Semiconductor wafer storage frame cassette

Abstract

The utility model relates to the technical field of semiconductor, and disclose a kind of semiconductor wafer storage frame box, including placing plate, the bottom of the placing plate is equipped with additional plate, the inside of the placing plate is inserted with the limiting plate for preventing position deviation, the inner wall of the placing plate is threadedly connected with fixed frame, the top of the fixed frame is equipped with for adjusting adapter rod, the outer wall of the placing plate is clamped with the sliding plate slot for fixed, the inside of the sliding plate slot is clamped with stretchable plate.This semiconductor wafer storage frame box, through the cooperation setting of placing plate, additional plate, limiting plate, fixed frame and adapter rod, can make the device better storage semiconductor wafer when using, by additional plate in the bottom of placing plate positioning, realize the side of the partition processing, prevent in the case of overall imbalance from sliding out, increase the practicability of device, by the use of fixed frame and adapter rod, effectively fixed on the top of placing plate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a semiconductor wafer storage frame box. Background Technology

[0002] In the field of semiconductor technology, semiconductor wafers are the basic material for integrated circuit manufacturing, and their quality and safe storage are of paramount importance. With the continuous development of semiconductor technology, the requirements for wafer storage are becoming increasingly stringent. Currently, traditional semiconductor wafer storage methods have some problems, such as insufficient storage stability, easy damage to wafers, inconvenient and inefficient operation when removing wafers, lack of effective protective measures, and susceptibility to external environmental factors. Therefore, an innovative semiconductor wafer storage solution is needed to meet the needs of modern semiconductor manufacturing.

[0003] Chinese Patent Publication No. CN214165690U discloses a semiconductor wafer storage box, including an inner shell, which is cubic in shape with an open top and a closed bottom. The inner shell contains multiple circular storage compartments arranged vertically side-by-side, with each compartment having a straight edge cut along its circular edge at the top. The inner shell has notches on both sides that communicate with the storage compartments to allow the wafers to be completely placed within them. An outer shell, which is cylindrical, is inserted through the opening at the top of the inner shell to fit around it. The lower outer wall of the outer shell has external threads, through which a cap is connected. This invention reduces wafer wear and prevents dust from entering the box, thereby lowering production costs.

[0004] However, this utility model has the following problems in actual use:

[0005] The overall device of this utility model is relatively unstable during use. It lacks a barrier design to prevent the wafer from sliding outward under unbalanced conditions. The extraction and placement require operations such as disassembling the outer shell and the cap, which is relatively cumbersome. It cannot be adjusted and combined according to different needs. Utility Model Content

[0006] (a) Technical problems to be solved

[0007] To overcome the aforementioned shortcomings of the prior art, this utility model provides a semiconductor wafer storage frame box, which solves the problems in the prior art:

[0008] The overall device of this invention is relatively unstable during use. It lacks a barrier design to prevent the wafer from sliding outwards under unbalanced conditions. The extraction and placement require disassembling the outer shell and cap, which is relatively cumbersome. It also cannot be adjusted and combined according to different needs.

[0009] (II) Technical Solution

[0010] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor wafer storage frame box, comprising a placement plate, an additional plate at the bottom of the placement plate, a limiting plate for preventing positional displacement inserted inside the placement plate, a fixing frame threaded to the inner wall of the placement plate, an adjustment adapter rod at the top of the fixing frame, a sliding plate groove for fixing snapped into the outer wall of the placement plate, a stretching plate snapped into the inside of the sliding plate groove, and a bonding plate on one side of the stretching plate.

[0011] Furthermore, the inner wall of the placement plate is provided with a slot for placement, and the outer wall of the placement plate is threaded with bolts to prevent loosening.

[0012] Furthermore, a soft rubber pad is snapped into the inner wall of the additional plate, and a through pin is threaded to the bottom of the additional plate. The through pin passes through the outer wall of the additional plate and is threaded to the bottom of the placement plate.

[0013] Furthermore, both sides of the limiting plate are threaded with auxiliary pieces for positioning, and one side of the auxiliary piece is engaged with the interior of the placement plate.

[0014] Furthermore, the outer wall of the fixing frame is threaded to one side of the bolt, and a positioning block is fixedly installed on the top of the fixing frame.

[0015] Furthermore, one side of the adapter rod is engaged with the outer wall of the positioning block, and the outer wall of the adapter rod is engaged with a rubber sleeve for support.

[0016] Furthermore, an adjusting ring is engaged on one side of the sliding plate groove, and the adjusting ring passes through the interior of the sliding plate groove and engages with the outer wall of the placement plate.

[0017] Furthermore, a plate is fixedly connected to the outer wall of the bonding plate, one side of the plate is threadedly connected to one side of the stretching plate, and a handle is fixedly installed on the outer surface of the bonding plate.

[0018] (III) Beneficial Effects

[0019] This utility model provides a semiconductor wafer storage frame box, which has the following beneficial effects:

[0020] This semiconductor wafer storage frame box, through the coordinated arrangement of a placement plate, an auxiliary plate, a limiting plate, a fixing frame, and an adapter rod, allows for better storage and placement of semiconductor wafers during use. The auxiliary plate positions itself at the bottom of the placement plate, providing a barrier on the other side to prevent it from sliding outwards in case of overall imbalance, thus increasing the practicality of the device. The fixing frame and adapter rod effectively secure the top of the placement plate, and the operator can manually adjust and carry it by supporting the adapter rod. The coordinated arrangement of the sliding plate slot, the stretching plate, and the bonding plate allows for easy removal of semiconductor wafers. At the same time, adjusting the stretching plate assists in moving the bonding plate outwards, and the sliding plate slot rotates on the outer wall of the placement plate to ensure that the bonding plate can be adjusted upwards, increasing the mobility between components and making the device itself more practical. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of this utility model;

[0022] Figure 2 This is a schematic diagram of the partial explosion structure of this utility model;

[0023] Figure 3 This is a schematic diagram of the fixed frame structure of this utility model;

[0024] Figure 4 This is a schematic diagram of the bonding plate structure of this utility model;

[0025] Figure 5 This is a schematic diagram of the tensile plate structure of this utility model.

[0026] In the diagram: 1. Placement plate; 2. Additional plate; 3. Limiting plate; 4. Fixing frame; 5. Adapter rod; 6. Sliding plate groove; 7. Tensioning plate; 8. Adhesive plate; 9. Slot; 10. Bolt; 11. Soft rubber pad; 12. Through pin; 13. Auxiliary piece; 14. Positioning block; 15. Rubber sleeve; 16. Adjusting ring; 17. Plate; 18. Handle. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0028] Please see Figures 1 to 5 This utility model provides a semiconductor wafer storage frame box, which is applied in semiconductor manufacturing scenarios. In this embodiment, the structure of the storage frame box is improved to give it the advantage of protection.

[0029] Example 1:

[0030] Please see Figure 1 and Figure 2 This utility model provides a technical solution: a semiconductor wafer storage frame box, including a placement plate 1, an auxiliary plate 2 at the bottom of the placement plate 1, a limiting plate 3 for preventing positional displacement inserted inside the placement plate 1, a slot 9 for placement on the inner wall of the placement plate 1, a bolt 10 for preventing loosening threadedly connected to the outer wall of the placement plate 1, a soft rubber pad 11 snapped into the inner wall of the auxiliary plate 2, a through pin 12 threadedly connected to the bottom of the auxiliary plate 2, the through pin 12 passing through the outer wall of the auxiliary plate 2 and threadedly connected to the bottom of the placement plate 1, and auxiliary pieces 13 for positioning threadedly connected to both sides of the limiting plate 3, one side of the auxiliary piece 13... The slot 9 engages with the internal part of the placement plate 1, thus providing a specific placement position for the semiconductor wafer, ensuring the wafer's position is stable during storage and preventing movement. The bolt 10 strengthens the connection between the placement plate 1 and other components, preventing loosening during use. The soft rubber pad 11 acts as a buffer, protecting the stored semiconductor wafer from impacts and vibrations. The through pin 12 ensures a secure and reliable connection between the auxiliary plate 2 and the placement plate 1. The auxiliary piece 13 further enhances the positioning function of the limiting plate 3, preventing the semiconductor wafer from shifting position during storage.

[0031] Example 2:

[0032] Please see Figure 1 , Figure 2 and Figure 3 In order to facilitate the fixation of the top of the device and prevent loosening at the docking position, making the device more integrated, a device fixing frame 4 and an adapter rod 5 are set.

[0033] The inner wall of the placement plate 1 is threadedly connected to a fixing frame 4. The top of the fixing frame 4 is provided with an adjustment adapter rod 5. The outer wall of the fixing frame 4 is threadedly connected to one side of the bolt 10. A positioning block 14 is fixedly installed on the top of the fixing frame 4. One side of the adapter rod 5 is engaged with the outer wall of the positioning block 14. A rubber sleeve 15 for support is engaged with the outer wall of the adapter rod 5. Therefore, the fixing frame 4 and the adapter rod 5 can be easily connected and positioned by the positioning block 14. The rubber sleeve 15 can increase the friction, making it convenient for the operator to hold the adapter rod 5 for carrying and operation.

[0034] Example 3:

[0035] Please see Figure 4 and Figure 5 To facilitate manual adjustment of the tension by operators and increase the mobility between parts, a sliding plate groove 6, a tension plate 7 and a bonding plate 8 are provided.

[0036] The outer wall of the placement plate 1 is fitted with a sliding plate groove 6 for fixing. A tension plate 7 is fitted inside the sliding plate groove 6. A bonding plate 8 is provided on one side of the tension plate 7. An adjusting ring 16 is fitted on one side of the sliding plate groove 6. The adjusting ring 16 passes through the inside of the sliding plate groove 6 and is fitted with the outer wall of the placement plate 1. A plate 17 is fixedly connected to the outer wall of the bonding plate 8. One side of the plate 17 is threadedly connected to one side of the tension plate 7. A handle 18 is fixedly installed on the outer surface of the bonding plate 8. Therefore, the position and angle of the sliding plate groove 6 can be adjusted by the adjusting ring 16, which is convenient for the operator to adjust as needed. The plate 17 can increase the strength and stability of the bonding plate 8 and can also be used to connect with the tension plate 7. The handle 18 can make it convenient for the operator to hold the bonding plate 8 for operation, improving the convenience of operation.

[0037] In this invention, the working steps of the device are as follows:

[0038] First, gently place the semiconductor wafer into the slot 9 of the placement plate 1 to ensure that the wafer is in a stable position and will not shift. Insert the limiting plate 3 and further fix the position of the wafer with the auxiliary piece 13. Install the fixing frame 4 and connect it firmly to the placement plate 1 with bolts 10 to provide top protection for the wafer. The operator can hold the rubber sleeve 15 on the adapter rod 5 to easily carry and move the semiconductor wafer storage frame box. Hold the handle 18 and pull the bonding plate 8 through the plate 17. At the same time, adjust the adjusting ring 16 as needed to make the sliding plate slot 6 and the stretching plate 7 cooperate to assist the bonding plate 8 to move outward and gently remove the semiconductor wafer.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A semiconductor wafer storage frame box, comprising a placement plate (1), characterized in that: The bottom of the placement plate (1) is provided with an additional plate (2). A limiting plate (3) for preventing positional displacement is inserted into the interior of the placement plate (1). A fixing frame (4) is threaded onto the inner wall of the placement plate (1). An adapter rod (5) for adjustment is provided on the top of the fixing frame (4). A sliding plate groove (6) for fixing is snapped onto the outer wall of the placement plate (1). A tension plate (7) is snapped onto the interior of the sliding plate groove (6). A bonding plate (8) is provided on one side of the tension plate (7).

2. The semiconductor wafer storage frame box according to claim 1, characterized in that: The inner wall of the placement plate (1) is provided with a slot (9) for placement, and the outer wall of the placement plate (1) is threaded with a bolt (10) for preventing loosening.

3. A semiconductor wafer storage frame box according to claim 1, characterized in that: The inner wall of the auxiliary plate (2) is fitted with a soft rubber pad (11), and the bottom of the auxiliary plate (2) is threaded with a through pin (12). The through pin (12) passes through the outer wall of the auxiliary plate (2) and is threaded to the bottom of the placement plate (1).

4. A semiconductor wafer storage frame box according to claim 1, characterized in that: Both sides of the limiting plate (3) are threaded with auxiliary pieces (13) for positioning, and one side of the auxiliary piece (13) is engaged with the inside of the placement plate (1).

5. A semiconductor wafer storage frame box according to claim 2, characterized in that: The outer wall of the fixed frame (4) is threaded to one side of the bolt (10), and a positioning block (14) is fixedly installed on the top of the fixed frame (4).

6. A semiconductor wafer storage frame box according to claim 1, characterized in that: One side of the adapter rod (5) is engaged with the outer wall of the positioning block (14), and the outer wall of the adapter rod (5) is engaged with a rubber sleeve (15) for support.

7. A semiconductor wafer storage frame box according to claim 1, characterized in that: An adjusting ring (16) is engaged on one side of the sliding plate groove (6), and the adjusting ring (16) passes through the inside of the sliding plate groove (6) and engages with the outer wall of the placement plate (1).

8. A semiconductor wafer storage frame box according to claim 1, characterized in that: A plate (17) is fixedly connected to the outer wall of the bonding plate (8). One side of the plate (17) is threadedly connected to one side of the stretching plate (7). A handle (18) is fixedly installed on the outer surface of the bonding plate (8).

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