A vacuum storage device

Abstract

The utility model discloses a vacuum storage device, including the table body, is set up with a plurality of accommodation cavities on the table body, and the accommodation cavity is used to accommodate at least one work piece, and a plurality of sealing covers are hinged on the table body, and a plurality of sealing covers correspond with a plurality of accommodation cavities one to one, and the sealing cover is used to open or seal corresponding accommodation cavity, the cavity wall of accommodation cavity is set up with the air extraction hole and the air release hole, and the air extraction hole and the air release hole all run through the table body, and the air extraction hole is communicated with the vacuum equipment through the sealed pipeline, and a plurality of air release valves are equipped on the table body, and a plurality of air release valves correspond with a plurality of air release holes one to one, and the air release valve is used to open or seal corresponding air release hole. The utility model can adapt to the application scene such as the need of high vacuum storage of hemispherical resonator etc. and the need of frequently taking and placing, to solve the performance degradation problem caused by film oxidation in the temporary storage process after the metallization of hemispherical resonator.

Description

Technical Field

[0001] This utility model relates to the field of high-precision inertial sensors, specifically to a vacuum storage device. Background Technology

[0002] A hemispherical resonator gyroscope is a high-precision inertial sensor based on the Coriolis effect. Its core component is a surface-metallized hemispherical resonator. The hemispherical resonator is formed by depositing a thin metal film on a fused silica or single-crystal quartz substrate to create electrodes. The metallization process includes thin film deposition and annealing steps. The time between metallization and packaging is relatively long. When the metal film is exposed to the atmosphere, the surface adsorbs oxygen and reacts with water vapor to form an oxide layer, significantly increasing surface resistance and energy loss. This leads to a decrease in the quality factor of the metallized hemispherical resonator. Even in dry environments, due to the time-dependent growth of the oxide layer, long-term storage will still lead to performance degradation. Furthermore, the adsorption of dust and organic matter in the atmosphere introduces additional energy loss. Oxidation and contamination of the metallized film alter its stress distribution, causing the resonant frequency of the hemispherical resonator to drift, severely affecting the zero-bias stability of the hemispherical resonator gyroscope.

[0003] To prevent oxidation of metal films, existing solutions typically involve storage in a drying oven or under an inert gas environment. While this slows down oxidation, it cannot completely isolate oxygen. Furthermore, the growth of the oxide layer is time-dependent, limiting the protective effect. Additionally, storage in existing general-purpose vacuum chambers is also limited due to their large volume, slow evacuation rates, and the frequent handling of the hemispherical harmonic oscillator after metallization, which also changes over time. This makes the protective effect unsuitable for mass production scenarios. Utility Model Content

[0004] To address the problems in the background technology, this utility model proposes a vacuum storage device to adapt to application scenarios such as hemispherical harmonic oscillators that require high vacuum storage and frequent retrieval.

[0005] The present invention adopts the following technical solution: A vacuum storage device includes a platform with multiple accommodating cavities for accommodating at least one workpiece. Multiple sealing caps are hinged to the platform, each corresponding to one of the accommodating cavities, and are used to open or seal the respective accommodating cavity. Each accommodating cavity has an extraction port and a venting port in its wall, both penetrating the platform. The extraction port is connected to a vacuum pump via a sealed pipe. The platform also has multiple venting valves, each corresponding to one of the venting ports, which are used to open or seal the respective venting ports.

[0006] Optionally, an integrated valve island is installed on the platform. The integrated valve island has multiple valve units, each corresponding to a multiple accommodating cavity. Each valve unit has an air inlet and an air outlet. The air inlet is connected to the vent of the corresponding accommodating cavity through a sealed pipe, and the air outlet is sealed to the suction port of the corresponding accommodating cavity. The air outlet is also connected to a vacuum pump through a sealed pipe.

[0007] Optionally, the integrated valve island is installed at the bottom of the platform, which is supported on two L-shaped support legs.

[0008] Optionally, each valve unit also has a valve switch for controlling the connection and disconnection between the corresponding outlet port and the vacuum equipment.

[0009] Optionally, each valve unit has a first quick-connect fitting installed in its air inlet port for sealing connection with the pipeline, and a second quick-connect fitting installed in its air extraction port for sealing connection with the pipeline.

[0010] Optionally, a first sealing ring is provided on the outer periphery of the accommodating cavity on the platform body for sealing connection with the sealing cover.

[0011] Optionally, one end of the sealing cover is hinged to the platform body, and the other end of the sealing cover is detachably connected to the platform body by bolts, with the first sealing ring pressed between the sealing cover and the platform body.

[0012] Optionally, a stage for mounting the workpiece is fixed inside the accommodating cavity.

[0013] Optionally, the vent is a countersunk hole, which includes a large hole section and a small hole section. The small hole section is connected to the corresponding receiving cavity. One end of the vent valve extends into the large hole section and abuts against the bottom wall of the large hole section. A second sealing ring is provided between the vent valve and the bottom wall of the large hole section. An air inlet is also provided on the platform, which extends to communicate with the large hole section.

[0014] Optionally, a pressure gauge is provided on the sealing cover, with one end of the pressure gauge passing through the sealing cover and extending into the receiving cavity.

[0015] Compared with the prior art, the advantages of this utility model are: This invention designs independent sealed storage station units, each of which is independently connected to a vacuum pumping device and can be evacuated or vented individually. This adapts to applications such as hemispherical harmonic oscillators that require high vacuum storage and frequent retrieval. Attached Figure Description

[0016] To facilitate understanding of this invention, it will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings depict only typical embodiments of this invention and should not be considered as limiting the scope of protection of this invention.

[0017] Figure 1 This is a three-dimensional structural diagram of the vacuum storage device according to an embodiment of the present invention.

[0018] Figure 2 This is a front view structural diagram of the vacuum storage device according to an embodiment of the present invention.

[0019] Figure 3 This is a top view of the integrated platform structure.

[0020] Figure 4 This is a bottom view of the integrated platform structure.

[0021] Figure 5 This is a side view of the integrated platform structure. Figure 6 A bottom view of the vacuum storage device. Figure 7 This is a cross-sectional view of the workstation of the vacuum storage device.

[0022] Figure 8 This is a schematic diagram of the vent valve.

[0023] Figure 9 This is a schematic diagram of the sealing cap. Detailed Implementation

[0024] The embodiments of the present invention are described below with reference to the accompanying drawings, so that those skilled in the art can better understand and implement the present invention. However, the listed embodiments are not intended to limit the present invention. In the absence of conflict, the following embodiments and the technical features in the embodiments can be combined with each other, wherein the same components are indicated by the same reference numerals.

[0025] like Figures 1-9 As shown, the vacuum storage device of this embodiment includes a platform 1, on which a plurality of accommodating cavities 1-1 are formed. Each accommodating cavity 1-1 is used to accommodate at least one workpiece. A plurality of sealing caps 2 are hinged to the platform 1, and each sealing cap 2 corresponds to one of the accommodating cavities 1-1. The sealing caps 2 are used to open or seal the corresponding accommodating cavity 1-1. The cavity wall of each accommodating cavity 1-1 is provided with a suction port 1-5 and a venting port 1-8. Both the suction port 1-5 and the venting port 1-8 penetrate the platform 1. The suction port 1-5 is connected to a vacuum pumping device through a sealed pipe. A plurality of venting valves 7 are provided on the platform 1, and each venting valve 7 corresponds to one of the venting ports 1-8. The venting valves 7 are used to open or seal the corresponding venting ports 1-8.

[0026] In this embodiment, an integrated valve island 5 is installed on the platform 1. The integrated valve island 5 has multiple valve units, which correspond one-to-one with multiple accommodating cavities 1-1. Each valve unit has an air inlet and an air outlet 5-1. The air inlet is connected to the vent hole 1-8 of the corresponding accommodating cavity 1-1 through a sealed pipe. The air outlet 5-1 is sealed and connected to the suction hole 1-5 of the corresponding accommodating cavity 1-1. The air outlet 5-1 is also connected to a vacuum pump through a sealed pipe.

[0027] In this embodiment, the integrated valve island 5 is installed at the bottom of the platform 1, and the platform 1 is supported on two L-shaped support legs 13.

[0028] In this embodiment, each valve unit also has a valve switch 6, which is used to control the connection and disconnection between the corresponding air outlet 5-1 and the vacuum equipment.

[0029] In this embodiment, each valve unit has a first quick connector 5-2 installed in its air inlet port for sealing connection with the pipeline, and a second quick connector 11 installed in its air extraction port 1-5 for sealing connection with the pipeline.

[0030] In this embodiment, a first sealing ring 8 is provided on the outer periphery of the accommodating cavity 1-1 on the platform 1 for sealing connection with the sealing cover 2.

[0031] In this embodiment, one end of the sealing cover 2 is hinged to the platform 1, and the other end of the sealing cover 2 is detachably connected to the platform 1 by bolts 4. The first sealing ring 8 is pressed between the sealing cover 2 and the platform 1.

[0032] In this embodiment, a platform 10 for mounting workpieces is fixed inside the accommodating cavity 1-1.

[0033] In this embodiment, the vent hole 1-8 is a recessed hole, which includes a large hole section and a small hole section. The small hole section is connected to the corresponding receiving cavity 1-1. One end of the vent valve 7 extends into the large hole section and abuts against the bottom wall of the large hole section. A second sealing ring 7-1 is provided between the vent valve 7 and the bottom wall of the large hole section. An air inlet hole 1-9 is also provided on the platform, which extends to communicate with the large hole section of the recessed hole.

[0034] In this embodiment, a pressure gauge 3 is provided on the sealing cover 2, and one end of the pressure gauge 3 passes through the sealing cover 2 and extends into the accommodating cavity 1-1.

[0035] This utility model provides a modular multi-station vacuum device, mainly used to solve the performance degradation problem caused by thin-film oxidation during the temporary storage of hemispherical resonator metallized inductors. Its core innovations include: This utility model designs independent sealed storage station units, each independently connected to the vacuum pumping equipment, allowing for individual evacuation or venting. This adapts to applications such as hemispherical resonator inductors that require high-vacuum storage and frequent handling.

[0036] The sealing station unit has pre-drilled threaded holes inside, allowing for the replacement of platforms that can accommodate hemispherical resonators of different sizes. Each station is also equipped with an independent pressure gauge to monitor the vacuum sealing status of each station, making it particularly suitable for mass production scenarios.

[0037] Specifically, such as Figure 1 The vacuum storage device shown has an integrated platform 1 as its main connecting component. The platform 1 is as follows: Figure 2 , Figure 3 , Figure 4 As shown, the top surface of the platform has multiple arrayed cavities 1-1 with diameters of 30mm-60mm and depths of 30mm-60mm, machined according to requirements. M6-M8 threaded blind holes are formed on the bottom wall of the cavities 1-1 as mounting holes 1-2 for the platform. On the top surface of the platform 1, on the outer periphery of the cavities 1-1, a countersunk sealing ring mounting groove 1-3 with a diameter of 35mm-65mm, a width of 2mm-3mm, and a depth of 1mm-2mm is machined. On the top surface of the platform 1, on one side of the cavities 1-1, M8-M18 threaded holes with a depth of 10mm-15mm are machined as mounting holes 1-4 for the spur bolts. The bottom surface is machined with M8-M18 threaded through holes as air extraction holes 1-5, and also as joint mounting positions. The top surface of the platform 1 is also machined with M15-M20 threaded through holes as solenoid valve switch mounting holes 1-6, and multiple hinge seats 1-7 are also welded on. The side surface of the platform 1 is machined with M24-M30 threaded through holes as vent holes 1-8, and also as vent valve mounting positions. The bottom surface of the platform 1 is also provided with 2mm-5mm through holes as air inlets 1-9, which are connected to vent holes 1-8. The accommodating cavity 1-1, air extraction holes 1-5 and vent holes 1-8 constitute a sealed storage station, which is 16 stations in this example. Hinge 1-7 mates with the hinge end of sealing cover 2 and is fixed by pins. The sealing cover is made of 304 stainless steel. Install the first sealing ring 8 in the sealing ring mounting groove 1-3; The stage 10 is customized according to the size of the hemispherical resonator. One end is a bolt, which is installed in the stage mounting hole 1-2 at the bottom of the vacuum cavity of the integrated multi-station stage. The stage mounting hole 1-2 is a central threaded hole. The other end of the stage 10 is a countersunk hole, which is used to accommodate the anchor end of the hemispherical resonator. Install the second quick connector 11 inside the air extraction port 1-5; Install the solenoid valve switch 6 in the solenoid valve switch mounting holes 1-6; Install such as within the large hole section of vent holes 1-8 Figure 7 The vent valve 7 shown has a second sealing ring 7-1 installed in the countersunk hole at its front end; A pressure gauge 3 is installed at the threaded through hole in the center of the sealing cover 2 to monitor the pressure inside the cavity; An integrated valve island 5 with electromagnetic induction is installed at the bottom of the platform 1, and L-shaped support feet 9 are installed on both sides; The second quick connector 11 is connected to the first quick connector 5-2 on the integrated valve island 5 via a sealed pipe (not shown in the attached diagram); One end of the integrated valve island 5 has an air outlet 5-1 connected to a vacuum device via a sealed pipe (the pipe and vacuum device are not shown in the attached diagram). With the above-described structural composition, an independent vacuum chamber can be realized. To better understand the advantages of the device described in this invention, the method of using this device is explained as follows: After the metallization or annealing of the hemispherical resonator, it is transferred to the accommodating cavity 1-1. The long anchor end of the hemispherical resonator is placed into the countersunk hole of the stage 10. The sealing cover 2 is closed. The threaded end of the screw bolt 4 passes through the U-shaped groove of the sealing cover and rotates into the screw bolt mounting hole 1-4 for locking. The vent valve 7 is closed, and the solenoid valve switch 6 of the corresponding accommodating cavity 1-1 is opened. The venting end of the solenoid valve island is connected to the vacuum equipment, so that the corresponding accommodating cavity 1-1 can obtain a vacuum. If it is necessary to remove or place the hemispherical resonator, close the solenoid valve switch 6 of the corresponding accommodating cavity 1-1, open the vent valve 7, and remove the screw bolt to complete the removal or placement of the hemispherical resonator in the corresponding cavity.

[0038] As mentioned above, the 16-station accommodating cavity 1-1 is connected to the second quick connector 11 on the accommodating cavity 1-1 via the first quick connector 5-2 on the integrated valve island 5, making each station independent. The opening and closing of the vacuum pipeline can be controlled by the solenoid valve switch 6. This is suitable for vacuum environment preservation after the hemispherical resonator is metallized, and the pick-and-place process will not interfere with the environmental state of the other hemispherical resonators.

[0039] The embodiments described above are merely preferred embodiments of this utility model. The terms "in one embodiment," "in another embodiment," "in yet another embodiment," or "in still another embodiment" used in this specification all refer to one or more of the same or different embodiments according to this disclosure. Ordinary variations and substitutions made by those skilled in the art within the scope of this utility model's technical solution should be included within the protection scope of this utility model.

Claims

1. A vacuum storage device, characterized in that, The system includes a platform (1), which has multiple accommodating cavities (1-1) for accommodating at least one workpiece. Multiple sealing caps (2) are hinged to the platform (1), and the multiple sealing caps (2) correspond one-to-one with the multiple accommodating cavities (1-1). The sealing caps (2) are used to open or seal the corresponding accommodating cavities (1-1). The cavity walls of the accommodating cavities (1-1) have suction holes (1-5) and vent holes (1-8), which both penetrate the platform (1). The suction holes (1-5) are connected to a vacuum pump through a sealed pipe. The platform (1) has multiple venting valves (7), which correspond one-to-one with the multiple vent holes (1-8). The venting valves (7) are used to open or seal the corresponding vent holes (1-8).

2. The vacuum storage device according to claim 1, characterized in that, An integrated valve island (5) is installed on the platform (1). The integrated valve island (5) has multiple valve units, which correspond one-to-one with multiple accommodating cavities (1-1). Each valve unit has an air inlet and an air outlet (5-1). The air inlet is connected to the vent (1-8) of the corresponding accommodating cavity (1-1) through a sealed pipe. The air outlet (5-1) is connected to the suction port (1-5) of the corresponding accommodating cavity (1-1) through a sealed pipe. The air outlet (5-1) is also connected to a vacuum pump through a sealed pipe.

3. The vacuum storage device according to claim 2, characterized in that, The integrated valve island (5) is installed at the bottom of the platform (1), which is supported on two L-shaped support feet (13).

4. The vacuum storage device according to claim 2, characterized in that, Each valve unit also has a valve switch (6) for controlling the connection and disconnection of the corresponding outlet (5-1) with the vacuum equipment.

5. The vacuum storage device according to claim 2, characterized in that, Each valve unit has a first quick connector (5-2) installed in its air inlet port for sealing connection with the pipeline, and a second quick connector (11) installed in its air extraction port (1-5) for sealing connection with the pipeline.

6. The vacuum storage device according to any one of claims 1-5, characterized in that, The platform (1) has a first sealing ring (8) on the outer periphery of the accommodating cavity (1-1) for sealing connection with the sealing cover (2).

7. The vacuum storage device according to claim 6, characterized in that, One end of the sealing cover (2) is hinged to the platform (1), and the other end of the sealing cover (2) is detachably connected to the platform (1) by bolts (4). The first sealing ring (8) is pressed between the sealing cover (2) and the platform (1).

8. The vacuum storage device according to any one of claims 1-5, characterized in that, A platform (10) for mounting workpieces is fixed inside the accommodating cavity (1-1).

9. The vacuum storage device according to any one of claims 1-5, characterized in that, The vent hole (1-8) is a recessed hole, which includes a large hole section and a small hole section. The small hole section is connected to the corresponding receiving cavity (1-1). One end of the vent valve (7) extends into the large hole section and abuts against the bottom wall of the large hole section. A second sealing ring (7-1) is provided between the vent valve (7) and the bottom wall of the large hole section. An air inlet hole (1-9) is also provided on the platform, which extends to communicate with the large hole section.

10. The vacuum storage device according to any one of claims 1-5, characterized in that, A pressure gauge (3) is provided on the sealing cover (2). One end of the pressure gauge (3) passes through the sealing cover (2) and extends into the receiving cavity (1-1).

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