Battery film preparation apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHEJIANG YIGESILON INTELLIGENT MANUFACTURING CO LTD
- Filing Date
- 2025-08-29
- Publication Date
- 2026-08-07
AI Technical Summary
[0006]本实用新型提供一种电池薄膜制备装置,以解决现有技术中的钙钛矿太阳能电池基底表面的液膜铺设不均匀导致的薄膜结晶度低、均匀性差,进而导致太阳能电池稳定差及良品率低的问题
[0017]Applying the technical solution of this utility model, this utility model provides a battery thin film preparation apparatus, including an imprinting assembly. The imprinting assembly includes a conveying platform, a driving structure, a liquid replenishment structure, and a sponge roller. The imprinting position is located on the surface of a substrate, and the substrate is set on the conveying platform. The sponge roller is set on the driving structure, which drives the sponge roller to rotate. The sponge roller absorbs imprinting liquid containing solute and solvent. The liquid replenishment structure replenishes the imprinting liquid absorbed in the sponge roller. The conveying platform drives the substrate to move closer to or further away from the sponge roller. The first direction is defined as the radial direction of the sponge roller perpendicular to the surface of the imprinting position. The compression distance is defined as the distance between the rotation axis of the sponge roller and the surface of the imprinting position along the first direction. By adjusting the compression distance, the compression deformation of the sponge roller at the imprinting position is controlled, thereby controlling the volume of the imprinting liquid at the imprinting position.
Smart Images

Figure CN224602490U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of solar cell fabrication technology, and more specifically, to a battery thin film fabrication apparatus. Background Technology
[0002] The key to improving the efficiency of perovskite solar cells lies in optimizing the quality of the thin film. Currently, the fabrication of perovskite solar cells can be divided into dry methods and solution methods. Among them, the dry method mainly includes vacuum thermal evaporation, while the solution method includes one-step and two-step methods.
[0003] Although the dry process can meet the needs of industrialization and is compatible with the fabrication of perovskite / crystalline silicon tandem solar cells, the organic salt, one of the active components of the perovskite thin film on the perovskite solar cell, is prone to decomposition under vacuum heating. The decomposition products can easily introduce defects into the perovskite active material. This results in the low reproducibility of perovskite cells fabricated by the current dry process and the lower cell performance compared to the solution method.
[0004] Due to inherent limitations in the slit coating process, its processing error is on the order of tens of micrometers, while the thickness of perovskite is no more than 1 micrometer. This results in inherent inhomogeneity in the films prepared by slit coating. Moreover, the high-precision slit coating equipment currently used to prepare perovskite films is extremely expensive. For photovoltaic technology aimed at achieving affordable power generation, the high equipment cost weakens the competitiveness of perovskite solar cells.
[0005] Therefore, in order to solve the above problems, it is urgent to research and develop a battery thin film preparation device, which is of great significance for improving the uniformity of the film, increasing the production efficiency of the film, and thus improving the performance of solar cells. Utility Model Content
[0006] This invention provides a battery thin film preparation apparatus to solve the problems of low crystallinity and poor uniformity of thin films caused by uneven liquid film laying on the surface of perovskite solar cell substrates in the prior art, which in turn leads to poor stability and low yield of solar cells.
[0007] To address the aforementioned problems, according to one aspect of this utility model, a battery thin film preparation apparatus is provided, comprising an imprinting assembly, which includes a conveying platform, a driving structure, a liquid replenishment structure, and a sponge roller. The imprinting position is located on the surface of a substrate, and the substrate is disposed on the conveying platform. The sponge roller is disposed on the driving structure, which drives the sponge roller to rotate. The sponge roller absorbs an imprinting liquid containing a solute and a solvent. The liquid replenishment structure replenishes the imprinting liquid absorbed by the sponge roller. The conveying platform drives the substrate to move closer to or further away from the sponge roller. A first direction is defined as the direction along the radial direction of the sponge roller and perpendicular to the surface of the imprinting position. The compression distance is defined as the distance between the rotation axis of the sponge roller and the surface of the imprinting position along the first direction. By adjusting the compression distance, the compression deformation of the sponge roller at the imprinting position is controlled, thereby controlling the volume of the imprinting liquid at the imprinting position.
[0008] Furthermore, the liquid replenishment structure includes a liquid pool and a liquid replenishment roller. The liquid pool contains the imprinting liquid. A portion of the liquid replenishment roller is disposed within the liquid pool and is in contact with the imprinting liquid to absorb the liquid. The liquid replenishment roller is rotatably disposed and is pressed against the sponge roller to allow the imprinting liquid in the liquid replenishment roller to enter the sponge roller.
[0009] Furthermore, the liquid replenishment structure includes a liquid pool, a liquid replenishment roller, and a transfer roller; the liquid pool contains the printing liquid; a portion of the liquid replenishment roller is disposed within the liquid pool and is in contact with the printing liquid for liquid absorption; the transfer roller and the liquid replenishment roller are rotatably disposed, the liquid replenishment roller and the transfer roller press against each other, and the transfer roller and the sponge roller press against each other, so that the printing liquid in the liquid replenishment roller enters the sponge roller through the transfer roller.
[0010] Furthermore, the replenishing roller and / or the transfer roller are located above the sponge roller so that the imprinting liquid is transferred into the sponge roller under the action of gravity; the liquid pool is located above the sponge roller and below the replenishing roller; the rotation direction of the replenishing roller is opposite to the rotation direction of the transfer roller, and the rotation direction of the transfer roller is opposite to the rotation direction of the sponge roller.
[0011] Furthermore, the liquid replenishment structure includes a liquid replenishment pipe and a liquid drive pump. The liquid replenishment pipe is connected to the liquid drive pump, and the imprinting liquid flows through the liquid replenishment pipe. The liquid drive pump drives the imprinting liquid in the liquid replenishment pipe to flow in a directional manner. The liquid outlet of the liquid replenishment pipe is located inside the sponge roller or abuts against the outer periphery of the sponge roller so that the imprinting liquid in the liquid replenishment pipe enters the sponge roller.
[0012] Furthermore, there are multiple replenishment pipes, at least some of which are connected in parallel; the liquid outlets of the multiple replenishment pipes connected in parallel discharge liquid simultaneously, and are spaced apart along the axial direction of the sponge roller, so as to replenish liquid at various points on the sponge roller at the same time.
[0013] Furthermore, the conveying platform includes a conveyor belt and a motor drive structure. The conveyor belt cooperates with the motor drive structure, which drives the conveyor belt to rotate cyclically. The substrate is removably placed on the upper surface of the conveyor belt, and the conveyor belt drives the substrate to move horizontally to move closer to or away from the sponge roller. The first direction is vertically downward. The length of the liquid film formed by the imprinting liquid at the imprinting position is controlled by adjusting the squeezing time between the sponge roller and the imprinting position and the horizontal movement distance of the substrate.
[0014] Furthermore, the sponge roller has a cylindrical structure, and its axial length is adapted to the width of the film to be prepared. The conveying platform drives the substrate to move horizontally, moving it closer to or further away from the sponge roller; the first direction is vertically downward. By adjusting the pressing time between the sponge roller and the imprinting position and the horizontal movement distance of the substrate, the length of the liquid film formed by the imprinting liquid at the imprinting position is controlled, and the length of the liquid film is adapted to the length of the film to be prepared. The porosity of the sponge roller 30 is 30-98%, and the specific surface area is 2000-200000 cm². 2 / g; and / or, the central axis of the sponge roller 30 coincides with the rotation axis and is horizontally positioned; the sponge roller 30 is cut with a plane including the central axis and horizontally positioned to obtain a cross-section, the shape of the cross-section being a rectangle or a square. When the cross-section is rectangular, the dimension of the rectangle along the axial direction of the sponge roller 30 is the length, the length range being 16.6 to 3000 cm, and the width of the rectangle range being 10.5 to 1500 cm; when the cross-section is square, the side length of the square ranges from 5.25 to 210 cm.
[0015] Furthermore, the battery thin film preparation apparatus also includes an annealing assembly for annealing the substrate to form a molded film from the imprinted liquid on the substrate.
[0016] Furthermore, the battery thin film fabrication apparatus also includes an anti-overflow component, which is used to prevent the imprinting liquid from overflowing from the imprinting position to the sidewalls and bottom of the substrate during the imprinting process. The anti-overflow component is attached to the sidewalls of the substrate. The anti-overflow component is a metal tray or uses a liquid-absorbing material. When the anti-overflow component is a metal tray, the top of the anti-overflow component is lower than or parallel to the surface where the imprinting position is located, and the distance between the top of the anti-overflow component and the surface where the imprinting position is located is within the range of 0 to 0.1 cm. When the anti-overflow component uses a liquid-absorbing material, the top of the anti-overflow component is higher than, parallel to, or lower than the surface where the imprinting position is located, and the distance between the top of the anti-overflow component and the surface where the imprinting position is located is within the range of -90 μm to 0.5 cm.
[0017] Applying the technical solution of this utility model, this utility model provides a battery thin film preparation apparatus, including an imprinting assembly. The imprinting assembly includes a conveying platform, a driving structure, a liquid replenishment structure, and a sponge roller. The imprinting position is located on the surface of a substrate, and the substrate is set on the conveying platform. The sponge roller is set on the driving structure, which drives the sponge roller to rotate. The sponge roller absorbs imprinting liquid containing solute and solvent. The liquid replenishment structure replenishes the imprinting liquid absorbed in the sponge roller. The conveying platform drives the substrate to move closer to or further away from the sponge roller. The first direction is defined as the radial direction of the sponge roller perpendicular to the surface of the imprinting position. The compression distance is defined as the distance between the rotation axis of the sponge roller and the surface of the imprinting position along the first direction. By adjusting the compression distance, the compression deformation of the sponge roller at the imprinting position is controlled, thereby controlling the volume of the imprinting liquid at the imprinting position.
[0018] This invention utilizes a conveying platform, a driving structure, a liquid replenishment structure, and a sponge roller working in tandem. By adjusting the compression distance, the compression deformation of the sponge roller at the imprinting position can be controlled, achieving precise control of the volume of the imprinting liquid at that position. This results in high-precision imprinting of the thin film, leading to higher crystallinity and better uniformity in the subsequently formed film, thus ensuring improved stability and yield of solar cells. The liquid replenishment structure replenishes the imprinting liquid absorbed by the sponge roller, allowing for continuous imprinting and improving the efficiency of the battery thin film preparation. By employing a sponge roller, this invention efficiently utilizes its excellent liquid absorption and retention capabilities, allowing for precise control of the liquid film thickness by adjusting the degree of compression. During the imprinting process, the sponge roller, immersed in imprinting liquid, is compressed, and the imprinting liquid is evenly released from the sponge roller. A liquid film is formed at the imprinting location. This invention can improve the crystallinity quality of the thin film by precisely controlling the liquid film laying, and is particularly suitable for perovskite thin films and other sensitive thin film materials. Compared with the existing method of preparing thin films by dripping liquid onto the substrate surface using a liquid dripping device, this invention achieves uniform film laying at the imprinting location through the imprinting of a sponge roller, significantly improving the uniformity and crystallinity quality of the film. This invention has a simple structure and low cost, is easy to assemble and maintain, and solves the problem of low crystallinity and poor uniformity of the thin film caused by uneven liquid film laying on the surface of the perovskite solar cell substrate in the prior art, which leads to poor stability and low yield of the solar cell. This invention is not only applicable to the preparation of perovskite thin films, but can also be extended to other types of thin film materials, such as hole transport layers and passivation layers, which can improve the flexibility and versatility of thin film preparation and is suitable for large-scale promotion and use. Attached Figure Description
[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:
[0020] Figure 1 A schematic diagram of the specific structure of the battery thin film preparation apparatus provided in an embodiment of the present invention is shown;
[0021] Figure 2 This diagram shows a partial structural schematic of the battery thin film preparation apparatus provided in an embodiment of the present invention before the imprinting process begins.
[0022] Figure 3 A partial structural schematic diagram of the battery thin film preparation apparatus provided in an embodiment of the present invention is shown during the imprinting process.
[0023] The above figures include the following reference numerals:
[0024] 10. Conveying platform; 11. Conveyor belt;
[0025] 20. Liquid replenishment structure; 21. Liquid pool; 22. Liquid replenishment drum; 23. Transfer drum;
[0026] 30. Sponge roller;
[0027] 40. The position to be imprinted;
[0028] 50. Base. Detailed Implementation
[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present utility model or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.
[0030] like Figures 1 to 3As shown, an embodiment of this utility model provides a battery thin film preparation apparatus, including an imprinting assembly. The imprinting assembly includes a conveying platform 10, a driving structure, a liquid replenishment structure 20, and a sponge roller 30. The imprinting position 40 is located on the surface of a substrate 50, which is disposed on the conveying platform 10. The sponge roller 30 is disposed on the driving structure, which drives the sponge roller 30 to rotate. The sponge roller 30 absorbs an imprinting liquid containing solute and solvent. The liquid replenishment structure 20 replenishes the imprinting liquid absorbed in the sponge roller 30. The conveying platform 10 drives the substrate 50 to move closer to or further away from the sponge roller 30. The first direction is defined as the radial direction of the sponge roller 30 and perpendicular to the surface of the imprinting position 40. The compression distance is defined as the distance between the rotation axis of the sponge roller 30 and the surface of the imprinting position 40 along the first direction. By adjusting the compression distance, the compression deformation of the sponge roller 30 at the imprinting position 40 is controlled, thereby controlling the volume of the imprinting liquid at the imprinting position 40.
[0031] This invention utilizes a conveying platform 10, a driving structure, a liquid replenishment structure 20, and a sponge roller 30 working in coordination. By adjusting the compression distance, the compression deformation of the sponge roller 30 at the imprinting position 40 can be controlled, achieving precise control of the volume of the imprinting liquid at that position 40. This results in high-precision imprinting of the thin film, leading to higher crystallinity and better uniformity in the subsequently formed film, ensuring improved stability and yield of solar cells. The liquid replenishment structure 20 replenishes the imprinting liquid absorbed by the sponge roller 30, allowing for continuous imprinting and improving the efficiency of the battery thin film preparation. The sponge roller 30 efficiently utilizes its excellent liquid absorption and retention capabilities, allowing for precise control of the liquid film thickness by adjusting the degree of compression. During the imprinting process, the sponge roller 30, immersed in imprinting liquid, is compressed, and the imprinting liquid is evenly distributed from the sea... The liquid film is released from the sponge roller 30 to the imprinting position 40, forming a liquid film. This invention can improve the crystallinity quality of the thin film by precisely controlling the laying of the liquid film, and is particularly suitable for perovskite thin films and other sensitive thin film materials. Compared with the existing method of preparing thin films by dripping liquid onto the surface of the substrate 50 using a liquid dripping device, this invention achieves uniform laying of the thin film at the imprinting position 40 through the imprinting of the sponge roller 30, which significantly improves the uniformity and crystallinity quality of the thin film. This invention has a simple structure and low cost, is easy to assemble and maintain, and solves the problem of low crystallinity and poor uniformity of the thin film caused by uneven liquid film laying on the surface of the perovskite solar cell substrate 50 in the prior art, which leads to poor stability and low yield of the solar cell. This invention is not only applicable to the preparation of perovskite thin films, but can also be extended to other types of thin film materials, such as hole transport layers and passivation layers, which can improve the flexibility and versatility of thin film preparation and is suitable for large-scale promotion and use.
[0032] In one specific embodiment of this utility model, the sponge roller 30 includes a roller and a sponge body, that is, the sponge roller 30 is similar to the replaceable sponge roller structure on a sweeping robot. The roller has a channel inside, which is used to replenish the sponge body with liquid.
[0033] Optionally, the replenishment structure 20 includes a liquid pool 21 and a replenishment roller 22. The liquid pool 21 contains the imprinting liquid. A portion of the replenishment roller 22 is disposed within the liquid pool 21 and is in contact with the imprinting liquid to absorb the liquid. The replenishment roller 22 is rotatably disposed and is pressed against the sponge roller 30 to allow the imprinting liquid in the replenishment roller 22 to enter the sponge roller 30.
[0034] The continuous replenishment of the printing liquid in the sponge roller 30 is achieved through the cooperation of the liquid pool 21 and the replenishing roller 22. The replenishing roller 22 absorbs liquid from the liquid pool 21 and, through mutual compression with the sponge roller 30, transfers the printing liquid to the sponge roller 30, ensuring a continuous liquid supply during the printing process. This design guarantees sufficient liquid in the sponge roller 30 during continuous printing, preventing film discontinuity or uneven thickness due to insufficient liquid. In actual production, the material and shape of the replenishing roller 22 can be flexibly designed, such as using materials with different liquid absorption properties to solve the liquid absorption problem under different liquid properties.
[0035] like Figure 1 As shown, the liquid replenishment structure 20 includes a liquid pool 21, a liquid replenishment roller 22, and a transfer roller 23. The liquid pool 21 contains the printing liquid. A portion of the liquid replenishment roller 22 is disposed within the liquid pool 21 and is in contact with the printing liquid to absorb the liquid. The transfer roller 23 and the liquid replenishment roller 22 are rotatably disposed, and the liquid replenishment roller 22 and the transfer roller 23 press against each other, and the transfer roller 23 and the sponge roller 30 press against each other, so that the printing liquid in the liquid replenishment roller 22 enters the sponge roller 30 through the transfer roller 23.
[0036] The combination of the liquid pool 21, the replenishing roller 22, and the transfer roller 23 achieves efficient transfer and uniform distribution of the imprinting liquid over long distances. The replenishing roller 22 draws liquid from the liquid pool 21, and the transfer roller 23, through mutual compression with the sponge roller 30, evenly distributes the imprinting liquid onto the sponge roller 30, ensuring the uniformity of the liquid film. This configuration significantly improves the uniformity and crystallization quality of the film, avoiding film defects caused by uneven liquid film distribution. In practical applications, the materials and shapes of the replenishing roller 22 and the transfer roller 23 can be changed to accommodate imprinting liquids of different properties, solving liquid transfer problems in various working environments.
[0037] like Figure 1 As shown, the replenishing roller 22 and / or the transfer roller 23 are located above the sponge roller 30 so that the imprinting liquid is transferred into the sponge roller 30 under the action of gravity; the liquid pool 21 is located above the sponge roller 30 and below the replenishing roller 22; the rotation direction of the replenishing roller 22 is opposite to the rotation direction of the transfer roller 23, and the rotation direction of the transfer roller 23 is opposite to the rotation direction of the sponge roller 30.
[0038] By optimizing the layout and rotation direction of the replenishing roller 22 and the transfer roller 23, the transfer process of the printing liquid is improved using gravity. The relative position and rotation direction design of the replenishing roller 22 and the transfer roller 23 ensure smoother transfer of the printing liquid into the sponge roller 30 under gravity, while preventing backflow. This technical solution improves the efficiency of liquid film laying, reduces liquid waste, and ensures the uniformity of the liquid film. In actual production, the relative position and rotation direction between the rollers can be adjusted to adapt to the properties of different liquids, solving the problems of low liquid transfer efficiency and liquid splashing that may occur under different working environments.
[0039] Optionally, the replenishment structure 20 includes a replenishment pipe and a liquid drive pump. The replenishment pipe is connected to the liquid drive pump, and the imprinting liquid flows through the replenishment pipe. The liquid drive pump drives the imprinting liquid in the replenishment pipe to flow in a directional manner. The liquid outlet of the replenishment pipe is located inside the sponge roller 30 or abuts against the outer periphery of the sponge roller 30 so that the imprinting liquid in the replenishment pipe enters the sponge roller 30.
[0040] The replenishment structure 20, through a combination of a replenishment pipe and a liquid-driven pump, achieves precise replenishment of the imprinting liquid within the sponge roller 30. The liquid-driven pump controls the directional flow of the imprinting liquid within the replenishment pipe, directly replenishing the liquid to the interior or exterior of the sponge roller 30 through the liquid outlet of the replenishment pipe, ensuring precise liquid replenishment. This design allows for precise control of the liquid volume within the sponge roller 30, avoiding film defects caused by insufficient or excessive liquid replenishment. In practical applications, the material of the replenishment pipe and the type of liquid-driven pump can be changed to accommodate imprinting liquids of different properties, solving the problem of precise liquid replenishment under various working environments.
[0041] Specifically, there are multiple replenishment pipes, and at least some of the replenishment pipes are arranged in parallel. The liquid outlets of the multiple replenishment pipes arranged in parallel discharge liquid at the same time, and are spaced apart along the axial direction of the sponge roller 30, so as to replenish liquid at various parts of the sponge roller 30 at the same time.
[0042] By setting up multiple parallel replenishment pipes, uniform replenishment of liquid is achieved at all points on the sponge roller 30. The parallel arrangement of multiple replenishment pipes allows the imprinting liquid to enter the sponge roller 30 simultaneously and evenly from multiple points, improving the uniformity of the liquid film. This technical solution ensures the uniformity of the liquid film on the sponge roller 30 during the imprinting process, thus improving the quality of the film. In practical applications, the number and distribution of replenishment pipes can be adjusted to accommodate the preparation of films of different widths, solving the problem of liquid film uniformity under different working environments.
[0043] like Figure 1 , Figure 2 and Figure 3As shown, the conveyor platform 10 includes a conveyor belt 11 and a motor drive structure. The conveyor belt 11 cooperates with the motor drive structure, which drives the conveyor belt 11 to rotate cyclically. The substrate 50 is removably placed on the upper surface of the conveyor belt 11. The conveyor belt 11 drives the substrate 50 to move horizontally to move closer to or away from the sponge roller 30. The first direction is vertically downward. The length of the liquid film formed by the imprinting liquid on the imprinting position 40 is controlled by adjusting the pressing time between the sponge roller 30 and the imprinting position 40 and the horizontal moving distance of the substrate 50.
[0044] The precise movement of the substrate 50 is achieved through the cooperation of the conveyor belt 11 and the motor drive structure. The motor drive structure controls the cyclic rotation of the conveyor belt 11, thereby controlling the movement of the substrate 50. By adjusting the contact time and movement distance between the substrate 50 and the sponge roller 30, the length of the liquid film is precisely controlled. This configuration allows for precise control of the liquid film length, improving the uniformity and crystallinity of the film. In other embodiments, the material of the conveyor belt 11 and the type of the motor drive structure can be changed to adapt to the movement requirements of different substrates 50, solving the problem of high-precision movement control of the substrate 50 under different working environments.
[0045] like Figure 1 , Figure 2 and Figure 3 As shown, the sponge roller 30 has a cylindrical structure, and the axial length of the sponge roller 30 is adapted to the width of the film to be prepared. The conveying platform 10 drives the substrate 50 to move horizontally to move closer to or away from the sponge roller 30. The first direction is vertically downward. By adjusting the pressing time between the sponge roller 30 and the imprinting position 40 and the horizontal moving distance of the substrate 50, the length of the liquid film formed by the imprinting liquid on the imprinting position 40 is controlled, and the length of the liquid film is adapted to the length of the film to be prepared.
[0046] The cylindrical structure of the sponge roller 30 ensures the uniformity of the contact surface with the substrate 50. The axial length of the sponge roller 30 is adapted to the film width. By adjusting the extrusion time and the moving distance of the substrate 50, the length of the liquid film is controlled, ensuring a match between the liquid film and the film length. This design improves the uniformity and length control accuracy of the film, thereby enhancing film quality. In other embodiments, the size and shape of the sponge roller 30 can be changed to accommodate the preparation of films of different widths and lengths, solving the problem of film size control under different working environments.
[0047] It should be noted that the thickness of the liquid film formed at the imprinting position 40 can be precisely controlled by adjusting factors such as the pressing time between the sponge roller and the imprinting position, the rotation speed of the sponge roller, the speed of the horizontal conveyor belt, the compression distance, and the concentration of the solute.
[0048] Specifically, the porosity of the sponge roller 30 is 30-98%, and the specific surface area is 2000-200000 cm². 2 / g; and / or, the central axis of the sponge roller 30 coincides with the rotation axis and is horizontally positioned; the sponge roller 30 is cut with a plane including the central axis and horizontally positioned to obtain a cross-section, the shape of the cross-section being a rectangle or a square. When the cross-section is rectangular, the dimension of the rectangle along the axial direction of the sponge roller 30 is the length, the length range being 16.6 to 3000 cm, and the width of the rectangle range being 10.5 to 1500 cm; when the cross-section is square, the side length of the square ranges from 5.25 to 210 cm.
[0049] The porosity and specific surface area design of the sponge roller 30 ensures its excellent liquid absorption and retention capabilities, improving the quality of the prepared film. By controlling the porosity and specific surface area of the sponge roller 30, the absorption and release of the imprinting liquid can be controlled, thereby achieving uniform film laying. The above technical solution ensures that the sponge roller 30 can uniformly release the imprinting liquid during the imprinting process, improving the uniformity and crystallinity of the film. In practical use and processing, the liquid absorption problem under different liquid properties can be solved by changing the material of the sponge roller 30, such as using polyurethane or polyester materials.
[0050] In one specific embodiment of this utility model, the material of the sponge roller 30 is selected from at least one of wood fiber, polystyrene, polyurethane, polyvinyl chloride, polyethylene, urea-formaldehyde resin, phenolic resin, polyether, polyvinyl alcohol and polyester materials.
[0051] It is worth noting that in one specific embodiment of this utility model, the substrate 50 can adopt an existing silicon wafer structure, and its shape is a rectangle with inverted triangles at the four corners or a square with inverted triangles at the four corners; the substrate 50 required for a single perovskite cell is a glass substrate, and its shape is a standard rectangle with conventional non-inverted triangles at the four corners.
[0052] Specifically, the battery thin film preparation apparatus also includes an annealing assembly, which is used to anneal the substrate 50 after imprinting so that the imprinting liquid (i.e. liquid film) on the substrate 50 becomes a shaped thin film.
[0053] The annealing assembly ensures that the imprinting liquid forms a high-quality molded film on the substrate 50, improving the film preparation quality. Annealing allows control of the crystallization process of the imprinting liquid on the substrate 50, thereby achieving high-quality film preparation. This configuration ensures that during the imprinting process, the imprinting liquid forms a uniform and highly crystalline film on the substrate 50, improving film performance. In actual production, the annealing control problem under different working environments can be solved by changing the temperature control method of the annealing assembly, such as using infrared heating or electric heating.
[0054] In one specific embodiment of this utility model, the imprinting position 40 is located on the surface of the substrate 50; the molded film prepared by the battery thin film preparation device forms a perovskite active layer, and the substrate 50 is a stacked structure including a substrate layer and an electron transport layer, or the substrate 50 is a stacked structure including a substrate layer and a hole transport layer; or, the molded film prepared by the battery thin film preparation device forms a perovskite organic salt precursor layer, and the substrate 50 is a stacked structure including a substrate layer, an electron transport layer, and a lead salt film; or, the substrate 50 is a stacked structure including a substrate layer, an electron transport layer, a lead salt and a cesium salt film; or, the substrate 50 is a stacked structure including a substrate layer, a hole transport layer, and a lead salt film; or, the substrate 50 is a stacked structure including a substrate layer, a hole transport layer, a lead salt and a cesium salt film; or, the substrate 50 is a stacked structure including a substrate layer and a hole transport layer; or, the substrate 50 is a stacked structure including a substrate layer and an electron transport layer; the battery thin film preparation device also includes a vacuum evaporation component, the vacuum evaporation component... The substrate 50 is used to form a lead salt thin film or a lead salt and cesium salt thin film by vacuum thermal evaporation deposition; or, the shaped thin film prepared by the battery thin film preparation device is a cesium salt thin film, which is used to prepare a perovskite active layer, and the substrate 50 is a stacked structure including a substrate layer, an electron transport layer, and a lead salt thin film; or, the substrate 50 is a stacked structure including a substrate layer, a hole transport layer, and a lead salt thin film; or, the shaped thin film prepared by the battery thin film preparation device forms a hole transport layer, and the substrate 50 is a stacked structure or a substrate layer including a substrate layer, an electron transport layer, and a perovskite active layer; or, the shaped thin film prepared by the battery thin film preparation device forms a passivation layer, and the substrate 50 is a first stacked structure including a substrate layer and an electron transport layer; or, the substrate 50 is a second stacked structure including a substrate layer, an electron transport layer, and a perovskite active layer; or, the substrate 50 is a third stacked structure including a substrate layer and a hole transport layer; or, the substrate 50 is a fourth stacked structure including a substrate layer, a hole transport layer, and a perovskite active layer.
[0055] Optionally, the battery thin film fabrication apparatus further includes an anti-overflow component, which is used to prevent the imprinting liquid from overflowing from the imprinting position 40 to the sidewalls and bottom of the substrate 50 during the imprinting process. The anti-overflow component is attached to the sidewalls of the substrate 50. The anti-overflow component is a metal tray or uses a liquid-absorbing material. When the anti-overflow component is a metal tray, the top of the anti-overflow component is lower than or parallel to the surface where the imprinting position 40 is located, and the distance between the top of the anti-overflow component and the surface where the imprinting position 40 is located is in the range of 0 to 0.1 cm. When the anti-overflow component uses a liquid-absorbing material, the top of the anti-overflow component is higher than, parallel to, or lower than the surface where the imprinting position 40 is located, and the distance between the top of the anti-overflow component and the surface where the imprinting position 40 is located is in the range of -90 μm to 0.5 cm (the negative sign represents lower).
[0056] The anti-overflow component effectively prevents the imprinting liquid from overflowing during the imprinting process, improving the quality of the film preparation. By fitting the anti-overflow component together, the flow range of the imprinting liquid on the substrate 50 can be controlled, thereby achieving high-quality film preparation. The above technical solution ensures that the imprinting liquid will not overflow to the sidewalls and bottom of the substrate 50 during the imprinting process, preventing backside contamination and additional cleaning costs. In practical applications, the anti-overflow problem can be addressed in different working environments by changing the material and shape of the anti-overflow component, such as using plastic or rubber materials.
[0057] The working process and principle of a specific embodiment of this utility model will now be described in detail as follows:
[0058] In a preferred embodiment, the porosity of the sponge roller 30 is 30-98%, and the specific surface area is 2000-200000 cm². 2 / g. The high porosity and specific surface area of the sponge roller 30 helps to enhance the uniformity of liquid absorption and release, thereby improving the crystallization quality and uniformity of the film.
[0059] To further enhance the uniformity of liquid absorption and release, and improve the crystallization quality and uniformity of the film, preferably, the material of the sponge roller 30 includes, but is not limited to, one or more components composed of wood fiber, polystyrene, polyurethane, polyvinyl chloride, polyethylene, urea-formaldehyde resin, phenolic resin, polyether, polyvinyl alcohol, and polyester.
[0060] In a preferred embodiment, the thin film is a perovskite active layer, and the substrate 50 is a stacked structure of substrate layer / electron transport layer / or a stacked structure of substrate layer / hole transport layer / .
[0061] The thin film preparation system provided in this application is applicable to perovskite active layers. Using this system improves battery performance and yield. Furthermore, by designing the shape of the compressible absorbent sponge roller 30, designing the absorbent sponge material, controlling the solute concentration, and selecting a solvent of suitable viscosity, the solution can be uniformly imprinted and deposited onto the substrate. After annealing, a thin film of uniform thickness is generated, further improving battery performance and yield.
[0062] In a preferred embodiment, the thin film is a perovskite organic salt precursor layer, and the substrate 50 is a stacked structure of substrate layer / electron transport layer / , or a stacked structure of substrate layer / hole transport layer, or a stacked structure of substrate layer / electron transport layer / lead salt film, or a stacked structure of substrate layer / electron transport layer / lead salt and cesium salt film, or a stacked structure of substrate layer / hole transport layer / lead salt film, or a stacked structure of substrate layer / hole transport layer / lead salt and cesium salt film, or a stacked structure of substrate layer and hole transport layer, or a stacked structure of substrate layer and electron transport layer; the preparation system further includes a vacuum evaporation component, which is used for vacuum thermal evaporation deposition to form a lead salt film or vacuum thermal evaporation co-deposition to form a lead salt and cesium salt film.
[0063] The thin film preparation system provided in this application is applicable to the preparation of perovskite active layers in solar cells. The vacuum evaporation assembly enables the preparation of lead salt films, lead salt films, and cesium salt films, thereby allowing the organic salt solution to react with the film and ultimately generate perovskite active materials. Compared to using a liquid dropper to drip liquid onto the surface of the substrate 50, or using a slot coating device to coat liquid onto the surface of the substrate 50, this application achieves uniform liquid film deposition on the substrate 50 through the imprinting contact between the sponge roller 30 and the surface of the substrate 50, significantly improving the uniformity and crystal quality of the film. Furthermore, after the imprinting process is completed, keeping the sponge roller 30 in a compressed state when removing the imprinting device prevents the liquid film deposited on the surface of the substrate 50 from being drawn back into the sponge roller 30. The perovskite active layer prepared using the preparation system provided in this application has better uniformity and higher crystallinity. Its application in single-cell perovskite cells or tandem solar cells is beneficial to improving their electrochemical performance, stability and yield. At the same time, it can avoid the use of additional vacuum equipment for evaporating organic salts, thereby significantly reducing production costs and increasing mass production capacity.
[0064] In a preferred embodiment, the thin film is a cesium salt thin film, which is used to prepare a perovskite active layer. The substrate 50 is a stacked structure of substrate layer / electron transport layer / lead salt thin film, or a stacked structure of substrate layer / hole transport layer / lead salt thin film.
[0065] Compared to using a liquid dropper to drop liquid onto the surface of substrate 50 or using a slit coating device to coat liquid onto the surface of substrate 50, the cesium salt film prepared using the preparation system provided in this application has better uniformity. Applying it to single-cell perovskite solar cells or tandem solar cells is beneficial to improving their electrochemical performance, stability and yield.
[0066] In a preferred embodiment, the thin film is a hole transport layer, and the substrate 50 is a stacked structure of substrate layer / electron transport layer / perovskite active layer or a substrate layer.
[0067] Compared to solution methods (such as using a liquid dropper to drop liquid onto the surface of substrate 50, or using a slit coating device to coat liquid onto the surface of substrate 50), the hole transport layer prepared by the above-mentioned preparation system provided in this application has better uniformity and higher hole transport efficiency. Applying it to single-cell perovskite solar cells or tandem solar cells is beneficial to improving their electrochemical performance and yield.
[0068] In a preferred embodiment, the thin film is a passivation layer, and the substrate 50 is a first stacked structure of substrate layer / electron transport layer, or a second stacked structure of substrate layer / electron transport layer / perovskite active layer, or a third stacked structure of substrate layer / hole transport layer, or a fourth stacked structure of substrate layer / hole transport layer / perovskite active layer.
[0069] Compared with traditional solution methods (such as using a liquid dropper to drop liquid onto the surface of substrate 50, or using a slot coating device for coating, or using a spin coating device for spin coating), the passivation layer prepared by the above-mentioned preparation system provided in this application has better uniformity, which is conducive to better exerting the passivation effect of the passivation layer, thereby improving the electrochemical performance and stability of single-cell perovskite solar cells or tandem solar cells.
[0070] In a preferred embodiment, the thin film is an electron transport layer, and the substrate 50 is a stacked structure of substrate layer / hole transport layer / perovskite active layer or a substrate layer.
[0071] Compared to solution methods (such as using a liquid dropper to drop liquid onto the surface of substrate 50, or using a slit coating device to coat liquid onto the surface of substrate 50), the electron transport layer prepared by the above-mentioned preparation system provided in this application has better uniformity and higher electron transport efficiency. Applying it to single-cell perovskite solar cells or tandem solar cells is beneficial to improving their electrochemical performance and yield.
[0072] During the process of applying liquid to the surface of the substrate 50 by squeezing the sponge roller 30, excess liquid may overflow to the sidewalls or even the bottom of the substrate 50 (i.e., the other side surface of the substrate 50). In a preferred embodiment, the film preparation system provided in this application further includes an anti-overflow component to prevent liquid from overflowing from the side surface of the substrate 50 near where the liquid film is applied to the sidewalls and bottom of the substrate 50 during the imprinting process. The anti-overflow component is fitted to the sidewalls of the substrate 50.
[0073] To further suppress liquid overflow to the sidewalls and bottom of the substrate 50 membrane layer, preferably, the overflow prevention component is a metal tray or its material is an absorbent material.
[0074] In a preferred embodiment, the anti-overflow component is a metal tray, and the top of the anti-overflow component is lower than or parallel to the surface of the substrate 50 near the liquid film. Preferably, the distance between the top of the anti-overflow component and the surface of the substrate 50 near the liquid film is 0 to 0.1 cm. Alternatively, the anti-overflow component is made of absorbent material, and the top of the anti-overflow component is higher than, parallel to, or lower than the surface of the substrate 50 near the liquid film. Taking the surface of the substrate 50 near the liquid film as a reference plane, the top height of the anti-overflow component is preferably -90 μm to 0.5 cm. It should be noted that a negative height indicates that the top of the anti-overflow component is lower than the position to be imprinted. Setting the positional relationship between the anti-overflow component and the film layer of the substrate 50 within the above range is beneficial to further suppress liquid overflow to the sidewalls and bottom of the film layer of the substrate 50.
[0075] The beneficial technical effects of the above-mentioned technical solution of this utility model are as follows:
[0076] 1. Compared with using a liquid dripping device to drip liquid onto the surface of substrate 50, the liquid film is laid by the imprinting contact between the sponge roller 30 and the surface of substrate 50, thereby achieving uniform laying of the liquid film on substrate 50, which significantly improves the uniformity and crystallization quality of the film.
[0077] 2. This system is not only applicable to the preparation of perovskite thin films, but can also be extended to other types of thin film materials, such as hole transport layers, passivation layers, and electron transport layers, thus improving the system's flexibility and versatility.
[0078] 3. High-quality thin films can greatly improve the energy conversion efficiency of perovskite solar cells, reduce defects, improve the stability and yield of solar cells, thereby enhancing the overall performance of the cells.
[0079] 4. Compared with high-precision slit coating equipment, the preparation system provided in this application has a simpler structure and reduces the waste of expensive raw materials during operation, thereby reducing production costs and promoting the commercialization of perovskite solar cells.
[0080] In summary, this invention provides a battery thin film preparation apparatus. By coordinating a conveying platform 10, a driving structure, a liquid replenishment structure 20, and a sponge roller 30, the apparatus allows for precise control of the volume of the imprinting liquid at the imprinting position 40 by adjusting the compression distance. This results in high-precision imprinting of the thin film, leading to higher crystallinity and better uniformity in the subsequently formed film, thus ensuring improved stability and yield of solar cells. The liquid replenishment structure 20 replenishes the imprinting liquid absorbed by the sponge roller 30, enabling continuous imprinting and improving the preparation efficiency of the battery thin film. The use of the sponge roller 30 efficiently utilizes its excellent liquid absorption and retention capabilities, allowing for precise control of the liquid film thickness by adjusting the degree of compression. During the imprinting process, the sponge roller 30, immersed in the imprinting liquid, is compressed, resulting in the imprinting process. Liquid is uniformly released from the sponge roller 30 onto the imprinting position 40, forming a liquid film. This invention can improve the crystallinity quality of the thin film by precisely controlling the liquid film laying, and is particularly suitable for perovskite thin films and other sensitive thin film materials. Compared with the existing method of preparing thin films by dripping liquid onto the surface of the substrate 50 using a liquid dripping device, this invention achieves uniform film laying on the imprinting position 40 through the imprinting of the sponge roller 30, significantly improving the uniformity and crystallinity quality of the film. This invention has a simple structure and low cost, is easy to assemble and maintain, and solves the problem of low crystallinity and poor thickness uniformity of the thin film caused by uneven liquid film laying on the surface of the perovskite solar cell substrate 50 in the prior art, which leads to poor stability and low yield of the solar cell. This invention is not only applicable to the preparation of perovskite thin films, but can also be extended to other types of thin film materials, such as hole transport layers, passivation layers, and electron transport layers, which can improve the flexibility and versatility of thin film preparation and is suitable for large-scale promotion and use.
[0081] The technical features of the embodiments described above can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered to be within the scope of this specification.
[0082] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0083] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.
[0084] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.
[0085] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.
[0086] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.
[0087] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A battery thin film preparation apparatus, characterized in that, The device includes an imprinting assembly, which comprises a conveying platform (10), a driving structure, a liquid replenishment structure (20), and a sponge roller (30). The imprinting position (40) is located on the surface of a substrate (50), which is mounted on the conveying platform (10). The sponge roller (30) is mounted on the driving structure, which drives the sponge roller (30) to rotate. The sponge roller (30) absorbs the imprinting liquid containing solute and solvent. The liquid replenishment structure (20) replenishes the imprinting liquid absorbed by the sponge roller (30). The platform (10) is used to drive the substrate (50) to move closer to or further away from the sponge roller (30); wherein, the first direction is the direction along the radial direction of the sponge roller (30) and perpendicular to the surface of the position to be imprinted (40), and the compression distance is the distance between the rotation axis of the sponge roller (30) and the surface of the position to be imprinted (40) along the first direction. By adjusting the compression distance, the compression deformation of the sponge roller (30) on the position to be imprinted (40) is controlled, so as to control the volume of the imprinting liquid on the position to be imprinted (40).
2. The battery thin film preparation apparatus according to claim 1, characterized in that, The replenishment structure (20) includes a liquid pool (21) and a replenishment roller (22). The liquid pool (21) contains the imprinting liquid. A portion of the replenishment roller (22) is disposed within the liquid pool (21) and is in contact with the imprinting liquid to absorb the liquid. The replenishment roller (22) is rotatably disposed and is pressed against the sponge roller (30) to allow the imprinting liquid in the replenishment roller (22) to enter the sponge roller (30).
3. The battery thin film preparation apparatus according to claim 1, characterized in that, The replenishment structure (20) includes a liquid pool (21), a replenishment roller (22), and a transfer roller (23); the liquid pool (21) contains the imprinting liquid; a portion of the replenishment roller (22) is disposed within the liquid pool (21) and in contact with the imprinting liquid for liquid absorption; the transfer roller (23) and the replenishment roller (22) are rotatably disposed, the replenishment roller (22) and the transfer roller (23) are mutually squeezed, and the transfer roller (23) and the sponge roller (30) are mutually squeezed, so that the imprinting liquid in the replenishment roller (22) enters the sponge roller (30) through the transfer roller (23).
4. The battery thin film preparation apparatus according to claim 3, characterized in that, The replenishing roller (22) and / or the transfer roller (23) are located above the sponge roller (30) so that the imprinting liquid is transferred to the sponge roller (30) under the action of gravity; the liquid pool (21) is located above the sponge roller (30) and below the replenishing roller (22); the rotation direction of the replenishing roller (22) is opposite to the rotation direction of the transfer roller (23), and the rotation direction of the transfer roller (23) is opposite to the rotation direction of the sponge roller (30).
5. The battery thin film preparation apparatus according to claim 1, characterized in that, The replenishment structure (20) includes a replenishment pipe and a liquid drive pump. The replenishment pipe is connected to the liquid drive pump. The imprinting liquid flows through the replenishment pipe. The liquid drive pump drives the imprinting liquid in the replenishment pipe to flow in a directional manner. The liquid outlet of the replenishment pipe is located inside the sponge roller (30) or abuts against the outer periphery of the sponge roller (30) so that the imprinting liquid in the replenishment pipe enters the sponge roller (30).
6. The battery thin film preparation apparatus according to claim 5, characterized in that, The replenishment tubes are multiple, and at least a portion of the multiple replenishment tubes are arranged in parallel; the liquid outlets of the multiple replenishment tubes arranged in parallel discharge liquid at the same time, and are spaced apart along the axial direction of the sponge roller (30) so as to replenish liquid at various points of the sponge roller (30) at the same time.
7. The battery thin film preparation apparatus according to claim 1, characterized in that, The conveying platform (10) includes a conveyor belt (11) and a motor drive structure. The conveyor belt (11) cooperates with the motor drive structure, and the motor drive structure is used to drive the conveyor belt (11) to rotate cyclically. The substrate (50) is detachably placed on the upper surface of the conveyor belt (11). The conveyor belt (11) drives the substrate (50) to move horizontally to move closer to or away from the sponge roller (30). The first direction is vertically downward. The length of the liquid film formed by the imprinting liquid on the imprinting position (40) is controlled by adjusting the pressing time between the sponge roller (30) and the imprinting position (40) and the horizontal moving distance of the substrate (50).
8. The battery thin film preparation apparatus according to claim 1, characterized in that, The sponge roller (30) has a cylindrical structure, and the axial length of the sponge roller (30) is adapted to the width of the film to be prepared. The conveying platform (10) drives the substrate (50) to move horizontally to move closer to or away from the sponge roller (30). The first direction is vertically downward. By adjusting the pressing time between the sponge roller (30) and the imprinting position (40) and the horizontal moving distance of the substrate (50), the length of the liquid film formed by the imprinting liquid on the imprinting position (40) is controlled, and the length of the liquid film is adapted to the length of the film to be prepared. The porosity of the sponge roller (30) is 30-98%, and the specific surface area is 2000-200000 cm² / g; and / or, the central axis of the sponge roller (30) coincides with the rotation axis and is horizontally arranged; the sponge roller (30) is cut with a plane including the central axis and horizontally arranged to obtain a cross-section, the shape of the cross-section is rectangular or square, when the shape of the cross-section is rectangular, the dimension of the rectangle along the axial direction of the sponge roller (30) is the length, the length range is 16.6-3000 cm, and the width range is 10.5-1500 cm; when the shape of the cross-section is square, the side length of the square ranges from 5.25 to 210 cm.
9. The battery thin film preparation apparatus according to claim 1, characterized in that, The battery thin film preparation apparatus further includes an annealing component for annealing the substrate (50) to form an imprinted liquid on the substrate (50) into a molded film.
10. The battery thin film preparation apparatus according to claim 1, characterized in that, The battery thin film preparation apparatus further includes an anti-overflow component, which is used to prevent the imprinting liquid from overflowing from the imprinting position (40) to the sidewall and bottom of the substrate (50) during the imprinting process. The anti-overflow component is disposed in contact with the sidewall of the substrate (50). The anti-overflow component is a metal tray or uses a liquid-absorbing material. When the anti-overflow component is a metal tray, the top of the anti-overflow component is lower than or parallel to the surface of the imprinting position (40), and the distance between the top of the anti-overflow component and the surface of the imprinting position (40) is within the range of 0 to 0.1 cm. When the anti-overflow component uses a liquid-absorbing material, the top of the anti-overflow component is higher than, parallel to, or lower than the surface of the imprinting position (40), and the distance between the top of the anti-overflow component and the surface of the imprinting position (40) is within the range of -90 μm to 0.5 cm.