Spraying device

Abstract

The utility model discloses a kind of spraying devices, comprising: cover, with air inlet part;Spraying part, be in the cover, and form diffusion cavity between the cover, the air inlet part is communicated the diffusion cavity, the spraying part includes several spray holes;Isolation device, including several isolation pieces, each the isolation piece sequentially head-to-tail detachable interface is arranged in the diffusion cavity, to make the isolation device divide the diffusion cavity into at least two air chambers;At least one adjusting piece, detachably arranged in the spray hole, to adjust the spraying range of the spraying part.The utility model can flexibly adjust the spraying area of each subzone in spraying device according to the change of process requirement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a spraying device. Background Technology

[0002] The spray system is a critical component in semiconductor device fabrication equipment. It provides the substrate with reactive gases capable of forming compound semiconductors. These gases decompose or undergo chemical deposition reactions on the substrate to form a compound semiconductor thin film. The structure of the spray system largely determines the flow and distribution of the reactive gases. Precise gas transport and fluid dynamics design, achieved through structural design such as spray orifice size and arrangement, must match the chamber pressure and gas flow rate to deposit high-quality thin films on the substrate. In some cases, depending on process requirements and the characteristics of different reactive gases, structures that prevent mixing of the reactive gases within the spray system are also needed. Alternatively, airflow can be adjusted through zoned coupling of the spray system to improve the uniformity of film growth and the quality of the deposited film.

[0003] In the existing technology, the partition plates that realize the internal partitioning of the spray device are fixed and non-removable structures, which makes each air chamber partition fixed, the airflow adjustment inflexible, and also limits the universality of the spray device.

[0004] Therefore, it is necessary to provide a spraying device to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0005] The purpose of this invention is to provide a spraying device that can flexibly adjust the spraying area of ​​each zone within the spraying device according to changes in process requirements.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A spraying device, comprising: The cover is equipped with an air intake. A spray element is disposed on the cover body, forming a diffusion cavity between the spray element and the cover body, the air inlet is connected to the diffusion cavity, and the spray element includes a plurality of spray holes; An isolation device includes a plurality of isolation components, each of which is sequentially and detachably connected end to end within the diffusion cavity, so that the isolation device divides the diffusion cavity into at least two air chambers. At least one adjusting element is detachably disposed at the spray hole to adjust the spray range of the spray element.

[0007] By adopting the above technical solution, an isolation device is detachably installed within the diffusion cavity, dividing the diffusion cavity into at least two gas chambers. This allows for flexible installation of different numbers of isolation devices based on the needs of the gas chambers. The isolation section includes several isolation components, and the spray area of ​​each gas chamber can be flexibly changed by the sequentially detachable connection of these components. This allows for adjustment of the spray area of ​​each gas chamber according to different process requirements. Multiple detachable adjusting components can be used to block corresponding spray holes. Furthermore, the adjusting components can block one or more spray holes in one gas chamber, or partially block the spray holes in a single gas chamber, thereby adjusting the spray range. Unnecessary spray holes can be blocked according to the size of the growth substrate to prevent raw material waste. The on / off state of the spray holes can also be modulated according to the substrate thickness distribution to adjust thickness uniformity.

[0008] Optionally, the adjusting member has a mounting part and a positioning part. The mounting part is adapted to the spray hole to block the corresponding spray hole, and the positioning part is located on the top of the mounting part and abuts against the spray member.

[0009] Optionally, the component material of either the spraying element or the regulating element is a heat-resistant material, and / or the surface of either the spraying element or the regulating element is covered with a heat-resistant coating; the coefficient of thermal expansion of the regulating element is less than or equal to the coefficient of thermal expansion of the spraying element.

[0010] Optionally, the heat-resistant material is graphite, or a metal with a melting point or softening point of not less than 2000 degrees Celsius, and the heat-resistant coating is silicon carbide or tantalum carbide.

[0011] Optionally, the isolation element can be detachably disposed on the spray element or the cover.

[0012] Optionally, the number of isolation devices is at least 2, and they are nested sequentially from the inside to the outside to divide the diffusion cavity into at least 3 air chambers.

[0013] Optionally, a plurality of the spray holes form a plurality of spray rings that surround the spray member from the inside out. The spray member has an annular groove along the circumferential direction, and the annular groove is located between adjacent spray rings. The annular groove is used to detachably connect each of the isolation members.

[0014] Optionally, some of the isolation components are detachable positioning connectors corresponding to the spray holes, while other isolation components are detachable extension connectors between adjacent positioning connectors; the bottom of each positioning connector is provided with a positioning element, which is detachably located at the corresponding spray hole.

[0015] Optionally, the spray holes form a plurality of spray rings that surround the spray member from the inside out, and the extension connector is located between adjacent spray rings.

[0016] Optionally, the positioning connector is a folded structure, which includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure, or an arc-shaped structure. Attached Figure Description

[0017] Figure 1 This is a cross-sectional view of the internal structure of a spraying device according to an embodiment of the present utility model; Figure 2 This is a schematic diagram of the assembly structure of a spray component and an isolation device according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the assembly structure of another spray component and isolation device according to an embodiment of the present invention. Figure 4 This is a schematic diagram of the assembly structure when the positioning connector and the adjacent extension connector are connected according to an embodiment of the present invention. Figure 5 This is a schematic diagram of the assembly structure of a spray component and an adjusting component according to an embodiment of the present utility model; Figure 6 This is a schematic diagram of the thickness distribution of the epitaxial sheet without an adjustment element, according to an embodiment of the present invention. Figure 7 This is a schematic diagram of the thickness distribution of the outer edge of an adjusting element when sealing the three rings of spray holes on the outside of the middle air chamber according to an embodiment of the present invention.

[0018] Figure label: 100. Cover; 110. Top plate; 120. Side plate; 200. Sprayer component; 210. Spray hole; 220. Annular groove; 230. Spray ring; 300. Diffuser chamber; 310. Central air chamber; 320. Middle air chamber; 330. Edge air chamber; 400. Isolation device; 420. Isolation component; 421. Positioning connector; 422. Extension connector; 430. Positioning component; 500. Adjustment component; 510. Mounting part; 520. Positioning part. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0020] The following is in conjunction with the appendix Figure 1-7 The specific embodiments of this utility model will be further described in detail below.

[0021] This invention provides a spraying device for use in a vapor-phase growth apparatus. The vapor-phase growth apparatus includes, but is not limited to, a chemical vapor deposition (CVD) apparatus, and can also be a physical vapor deposition (PVD) apparatus. The chemical vapor deposition apparatus can be a plasma-enhanced chemical vapor deposition (PECVD) apparatus, a metal-organic chemical vapor deposition (MOCVD) apparatus, etc. This embodiment uses an MOCVD apparatus as an example for illustration. It should be understood that this apparatus is merely exemplary, and the invention is not limited to this single apparatus.

[0022] Reference Figure 1 The spray device shown includes: The cover 100 is provided with at least one air inlet (not shown in the figure) to introduce gas into each air chamber; A spray element 200 is disposed on the cover 100, and a diffusion cavity 300 is formed between the spray element 200 and the cover 100. Specifically, the diffusion cavity 300 is connected to each air inlet and communicates with the outside through the spray element 200; the spray element 200 includes a plurality of spray holes 210 to transfer the gas in the diffusion cavity 300 to the process chamber of the vapor phase growth equipment.

[0023] The isolation device 400 includes a plurality of isolation elements 420, each isolation element 420 being sequentially and detachably connected end to end within the diffusion cavity 300, so that the isolation device 400 divides the diffusion cavity 300 into at least two air chambers; At least one adjusting element 500 is detachably provided at the spray hole 210 to adjust the spray range of the spray element 200.

[0024] In some embodiments, refer to Figure 1 The top of the cover 100 is provided with multiple air inlets, which are evenly distributed on the top of the cover 100. These air inlets are connected to an external air supply device, which provides process gas. The process gas enters different positions in the process chamber through different air inlets. More specifically, the cover 100 is connected to the process chamber. To evenly disperse the process gas, a spray element 200 is also provided inside the cover 100. The spray element 200 is plate-shaped and has multiple spray holes 210 evenly distributed on it. The spray holes 210 penetrate the spray element 200 along its thickness direction. There is a gap between the end face of the spray element 200 and the cover 100, forming a diffusion cavity 300 between the spray element 200 and the cover 100. The spray holes 210 communicate with the diffusion cavity 300. The process gas from the air inlets enters the diffusion cavity 300, then flows through the spray holes 210 and enters the process chamber.

[0025] In some embodiments, the isolation device 400 is detachably disposed within the diffusion cavity 300 for separating air chambers. In some specific embodiments, the isolation device 400 includes a plurality of isolation members 420, which are connected end to end to form a closed structure, with one end of the isolation member 420 abutting against the cover 100 and the other end abutting against the spray member 200, thereby dividing the diffusion cavity 300 into different air chambers.

[0026] In some embodiments, adjacent spacers 420 are detachably connected, for example, by a convex-concave fit. The detachable connection method is prior art and will not be described in detail here.

[0027] In some embodiments, the adjusting member 500 is detachably mounted on the spray member 200. When the adjusting member 500 is needed, it is mounted on the spray member 200 to block the spray hole 210; when the adjusting member 500 is not needed, it is removed from the spray hole 210. Removing the adjusting member 500 does not affect the process gas passing through the spray hole 210. During use, multiple adjusting members 500 can be configured with different shapes on the spray member 200 as needed to adjust the spray range. Alternatively, during use, the spray holes 210 of different gas chambers can be blocked as needed to adjust the spray area of ​​the corresponding gas chamber.

[0028] For ease of connection between the adjusting component 500 and the spraying component 200, refer to... Figure 5The adjusting member 500 has a mounting part 510 and a positioning part 520. The mounting part 510 is adapted to the spray hole 210. When the mounting part 510 passes through the spray hole 210, it blocks the corresponding spray hole 210. The positioning part 520 is located on the top of the mounting part 510 and abuts against the spray member 200 to position the mounting part 510.

[0029] The mounting part 510 is columnar, and its diameter matches the inner diameter of the spray hole 210. The positioning part 520 is fixedly mounted on the top of the mounting part 510. The fixing method can be bolt fixing or integral molding, etc., without limitation, as long as there is no relative movement between the mounting part 510 and the positioning part 520. Specifically, the diameter of the positioning part 520 is larger than the diameter of the mounting part 510, so that after the mounting part 510 passes through the spray hole 210, the positioning part 520 abuts against the spray element 200, thereby fixing the position of the mounting part 510. More specifically, the top of the positioning part 520 is higher than the end face of the spray element 200 to facilitate the removal of the adjusting element 500 from the spray hole 210.

[0030] The bottom wall of the positioning part 520 is set horizontally or inclined; In some embodiments, the bottom wall of the positioning part 520 is horizontally arranged. When the mounting part 510 passes through the spray hole 210, the bottom wall of the positioning part 520 abuts against the end face of the spray member 200, thereby limiting the mounting part 510.

[0031] In some embodiments, the bottom wall of the positioning part 520 is inclined. Specifically, the bottom wall of the positioning part 520 gradually approaches the axis of the positioning part 520 from the edge of the positioning part 520 toward the vertical direction downward, so that after the mounting part 510 passes through the spray hole 210, the bottom wall of the positioning part 520 abuts against the inner wall of the spray hole 210, thereby limiting the mounting part 510.

[0032] In some embodiments, there are multiple adjusting members 500, wherein the bottom wall of the positioning part 520 in a portion of the adjusting members 500 is horizontally arranged, and the bottom wall of the positioning part 520 in another portion of the adjusting members 500 is inclined. No limitation is made here, the main requirement being that the adjusting member 500 can block the corresponding spray hole 210.

[0033] In some embodiments, a plurality of adjusting members 500 are arranged in a ring to block one of the air chambers, or to block part of the spray holes 210 in one of the air chambers.

[0034] In some embodiments, the number of isolation devices 400 is at least two, and they are sequentially nested from the inside out to divide the diffusion cavity 300 into at least three gas chambers. Specifically, taking two isolation devices 400 as an example, when there are two isolation devices 400, the two isolation devices 400 are sequentially nested from the inside out, jointly dividing the diffusion cavity 300 into three gas chambers, namely a central gas chamber 310, a middle gas chamber 320, and an edge gas chamber 330. In some more specific embodiments, the inner diameter of the central gas chamber 310 is 8-16 cm, and a 4-6 inch substrate can be placed below it; the middle diameter of the middle gas chamber 320 is 12-21 cm, and an 8-inch substrate can be placed below it; the outer diameter of the edge gas chamber 330 is 18-31 cm, and a 12-inch substrate can be placed below it. The substrate mentioned in this embodiment can be a silicon substrate, a silicon carbide substrate, etc.

[0035] In some specific embodiments, the position and number of adjusting members 500 are set according to requirements during use. For example, multiple adjusting members 500 are set to block the spray holes 210 of the central air chamber 310, the middle air chamber 320, or the edge air chamber 330 to block the corresponding air chamber. Alternatively, multiple adjusting members 500 are set to block some of the spray holes 210 in the central air chamber 310, the middle air chamber 320, or the edge air chamber 330, thereby adjusting the spray range of the corresponding air chamber.

[0036] The isolator 420 is detachably mounted on the spray element 200 or the cover 100. When multiple isolators 420 are provided, multiple isolators 420 are detachably mounted on the spray element 200 or the cover 100 and are sequentially mounted from the inside to the outside to divide the diffusion cavity 300 into multiple air chambers.

[0037] In some embodiments, multiple isolation members 420 are detachably disposed on the spray member 200.

[0038] In some embodiments, multiple isolation members 420 are detachably provided on the cover 100.

[0039] In some embodiments, one isolation member 420 is disposed on the spray member 200, and another isolation member 420 is disposed on the cover 100.

[0040] In some specific embodiments, multiple isolation members 420 are detachably disposed on the spray member 200, and the top of the isolation member 420 abuts against the cover 100 to separate the diffusion cavity 300.

[0041] In some embodiments, each gas chamber is provided with an air inlet to supply process gas to the corresponding gas chamber after the diffusion chamber 300 is divided. Specifically, the cover 100 is provided with multiple air inlets, which correspond to the central gas chamber 310, the middle gas chamber 320, and the edge gas chamber 330, respectively, so that the air inlets can supply process gas to the corresponding gas chambers.

[0042] Without the isolation device 400, a single gas chamber is formed, through which process gas is introduced. With an internal isolation device 400 installed within the diffusion chamber 300, the gas chamber is divided into two chambers: the inner chamber is introduced with a reaction gas of one flow rate / component / molecular weight; the outer chamber is introduced with a reaction gas of another flow rate / component / molecular weight. This allows for adjustment of epitaxial uniformity through partitioned coupling. Alternatively, with two internal isolation devices 400 installed within the diffusion chamber 300, the diffusion chamber 300 is divided into three chambers: the central chamber 310 is introduced with a reaction gas of one flow rate / component / molecular weight; the middle chamber 320 is introduced with a reaction gas of another flow rate / component / molecular weight; and the edge chamber 330 is introduced with a third reaction gas of a different flow rate / component / molecular weight, or a cleaning gas.

[0043] In some more specific embodiments, when growing a 12-inch epitaxial wafer, the number of spacers 420 can be selected according to the growth results to divide the diffusion cavity 300 into at least one gas chamber. The type / flow rate / component / molecular weight of the gas introduced into each gas chamber can be adjusted to achieve partitioned coupling and improve uniformity.

[0044] In some more specific embodiments, when growing an 8-inch epitaxial wafer, based on the above-mentioned installation of two sleeved isolation devices 400, the inner isolation device 400 is removed to form two gas chambers. The inner gas chamber is filled with process gas to correspond to the growth of the 8-inch epitaxial wafer, and the outer gas chamber is filled with clean gas. This can constrain the process gas, obtain the required flow field range, and isolate the process gas from the inner wall of the reaction chamber to prevent the formation of a coating on the sidewall.

[0045] In some more specific embodiments, when growing 4-6 inch epitaxial wafers, based on the above-mentioned installation of two sleeved isolation devices 400, the outer isolation device 400 is removed to form two gas chambers. The inner gas chamber is filled with process gas to correspond to the growth of 4-6 inch epitaxial wafers, and the outer gas chamber is filled with clean gas. This can constrain the process gas, obtain the required flow field range, and isolate the process gas from the reaction chamber wall to prevent the formation of coatings on the sidewalls.

[0046] The spray component 200 and the regulating component 500 are both made of heat-resistant materials, and / or the surfaces of either the spray component 200 or the regulating component 500 are covered with a heat-resistant coating; the coefficient of thermal expansion of the regulating component 500 is less than or equal to that of the spray component 200. The heat-resistant material is graphite, or a metal with a melting point or softening point not lower than 2000 degrees Celsius, and the heat-resistant coating is silicon carbide or tantalum carbide.

[0047] In some embodiments, the spray element 200 is composed of graphite or heat-resistant metal; the heat-resistant metal has a melting point or softening point ≥2000°C. Furthermore, the surface of the spray element 200 is covered with a heat-resistant coating.

[0048] In some specific embodiments, a coating, namely a heat-resistant coating, is applied to the spray element 200. The heat-resistant coating is graphite-plated silicon carbide or graphite-plated tantalum carbide. In some embodiments, the spray element 200 can also be made of other high-temperature resistant metal materials, as long as the melting point or softening point is ≥2000℃, such as molybdenum.

[0049] In some embodiments, the adjusting element 500 is composed of graphite or a heat-resistant metal; the heat-resistant metal has a melting point or softening point ≥2000°C. Furthermore, the surface of the adjusting element 500 is covered with a heat-resistant coating.

[0050] In some specific embodiments, the adjusting element 500 is made of graphite, and a coating, namely a heat-resistant coating, is applied to the adjusting element 500. The heat-resistant coating is graphite plated with silicon carbide or graphite plated with tantalum carbide. In some embodiments, the adjusting element 500 can also be made of other high-temperature resistant metal materials, as long as the melting point or softening point is ≥2000℃, such as molybdenum.

[0051] In some embodiments, especially when the process temperature is high, resulting in a significant thermal expansion effect on the spray element 200 and the regulating element 500, materials with a high coefficient of thermal expansion undergo greater deformation under heat at the same temperature. Therefore, due to the high coefficient of thermal expansion of the spray element 200, the degree of deformation under the thermal expansion effect is greater than that of the regulating element 500, thus avoiding expansion stress on the spray hole 210 caused by the thermal expansion deformation of the regulating element 500. If the coefficient of thermal expansion of the regulating element 500 is greater than that of the spray element 200, the degree of deformation of the spray element 200 under the thermal expansion effect will be lower than that of the regulating element 500. Plastic deformation will occur at the connection between the regulating element 500 and the spray element 200, which may even damage the spray element 200 or the regulating element 500.

[0052] In some embodiments, existing spray devices are mostly made of stainless steel, which cannot withstand high temperatures (e.g., above 800 degrees Celsius) for a long time and requires additional water cooling components. The spray component 200 of the present invention is made of graphite or heat-resistant metal, or a heat-resistant coating is formed on the spray component 200, such as graphite plated with silicon carbide or graphite plated with tantalum carbide. No additional water cooling is required, the spray component 200 can be replaced separately, the replacement cost is low, and the maintenance cycle is long.

[0053] A plurality of spray holes 210 form a plurality of spray rings 230 that surround the spray element 200 from the inside out.

[0054] Specifically, refer to Figure 2 and Figure 3 In order to facilitate the detachable connection of the 420 isolation components and the spray components 200, an annular groove 220 is provided on the spray component 200 along the circumferential direction, and the annular groove 220 is located between adjacent spray rings 230. The annular groove 220 is used to detachably connect each isolation component 420.

[0055] The annular groove 220 is a closed structure that forms a ring around the middle of the spray element 200; the isolation device 400 is detachably installed in the annular groove 220, and each isolation element 420 is connected end to end in the annular groove 220 to form a ring.

[0056] In some specific embodiments, the annular groove 220 is circular or polygonal, and there is no limitation, as long as the annular groove 220 can separate adjacent spray rings 230.

[0057] In some specific embodiments, refer to Figure 2 The annular groove 220 is a semi-through groove, meaning that the annular groove 220 does not penetrate the spray component 200. At the same time, each isolation component 420 is located in the annular groove 220 and is snapped into the annular groove 220.

[0058] In addition to the disassembly and connection method of the isolator 420 being snapped into the annular groove 220, refer to Figure 3 , Figure 4 and Figure 5 The detachable connection between the isolation member 420 and the spray member 200 can also be that the bottom of the isolation member 420 is provided with multiple positioning members 430, and the positioning members 430 pass through the spray hole 210 so that the isolation member 420 can be detachably set on the spray member 200.

[0059] Specifically, some of the isolation components 420 are detachable positioning connectors 421 corresponding to the spray holes 210, and other isolation components 420 are detachable extension connectors 422 between adjacent positioning connectors 421; the bottom of the positioning connector 421 is provided with a positioning component 430, which is detachably provided in the corresponding spray hole 210.

[0060] In some embodiments, the isolation member 420 includes a positioning connector 421 and an extension connector 422. The positioning connector 421 is detachably disposed on the spray member 200, while the extension connector 422 is disposed on the spray member 200 and positioned between two adjacent positioning connectors 421. That is, one or more extension connectors 422 are provided between two adjacent positioning connectors 421, so that multiple isolation members 420 are connected end to end in sequence to form a ring.

[0061] In some embodiments, the positioning connector 421 is detachably disposed in the corresponding spray hole 210 to block the corresponding spray hole 210; at the same time, the extension connector 422 is located between adjacent spray rings 230, that is, the extension connector 422 does not interfere with the process of airflow passing through the spray hole 210; that is, when the process gas passes through the spray hole 210, only the spray hole 210 at the location of the positioning connector 421 is blocked, and it will not affect the effective spray area of ​​the spray ring 230; thereby improving the problem that the effective spray area of ​​the spray ring 230 is affected by the extension connector 422 blocking the spray hole 210 or part of the spray hole 210.

[0062] In some embodiments, the positioning member 430 is disposed at the bottom of the positioning connector 421. The positioning member 430 is detachably disposed behind the spray hole 210. The exposed surface of the positioning connector 421 facing the spray element 200 (excluding the positioning member 430) is in contact with the area between adjacent spray rings 230 of the spray element 200 to ensure airtightness. The detachable arrangement between the positioning member 430 and the spray hole 210 needs to ensure airtightness between them; for example, the outer diameter of the positioning member 430 should be compatible with the aperture of the spray hole 210.

[0063] In some specific embodiments, the positioning member 430 is detachably disposed on the corresponding spray hole 210 and its bottom is received inside the spray hole 210, that is, the positioning member 430 does not extend into the process cavity, so as to reduce the interference to the airflow passing through the spray hole 210.

[0064] In some specific embodiments, the extension connector 422 is attached to the spray element 200. That is, the positioning connector 421 is detachably disposed on the spray element 200, and the extension connector 422 is detachably disposed on the positioning connector 421 or an adjacent extension connector 422. This allows the extension connector 422 to be detachably disposed on the spray element 200, maximizing the use of the original structure of the spray element 200 and avoiding grooving or other secondary processing on the spray element 200. Simultaneously, it reduces the number of connection points between the isolation device 400 and the spray element 200, thereby reducing the stress generated by thermal expansion.

[0065] In some specific embodiments, the number of extension connectors 422 between two adjacent positioning connectors 421 is the same, so that the isolation device 400 forms a circular or regular polygonal ring.

[0066] In some specific embodiments, when the positioning connector 421 and the extension connector 422 form a polygonal ring, the number of extension connectors 422 between two adjacent positioning connectors 421 is different, so as to form an irregular polygonal ring.

[0067] In some specific embodiments, both isolation devices 400 are annular.

[0068] In some specific embodiments, both isolation devices 400 are polygonal rings.

[0069] In some specific embodiments, one of the two isolation devices 400 is annular and the other is polygonal annular.

[0070] In some embodiments, the positioning connector 421 has a folded structure, which includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure, or an arc-shaped structure.

[0071] In some specific embodiments, the positioning connector 421 can also be of other shapes, which are not limited here, as long as it can achieve positioning connection. The shape of the extension connector 422 is not limited, as long as it can separate the two air chambers. That is, the shape of the air chambers can be irregular. This setting can further refine the airflow adjustment of the air chambers according to process requirements. During use, the shape of the isolation device 400 can be adjusted according to process requirements.

[0072] During operation, when growing a 4-6 inch substrate, the adjustment member 500 is inserted into the spray hole 210 from above the spray member 200, so that the edge gas chamber 330 is sealed by the adjustment member 500 and no gas is introduced into the edge gas chamber 330; the middle gas chamber 320 can be sealed as needed, and the remaining spray hole 210 is used to pass clean gas; the spray hole 210 of the center gas chamber 310 is used to pass process gas to perform epitaxial growth on the corresponding substrate below.

[0073] When growing an 8-inch substrate, only the outer ring isolation device 400 is set, and the spray hole 210 is blocked as needed.

[0074] More specifically, refer to Figure 6 When growing SiC epitaxial wafers, the spray area corresponding to the epitaxial thickness data shows different thickness trends. The thickness non-uniformity in this batch is as high as 4.4%, and the thickness in the central gas chamber 320 region shows a clear trend of increasing from the inside to the outside.

[0075] Reference Figure 7 Based on the trend of the furnace, the adjustable part 500 was used to block the three rings of spray holes 210 on the outside of the middle gas chamber 320. On this basis, the outer ring growth of the epitaxial wafer was carried out. The thickness non-uniformity of this furnace was reduced to 1.4%, which is a significant improvement compared with the previous furnace.

[0076] The implementation principle of the spray device in the silicon carbide epitaxial equipment of this application embodiment is as follows: Since the isolation device 400 is detachably disposed in the diffusion cavity 300, the diffusion cavity 300 can be divided into different gas chambers by installing one or two isolation devices 400, thereby adjusting the size of the corresponding gas chambers to achieve multi-zone coupling, suitable for epitaxial growth of substrates of different sizes. Furthermore, this setting allows the use of the same spray head to achieve epitaxial growth of multiple substrates of different sizes, resulting in high compatibility. In addition, by setting the adjustment component 500, unnecessary spray holes 210 can be blocked according to the size of the substrate being grown, preventing waste of raw materials. The on / off state of the spray holes 210 can also be modulated according to the substrate thickness distribution to adjust the thickness uniformity.

[0077] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A spraying device, characterized in that, include: The cover (100) is provided with an air intake; A spray element (200) is disposed on the cover (100) and forms a diffusion cavity (300) between it and the cover (100). The air inlet is connected to the diffusion cavity (300). The spray element (200) includes a plurality of spray holes (210). The isolation device (400) includes a plurality of isolation components (420), each of the isolation components (420) being sequentially and detachably connected end to end in the diffusion cavity (300) so that the isolation device (400) divides the diffusion cavity (300) into at least two air chambers; At least one adjusting element (500) is detachably disposed at the spray hole (210) to adjust the spray range of the spray element (200).

2. The spraying device according to claim 1, characterized in that, The adjusting member (500) has a mounting part (510) and a positioning part (520). The mounting part (510) is adapted to the spray hole (210) to block the corresponding spray hole (210). The positioning part (520) is provided on the top of the mounting part (510) and abuts against the spray member (200).

3. The spraying device according to claim 2, characterized in that, The constituent material of either the spraying component (200) or the adjusting component (500) is a heat-resistant material, and / or the surface of either the spraying component (200) or the adjusting component (500) is covered with a heat-resistant coating; the coefficient of thermal expansion of the adjusting component (500) is less than or equal to the coefficient of thermal expansion of the spraying component (200).

4. The spraying device according to claim 3, characterized in that, The heat-resistant material is graphite, or a metal with a melting point or softening point of not less than 2000 degrees Celsius, and the heat-resistant coating is silicon carbide or tantalum carbide.

5. The spraying device according to claim 1, characterized in that, The isolation element (420) is detachably disposed on the spray element (200) or the cover (100).

6. The spraying device according to claim 1, characterized in that, The number of isolation devices (400) is at least 2, and they are sequentially nested from the inside to the outside to divide the diffusion cavity (300) into at least 3 air chambers.

7. The spraying device according to claim 3, characterized in that, A plurality of spray holes (210) form a plurality of spray rings (230) that surround the spray member (200) from the inside out. An annular groove (220) is provided on the spray member (200) along the circumferential direction, and the annular groove (220) is located between adjacent spray rings (230). The annular groove (220) is used for detachably connecting each of the isolation members (420).

8. The spraying device according to claim 3, characterized in that, Some of the isolation members (420) are detachable positioning plugs (421) corresponding to the spray holes (210), and the other isolation members (420) are detachable extension plugs (422) between adjacent positioning plugs (421); the bottom of the positioning plugs (421) is provided with a positioning member (430), and the positioning member (430) is detachably provided to the corresponding spray hole (210).

9. The spraying device according to claim 8, characterized in that, A plurality of spray holes (210) form a plurality of spray rings (230) that surround the spray member (200) from the inside out, and the extension connector (422) is located between adjacent spray rings (230).

10. The spraying device according to claim 8, characterized in that, The positioning connector (421) has a folded structure, which includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure, or an arc-shaped structure.

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