An elongated strip substrate side anti-diffraction sputtering fixture

Abstract

The utility model discloses an elongated strip base plate side anti-diffraction sputtering clamp relates to base plate sputtering field, include: base piece is "U" type structure, and the inside wall on "U" type structure is provided with recessed groove piece, shielding piece includes a plurality of long strip pole, and both ends of single long strip pole are installed in recessed groove piece, and single long strip pole straddles "U" type structure, and every long strip pole is parallelly arranged, and can slide in recessed groove piece, long strip pole sets up and is held in the long strip base plate between the inside wall of base piece and the inside between two long strip poles of adjacent two long strip poles, positioning piece is used for holding shielding piece and long strip base plate in the "U" type structure of base piece. The utility model discloses a base piece is set up as "U" type structure, sets up a plurality of long strip pole and "U" type structure cooperation, sets up positioning piece and carries out the limit fixed, to reach the fixed effect of the clamp, sputtering efficiency and the purpose of uniformity of improvement.

Description

Technical Field

[0001] This utility model relates to the field of substrate sputtering, specifically to a diffraction-resistant sputtering fixture for the side of a slender substrate. Background Technology

[0002] In high-tech fields such as semiconductors, optics, and microelectromechanical systems (MEMS), thin film deposition technology is one of the key processes for manufacturing high-performance devices. Among them, sputtering technology, with its advantages of high precision and excellent film quality, is widely used in the preparation of thin films on slender substrates. Through sputtering, uniform and dense thin films can be formed on the surface of the substrate, thereby endowing the substrate with specific optical, electrical, or mechanical properties, providing important support for the research and development and production of various high-end products. However, with the continuous improvement of thin film performance requirements and the increasing complexity of device structures, existing sputtering processes are gradually revealing some technical challenges that urgently need to be solved when depositing on the sides of slender substrates.

[0003] In sputtering, atomic diffraction is an unavoidable problem. During the transport of atoms between the sputtering source and the substrate, a certain degree of scattering and diffraction occurs, causing some atoms to deviate from their original deposition path and eventually deposit in non-target areas of the elongated substrate, resulting in uneven film deposition on the substrate sides. This uneven film not only affects the performance and quality of the device but may also lead to device malfunctions during subsequent use. Furthermore, traditional fixtures used to fix elongated substrates have many drawbacks. Their structures are usually complex, which not only increases manufacturing costs but also reduces the versatility of the fixtures, making it difficult to adapt to elongated substrates of different sizes. During sputtering, the substrate needs to remain highly stable, but traditional fixtures often provide poor fixation, allowing the substrate to easily shift, further exacerbating the inconsistency and unreliability of film deposition.

[0004] In view of the above, this application is hereby submitted. Utility Model Content

[0005] The purpose of this utility model is to provide a diffraction-resistant sputtering fixture for the side of a slender substrate. By setting the base component as a "U"-shaped structure, setting multiple long rods to cooperate with the "U"-shaped structure, and setting positioning components for limiting and fixing, the fixture can solve the problems of poor fixing effect, easy displacement of the substrate, and low sputtering efficiency and unevenness in the prior art.

[0006] This utility model embodiment is achieved through the following technical solution: This utility model embodiment provides a diffraction sputtering protection fixture for the side of a slender substrate, comprising: The base component has a "U" shaped structure, and the inner wall of the "U" structure is provided with a groove. The shielding component includes multiple long rods, with both ends of each long rod installed in a groove, and each long rod spanning a "U"-shaped structure. Each long rod is arranged in parallel and can slide within the groove. The long rods are configured to hold a single long substrate between the long rod on the inside and the inner wall of the base component and / or between two adjacent long rods. The positioning element, set on the base component, is used to clamp the shielding element and the long strip substrate within the "U"-shaped structure of the base component.

[0007] Optionally, the base component includes a first support plate, a second support plate, and a third support plate, wherein the second support plate is vertically connected to one end of the first support plate, and the third support plate is vertically connected to the other end of the first support plate; The grooved component includes a first groove and a second groove, the first groove being disposed on the inner side of the second support plate and the second groove being disposed on the inner side of the third support plate; One end of the long bar is movably installed in the first groove, and the other end is movably installed in the second groove.

[0008] Optionally, the first groove extends to the free end of the second support plate, and the second groove extends to the free end of the third support plate.

[0009] Optionally, the second support plate and the third support plate are arranged symmetrically along the transverse center line of the first support plate, and the first groove and the second groove are arranged symmetrically along the transverse center line of the first support plate.

[0010] Optionally, the long bar has a cuboid structure, with a first slider at one end and a second slider at the other end. The first slider is installed in the first groove and the second slider is installed in the second groove.

[0011] Optionally, the top and bottom of the first slider and the second slider both protrude outward from the long bar, and the first slider and the second slider are symmetrically arranged along the central axis of the long bar, and the first slider and the second slider are symmetrically arranged along the vertical center line of the long bar.

[0012] Optionally, the height of the long bar is lower than the height of the long substrate.

[0013] Optionally, the positioning element is a plate-like structure, which is used to encapsulate the opening of the "U"-shaped structure of the base element.

[0014] Optionally, the inner side of the positioning member is provided with multiple elastic members, the free end of which is configured to abut against the outer long bar and generate elastic compression on the outer long bar.

[0015] Optionally, the positioning element is provided with a first screw hole and a second screw hole, the first screw hole being used for bolt connection with the second support plate, and the second screw hole being used for bolt connection with the third support plate.

[0016] Compared with the prior art, the embodiments of this utility model have the following advantages and beneficial effects: 1. The elongated substrate side anti-diffraction sputtering fixture provided in this embodiment of the utility model effectively shields the side of the substrate through the physical barrier formed by the long bar of the shielding component, preventing sputtered atomic deposition on the side and ensuring uniform deposition of the thin film on the side of the substrate. The "U"-shaped structure of the base component and the firm clamping effect of the positioning component ensure that the substrate remains highly stable during sputtering, avoiding uneven deposition caused by displacement. The long bar of the shielding component can slide within the groove component, allowing the fixture to be flexibly adjusted to adapt to substrates of different widths, improving the versatility and flexibility of the fixture. Compared with the traditional complex fixture structure, this embodiment of the utility model simplifies the fixture structure, reduces manufacturing costs, and improves the reliability and service life of the fixture.

[0017] 2. In this embodiment of the invention, the physical barrier formed by the long bar effectively shields the sides of each substrate, preventing sputtered atoms from depositing on the sides and ensuring uniform deposition of the thin film on the sides of the substrate. The height of the long bar is lower than the height of the substrate, allowing sputtered atoms to be uniformly deposited on the side edges of the substrate, avoiding uneven deposition caused by the shielding of the long bar. The "U"-shaped structure of the base and the firm clamping effect of the positioning component ensure that each substrate remains highly stable during sputtering, avoiding uneven deposition caused by displacement.

[0018] 3. The symmetrically arranged support plates and grooves of this utility model ensure the overall balance and stability of the fixture. Especially during the sputtering process, it can effectively prevent vibration or displacement caused by imbalance. The plate-like structure of the positioning component and the setting of the elastic component provide additional stability, ensuring that the entire fixture remains stable during the sputtering process and reducing the possibility of vibration and displacement.

[0019] In general, the elongated substrate side anti-diffraction sputtering fixture provided by the embodiments of this utility model improves the fixing effect of the fixture by setting the base component as a "U" shape, setting multiple long rods to cooperate with the "U" shape, and setting positioning components for limiting and fixing, thereby preventing the substrate from shifting and improving sputtering efficiency and uniformity. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A schematic diagram of the anti-diffraction sputtering fixture provided in this embodiment of the utility model; Figure 2 This is a schematic diagram of the structure of the base component provided in an embodiment of the present utility model; Figure 3 A schematic diagram of the shielding component structure provided in an embodiment of this utility model; Figure 4 A schematic diagram of the positioning component structure provided in an embodiment of this utility model; Figure 5 A partially disassembled structural diagram of the anti-diffraction sputtering fixture provided in this embodiment of the utility model.

[0022] The attached diagram shows the markings and corresponding component names: 1-Base component, 2-Groove component, 3-Long bar, 4-Positioning component, 5-First support plate, 6-Second support plate, 7-Third support plate, 8-First groove bar, 9-Second groove bar, 10-First slider, 11-Second slider, 12-Elastic component, 13-First screw hole, 14-Second screw hole. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0025] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0026] In the description of this utility model, it should be noted that the terms "first", "second", "third", etc. are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance. Example

[0027] Combined with reference Figure 1 and Figure 2As shown, this utility model embodiment provides a diffraction and sputtering protection fixture for the side of a slender substrate, comprising: a base 1, which has a "U"-shaped structure, with a groove 2 provided on the inner wall of the "U"-shaped structure; a shielding component, comprising multiple long rods 3, with both ends of each long rod 3 installed in the groove 2, and each long rod 3 spanning the "U"-shaped structure, with each long rod 3 arranged in parallel and capable of sliding within the groove 2; the long rods 3 are configured to clamp a single slender substrate between the long rod 3 on the inner side and the inner wall of the base 1 and / or between two adjacent long rods 3; and a positioning component 4, disposed on the base 1, for clamping the shielding component and the slender substrate within the "U"-shaped structure of the base 1. Specifically, the base component 1 is used to support and fix other components, while providing a stable support platform for the long strip substrate to prevent displacement of the substrate during sputtering. The inner wall of the base component 1 is provided with a groove 2 for installing and fixing the long rod 3 in the shield. The "U"-shaped structure can provide enough space so that the long strip substrate can be clamped between the inner wall and the long rod 3 or between two adjacent long rods 3. At the same time, the groove 2 allows the long rod 3 to be flexibly adjusted to accommodate substrates of different widths. The base component 1, through its "U"-shaped structure and groove 2, provides a stable frame for the entire fixture, ensuring that the substrate and the shield can maintain a relatively stable position during sputtering.

[0028] In this embodiment of the invention, the shielding component is composed of multiple long rods 3. Its main function is to clamp the side of the long substrate. During the sputtering process, the shielding component forms a physical barrier through the arrangement of its long rods 3, blocking the side of the substrate. This allows sputtered atoms to be deposited only along a specific direction onto the front or back of the substrate, without depositing onto the side of the substrate, thereby achieving uniform thin film deposition. This ensures uniform deposition of the thin film on the side of the substrate. The parallel arrangement and slidability of the long rods 3 allow the shielding component to be flexibly adjusted according to substrates of different lengths and widths, ensuring that the substrate can be tightly clamped between the long rods 3 and the inner wall of the base component 1 or between two adjacent long rods 3.

[0029] Positioning component 4 is used to firmly clamp the shield and the long strip substrate within the "U"-shaped structure of the base component 1, ensuring the stability of the substrate and the shield during sputtering. Positioning component 4 is installed on the base component 1 and the shield and the substrate are fixed in the base component 1 by mechanical structures (such as screws, clips, etc.).

[0030] This embodiment of the invention effectively shields the sides of the substrate by using the physical barrier formed by the long bar 3 of the shielding component, preventing sputtered atomic deposition on the sides and ensuring uniform deposition of the thin film on the sides of the substrate. The "U"-shaped structure of the base component 1 and the firm clamping effect of the positioning component 4 ensure that the substrate remains highly stable during sputtering, avoiding uneven deposition caused by displacement. The long bar 3 of the shielding component can slide within the groove component 2, allowing the fixture to be flexibly adjusted to adapt to substrates of different widths, improving the versatility and flexibility of the fixture. Compared with the traditional complex fixture structure, this embodiment of the invention simplifies the fixture structure, reduces manufacturing costs, and improves the reliability and service life of the fixture.

[0031] For example, refer to Figure 2 As shown, the base component 1 includes a first support plate 5, a second support plate 6, and a third support plate 7. The second support plate 6 is vertically connected to one end of the first support plate 5, and the third support plate 7 is vertically connected to the other end of the first support plate 5. The groove component 2 includes a first groove 8 and a second groove 9. The first groove 8 is disposed inside the second support plate 6, and the second groove 9 is disposed inside the third support plate 7. One end of the long bar 3 is movably installed in the first groove 8, and the other end is movably installed in the second groove 9.

[0032] Specifically, the first support plate 5, the second support plate 6, and the third support plate 7 together form a "U"-shaped structure. The second support plate 6 and the third support plate 7 form both sides of the "U"-shaped structure, used to limit and fix the elongated substrate, preventing displacement of the substrate during sputtering. The first groove 8 is located inside the second support plate 6, used to install and fix one end of the elongated rod 3, and the second groove 9 is located inside the third support plate 7, used to install and fix the other end of the elongated rod 3. The first groove 8 and the second groove 9 provide the installation position for the elongated rod 3, allowing the elongated rod 3 to slide within the groove, thereby accommodating elongated substrates of different widths.

[0033] It should be noted that the number of long bars 3 is not limited here; refer to... Figure 5 As shown, the specific configuration can be adjusted based on the number and size of the elongated substrates. The innermost elongated substrate is clamped between the elongated rod 3 and the base component 1, while the remaining elongated substrates are clamped between two adjacent elongated rods 3. Each adjacent elongated rod 3 clamps one elongated substrate, enabling batch sputtering of the elongated substrates. Preferably, the first groove 8 extends to the free end of the second support plate 6, and the second groove 9 extends to the free end of the third support plate 7, increasing the range of motion of the elongated rods 3.

[0034] For example, in conjunction with reference Figure 2 and Figure 3As shown, the long bar 3 has a cuboid structure, with a first slider 10 at one end and a second slider 11 at the other end. The first slider 10 is installed inside the first groove 8, and the second slider 11 is installed inside the second groove 9. The first slider 10 is used to cooperate with the first groove 8, and the second slider 11 is used to cooperate with the second groove 9. The long bar 3 is installed in the first groove 8 and the second groove 9 through the sliders at both ends, clamping multiple long substrates in the "U"-shaped structure of the base component 1. This ensures that the substrates remain stable during sputtering and forms a physical barrier to shield the sides of the substrates, preventing sputtered atoms from depositing on the sides of the substrates and ensuring uniform deposition of the thin film on the sides of the substrates.

[0035] The slider design allows the long bar 3 to be easily installed and removed from the free end of the slot bar, improving operational convenience and ensuring the stability of the long bar 3 during the sputtering process, preventing it from shifting due to vibration or impact. To further increase clamping stability, the size of the first slider 10 can be set to match the size of the first slot bar 8, and the size of the second slider 11 can be set to match the size of the second slot bar 9.

[0036] In a preferred embodiment of this utility model, the second support plate and the third support plate 7 are arranged symmetrically along the transverse centerline of the first support plate 5, and the first groove 8 and the second groove 9 are arranged symmetrically along the transverse centerline of the first support plate 5. The symmetrically arranged support plates ensure the balance and stability of the fixture during operation, especially during sputtering, effectively preventing vibration or displacement caused by imbalance. They also allow the fixture to distribute the force generated during sputtering evenly, avoiding excessive local stress and extending the fixture's service life. Similarly, preferably, the top and bottom of the first slider 10 and the second slider 11 both protrude outwards from the elongated rod 3, and both the first slider 10 and the second slider 11 are arranged symmetrically along the central axis of the elongated rod 3 and along the vertical centerline of the elongated rod 3. In this embodiment, the height of the elongated rod 3 is lower than the height of the elongated substrate. This structure allows sputtered atoms to be uniformly deposited onto the side edges of the substrate, avoiding uneven deposition caused by the elongated rod 3 blocking the deposition.

[0037] Furthermore, referring to Figure 4As shown, the positioning element 4 is a plate-like structure. The positioning element 4 is used to encapsulate the opening of the "U"-shaped structure of the base element 1. The plate-like structure of the positioning element 4 provides additional stability, ensuring the entire fixture remains stable during sputtering and reducing the possibility of vibration and displacement. Preferably, the inner side of the positioning element 4 is provided with multiple elastic elements 12. The free end of the elastic element 12 is configured to abut against the outer long bar 3 and generate elastic compression on the outer long bar 3. The positioning element 4 is provided with a first screw hole 13 and a second screw hole 14. The first screw hole 13 is used for bolting to the second support plate 6, and the second screw hole 14 is used for bolting to the third support plate 7.

[0038] Specifically, the size and shape of the positioning element 4 match the opening of the "U"-shaped structure of the base element 1 to ensure complete coverage of the opening. The positioning element 4 is provided with a first screw hole 13 and a second screw hole 14 (see reference). Figure 5 As shown, the positioning elements 4 are bolted to the second support plate 6 and the third support plate 7 respectively, ensuring that the positioning element 4 is firmly fixed to the base element 1. Multiple elastic elements 12 are provided on the inner side of the positioning element 4. These elastic elements 12 can be made of springs, elastic rubber, or other elastic materials; there are no restrictions here. The number and position of the elastic elements 12 are also not limited, as long as sufficient clamping stability is achieved. The free end of the elastic element 12 abuts against the outer long rod 3, generating elastic compression on the outer long rod 3 to ensure that all long rods 3 remain stable during sputtering, preventing displacement due to vibration or impact.

[0039] During installation, prepare multiple long substrate strips and multiple long rods 3, ensuring that the height of the long rods 3 is lower than the height of the long substrate strips to allow for uniform sputtering of the side edges of the long substrate strips. Insert one end of the first long rod 3 into the free end of the first slot 8 through the first slider 10, and the other end into the free end of the second slot 9 through the second slider 11, ensuring that one end of the long rod 3 is inside the first slot 8 and the other end is inside the second slot 9. Insert one end of the first long substrate strip into the free end of the first slot 8 and the other end into the free end of the second slot 9, ensuring that one end of the long substrate strip is inside the first slot 8 and the other end is inside the second slot 9. Install subsequent long rods 3 and long substrate strips alternately in sequence, ensuring that each long substrate strip is clamped and protected by the long rod 3, and that there is a long substrate strip between every two long rods 3. Each long substrate strip and long rod 3 is installed through the free ends of the first slot 8 and the second slot 9.

[0040] After installing all the long substrate strips, insert the last long rod 3 to ensure that the last long substrate strip is clamped and protected by the last long rod 3. Install the positioning member 4 at the opening of the "U"-shaped structure of the base member 1, ensuring that the inner elastic element 12 of the positioning member 4 abuts against the outer long rod 3 and generates elastic compression on the outer long rod 3. This compression force is then transmitted to each long rod 3, ensuring that each long substrate strip is stably clamped. Using bolts, fix the positioning member 4 to the second support plate 6 and the third support plate 7 through the first screw hole 13 and the second screw hole 14, respectively, ensuring that the positioning member 4 is securely encapsulated at the opening of the "U"-shaped structure of the base member 1. Finally, perform batch sputtering of long substrate strips using the entire device.

[0041] In this embodiment of the invention, by alternately installing the long rod 3 and the long substrate, it is ensured that each long substrate is clamped and protected by the long rod 3, while allowing uniform sputtering of the side edges of the long substrate. Both the long substrate and the long rod 3 are installed through the free ends of the first groove 8 and the second groove 9, making installation and disassembly more convenient and reducing the complexity and time of operation. One end of the long substrate is in the first groove 8 and the other end is in the second groove 9, ensuring that the substrate remains stable during sputtering and does not shift. The long rod 3 is installed in the groove through sliders at both ends, ensuring that the long rod 3 slides smoothly in the groove and adapts to long substrates of different specifications. Multiple elastic elements 12 are provided on the inner side of the positioning member 4. The free ends of these elastic elements 12 abut against the outer long rod 3 and generate elastic compression on the outer long rod 3, further ensuring the stability of the long rod 3 during sputtering.

[0042] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model. It should be noted that the structures or components illustrated in the accompanying drawings are not necessarily drawn to scale, and descriptions of well-known components, processing techniques, and processes are omitted to avoid unnecessarily limiting the utility model.

Claims

1. A jig for preventing diffraction and sputtering on the side of a slender strip substrate, characterized in that, include: The base component (1) is a "U" shaped structure, and a groove component (2) is provided on the inner wall of the "U" shaped structure. The shielding component includes multiple long rods (3), both ends of each long rod (3) are installed in the groove (2), and each long rod (3) spans the "U"-shaped structure. Each long rod (3) is arranged in parallel and can slide within the groove (2). The long rod (3) is configured to hold a single long substrate between the long rod (3) on the inner side and the inner wall of the base component (1) and / or between two adjacent long rods (3). Positioning element (4) is provided on the base element (1) for clamping the shielding element and the long strip substrate in the "U"-shaped structure of the base element (1).

2. The anti-diffraction sputtering fixture for the side of a slender strip substrate according to claim 1, characterized in that, The base component (1) includes a first support plate (5), a second support plate (6) and a third support plate (7), wherein the second support plate (6) is vertically connected to one end of the first support plate (5) and the third support plate (7) is vertically connected to the other end of the first support plate (5); The grooved part (2) includes a first groove (8) and a second groove (9). The first groove (8) is disposed on the inner side of the second support plate (6), and the second groove (9) is disposed on the inner side of the third support plate (7). One end of the long bar (3) is movably installed in the first groove (8), and the other end is movably installed in the second groove (9).

3. The anti-diffraction sputtering fixture for the side of a slender strip substrate according to claim 2, characterized in that, The first groove (8) extends to the free end of the second support plate (6), and the second groove (9) extends to the free end of the third support plate (7).

4. The anti-diffraction sputtering fixture for the side of a slender substrate according to claim 2, characterized in that, The second support plate (6) and the third support plate (7) are arranged symmetrically along the transverse center line of the first support plate (5), and the first groove (8) and the second groove (9) are arranged symmetrically along the transverse center line of the first support plate (5).

5. A side-mounted anti-diffraction sputtering fixture for a slender strip substrate according to claim 2, characterized in that, The long bar (3) has a cuboid structure, with a first slider (10) at one end and a second slider (11) at the other end. The first slider (10) is installed in the first groove (8), and the second slider (11) is installed in the second groove (9).

6. The anti-diffraction sputtering fixture for the side of a slender strip substrate according to claim 5, characterized in that, The top and bottom of the first slider (10) and the second slider (11) both protrude outward from the long bar (3). The first slider (10) and the second slider (11) are both arranged symmetrically along the central axis of the long bar (3). The first slider (10) and the second slider (11) are arranged symmetrically along the vertical center line of the long bar (3).

7. A side-mounted anti-diffraction sputtering fixture for a slender strip substrate according to claim 5, characterized in that, The height of the long bar (3) is lower than the height of the long substrate.

8. A side-mounted anti-diffraction sputtering fixture for a slender substrate according to claim 2, characterized in that, The positioning element (4) is a plate-shaped structure, and the positioning element (4) is used to encapsulate the opening of the "U"-shaped structure of the base element (1).

9. A side-mounted anti-diffraction sputtering fixture for a slender strip substrate according to claim 8, characterized in that, The inner side of the positioning member (4) is provided with a plurality of elastic members (12), the free end of the elastic member (12) is configured to abut against the outer long bar (3) and generate elastic compression on the outer long bar (3).

10. A side-mounted anti-diffraction sputtering fixture for a slender strip substrate according to claim 2, characterized in that, The positioning component (4) is provided with a first screw hole (13) and a second screw hole (14). The first screw hole (13) is used to bolt to the second support plate (6), and the second screw hole (14) is used to bolt to the third support plate (7).

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