Wire sawing silicon ingot with wire tension adjusting function

Abstract

The utility model relates to the technical field of semiconductor material processing discloses diamond wire recovery winding mechanism with tension adjusting function for cutting silicon ingot, including the frame for supporting, the frame outside is provided with the casing for preventing, install in the frame for the traction winding assembly. The utility model discloses the mechanical type adjustment to the diamond wire body tension is realized to the adjusting assembly, and its worm gear mechanism has the self -locking characteristic, can reliably lock the tension wheel in any position, thereby keeps the long -term stability of tension, effectively avoids the risk that the diamond wire body is broken and wears due to the too small tension and leads to the winding loose, the disorderly wire, or the too big tension, significantly improves the recovery reliability and the winding quality, simultaneously, the measurement component can clear the dust automatically before measurement, and real -time monitoring diamond wire body diameter fluctuation, its signal can not only reflect the wear state, but also can judge cutting process stability, provides the key data support for process optimization and equipment preventive maintenance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing technology, specifically to a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function. Background Technology

[0002] Silicon ingots are high-purity crystalline silicon materials produced through crystal growth techniques such as the Czochralski method or ingot casting. They are typically cylindrical or quasi-square in shape and serve as a core raw material for manufacturing solar photovoltaic cells and semiconductor chips. Silicon ingot cutting equipment is a key piece of equipment in modern precision manufacturing. The equipment utilizes a cutting wire that can be hundreds of kilometers long and has diamond micropowder as an abrasive on its surface. This wire moves at high speed between multiple guide rollers under tension, forming a parallel "cutting wire mesh." Simultaneously, abrasive slurry with cutting capabilities is continuously sprayed onto the cutting area. Through the grinding action, the entire solid silicon ingot is simultaneously cut into hundreds of ultra-thin silicon wafers of uniform thickness in one go, thus achieving efficient and high-precision processing of hard and brittle materials.

[0003] Existing silicon ingot cutting equipment often uses simple friction brakes or pneumatic damping mechanisms for recovering the cut wires. These mechanisms suffer from low control precision, slow response, and inability to maintain tension during power outages or shutdowns. This leads to severe tension fluctuations in the cut wires during recovery. Insufficient tension results in loose winding, tangled wires, or even wires detaching from the rollers, causing downtime. Excessive tension stretches or breaks the already worn and weakened diamond wires, causing production interruptions and material waste. Furthermore, operators cannot currently monitor the wear status of the diamond wires or the stability of the cutting process in real time during recovery and winding. They cannot provide early warnings of impending wire breakage and can only react passively after a breakage occurs, severely impacting continuous equipment operation time. Moreover, the inability to obtain crucial data such as the wire diameter during recovery hinders process optimization and preventative maintenance, negatively impacting long-term production quality stability and improvement. Therefore, this art provides a diamond wire recovery and winding mechanism for cut silicon ingots with tension adjustment to address the problems mentioned in the background. Utility Model Content

[0004] The purpose of this invention is to provide a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function, thereby solving the problems mentioned in the background art above.

[0005] This utility model provides the following technical solution: a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function, including a frame for support, a protective housing on the outside of the frame, a winding assembly for traction installed inside the frame, a diamond wire body inside the winding assembly, an adjustment assembly for adjusting the tension of the diamond wire body on the inner wall of the frame, and a measuring assembly for real-time detection of the diamond wire body installed inside the frame.

[0006] As a preferred embodiment of the above technical solution, the winding assembly includes a high-speed main roller, a take-up roller, and an unwind roller. Two high-speed main rollers are provided, and both high-speed main rollers are rotatably connected to the upper part of the inner wall of the frame. The two high-speed main rollers are symmetrically arranged. The take-up roller and the unwind roller are rotatably connected to both sides of the inner wall of the frame. The take-up roller and the unwind roller are centrally symmetrically arranged.

[0007] As a preferred embodiment of the above technical solution, two guide wheel groups arranged symmetrically in the center are installed on the inner wall of the frame. The diamond wire body is sequentially arranged on the unwinding roller, one of the guide wheel groups, two high-speed main rollers, the other guide wheel group, and the take-up roller. A first motor and a second motor are fixedly installed on the inner wall of the frame. The output ends of the first motor and the second motor both pass through the frame. The output end of the first motor is fixedly connected to one end of the unwinding roller, and the output end of the second motor is fixedly connected to one end of the take-up roller.

[0008] As a preferred embodiment of the above technical solution, the adjustment component includes a mounting plate, which is fixedly connected to the upper part of the inner wall of the frame. A lifting groove is provided on one side of the mounting plate, and a lifting block is slidably connected in the lifting groove. A tension adjusting wheel is rotatably connected to one side of the lifting block, and the tension adjusting wheel is located above the diamond wire body. A one-way screw is rotatably connected to the inner wall of the lifting groove, and the one-way screw passes through the lifting block, and the lifting block and the one-way screw are externally threaded.

[0009] As a preferred embodiment of the above technical solution, a rotating cavity is provided at the upper part of the mounting plate. A worm gear and a worm are rotatably connected to the inner wall of the rotating cavity. The worm and the worm gear mesh with each other. The output end of the worm gear passes through the lower inner wall of the rotating cavity and is fixedly connected to the upper end of the one-way screw. A third motor is fixedly installed at the upper part of the side wall of the mounting plate. The output end of the third motor passes through the mounting plate and is fixedly connected to one end of the worm.

[0010] As a preferred embodiment of the above technical solution, the measuring component includes an air pump, a protective plate, and a support frame. The air pump is fixedly installed at the bottom of the inner wall of the frame, the protective plate is fixedly connected to the upper part of one side of the inner wall of the frame, the support frame is fixedly connected to one side of the frame, a laser diameter gauge is installed at the lower end of the protective plate, a collection mesh frame is placed inside the support frame, the air outlet of the air pump is connected to an air supply pipe, the air supply pipe passes through the frame, and the air outlet of the air supply pipe is connected to an air jet hood, which faces the diamond wire body.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] This device achieves precise and controllable mechanical adjustment of the tension of the diamond wire body during the recycling process through the adjustment component. The worm gear mechanism has a self-locking characteristic, which can reliably lock the tension wheel in any position to maintain stable tension. It allows operators to set a constant base tension value according to process requirements, effectively avoiding the risks of loose winding and tangled wire due to insufficient tension, and the risk of breaking the worn diamond wire body due to excessive tension. This fundamentally improves the reliability and winding quality of recycling. In addition, the measuring component can monitor the diameter fluctuation of the diamond wire body in real time. Its signal can not only reflect the wear of the diamond wire body, but also determine whether the cutting process is stable. Before measurement, it can automatically remove dust that affects the measurement accuracy, providing data support for process optimization and preventive maintenance of equipment. Attached Figure Description

[0013] Figure 1 A schematic diagram of the main structure of a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function;

[0014] Figure 2 A split view of the main structure of a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function;

[0015] Figure 3 A schematic diagram of the winding roller structure for a diamond wire recovery and winding mechanism for cutting silicon ingots with tension adjustment function;

[0016] Figure 4 A schematic diagram of the unwinding roller structure for a diamond wire recovery and winding mechanism for cutting silicon ingots with tension adjustment function;

[0017] Figure 5 A schematic diagram of the adjustment component structure of a diamond wire recovery and winding mechanism for cutting silicon ingots with tension adjustment function;

[0018] Figure 6 A cross-sectional view of the rotating cavity structure of a diamond wire recovery and winding mechanism for cutting silicon ingots with tension adjustment function;

[0019] Figure 7A schematic diagram of the measuring component structure of a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function.

[0020] 1. Frame; 2. Housing; 3. Winding assembly; 301. High-speed main roller; 302. Take-up roller; 303. Unwinding roller; 304. Guide roller assembly; 305. First motor; 306. Second motor; 4. Diamond wire body; 5. Adjustment assembly; 501. Mounting plate; 502. Lifting groove; 503. Lifting block; 504. Tension adjusting wheel; 505. One-way screw; 506. Rotating cavity; 507. Worm gear; 508. Worm; 509. Third motor; 6. Measuring assembly; 601. Air pump; 602. Protective plate; 603. Support frame; 604. Laser diameter gauge; 605. Collection frame; 606. Air supply pipe; 607. Air jet cover. Detailed Implementation

[0021] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0022] Please see Figures 1-7 As shown, this utility model provides a technical solution: a diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function, including a frame 1 for support, a protective housing 2 on the outside of the frame 1, a winding assembly 3 for traction installed inside the frame 1, a diamond wire body 4 inside the winding assembly 3, an adjustment assembly 5 for adjusting the tension of the diamond wire body 4 on the inner wall of the frame 1, and a measuring assembly 6 for real-time detection of the diamond wire body 4 installed inside the frame 1.

[0023] Furthermore, the frame 1, serving as the rigid support foundation of the entire device, ensures the stable operation of all functional components. The outer casing 2 of the frame 1 provides crucial safety protection, effectively isolating the high-speed moving diamond wire body 4 and preventing accidental contact by personnel. The winding assembly 3 forms the core recycling path, responsible for guiding and pulling the diamond wire body 4 to complete the directional and uniform movement from unwinding to winding, and is the main executor for achieving efficient recycling. The adjustment assembly 5 applies controllable mechanical action to the diamond wire body 4, adjusting and maintaining the tension of the diamond wire body 4 at the optimal set value in real time during the recycling process, thereby effectively preventing tangled wires caused by excessively loose winding or broken wires caused by excessively tight winding. The measuring assembly 6 is responsible for online real-time monitoring of the diamond wire body 4 in operation, providing key data support for process evaluation and equipment status diagnosis. Ultimately, all these factors together ensure the efficiency, reliability, and safety of the recycling process. The machine is equipped with a cutting fluid supply component and a workpiece fixing component at the top. A cutting fluid collection device is installed inside the frame 1. The cutting fluid supply component at the top of the machine housing 2 accurately delivers the mixed slurry to the cutting area through a pump and pipeline, and sprays it evenly onto the contact surface between the diamond wire body 4 and the silicon ingot through a nozzle array. This serves to cool, lubricate, and carry the abrasive for cutting. The workpiece fixing component firmly bonds the silicon ingot and suspends it below the workpiece table through a rigid workpiece plate and a servo feed mechanism. It feeds downward at a constant speed to ensure that the ingot enters the cutting wire mesh smoothly. The cutting fluid collection device at the bottom of the frame 1 uses an inclined channel or collection tray to collect the used slurry. Through filtration, sedimentation, and concentration adjustment, solid-liquid separation and medium regeneration are achieved, ultimately forming a complete closed-loop cutting fluid circulation system. This system not only ensures the continuous and stable operation of the cutting process, but also significantly improves resource utilization efficiency and reduces waste liquid discharge.

[0024] As one implementation method in this embodiment, please refer to Figures 2-4 As shown, the winding assembly 3 includes a high-speed main roller 301, a take-up roller 302, and an unwind roller 303. There are two high-speed main rollers 301, and both high-speed main rollers 301 are rotatably connected to the upper part of the inner wall of the frame 1. The two high-speed main rollers 301 are symmetrically arranged. The take-up roller 302 and the unwind roller 303 are rotatably connected to both sides of the inner wall of the frame 1. The take-up roller 302 and the unwind roller 303 are centrally symmetrically arranged.

[0025] Two guide roller groups 304 arranged symmetrically in a central configuration are installed on the inner wall of the frame 1. The diamond wire body 4 is sequentially arranged on the unwinding roller 303, one of the guide roller groups 304, two high-speed main rollers 301, the other guide roller group 304, and the take-up roller 302. A first motor 305 and a second motor 306 are fixedly installed on the inner wall of the frame 1. The output ends of the first motor 305 and the second motor 306 both pass through the frame 1. The output end of the first motor 305 is fixedly connected to one end of the unwinding roller 303, and the output end of the second motor 306 is fixedly connected to one end of the take-up roller 302.

[0026] Furthermore, the efficient recovery of the diamond wire body 4 is achieved through the coordinated action of the high-speed main roller 301, take-up roller 302, unwind roller 303, guide roller assembly 304, first motor 305, and second motor 306. The diamond wire body 4 is drawn out from the unwind roller 303, guided by the guide roller assembly 304 on one side, and then passes around the two symmetrically arranged high-speed main rollers 301 to form a stable path. The high-speed main rollers 301 are provided with corresponding grooves on their exterior to ensure that the diamond wire body 4 can move stably. Finally, it is guided by the guide roller assembly 304 on the other side and collected by the take-up roller 302. During this process, the second motor 306 acts as the main force to drive the take-up roller 302 and provide continuous traction, while the first motor 305 is connected to the unwind roller 303 and applies a controllable reverse torque. Working together, a stable base tension is established and maintained during the movement of the diamond wire body 4. The guide wheel assembly 304 includes multiple guide wheels, all of which are rotatably connected to the inner wall of the frame 1. A tension sensor is installed at the rotation shaft of the guide wheel. The tension sensor can directly and accurately convert the radial pressure applied by the diamond wire body 4 to the guide wheel into a measurable electrical signal, thereby providing the system with real-time and continuous feedback data on the tension of the diamond wire body 4. This allows the control system to dynamically adjust the torque output of the motor accordingly, achieving closed-loop precise control of the tension. This effectively avoids problems such as stretching and breakage of the diamond wire body 4 due to excessive tension or loose winding and tangled wires due to insufficient tension, fundamentally ensuring the stability and reliability of the recycling process.

[0027] As one implementation method in this embodiment, please refer to Figures 3-6 As shown, the adjustment component 5 includes a mounting plate 501, which is fixedly connected to the upper part of the inner wall of the frame 1. A lifting groove 502 is provided on one side of the mounting plate 501. A lifting block 503 is slidably connected in the lifting groove 502. A tension adjusting wheel 504 is rotatably connected to one side of the lifting block 503. The tension adjusting wheel 504 is located above the diamond wire body 4. A one-way screw 505 is rotatably connected to the inner wall of the lifting groove 502. The one-way screw 505 passes through the lifting block 503, and the lifting block 503 and the one-way screw 505 are externally threaded.

[0028] Furthermore, when the unidirectional screw 505 rotates, it drives the lifting block 503, which is threadedly engaged with it, to perform precise vertical lifting and lowering movements along the fixed lifting groove 502. This, in turn, drives the tension adjusting wheel 504, which is rotatably connected to the lifting block 503, to move synchronously. By changing the height of the tension adjusting wheel 504 relative to the path of the diamond wire body 4, the wrap angle and effective length of the diamond wire body 4 are directly adjusted, thereby achieving mechanical control of the tension of the diamond wire body 4. This effectively avoids tension fluctuations in the diamond wire body 4 and ensures the winding quality.

[0029] As one implementation method in this embodiment, please refer to Figure 6As shown, a rotating cavity 506 is provided at the upper part of the mounting plate 501. A worm gear 507 and a worm 508 are rotatably connected to the inner wall of the rotating cavity 506. The worm 508 and the worm gear 507 mesh with each other. The output end of the worm gear 507 passes through the lower inner wall of the rotating cavity 506 and is fixedly connected to the upper end of the one-way screw 505. A third motor 509 is fixedly installed at the upper part of the side wall of the mounting plate 501. The output end of the third motor 509 passes through the mounting plate 501 and is fixedly connected to one end of the worm 508.

[0030] Furthermore, power is provided by a third motor 509, whose output drives the worm 508 to rotate within the rotating cavity 506. The worm 508 transmits motion to the worm wheel 507 through meshing, which in turn drives the one-way screw 505 to rotate. The third motor 509 realizes the electric operation of tension adjustment, improving the convenience and accuracy of control. The mechanism formed by the worm 508 and the worm wheel 507 not only realizes the vertical direction of motion, but more importantly, it has a powerful reverse self-locking function, which can effectively prevent the tension adjusting wheel 504 from shifting under the tension of the diamond wire body 4, thereby ensuring the long-term stability of the set tension and making the entire adjustment process more reliable.

[0031] As one implementation method in this embodiment, please refer to Figure 3 and Figure 7 As shown, the measuring component 6 includes an air pump 601, a protective plate 602, and a support frame 603. The air pump 601 is fixedly installed at the bottom of the inner wall of the frame 1. The protective plate 602 is fixedly connected to the upper part of one side of the inner wall of the frame 1. The support frame 603 is fixedly connected to one side of the frame 1. A laser diameter gauge 604 is installed at the lower end of the protective plate 602. A collection mesh frame 605 is placed inside the support frame 603. The air outlet of the air pump 601 is connected to an air supply pipe 606. The air supply pipe 606 passes through the frame 1. The air outlet of the air supply pipe 606 is connected to an air jet hood 607. The air jet hood 607 is directly facing the diamond wire body 4.

[0032] Furthermore, the compressed air generated by the air pump 601 is delivered to the air jet hood 607 via the air supply pipe 606. The latter directs the high-speed airflow at the diamond wire body 4 to sweep away the surface deposits. The removed impurities fall into the collection frame 605 on the support frame 603. The side walls and bottom of the collection frame 605 are made of wire mesh, which ensures that the gas is discharged from the bottom and avoids airflow disturbance inside the collection frame 605, thus keeping the impurities stably within the collection frame 605. At the same time, the laser diameter gauge 604 installed at the lower end of the protective plate 602 performs non-contact diameter measurement on the cleaned diamond wire body 4, ensuring the accuracy and reliability of the monitoring process. It can judge whether the cutting process ahead is stable based on the diameter fluctuation of the diamond wire body 4, and can provide early warning of wire breakage risk or process abnormality.

[0033] It should be noted that the laser diameter gauge 604 is existing technology, including a laser emitter, an optical lens system, a photodiode array, and a signal processor. Its working principle is that the laser emitter generates a parallel fan-shaped laser beam. When the diamond wire body 4 passes through the laser beam, it will form a shadow on the sensor with the same width as its diameter. The signal processor can obtain the accurate diameter data of the diamond wire body 4 in real time and non-contact by calculating the width of the shadow at high speed. This will not be elaborated here.

[0034] Working principle: When the tension needs to be changed, the third step 509 is activated, driving the worm gear 508 to rotate the worm wheel 507, which in turn drives the one-way screw 505 to rotate. The lifting block 503, which is threadedly engaged with the one-way screw 505, moves vertically, causing the tension adjusting wheel 504 on it to rise and fall. When the tension adjusting wheel 504 falls, it presses down on the diamond wire body 4, increasing the tension; when it rises, it decreases the tension. This achieves adjustment of the basic tension of the diamond wire body 4 during the recycling process. Furthermore, the self-locking characteristics of the worm wheel 507 and worm gear 508 can reliably lock the tension adjusting wheel 504 in any position, thereby maintaining the stability of the tension setting value over a long period of time. This allows operators to set the most suitable constant tension according to different specifications and conditions of the diamond wire body 4, effectively avoiding the risks of loose winding and tangled wire due to insufficient tension, and the risk of breaking the worn diamond wire body 4 due to excessive tension. This fundamentally improves the success rate of recycling and the winding quality.

[0035] While the diamond wire body 4 is being cut, the air pump 601 generates compressed air, which is blown out from the jet hood 607 through the air supply pipe 606 to pre-clean the diamond wire body 4 that is about to enter the measurement area, blowing off most of the loose contaminants attached to its surface. These impurities can fall into the collection mesh frame 605, effectively removing the dust on the outside of the diamond wire body 4 that affects the measurement accuracy. Subsequently, the diamond wire body 4 passes under the laser diameter measuring instrument 604. The laser diameter measuring instrument 604 measures the instantaneous diameter of the diamond wire body 4 in a non-contact manner in real time and at high frequency. It can not only monitor the wear of the diamond wire body 4 in real time, but also judge whether the cutting process ahead is stable based on the diameter fluctuation of the diamond wire body 4, and can give early warning of the risk of wire breakage or process abnormality.

[0036] The above embodiments are only used to illustrate the technical solution of this utility model, and are not intended to limit it.

Claims

1. A diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function, comprising a support frame (1), characterized in that: The frame (1) is provided with a protective housing (2) on the outside, and a winding assembly (3) for traction is installed inside the frame (1). A diamond wire body (4) is provided inside the winding assembly (3). An adjustment assembly (5) for adjusting the tension of the diamond wire body (4) is provided on the inner wall of the frame (1). A measuring assembly (6) for real-time detection of the diamond wire body (4) is installed inside the frame (1).

2. The diamond wire recovery and winding mechanism for cutting silicon ingots with tension adjustment function according to claim 1, characterized in that: The winding assembly (3) includes a high-speed main roller (301), a take-up roller (302), and an unwinding roller (303). There are two high-speed main rollers (301), and both high-speed main rollers (301) are rotatably connected to the upper part of the inner wall of the frame (1). The two high-speed main rollers (301) are symmetrically arranged. The take-up roller (302) and the unwinding roller (303) are rotatably connected to both sides of the inner wall of the frame (1). The take-up roller (302) and the unwinding roller (303) are centrally symmetrically arranged.

3. The diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function according to claim 2, characterized in that: The inner wall of the frame (1) is equipped with two guide wheel groups (304) arranged in a centrally symmetrical manner. The diamond wire body (4) is arranged in sequence on the unwinding roller (303), one of the guide wheel groups (304), two high-speed main rollers (301), the other guide wheel group (304) and the take-up roller (302). The inner wall of the frame (1) is fixedly equipped with a first motor (305) and a second motor (306). The output ends of the first motor (305) and the second motor (306) both pass through the frame (1). The output end of the first motor (305) is fixedly connected to one end of the unwinding roller (303), and the output end of the second motor (306) is fixedly connected to one end of the take-up roller (302).

4. The diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function according to claim 1, characterized in that: The adjustment component (5) includes a mounting plate (501), which is fixedly connected to the upper part of the inner wall of the frame (1). A lifting groove (502) is provided on one side of the mounting plate (501). A lifting block (503) is slidably connected in the lifting groove (502). A tension adjusting wheel (504) is rotatably connected to one side of the lifting block (503). The tension adjusting wheel (504) is located above the diamond wire body (4). A one-way screw (505) is rotatably connected to the inner wall of the lifting groove (502). The one-way screw (505) passes through the lifting block (503), and the lifting block (503) and the one-way screw (505) are externally threaded.

5. The diamond wire recovery and winding mechanism for cutting silicon ingots with tension adjustment function according to claim 4, characterized in that: A rotating cavity (506) is provided at the upper part of the mounting plate (501). A worm gear (507) and a worm (508) are rotatably connected to the inner wall of the rotating cavity (506). The worm (508) and the worm gear (507) mesh with each other. The output end of the worm gear (507) passes through the lower inner wall of the rotating cavity (506) and is fixedly connected to the upper end of the one-way screw (505). A third motor (509) is fixedly installed at the upper part of the side wall of the mounting plate (501). The output end of the third motor (509) passes through the mounting plate (501) and is fixedly connected to one end of the worm (508).

6. The diamond wire recycling and winding mechanism for cutting silicon ingots with tension adjustment function according to claim 1, characterized in that: The measuring component (6) includes an air pump (601), a protective plate (602), and a support frame (603). The air pump (601) is fixedly installed at the bottom of the inner wall of the frame (1). The protective plate (602) is fixedly connected to the upper side of one side of the inner wall of the frame (1). The support frame (603) is fixedly connected to one side of the frame (1). A laser diameter gauge (604) is installed at the lower end of the protective plate (602). A collection mesh frame (605) is placed inside the support frame (603). The air outlet of the air pump (601) is connected to an air supply pipe (606). The air supply pipe (606) passes through the frame (1). The air outlet of the air supply pipe (606) is connected to an air jet hood (607). The air jet hood (607) faces the diamond wire body (4).

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