Graphite heat field carrier rod

CN224605141UActive Publication Date: 2026-08-07ZHEJIANG NIPPON TECHNO-CARBON CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
ZHEJIANG NIPPON TECHNO-CARBON CO LTD
Filing Date
2025-09-12
Publication Date
2026-08-07

AI Technical Summary

Technical Problem

在石墨热场运作当中,需要通过转动托杆来调节晶体的生长方向,而固定环与托轴位螺纹连接,在坩埚重力作用下托轴逆螺纹转动,很容易松开两者将的连接,导致托盘以及上面的坩埚发生倾斜甚至掉落

Benefits of technology

顶托圆心位置的定位延伸柱可以准确的插接于顶托插槽中,并且有紧固插销进行加固,不仅能巩固顶托的稳定性,而且可以确保顶托的圆心处在支撑轴的轴心位置。同时,定位延伸柱还带有与顶托插槽配合的多边形结构,使支撑柱在转动时能带动顶托一起旋转。

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to graphite thermal field technical field, concretely relates to a kind of graphite thermal field support rod, including support column and jacking, the jacking slot is opened in the axial on the support column end face, the shaft center of the jacking is vertically provided with positioning extension column, the positioning extension column is cooperatively inserted in the jacking slot and with the sidewall of the jacking slot circumferential abut, fastening bolt is inserted in the shaft center of the positioning extension column, so that the positioning extension column is diametrically abutted on the sidewall of the jacking slot.The positioning extension column of jacking center position can be accurately inserted in jacking slot, and there is fastening bolt to reinforce, not only can consolidate the stability of jacking, but also can ensure that the center of jacking is at the shaft center position of support shaft.Meanwhile, the positioning extension column is also provided with polygonal structure matched with jacking slot, so that support column can drive jacking to rotate when rotating.
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Description

Technical Field

[0001] This utility model belongs to the field of graphite thermal field technology, specifically relating to a graphite thermal field support rod. Background Technology

[0002] Graphite thermal fields are an important component in the manufacture of single-crystal silicon. Their function is to convert electrical energy into heat energy to melt the silicon material and maintain the single crystal growth at a specific temperature. Graphite thermal fields are typically made of graphite, which possesses high thermal conductivity, high heat resistance, and high chemical stability, making them suitable for use in high-temperature, high-vacuum environments.

[0003] A threaded graphite support rod disclosed in patent CN222846886U includes: a support shaft, the bottom end of which is connected to a driving device for rotating or lifting the support shaft; a tray, which is disposed at the top of the support shaft and has a connecting hole in the middle; and an external thread, which is disposed at the top of the support shaft and is threadedly connected to the connecting hole. This design facilitates the separation of the tray from the support shaft, thus reducing transportation costs.

[0004] In the above scheme, each arc plate is circumferentially inserted into a fixing ring, which is then threaded to the end of the support shaft. During the operation of the graphite hot field, the growth direction of the crystal needs to be adjusted by rotating the support rod. However, the fixing ring and the support shaft are threaded together. Under the weight of the crucible, the support shaft rotates against the thread, which can easily loosen the connection between the two, causing the tray and the crucible on it to tilt or even fall. Summary of the Invention

[0005] The purpose of this invention is to address the aforementioned problems by providing a graphite thermal field support rod that can solve the technical issues described above.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A graphite thermal field support rod includes a support column and a top support. The support column has an axially formed top support slot on its end face. A positioning extension column is vertically arranged at the axis of the top support. The positioning extension column is inserted into the top support slot and circumferentially abuts against the side wall of the top support slot. A fastening pin is inserted at the axis of the positioning extension column so that the positioning extension column radially abuts against the side wall of the top support slot.

[0007] In the graphite thermal field support rod, the top support slot, which is a polygonal column with a hollowed-out shape, is inserted into the positioning extension column, and the top support is concentrically abutted against the end face of the top support slot side of the support column.

[0008] In the graphite thermal field support rod, a reinforcing stepped structure is provided at one end of the support column top support slot along the circumference, and an annular top support reinforcing rib is axially sleeved on the reinforcing stepped structure, with one axial end face of the top support abutting against at least a portion of the top support.

[0009] In the graphite thermal field support rod, the top support reinforcing rib and the top support abut against one end face flush with the slot end face of the top support slot, and the other end face of the top support reinforcing rib abuts against the axial stepped surface of the reinforcing stepped structure.

[0010] In the graphite thermal field support rod, the inner ring of the top support reinforcing rib mates with the radial surface of the reinforcing stepped structure, radially constraining the abutment of the positioning extension column.

[0011] In the graphite thermal field support rod, a fastening insertion hole is provided at the center of the top support, which axially penetrates the positioning extension column. The fastening pin is interference-fitted into the fastening insertion hole, so that the positioning extension column expands outward and radially abuts against the side wall of the top support slot.

[0012] In the graphite thermal field support rod, the inner radial direction of the fastening hole gradually decreases away from the top support, and one end of the fastening pin is provided with a tapered end that matches the reduced inner diameter of the fastening hole.

[0013] In the graphite thermal field support rod, the top support is composed of several fan-shaped split trays, and a split extension column that is assembled into the positioning extension column is vertically arranged at the center of the split tray.

[0014] In the graphite thermal field support rod, the support column includes a bottom column and a connecting column connected axially. One end of the connecting column is provided with the top support, and the other end of the connecting column is connected to the bottom column through a male-female plug-in structure that can restrict circumferential rotation.

[0015] In the graphite thermal field support rod, the male and female plug-in structure includes a positioning shaft provided at the male plug-in end and a positioning groove at the female plug-in end, and a transmission protrusion provided on the positioning shaft and abutting circumferentially against the inner wall of the positioning groove.

[0016] The advantages of this utility model are: The positioning extension post at the center of the top support can be accurately inserted into the top support slot and is reinforced with a fastening pin. This not only strengthens the stability of the top support but also ensures that the center of the top support is located at the axis of the support shaft. Simultaneously, the positioning extension post also features a polygonal structure that mates with the top support slot, allowing the support post to rotate along with the top support when it rotates. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0018] Figure 2 This is a schematic diagram of the top support slot structure of this utility model.

[0019] Figure 3 This is a schematic diagram of the top support structure of this utility model.

[0020] Figure 4 This is a schematic diagram of the male and female insertion structure of the extension column of this utility model.

[0021] In the diagram, there are: support column 1, top support slot 11, reinforcing step structure 12, bottom column 13, connecting column 14, top support 2, positioning extension column 21, fastening pin 22, fastening insertion hole 23, split tray 24, split extension column 25, top support reinforcing rib 3, male and female plug-in structure 4, positioning shaft 41, positioning groove 42, and transmission protrusion 43. Detailed Implementation

[0022] The following are specific embodiments of the utility model, which are described in conjunction with the accompanying drawings. However, the utility model is not limited to these embodiments.

[0023] like Figures 1-4 As shown, the graphite thermal field support rod includes a support column 1 and a top support 2. The support column 1 has an axially formed top support slot 11 on its end face. The top support 2 has a vertically arranged positioning extension column 21 at its axis. The positioning extension column 21 is inserted into the top support slot 11 and abuts against the side wall of the top support slot 11 circumferentially. A fastening pin 22 is inserted at the axis of the positioning extension column 21 so that the positioning extension column 21 abuts against the side wall of the top support slot 11 radially.

[0024] The positioning extension post at the center of the top support can be accurately inserted into the top support slot and is reinforced with a fastening pin. This not only strengthens the stability of the top support but also ensures that the center of the top support is located at the axis of the support shaft. Simultaneously, the positioning extension post also features a polygonal structure that mates with the top support slot, allowing the support post to rotate along with the top support when it rotates.

[0025] In this embodiment, the top support slot 11, which is a polygonal column with a hollowed-out shape, is inserted into the positioning extension column 21, and the top support 2 is concentrically abutted against the end face of the top support slot 11 on the side of the support column 1.

[0026] The slot can be designed as square or hexagonal to avoid rotation and enhance torsional resistance, preventing the top support from rotating and shifting relative to the support shaft, and improving the follow-up performance of the top support when the support shaft rotates. The top support and the end face of the support column form end face contact, sharing the support of the cantilevered part of the top support's outer edge and improving stress stability.

[0027] In this embodiment, a reinforcing stepped structure 12 is provided at one end of the top support slot 11 of the support column 1 along the circumference. An annular top support reinforcing rib 3 is axially sleeved on the reinforcing stepped structure 12. At least a portion of the axial end face of the top support rib 3 abuts against the top support 2.

[0028] That is, a column with a smaller diameter is processed on the end face of the support column. The difference in diameter between the small column and the original column forms a ring-shaped stepped structure. The top support reinforcing rib is fitted on the small column. The larger supporting surface of the top support reinforcing rib supports more of the suspended part of the top support and reduces the axial pressure on the top support.

[0029] In this embodiment, the top support reinforcing rib 3 and the top support 2 abut against one end face flush with the slot end face of the top support slot 11, and the other end face of the top support reinforcing rib 3 abuts against the axial stepped surface of the reinforcing stepped structure 12.

[0030] The upper end face of the top support reinforcing rib is flush with the groove of the support slot, and the two together are supported by the lower end face of the top support. At the same time, it can also limit the axial position of the top support reinforcing rib in the small column, ensuring that it will not move.

[0031] In this embodiment, the inner ring of the top support reinforcing rib 3 mates with the radial surface of the reinforcing stepped structure 12, radially constraining the abutment of the positioning extension column 21.

[0032] The inner ring of the reinforcing rib is tightened and fits against the stepped surface, which not only improves its own stability, but also enhances the structural strength of the top support slot wall, making the positioning extension column fit more tightly with the top support slot, thereby strengthening the stability and follow-up performance of the top support.

[0033] In this embodiment, a fastening insertion hole 23 is provided at the center of the top support 2, through which the positioning extension post 21 is axially inserted. The fastening pin 22 is interference-fitted into the fastening insertion hole 23, so that the positioning extension post 21 expands outward and radially abuts against the side wall of the top support slot 11.

[0034] After the fastening pin is inserted, it generates radial tension, which interacts with the outer top support reinforcing rib to provide strong locking and prevent the top support from loosening.

[0035] In this embodiment, the inner radial direction of the fastening hole 23 gradually decreases away from the top support 2, and one end of the fastening pin 22 is provided with a tapered end that matches the reduced inner diameter of the fastening hole 23.

[0036] The insertion hole is a tapered hole with a taper. After insertion, it automatically wedges and forms a self-locking mechanism, making the pin installation more secure. It has an automatic locking function to prevent loosening due to vibration or thermal expansion and contraction.

[0037] In this embodiment, the top support 2 is composed of several fan-shaped split trays 24, and a split extension column 25, which is assembled into a positioning extension column 21, is vertically arranged at the center of the split tray 24.

[0038] The modular assembly of the top support facilitates manufacturing and replacement, and also reduces the cost of partial component replacement. The modular extension columns are combined to form an integral positioning column, which makes the fastening pin have better extensibility in the fastening hole when it is inserted, making it easier for personnel to repeatedly disassemble and assemble.

[0039] In this embodiment, the support column 1 includes a bottom column 13 and a connecting column 14 that are axially connected. One end of the connecting column 14 is provided with a top support 2, and the other end of the connecting column 14 is connected to the bottom column 13 through a male-female plug-in structure 4 that can restrict circumferential rotation.

[0040] The connecting column and the bottom column are connected by a convex-concave plug-in structure. The segmented support column is easier to install in the insulation shell. Usually, the bottom column has a female plug-in end on one side and the connecting column has a plug-in end on the other side. The connection is also equipped with a fitting structure to restrict circumferential rotation, so that the connecting column can rotate synchronously with the bottom column to transfer kinetic energy.

[0041] In addition, a connecting extension post can be added between the base post and the connecting post, with a female plug-in end and a male plug-in end respectively at both ends of the extension post.

[0042] In this embodiment, the male and female plug-in structure 4 includes the cooperation between the positioning shaft 41 at the male plug-in end and the positioning groove 42 at the female plug-in end, and the circumferential abutment between the transmission protrusion 43 on the positioning shaft 41 and the inner wall of the positioning groove 42.

[0043] Both the positioning shaft and the positioning groove are located at the center of the column, and their interlocking ensures the concentricity of the two columns. An additional polygonal slot is made near the opening of the positioning groove, which mates with the transmission protrusion 43 on the positioning shaft 41 to form a circumferential abutment, thereby establishing a circumferential transmission connection.

[0044] The positioning shaft and positioning groove are equipped with multiple stepped structures to make the insertion of the bottom column and connecting column more precise.

[0045] The specific embodiments described herein are merely illustrative examples illustrating the spirit of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of this utility model or exceeding the scope defined by the appended claims.

Claims

1. A graphite thermal field support rod, comprising a support column (1) and a top support (2), characterized in that, The support column (1) has an axially formed top support slot (11) on its end face. The top support (2) has a vertically arranged positioning extension column (21) at its axis. The positioning extension column (21) is inserted into the top support slot (11) and circumferentially abuts against the side wall of the top support slot (11). A fastening pin (22) is inserted at the axis of the positioning extension column (21) so that the positioning extension column (21) abuts against the side wall of the top support slot (11) radially.

2. The graphite thermal field support rod according to claim 1, characterized in that, The top support slot (11), which is a polygonal column with a hollowed-out shape, is inserted into the positioning extension column (21), and the top support (2) is concentrically abutted against the end face of the top support slot (11) of the support column (1).

3. The graphite thermal field support rod according to claim 1, characterized in that, The support column (1) has a reinforced stepped structure (12) with a circumferential opening at one end of the top support slot (11). The reinforced stepped structure (12) is axially fitted with an annular top support reinforcing rib (3). At least a portion of the axial end face of the top support (2) abuts against the top support (2).

4. The graphite thermal field support rod according to claim 3, characterized in that, The top support reinforcing rib (3) and the top support (2) abut against one end face flush with the slot end face of the top support slot (11), and the other end face of the top support reinforcing rib (3) abuts against the axial stepped surface of the reinforcing stepped structure (12).

5. The graphite thermal field support rod according to claim 3, characterized in that, The inner ring of the top support reinforcing rib (3) mates with the radial surface of the reinforcing stepped structure (12), radially constraining the abutment of the positioning extension column (21).

6. The graphite thermal field support rod according to claim 1, characterized in that, The top support (2) has a fastening hole (23) that axially penetrates the positioning extension post (21) at its center. The fastening pin (22) is interference-fitted into the fastening hole (23), so that the positioning extension post (21) expands outward and radially abuts against the side wall of the top support slot (11).

7. The graphite thermal field support rod according to claim 6, characterized in that, The inner radial diameter of the fastening hole (23) gradually decreases away from the top support (2), and one end of the fastening pin (22) is provided with a tapered end that matches the reduced inner diameter of the fastening hole (23).

8. The graphite thermal field support rod according to claim 6, characterized in that, The top support (2) is composed of several fan-shaped split trays (24), and a split extension column (25) that is assembled into the positioning extension column (21) is vertically arranged at the center of the split tray (24).

9. The graphite thermal field support rod according to claim 1, characterized in that, The support column (1) includes a bottom column (13) and a connecting column (14) connected axially. One end of the connecting column (14) is provided with the top support (2), and the other end of the connecting column (14) is connected to the bottom column (13) through a male-female plug-in structure (4) that can restrict circumferential rotation.

10. The graphite thermal field support rod according to claim 9, characterized in that, The male-female plug-in structure (4) includes a positioning shaft (41) provided at the male plug end and a positioning groove (42) at the female plug end, and a transmission protrusion (43) provided on the positioning shaft (41) and a circumferential abutment against the inner wall of the positioning groove (42).