Tgv plating cell

Abstract

The utility model discloses a kind of TGV electroplating tank, including tank body, TGV glass fixture, swing assembly, stirring paddle, jet disc, electroplating liquid circulating mechanism, tank body is used to accommodate electroplating liquid, TGV glass fixture is set on tank body, the output end of swing assembly is connected with two groups of stirring paddle capable of linear motion on tank body, two groups of stirring paddle are respectively arranged at the two sides of TGV glass fixture, stirring paddle is all provided with jet disc, jet disc includes internal cavity and multiple jet orifices distributed on its surface, the jet direction of jet orifice is set to TGV glass fixture direction, swing assembly drives jet disc to swing in tank body by stirring paddle, the input end of electroplating liquid circulating mechanism is communicated with tank body, and output end is communicated with jet disc.The utility model is characterized in that under the jet action of jet orifice on jet disc, combined with the swing of jet disc, TGV hole can be effectively reduced after hole filling Hole cavity, improve the uniformity of electroplating.

Description

Technical Field

[0001] This utility model relates to the field of electroplating equipment technology, specifically a TGV electroplating tank. Background Technology

[0002] With the rapid development of three-dimensional heterogeneous integration technology, TGV (Through Glass Via) technology, as the core means to realize vertical interconnection of glass substrates, has shown unique advantages in the fields of 2.5D / 3D packaging, RF module integration and optoelectronic hybrid packaging.

[0003] In the TGV metallization process, the quality of copper plating directly affects the conductivity reliability and thermomechanical properties of the interconnect structure. Current technology faces a dual challenge: firstly, the high aspect ratio of microvias causes the failure of traditional diffusion mass transfer mechanisms, easily leading to plating dead zones in the central region of TGV glass vias; secondly, the vicious coupling effect of excessive deposition at the TGV orifice and insufficient filling in the central region results in plating voids in the via. Currently, while jet systems based on PCB process improvements can enhance macroscopic mass transfer, they cannot overcome the additive concentration gradient caused by the stagnant boundary layer within the microvias; and the laminar shear force generated by the wafer plating paddle agitation is insufficient to drive the directional migration of additive molecules within the deep holes, resulting in insufficient filling density and significant void defects. Utility Model Content

[0004] The technical problem to be solved by this utility model is how to reduce the voids in the hole after TGV filling.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0006] A TGV electroplating tank includes a tank body, a TGV glass clamp, a oscillating assembly, a stirring paddle, a spray plate, and an electroplating solution circulation mechanism. The tank body is used to contain the electroplating solution. The TGV glass clamp is mounted on the tank body. The output end of the oscillating assembly is connected to two sets of stirring paddles that can move linearly on the tank body. The two sets of stirring paddles are respectively mounted on both sides of the TGV glass clamp. Each stirring paddle is equipped with a spray plate, which includes an internal cavity and multiple spray holes distributed on its surface. The spray direction of the spray holes is set towards the TGV glass clamp. The oscillating assembly drives the spray plate to oscillate within the tank body through the stirring paddle. The input end of the electroplating solution circulation mechanism is connected to the tank body, and the output end is connected to the spray plate.

[0007] By driving the oscillating assembly to drive the agitator, the jet disk is driven to oscillate on the surface of the TVG glass to be electroplated, which is parallel to the TGV glass fixture in the tank. This creates a non-periodic fluid boundary layer on the surface of the TVG glass to be electroplated. The jetting action of the jet holes on the jet disk, combined with the oscillation of the jet disk, can effectively reduce the voids in the holes after TGV filling and improve the uniformity of electroplating.

[0008] Preferably, the tank includes an outer tank and an inner tank, with the inner tank disposed inside the outer tank, forming a reflux trough between the inner and outer tanks. The inner tank is provided with multiple reflux holes communicating with the reflux trough, and the TGV glass clamp and jet plate are both disposed on the inner tank.

[0009] Preferably, the inner tank is a frame structure surrounded by multiple side plates, and the reflux holes are located on the side plates.

[0010] Preferably, the top of the side plate is also provided with a wavy overflow notch.

[0011] Preferably, the oscillating assembly includes a fixed base, a drive motor, a rotating block, a fisheye connecting rod, and a fixed rod. The fixed base is fixed to the outside of the tank, the drive motor is fixed to the fixed base, the output end of the drive motor is connected to the rotating block, one end of the fisheye connecting rod is hinged to the rotating block, and the other end is hinged to the fixed rod. The fixed rod is fixedly connected to two sets of stirring paddles, and the center of the connection between the fisheye connecting rod and the rotating block is eccentrically set with respect to the center of the output end of the drive motor.

[0012] Preferably, the electroplating solution circulation mechanism includes a supply pipe, a recovery pipe, and a circulation pump. The supply pipe is connected to the spray plate, the recovery pipe is connected to the tank, the input end of the circulation pump is connected to the recovery pipe, and the output end is connected to the supply pipe.

[0013] Preferably, the liquid supply pipe is also equipped with a filter.

[0014] Preferably, the blades on the two sets of jet disks are aligned or staggered.

[0015] Preferably, a shielding plate is also provided in the tank between the jet disk and the anode.

[0016] Preferably, the thickness of the shielding plate is not less than 40 mm.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] By driving the oscillating assembly to drive the agitator, the jet disk is driven to oscillate on the surface of the TVG glass to be electroplated, which is parallel to the TGV glass fixture in the tank. This creates a non-periodic fluid boundary layer on the surface of the TVG glass to be electroplated. The jetting action of the jet holes on the jet disk, combined with the oscillation of the jet disk, can effectively reduce the voids in the holes after TGV filling and improve the uniformity of electroplating. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0020] Figure 2 This is a partial structural schematic diagram of an embodiment of the present utility model;

[0021] Figure 3This is a schematic diagram of the jet disk in an embodiment of the present invention. Detailed Implementation

[0022] To facilitate understanding of the technical solution of this utility model by those skilled in the art, the technical solution of this utility model will now be further described in conjunction with the accompanying drawings.

[0023] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0024] In this application, unless otherwise expressly specified and limited, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise expressly and specifically limited.

[0025] See Figures 1 to 3 This embodiment discloses a TGV electroplating tank, including a tank body 1, a TGV glass clamp 2, a swing assembly 3, a stirring paddle 4, a jet plate 5, an electroplating solution circulation mechanism 6, an anode 7, and a shielding plate 8.

[0026] The tank 1 is used to contain the electroplating solution. The tank 1 includes an inner tank 11 and an outer tank 12. The inner tank 11 is disposed inside the outer tank 12. A return channel 101 is formed between the inner tank 11 and the outer tank 12. The top opening height of the inner tank 11 is lower than the top opening height of the outer tank 12. The inner tank 11 is a frame structure surrounded by multiple side plates. Multiple return holes 111 communicating with the return channel 101 are provided on the side plates.

[0027] Furthermore, the top of the side plate is provided with a wavy overflow notch 112 for overflowing the electroplating solution in the inner tank 11 into the return tank 101.

[0028] The TGV glass clamp 2 is mounted on the inner tank 11 and is used to install the TVG glass to be electroplated.

[0029] The output end of the oscillating component 3 is connected to two sets of stirring paddles 4 that can move linearly on the tank 1. The two sets of stirring paddles 4 are respectively set on both sides of the TGV glass clamp 2. The oscillating component 3 includes a fixed base 31, a drive motor 32, a rotating block 33, a fisheye connecting rod 34, and a fixed rod 35. The fixed base 31 is fixed on the outside of the outer tank 12. The drive motor 32 is fixed on the fixed base 31. The output end of the drive motor 32 is connected to the rotating block 33. One end of the fisheye connecting rod 34 is hinged to the rotating block 33, and the other end is hinged to the fixed rod 35. The fixed rod 35 is fixedly connected to the two sets of stirring paddles 4. The center of the connection between the fisheye connecting rod 34 and the rotating block 33 is eccentrically set with the center of the output end of the drive motor 32, so that the fisheye connecting rod 34 can swing with the rotation of the rotating block 33, thereby driving the two sets of stirring paddles 4 to swing on the tank 1.

[0030] Each agitator 4 is equipped with a jet plate 5, which is located inside the inner tank 11. The jet plate 5 includes an internal cavity (not shown in the figure) and multiple jet holes 51 distributed on its surface. The jet direction of the jet holes 51 is set towards the TGV glass fixture 2. The driving swing assembly 3 drives the jet plate 5 to swing on the surface of the TVG glass to be electroplated on the inner tank 11 parallel to the TGV glass fixture 2 through the agitator 4. This forms a non-periodic fluid boundary layer on the surface of the TVG glass to be electroplated. Under the jetting action of the jet holes 51 on the jet plate 5, combined with the swing of the jet plate 5, the voids in the holes after TGV filling can be effectively reduced, and the uniformity of electroplating can be improved.

[0031] The blades on the two sets of jet disks 5 can be aligned or staggered. Specifically, the blades on the two sets of jet disks 5 can be completely aligned or staggered, which can be adjusted according to different products. If the product is very thin, the blades on the two jet disks 5 can be completely aligned; if the product has a high aspect ratio, the blades on the two jet disks 5 can be staggered to increase the pressure difference of the chemical flow in the orifice. To further increase the pressure difference of the chemical flow in the orifice, the two jet disks 5 can also be designed with alternating jets, allowing the jets on both sides to alternate, and synchronized with a programmable power supply to achieve alternating deposition of metallic copper.

[0032] Furthermore, the jet holes 51 are arranged in a crisscross pattern to achieve defect-free filling of the electroplated glass.

[0033] The input end of the electroplating solution circulation mechanism 6 is connected to the return tank 101, and the output end is connected to the spray plate 5. The electroplating solution circulation mechanism 6 includes a supply pipe 61, a recovery pipe 62, a circulation pump 63, and a filter 64. One end of the supply pipe 61 is connected to the spray plate 5, and the other end is connected to the output end of the circulation pump 63. One end of the recovery pipe 62 is connected to the return tank 101, and the other end is connected to the input end of the circulation pump 63. A filter 64 is also provided on the supply pipe 61 for filtering the electroplating solution.

[0034] An anode 7 is also provided inside the inner tank 11.

[0035] A shielding plate 8 is also provided in the inner tank 11 between the spray plate 5 and the anode 7. The thickness of the shielding plate 8 is not less than 40mm, which effectively improves the uniformity of electroplating.

[0036] The working principle of this embodiment is as follows: The TGV glass to be electroplated is loaded on the TGV glass fixture 2 and inserted between two sets of spray disks 5 as the cathode for electroplating; the driving swing assembly 3 drives the spray disks 5 to swing parallel to the surface of the TVG glass to be electroplated on the inner tank 11 via the stirring paddle 4. At the same time, the circulation pump 63 is started to draw electroplating solution from the recovery tank 101, pass it through the filter 64 and enter the spray disks 5, and spray it out from the spray holes 51 on the spray disks 5, impacting the surface of the TGV glass to be electroplated. Part of the electroplating solution in the inner tank 11 flows back to the recovery tank 101 through the return hole 111, and the other part flows back to the recovery tank 101 through the overflow notch 112 at the top of the side plate. During electroplating, the TGV glass to be electroplated serves as the cathode for electroplating. When connected to the power supply and anode 7, a galvanic cell is formed. Copper ions are deposited at the anode, and metallic copper is deposited at the cathode.

[0037] In summary, in this embodiment, the driving swing assembly 3 drives the stirring paddle 4 to drive the jet disk 5 to swing on the TVG glass surface to be electroplated on the inner tank 11 parallel to the TGV glass fixture 2, so that a non-periodic fluid boundary layer is formed on the surface of the TVG glass to be electroplated. Under the jetting action of the jet holes 51 on the jet disk 5, combined with the swinging of the jet disk 5, the voids in the holes after TGV filling can be effectively reduced, and the uniformity of electroplating can be improved.

[0038] In addition, by arranging the jet holes 51 in a cross-shaped manner, defect-free filling of electroplated glass can be achieved.

[0039] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this invention, and no reference numerals in the claims should be construed as limiting the scope of the claims.

[0040] The above-described embodiments are merely examples of implementation methods of the utility model. The scope of protection of this utility model is not limited to the above-described embodiments. For those skilled in the art, several modifications and improvements can be made without departing from the concept of this utility model, and these all fall within the scope of protection of this utility model.

Claims

1. A TGV electroplating tank, characterized in that: The system includes a tank, a TGV glass fixture, a oscillating assembly, a stirring paddle, a spray plate, and an electroplating solution circulation mechanism. The tank contains the electroplating solution. The TGV glass fixture is inserted into the tank during electroplating. The output end of the oscillating assembly is connected to two sets of stirring paddles that can move linearly on the tank. The two sets of stirring paddles are respectively located on both sides of the TGV glass fixture. Each stirring paddle is equipped with a spray plate, which includes an internal cavity and multiple spray holes distributed on its surface. The spray direction of the spray holes is set towards the TGV glass fixture. The oscillating assembly drives the spray plate to oscillate within the tank through the stirring paddles. The input end of the electroplating solution circulation mechanism is connected to the tank, and the output end is connected to the spray plate.

2. The TGV electroplating tank according to claim 1, characterized in that: The tank includes an outer tank and an inner tank. The inner tank is located inside the outer tank, and a reflux channel is formed between the inner and outer tanks. The inner tank has multiple reflux holes that communicate with the reflux channel. The TGV glass clamp and the jet plate are both located on the inner tank.

3. The TGV electroplating tank according to claim 2, characterized in that: The inner tank is a U-shaped frame structure formed by four side plates. The reflux holes are set on the side plates on both sides perpendicular to the TGV glass clamp. Each side plate has two rows of reflux holes, and the reflux holes are set close to the two ends of the TGV glass clamp.

4. The TGV electroplating tank according to claim 3, characterized in that: The top of the four side panels also features wavy overflow notches.

5. A TGV electroplating tank according to claim 1, characterized in that: The oscillating assembly includes a fixed base, a drive motor, a rotating block, a fisheye connecting rod, and a fixed rod. The fixed base is fixed to the outside of the tank, and the drive motor is fixed to the fixed base. The output end of the drive motor is connected to the rotating block. One end of the fisheye connecting rod is hinged to the rotating block, and the other end is hinged to the fixed rod. The fixed rod is fixedly connected to two sets of stirring paddles. The center of the connection between the fisheye connecting rod and the rotating block is eccentrically set to the center of the output end of the drive motor.

6. A TGV electroplating tank according to claim 1, characterized in that: The electroplating solution circulation mechanism includes a supply pipe, a recovery pipe, and a circulation pump. The supply pipe is connected to the spray plate, the recovery pipe is connected to the tank, the input end of the circulation pump is connected to the recovery pipe, and the output end is connected to the supply pipe.

7. A TGV electroplating tank according to claim 6, characterized in that: A filter is also installed on the liquid supply line.

8. A TGV electroplating tank according to claim 1, characterized in that: The blades on the two sets of jet disks are aligned or staggered.

9. A TGV electroplating tank according to claim 1, characterized in that: A shielding plate is also installed in the tank between the jet plate and the anode.

10. A TGV electroplating tank according to claim 9, characterized in that: The thickness of the shielding plate shall not be less than 40mm.

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