Semiconductor evaporation station planetary carrier

Abstract

The utility model relates to the technical field of planet carrier, and concretely is semiconductor evaporation station planet carrier, including planet carrier, install a plurality of placing mechanism on planet carrier, and placing mechanism includes fixed sleeve, install a plurality of fixed sleeve that are annular equidistance distribution on planet carrier, and the outside rotatory connection of fixed sleeve has the sleeve, and the inside rotatory connection of fixed sleeve has a plurality of supporting plate, and a plurality of supporting plate one end respectively extend to fixed sleeve center place, and a plurality of supporting plate one side center place are rotatory connected with push rod respectively, and push rod one end is slidably connected with fixed sleeve inside, and push rod one end is rotatory connected with sleeve inside, and install the limiting mechanism between sleeve and fixed sleeve, through the installation of a plurality of supporting plate, it is convenient to place stable to wafer, and simultaneously through the rotation of sleeve, make sleeve drive a plurality of push rods to adjust the position of a plurality of supporting plates, and then place the wafer of different size according to the need, and the operation is convenient and flexible, and the range of processing is improved.

Description

Technical Field

[0001] This utility model relates to a planetary carrier, specifically a semiconductor evaporation stage planetary carrier, and belongs to the field of planetary carrier technology. Background Technology

[0002] In the semiconductor manufacturing industry, evaporation stages are key equipment for thin film deposition. They heat materials through an evaporation source and deposit them onto the wafer surface to form the desired thin film structure. Planetary carriers, as one of the core components of the evaporation stage, are mainly used to support and fix the wafer, ensuring that the wafer maintains a stable position and orientation during the evaporation process to achieve uniform thin film deposition. During the evaporation process, the wafer needs to be placed on the planetary carrier to achieve uniform film deposition inside the equipment.

[0003] However, traditional planetary racks can only accommodate wafers of one size. When placing wafers of different sizes, the planetary rack needs to be replaced. This process of disassembling and replacing the planetary rack is cumbersome, time-consuming, and labor-intensive. In addition, multiple planetary racks of different specifications are needed as spares, which increases costs.

[0004] Therefore, there is an urgent need to design a new planetary carrier structure that can be flexibly adjusted, stably supported, and easy to operate and maintain, in order to meet the needs of the continuous development of semiconductor manufacturing processes. Utility Model Content

[0005] The purpose of this invention is to provide a semiconductor evaporation stage planetary carrier to solve the above-mentioned problems. By installing multiple trays, it is easy to place the wafer stably. At the same time, by rotating the rotating sleeve, the rotating sleeve drives multiple push rods to adjust the position of multiple trays, thereby placing wafers of different sizes as needed. The operation is convenient and flexible, and the processing range is improved.

[0006] This utility model achieves the above-mentioned objective through the following technical solution: a semiconductor evaporation stage planetary carrier, including a planetary carrier, on which multiple placement mechanisms are installed. Each placement mechanism includes a fixed sleeve. Multiple fixed sleeves are installed on the planetary carrier in a ring-shaped, equidistant arrangement. A rotating sleeve is rotatably connected to the outer side of each fixed sleeve, and multiple support plates are rotatably connected to the inner side of each fixed sleeve. One end of each support plate extends to the center of the fixed sleeve. A push rod is rotatably connected to the center of one side of each support plate. One end of each push rod is slidably connected to the inner side of the fixed sleeve, and the other end of each push rod is rotatably connected to the inner side of the rotating sleeve. A limit mechanism is installed between the rotating sleeve and the fixed sleeve.

[0007] Preferably, the tray has an arc-shaped structure, and a placement groove is provided on the top side of one end of the tray.

[0008] Preferably, an arc-shaped protective pad is provided on one side of the placement slot, and the protective pad is connected to the end of the tray.

[0009] Preferably, the outer side of the rotating sleeve is equipped with a plurality of protrusions distributed in a ring at equal intervals, and the protrusions are trapezoidal in structure.

[0010] Preferably, the top of the fixing sleeve is rotatably connected to multiple pressure plates via screws, and the pressure plates extend to the center of the fixing sleeve.

[0011] Preferably, a plurality of rubber blocks are installed on the outer bottom of the fixing sleeve in a ring-shaped equidistant arrangement, and the fixing sleeve engages with the planetary carrier through the plurality of rubber blocks.

[0012] Preferably, one end of the rubber block extends into the inner side of the fixing sleeve, and the one end of the rubber block is slidably connected to the inner side of the fixing sleeve by multiple abutment springs.

[0013] Preferably, the rubber block has an arc-shaped structure, and the outer side of the rubber block has a serrated structure.

[0014] Preferably, the limiting mechanism includes a limiting block, which is installed inside the fixed sleeve. The limiting block is slidably connected to the inside of the fixed sleeve by a compression spring, and one end of the limiting block extends to the outside of the fixed sleeve and abuts against the bottom of the rotating sleeve.

[0015] Preferably, a toothed ring is installed at the bottom of the rotating sleeve, and one end of the limiting block has a toothed structure, with one end of the limiting block abutting against the toothed ring.

[0016] The beneficial effects of this utility model are as follows: By installing the planetary carrier, multiple fixed sleeves can be connected. With the cooperation of multiple ring-shaped trays, it is convenient to lift and place the wafer, so that the wafer is stored inside the multiple fixed sleeves, which facilitates subsequent coating work. By rotating the rotating sleeve, with the cooperation of multiple push rods, the rotating sleeve synchronously controls the multiple push rods to push the multiple trays, thereby realizing the adjustment of the swing angle of the multiple trays, changing the distance between the end of the tray and the center of the fixed sleeve, realizing the placement of wafers of different sizes, making the operation more convenient and increasing the placement range. With the cooperation of the limiting mechanism, the rotating sleeve plays a limiting role after rotation, preventing the rotating sleeve from loosening with the fixed sleeve and affecting the support of the tray. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the connection structure between the pressure plate and the fixing sleeve of this utility model;

[0019] Figure 3 This is a schematic diagram of the connection structure between the tray and the fixing sleeve of this utility model;

[0020] Figure 4 This is a schematic diagram of the connection structure between the rubber block and the fixing sleeve of this utility model;

[0021] Figure 5 This is a schematic diagram of the connection structure between the rotating sleeve and the fixed sleeve of this utility model.

[0022] In the diagram: 1. Planetary carrier; 2. Placement mechanism; 201. Fixing sleeve; 202. Rotating sleeve; 203. Protrusion; 204. Pressure plate; 205. Screw; 206. Support plate; 207. Placement groove; 208. Push rod; 209. Rubber block; 210. Contact spring; 211. Protective pad; 3. Limiting mechanism; 301. Limiting block; 302. Compression spring; 303. Gear ring. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figures 1-5 As shown, the semiconductor evaporation stage planetary carrier includes a planetary carrier 1. Multiple placement mechanisms 2 are installed on the planetary carrier 1. Each placement mechanism 2 includes a fixed sleeve 201. Multiple fixed sleeves 201 are installed on the planetary carrier 1 in a ring-shaped and equidistant arrangement. A rotating sleeve 202 is rotatably connected to the outer side of the fixed sleeve 201. Multiple support plates 206 are rotatably connected to the inner side of the fixed sleeve 201. One end of each support plate 206 extends to the center of the fixed sleeve 201. A push rod 208 is rotatably connected to the center of one side of each support plate 206. One end of the push rod 208 is slidably connected to the inner side of the fixed sleeve 201, and the other end of the push rod 208 is rotatably connected to the inner side of the rotating sleeve 202. A limit mechanism 3 is installed between the rotating sleeve 202 and the fixed sleeve 201.

[0025] As a technical optimization of this utility model, the tray 206 has an arc-shaped structure. One end of the tray 206 has a placement groove 207 on its top side, which facilitates the tray 206 to be hidden inside the fixing sleeve 201 after being stored, and at the same time makes the wafer stable on the tray 206 and in the center position.

[0026] As a technical optimization of this utility model, an arc-shaped protective pad 211 is provided on one side of the placement slot 207. The protective pad 211 is connected to the end of the tray 206. By installing the protective pad 211, the wafer will not be damaged by contact when it is placed, thus playing a protective and anti-slip role.

[0027] As a technical optimization of this utility model, a plurality of protrusions 203 are installed on the outer side of the rotating sleeve 202 in a ring-shaped and equidistant manner. The protrusions 203 have a trapezoidal structure. The installation of the protrusions 203 increases the friction when the rotating sleeve 202 rotates, thus playing an anti-slip role.

[0028] As a technical optimization of this utility model, the top of the fixed sleeve 201 is rotatably connected to multiple pressure plates 204 by screws 205. The pressure plates 204 extend to the center of the fixed sleeve 201. With the cooperation of the screws 205, it is easy to install the pressure plates 204, so that the pressure plates 204 can be rotated and adjusted to facilitate contact with the top side of wafers of different sizes, so as to stabilize the wafer placement.

[0029] As a technical optimization of this utility model, a plurality of rubber blocks 209 distributed in a ring at equal intervals are installed on the outer side of the bottom of the fixing sleeve 201. The fixing sleeve 201 is engaged with the planetary carrier 1 through the plurality of rubber blocks 209. The installation of the plurality of rubber blocks 209 facilitates the detachable and stable engagement of the fixing sleeve 201 and the planetary carrier 1, and also facilitates subsequent disassembly and maintenance.

[0030] As a technical optimization of this utility model, one end of the rubber block 209 extends to the inner side of the fixing sleeve 201. One end of the rubber block 209 is slidably connected to the inner side of the fixing sleeve 201 through multiple abutment springs 210. Through the cooperation of multiple abutment springs 210, the rubber block 209 and the outer side of the fixing sleeve 201 have elastic sliding, making the fixing sleeve 201 easy to disassemble and assemble.

[0031] As a technical optimization of this utility model, the rubber block 209 has an arc-shaped structure and an oblique tooth structure on the outside. The oblique tooth structure design on the outside of the rubber block 209 makes it easier for the rubber block 209 to engage with the planetary carrier 1 and prevents it from slipping, thus playing an anti-slip role.

[0032] As a technical optimization of this utility model, the limiting mechanism 3 includes a limiting block 301. The limiting block 301 is installed inside the fixed sleeve 201. The limiting block 301 is slidably connected to the inside of the fixed sleeve 201 through a compression spring 302. One end of the limiting block 301 extends to the outside of the fixed sleeve 201 and abuts against the bottom of the rotating sleeve 202. Through the installation of the limiting block 301, under the abutment of the compression spring 302, the limiting block 301 is always in contact with the rotating sleeve 202, which increases the friction of the rotating sleeve 202 and makes it less prone to loosening.

[0033] As a technical optimization of this utility model, a toothed ring 303 is installed at the bottom of the rotating sleeve 202. One end of the limiting block 301 has a toothed structure, and one end of the limiting block 301 abuts against the toothed ring 303. The installation of the toothed ring 303 facilitates the limiting block 301 to abut against the toothed ring 303 and limit the movement, thus improving the limiting effect. At the same time, the limiting block 301 can slide elastically through the compression spring 302. When the rotating sleeve 202 is rotated with a certain force, the limiting block 301 will be abutted and contracted by the toothed ring 303, making it easy for the rotating sleeve 202 to rotate to a certain position.

[0034] In use, this invention first installs multiple fixing sleeves 201 with the planetary carrier 1 via multiple rubber blocks 209. The fixing sleeves 201 are stably installed and facilitate subsequent disassembly and maintenance through the cooperation of the helical teeth and the contact spring 210. Then, multiple protrusions 203 rotate the rotating sleeve 202. With the cooperation of multiple push rods 208, the rotating sleeve 202 synchronously controls the push rods 208 to push multiple trays 206, thereby adjusting the swing angle of the trays 206 and changing the distance between the end of the tray 206 and the center of the fixing sleeve 201. This allows for the placement of wafers of different sizes, making operation more convenient and increasing the placement range. During the rotation of the rotating sleeve 202, the installation of the toothed ring 303 facilitates the movement of the limiting block. The limiting block 301 abuts against the toothed ring 303 to prevent the rotating sleeve 202 and the fixed sleeve 201 from loosening and affecting the support of the tray 206. At the same time, the limiting block 301 can slide elastically through the compression spring 302. By rotating the rotating sleeve 202 with a certain force, the limiting block 301 will be abutted and contracted by the toothed ring 303, which makes it easy for the rotating sleeve 202 to rotate to a certain position. After the multiple trays 206 distributed in a ring are adjusted to the position matching the wafer diameter, it is easy to place multiple wafers on the trays 206 in the multiple fixed sleeves 201. The trays 206 are provided with placement grooves 207 and protective pads 211 to make the wafers stable and not loose. Finally, the screws 205 abut against the top side of the wafers to prevent loosening, which facilitates the subsequent coating work.

[0035] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0036] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A semiconductor evaporation stage planetary carrier, comprising a planetary carrier (1), characterized in that: The planetary carrier (1) is equipped with multiple placement mechanisms (2). Each placement mechanism (2) includes a fixed sleeve (201). Multiple fixed sleeves (201) are installed on the planetary carrier (1) in a ring-shaped and equidistant arrangement. A rotating sleeve (202) is rotatably connected to the outside of the fixed sleeve (201). Multiple support plates (206) are rotatably connected to the inside of the fixed sleeve (201). One end of each of the multiple support plates (206) extends to the center of the fixed sleeve (201). A push rod (208) is rotatably connected to the center of one side of each of the multiple support plates (206). One end of the push rod (208) is slidably connected to the inside of the fixed sleeve (201). The other end of the push rod (208) is rotatably connected to the inside of the rotating sleeve (202). A limit mechanism (3) is installed between the rotating sleeve (202) and the fixed sleeve (201).

2. The planetary carrier of the semiconductor evaporation stage according to claim 1, characterized in that: The tray (206) has an arc-shaped structure, and a placement groove (207) is provided on the top side of one end of the tray (206).

3. The planetary carrier of the semiconductor evaporation stage according to claim 2, characterized in that: An arc-shaped protective pad (211) is provided on one side of the placement groove (207), and the protective pad (211) is connected to the end of the tray (206).

4. The planetary carrier of the semiconductor evaporation stage according to claim 1, characterized in that: The outer side of the rotating sleeve (202) is equipped with a plurality of protrusions (203) that are distributed in a ring at equal intervals, and the protrusions (203) are trapezoidal in shape.

5. The planetary carrier of the semiconductor evaporation stage according to claim 1, characterized in that: The top of the fixed sleeve (201) is rotatably connected to a plurality of pressure plates (204) via screws (205), and the pressure plates (204) extend to the center of the fixed sleeve (201).

6. The planetary carrier of the semiconductor evaporation stage according to claim 1, characterized in that: The bottom outer side of the fixing sleeve (201) is equipped with a plurality of rubber blocks (209) distributed in a ring at equal intervals. The fixing sleeve (201) is engaged with the planetary carrier (1) through the plurality of rubber blocks (209).

7. The planetary carrier of the semiconductor evaporation stage according to claim 6, characterized in that: One end of the rubber block (209) extends to the inside of the fixing sleeve (201), and the other end of the rubber block (209) is slidably connected to the inside of the fixing sleeve (201) by a plurality of abutment springs (210).

8. The planetary carrier of the semiconductor evaporation stage according to claim 7, characterized in that: The rubber block (209) has an arc-shaped structure, and the outer side of the rubber block (209) has a serrated structure.

9. The planetary carrier of the semiconductor evaporation stage according to claim 1, characterized in that: The limiting mechanism (3) includes a limiting block (301). The limiting block (301) is installed inside the fixed sleeve (201). The limiting block (301) is slidably connected to the inside of the fixed sleeve (201) by a compression spring (302). One end of the limiting block (301) extends to the outside of the fixed sleeve (201) and abuts against the bottom of the rotating sleeve (202).

10. The planetary carrier of the semiconductor evaporation stage according to claim 9, characterized in that: The bottom of the rotating sleeve (202) is equipped with a toothed ring (303), and one end of the limiting block (301) has a toothed structure, and one end of the limiting block (301) abuts against the toothed ring (303).

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