A hot material laying device for silicon material processing

Abstract

The utility model relates to the technical field of silicon material processing, and the application discloses a hot material paving device for silicon material processing, which comprises a conveying device shell, a transmission belt is arranged inside the conveying device shell, a first servo motor is fixed to one side of the conveying device shell, the output end of the first servo motor is fixedly connected with the transmission belt inside, a paving box is fixed to one side of the top surface of the conveying device shell, the utility model discloses that hot material is put into the paving box, then the thickness of the hot material to be paved is adjusted, the adjusting baffle is slid to the specified position in the adjusting sliding groove, the rotating block is moved to the upper side of the limiting block by rotating the rotating block, then the limiting block limits the rotating block, and the limiting block limits the adjusting baffle through the rotating block, thereby solving the problem that the close stacking mode seriously affects the heat dissipation efficiency of the hot material and influences the performance of the final product.

Description

Technical Field

[0001] This utility model application relates to the field of silicon material processing technology, specifically a hot material spreading device for silicon material processing. Background Technology

[0002] Silicon material processing refers to the process of using high-purity silicon as raw material and preparing it into wafers and devices suitable for the semiconductor, photovoltaic and other electronic industries through a series of precise physical and chemical processes. Its core steps include crystal growth, wafer forming, surface treatment and micro-nano manufacturing technologies such as thin film deposition, photolithography, doping and etching. This process aims to achieve precise control over the geometry, surface characteristics and electrical properties of silicon materials. It is the foundation of integrated circuit and solar cell manufacturing, with high technical thresholds and requirements for extremely high cleanliness and process precision.

[0003] In this process, the hot materials used in the processing are usually piled up on the conveyor belt during transportation. This tight stacking method will seriously affect the heat dissipation efficiency of the hot materials, resulting in uneven internal temperature distribution and uncontrolled cooling rate. This will directly affect the process stability of subsequent heat treatment and the quality uniformity of the wafer, which is crucial to the performance of the final product. Summary of the Invention

[0004] To address the problem that dense packing can severely impair the heat dissipation efficiency of hot materials, thus affecting the performance of the final product, this invention provides a hot material spreading device for silicon material processing to solve the aforementioned problem.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A hot material spreading device for silicon material processing includes a conveyor housing, a transmission belt inside the conveyor housing, a first servo motor fixed to one side of the conveyor housing, the output end of the first servo motor being fixedly connected to the inside of the transmission belt, a spreading box fixed to one side of the top surface of the conveyor housing, an adjusting groove being formed inside the spreading box near the middle of the transmission belt, an adjusting baffle being slidably arranged inside the adjusting groove, two fixing blocks being fixed on both sides of the top surface of the adjusting baffle, a rotating block being rotatably connected to the end of each fixing block away from the adjusting baffle, and a plurality of limiting blocks being symmetrically fixed on the side of the spreading box near the rotating blocks.

[0006] Furthermore, sliding plates are provided on both sides of the middle part of the housing of the conveying device. The sliding plates slide up and down inside the housing of the conveying device. A flat roller is rotatably arranged between the two sliding plates. A second servo motor is fixed on one side of one of the sliding plates. The output end of the second servo motor is fixedly connected to the flat roller.

[0007] Furthermore, the flattening box has an opening at one end near the adjusting baffle that matches the shape of the adjusting baffle, and the length and width of the opening are the same as the length and width of the adjusting baffle.

[0008] Furthermore, the flat box has a groove on the side near the fixed block that matches the shape of the fixed block, and the rotating block and the limiting block are fixedly connected by bolts.

[0009] Furthermore, two lead screws are symmetrically and rotatably arranged at the bottom end of the conveying device housing near the sliding plate. Each lead screw is threadedly connected to the corresponding sliding plate, and each lead screw is rotatably connected to the conveying device housing. A sprocket is fixed at the bottom end of each lead screw, and the two sprockets are connected by a transmission chain. A third servo motor is fixed at the bottom end of the conveying device housing, and the output end of the third servo motor is fixedly connected to a sprocket.

[0010] Furthermore, a number of texture blocks are fixed on the flat circular roller, and the distance between any two adjacent texture blocks is the same.

[0011] Compared with the prior art, the beneficial effects of this utility model are: 1. In this utility model, by putting hot material into the flattening box, and then according to the required thickness of the hot material, the adjusting baffle slides to the designated position in the adjusting groove, and by rotating the rotating block, the rotating block moves above the limiting block, thereby limiting the rotating block. At the same time, the limiting block limits the adjusting baffle through the rotating block, which solves the problem that the dense stacking method will seriously affect the heat dissipation efficiency of the hot material and affect the performance of the final product.

[0012] 2. In this utility model, the second servo motor drives the paving roller to rotate, so that the paving roller further pavers the hot material. At the same time, the textured blocks on the paving roller leave a reserved groove on the top surface of the hot material, so that when the hot material deforms due to alternating hot and cold, it will fill the gaps to a limited extent, without affecting the overall paving effect. Meanwhile, the sliding plate slides inside the housing of the conveyor device, which also allows the paving roller to adjust the height relationship with the transmission belt in conjunction with the adjusting baffle. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a three-dimensional structural schematic diagram according to an embodiment of the present application; Figure 2 yes Figure 1 The above-view three-dimensional structural diagram is shown in the embodiment. Figure 3 yes Figure 1 The embodiment shown is a three-dimensional schematic diagram of the adjustable tiling component structure; Figure 4 yes Figure 3 A three-dimensional schematic diagram of the cross-sectional structure of the adjustable tiling component in the illustrated embodiment; Figure 5 yes Figure 1 A schematic diagram of the three-dimensional structure of the rolling tiling component in the embodiment shown.

[0015] The meanings of the reference numerals in the figure are as follows: 1. Conveying device housing; 2. Transmission belt; 3. First servo motor; 4. Laying box; 5. Adjusting chute; 6. Adjusting baffle; 7. Fixed block; 8. Rotating block; 9. Limiting block; 10. Sliding plate; 11. Laying roller; 12. Texture block; 13. Second servo motor; 14. Lead screw; 15. Sprocket; 16. Transmission chain; 17. Third servo motor. Detailed Implementation

[0016] To make the purpose, features, and advantages of this application more apparent and understandable, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0017] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 A hot material spreading device for silicon material processing includes a conveyor housing 1, a transmission belt 2 inside the conveyor housing 1, a first servo motor 3 fixed on one side of the conveyor housing 1, the output end of the first servo motor 3 fixedly connected to the inside of the transmission belt 2, a spreading box 4 fixed on one side of the top surface of the conveyor housing 1, an adjusting groove 5 opened inside the spreading box 4 near the middle of the transmission belt 2, an adjusting baffle 6 slidably arranged inside the adjusting groove 5, two fixing blocks 7 fixed on both sides of the top surface of the adjusting baffle 6 respectively, and a rotating block 8 rotatably connected to the end of each fixing block 7 away from the adjusting baffle 6, and several limiting blocks 9 symmetrically fixed on the side of the spreading box 4 near the rotating block 8, so that the spreading box 4 spreads the hot material flat.

[0018] Specifically, the flat box 4 has an opening at one end near the adjusting baffle 6 that matches the shape of the adjusting baffle 6, and the length and width of the opening are the same as the length and width of the adjusting baffle 6. The flat box 4 has a sliding groove at one side near the fixing block 7 that matches the shape of the fixing block 7. The rotating block 8 and the limiting block 9 are fixedly connected by bolts to improve the limiting strength of the rotating block 8 and the limiting block 9.

[0019] As an optimization solution, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, sliding plates 10 are provided on both sides of the middle part of the housing 1 of the conveying device. The sliding plates 10 slide up and down inside the housing 1 of the conveying device. A flattening roller 11 is rotatably arranged between the two sliding plates 10. A second servo motor 13 is fixed on one side of one sliding plate 10. The output end of the second servo motor 13 is fixedly connected to the flattening roller 11, so that the flattening roller 11 performs secondary flattening on the hot material.

[0020] Specifically, two lead screws 14 are symmetrically and rotatably arranged at the bottom end of the conveying device housing 1 near the sliding plate 10. Each lead screw 14 is threadedly connected to the corresponding sliding plate 10. Each lead screw 14 is rotatably connected to the conveying device housing 1. A sprocket 15 is fixed at the bottom end of each lead screw 14. The two sprockets 15 are connected by a transmission chain 16. A third servo motor 17 is fixed at the bottom end of the conveying device housing 1. The output end of the third servo motor 17 is fixedly connected to a sprocket 15. Several texture blocks 12 are fixed on the flat circular roller 11. The distance between any two adjacent texture blocks 12 is the same, so that the texture blocks 12 scratch a reserved groove on the surface of the hot material.

[0021] Working Principle: Based on the thickness of the hot material to be laid for silicon processing, the height of the adjusting baffle 6 relative to the top surface of the transmission belt 2 is adjusted via the fixed block 7. The adjusting baffle 6 slides within the adjusting groove 5. After adjustment, the rotating block 8 is rotated, with one end rotatably connected to the fixed block 7. The rotating block 8 moves above the limiting block 9, which then limits its position. Simultaneously, the limiting block 9 starts the first servo motor 3, which drives the transmission belt 2. The operator then feeds the hot material into the laying box 4. The transmission belt 2 transports the hot material, and the adjusting baffle 6 limits its height, thus achieving laying. The height of the hot material is then adjusted according to the thickness of the hot material. The height of plate 6 activates the third servo motor 17, which drives the sprocket 15 to rotate. Simultaneously, the sprocket 15 drives another sprocket 15 to rotate via the transmission chain 16. The sprocket 15 drives the lead screw 14 to rotate and controls the sliding plate 10 to move up and down. At the same time, the sliding plate 10 drives the flattening roller 11 to move. At this time, the height of the flattening roller 11 is adjusted in conjunction with the baffle 6. Then, the second servo motor 13 is activated, which drives the flattening roller 11 to rotate. Simultaneously, the flattening roller 11 drives the texture block 12 to rotate, so that the flattening roller 11 flattens the hot material again and causes the texture block 12 to carve the reserved groove on the hot material.

[0022] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of the equivalent elements of the claims are intended to be included within this application. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0023] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A hot material spreading device for silicon material processing, comprising a conveying device housing (1), characterized in that: The conveyor housing (1) is equipped with a transmission belt (2) inside. A first servo motor (3) is fixed on one side of the conveyor housing (1). The output end of the first servo motor (3) is fixedly connected to the inside of the transmission belt (2). A flat box (4) is fixed on one side of the top surface of the conveyor housing (1). An adjustment groove (5) is opened inside the flat box (4) near the middle of the transmission belt (2). An adjustment baffle (6) is slidably arranged inside the adjustment groove (5). Two fixing blocks (7) are fixed on both sides of the top surface of the adjustment baffle (6). A rotating block (8) is rotatably connected to the end of each fixing block (7) away from the adjustment baffle (6). Several limiting blocks (9) are symmetrically fixed on the side of the flat box (4) near the rotating block (8).

2. The hot material spreading device for silicon material processing according to claim 1, characterized in that: The conveying device housing (1) has sliding plates (10) on both sides of the middle. The sliding plates (10) slide up and down inside the conveying device housing (1). A flat roller (11) is rotatably arranged between the two sliding plates (10). A second servo motor (13) is fixed on one side of one of the sliding plates (10). The output end of the second servo motor (13) is fixedly connected to the flat roller (11).

3. The hot material spreading device for silicon material processing according to claim 1, characterized in that: The flat box (4) has an opening at one end near the adjusting baffle (6) that matches the shape of the adjusting baffle (6), and the length and width of the opening are the same as the length and width of the adjusting baffle (6).

4. The hot material spreading device for silicon material processing according to claim 1, characterized in that: The flat box (4) has a sliding groove on the side near the fixed block (7) that matches the shape of the fixed block (7), and the rotating block (8) and the limiting block (9) are fixedly connected by bolts.

5. The hot material spreading device for silicon material processing according to claim 2, characterized in that: Two lead screws (14) are symmetrically rotatably arranged at the bottom end of the housing (1) of the conveying device, near the sliding plate (10). Each lead screw (14) is rotatably connected to the housing (1) of the conveying device, and each lead screw (14) is threadedly connected to the corresponding sliding plate (10). A sprocket (15) is fixed at the bottom end of each lead screw (14). The two sprockets (15) are connected by a transmission chain (16). A third servo motor (17) is fixed at the bottom end of the housing (1) of the conveying device, and the output end of the third servo motor (17) is fixedly connected to a sprocket (15).

6. The hot material spreading device for silicon material processing according to claim 2, characterized in that: Several texture blocks (12) are fixed on the flat circular roller (11), and the distance between any two adjacent texture blocks (12) is the same.

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