 of this utility model is as follows:

[0058] S1: Differential pressure covering operation:

[0059] The first lifting device 3 drives a reaction chamber device with cooling function to move downward, so that the reaction chamber device 1 with cooling function is closed together with the placement platform 2, so that the second placement seat 22 in the placement platform 2, on which the membrane is placed, is located in the middle of the upper reaction chamber 131 and the lower reaction chamber 132 (that is, the second placement seat 22 separates the upper reaction chamber 131 and the lower reaction chamber 132), and the first placement seat 21 is located in the lower reaction chamber 132;

[0060] Then, the vacuum pump 60 performs vacuum adsorption on the upper vacuum suction port 611 of the upper reaction chamber 131 and the lower vacuum suction port 612 of the lower reaction chamber 132 respectively, so that the upper reaction chamber 131 and the lower reaction chamber 132 are kept in a vacuum state. Then, the heating component is started to heat the membrane for a certain period of time.

[0061] Finally, when the temperature sensor 80 detects that the diaphragm has been heated to a certain temperature, the vacuum pump 60 is turned off; the second lifting device 4 drives the first placement seat 21 to approach the second placement seat 22, so that the top of the workpiece on the first placement seat 21 abuts against the bottom of the diaphragm on the second placement seat 22; the high-pressure air pump is turned on, and the high-pressure air pump introduces high-pressure gas into the high-pressure air port 70 of the upper reaction chamber 131. The high-pressure gas presses the diaphragm at a certain temperature onto the workpiece, thereby completing the differential pressure coating operation;

[0062] S2: Cooling operation of reaction chamber 13: After the differential pressure coating operation is completed, the first lifting device 3 and the second lifting device 4 are reset. The existing robotic arm or operator will remove the coated workpiece from the placement table 2 and place the new membrane and workpiece on the placement table 2 to wait for the next round of coating operation.

[0063] During this period, the cooling medium source is introduced into the first inlet valve 111. The cooling medium source flows unidirectionally along the serpentine continuous structure of the first internal circulation cooling channel 17 of the first plate 14 to the first outlet valve 112 and is finally recovered by the medium collector. At this time, the cooling medium source can quickly cool the first heating pipe 191 on one side of the first plate 14. Similarly, the cooling medium source is introduced into the second inlet valve 121. The cooling medium source flows unidirectionally along the serpentine continuous structure of the second internal circulation cooling channel 18 of the second plate 15 to the second outlet valve 122 and is finally recovered by the medium collector. At this time, the cooling medium source can quickly cool the second heating pipe 192 on one side of the second plate 15.

[0064] The differential pressure coating machine of Embodiment 2 of this utility model has the following advantages:

[0065] 1. If the differential pressure coating machine does not have a reaction chamber device with a cooling function to cool the reaction chamber 13, then either the reaction chamber 13 is allowed to cool naturally, but this will affect production efficiency, or the next process is still carried out under the condition that the reaction chamber 13 is at a certain high temperature. However, this will cause the diaphragm on the second placement seat 22 to be in a high temperature environment from the beginning in the next process. The surface temperature of the diaphragm will rise rapidly to the specified temperature. After the temperature sensor 80 detects this temperature, the high pressure coating work will begin. However, in reality, due to the short heating time of the diaphragm, although the surface temperature of the diaphragm reaches the specified temperature, the internal temperature of the diaphragm may not reach the specified temperature, or the diaphragm may not be heated for a certain time, and its extensibility may not be good enough. Therefore, the coating effect of the diaphragm will be poor.

[0066] Therefore, the purpose of the reaction chamber device with cooling function of the differential pressure coating machine of this utility model is to cool the reaction chamber 13 so that the temperature inside the reaction chamber 13 drops rapidly, thereby facilitating the next process and ensuring the molding quality of the next process.

[0067] 2. When the reaction chamber 13 of the differential pressure coating machine is being cooled, the cooling medium source flows only in the first internal circulation cooling channel 17 inside the first plate 14 and / or only in the second internal circulation cooling channel 18 inside the second plate 15. The cooling medium source will not flow into the inside of the reaction chamber 13 or outside the reaction chamber shell 10, thereby avoiding leakage and pollution of the cooling medium source or external dust from entering the differential pressure coating machine.

[0068] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A reaction chamber device with a cooling function, comprising a reaction chamber shell (10) and a reaction chamber (13) formed inside the reaction chamber shell (10), characterized in that, The reaction chamber (13) is equipped with a heating assembly. The reaction chamber shell (10) includes a first plate (14) installed on the top of the reaction chamber (13) and a second plate (15) installed around the reaction chamber (13). The first plate (14) has a first internal circulation cooling channel (17) inside and / or at least one of the second plates (15) has a second internal circulation cooling channel (18) inside. The reaction chamber shell (10) is equipped with a first inlet / outlet valve assembly (11) and / or the reaction chamber shell (10) is equipped with a second inlet / outlet valve assembly (11). The number of internal circulation cooling channels (18) corresponds to the number of second inlet and outlet valve assemblies (12). The first inlet and outlet valve assembly (11) includes a first inlet valve (111) connected to one end of the first internal circulation cooling channel (17) and a first outlet valve (112) connected to the other end of the first internal circulation cooling channel (17). The second inlet and outlet valve assembly (12) includes a second inlet valve (121) connected to one end of the second internal circulation cooling channel (18) and a second outlet valve (122) connected to the other end of the second internal circulation cooling channel (18).

2. The reaction chamber device with cooling function according to claim 1, characterized in that, The heating assembly includes a first heating tube (191) installed inside the first plate (14) and / or at least one second heating tube (192) installed inside the second plate (15), the number of the second heating tubes (192) corresponding to the number of the second internal circulation cooling channels (18).

3. A reaction chamber device with cooling function according to claim 2, characterized in that, A first reflector (135) is installed between the first plate (14) and the first heating tube (191), and a second reflector (136) is installed between the second plate (15) and the second heating tube (192).

4. A reaction chamber device with cooling function according to claim 1, characterized in that, The reaction chamber shell (10) also includes an outer shell (101), the outer shell (101) has a first cavity and a second cavity at the bottom of the first cavity, four second plates (15) surround to form an inner annular plate (102), the inner annular plate (102) is sleeved on the first cavity, the first plate (14) is installed on the top of the first cavity, the reaction chamber (13) includes an upper reaction chamber (131) and a lower reaction chamber (132) at the bottom of the upper reaction chamber (131), the area formed between the inner annular plate (102) and the first plate (14) is the upper reaction chamber (131), and the second cavity is the lower reaction chamber (132).

5. A reaction chamber device with cooling function according to claim 4, characterized in that, The first inlet valve (111) is inserted into one side wall of the first plate (14) and connected to one end of the first internal circulation cooling channel (17). The first outlet valve (112) is inserted into the other side wall of the first plate (14) and connected to the other end of the first internal circulation cooling channel (17). The second inlet valve (121) is inserted into one side of the top of the first plate (14) and connected to one end of the second internal circulation cooling channel (18). The second outlet valve (122) is inserted into the other side of the top of the first plate (14) and connected to the other end of the second internal circulation cooling channel (18).

6. A reaction chamber device with cooling function according to claim 1, characterized in that, The first internal circulation cooling channel (17) and the second internal circulation cooling channel (18) are respectively in the form of a serpentine continuous structure.

7. A reaction chamber device with cooling function according to claim 1, characterized in that, The first inlet valve (111) and the second inlet valve (121) are respectively connected to the cooling medium source, and the first outlet valve (112) and the second outlet valve (122) are respectively connected to the medium collector.

8. A differential pressure coating machine, characterized in that, The device includes a reaction chamber device (1) with cooling function as described in any one of claims 1-7 and a placement platform (2) installed below the reaction chamber device (1). The top of the reaction chamber device (1) with cooling function is equipped with a first lifting device (3). The first lifting device (3) is used to drive the reaction chamber device (1) with cooling function to move up and down reciprocally so as to realize the closing or separation of the reaction chamber device (1) and the placement platform (2).

9. A differential pressure coating machine according to claim 8, characterized in that, The reaction chamber shell (10) is equipped with a vacuum pump (60), the reaction chamber (13) is provided with a vacuum suction port (61) connected to the vacuum pump (60), the reaction chamber shell (10) is equipped with a high-pressure air pump, the reaction chamber (13) is provided with a high-pressure air port (70) connected to the high-pressure air pump, and the reaction chamber (13) is equipped with a temperature sensor (80) for measuring the temperature of the diaphragm on the placement platform (2).

10. A differential pressure coating machine according to claim 8, characterized in that, The placement platform (2) includes a first placement seat (21) for placing workpieces, a second placement seat (22) installed above the first placement seat (21) for placing diaphragms, and a second lifting device (4) installed at the bottom of the first placement seat (21) for driving the first placement seat (21) to reciprocate up and down along the direction of the second placement seat (22).

Images