Quartz dewar with lug

Abstract

The utility model relates to a vacuum tube sealing technology field especially relates to a take ear quartz dewar tube, including the quartz tube and ear quartz pipe cap for indium phosphide single crystal preparation, the polycrystal material of preparation single crystal is placed in the crucible, and the whole crucible is placed in the quartz tube and is tightly nested. The front end of the crucible and the quartz tube all has a sharp little tube, and the single crystal seed is placed in it, which is used for guiding the crystal. The utility model realizes the installation pipe cap ear on the quartz dewar tube cover, provides the clear snatch point, so that the operating personnel can easily hold the pipe cap ear with the tool or hand, and the quartz dewar tube is conveniently put into and taken out from the single crystal furnace hearth. The most critical is that compared with the previous tube sealing mode, the tube sealing method of the application can effectively increase the space in the quartz tube, increase the built-in crucible by forty to sixty percent of the length, so that the production capacity of each furnace increases 20-40 wafer, greatly increases its economic benefit, improves the overall production capacity.

Description

Technical Field

[0001] This utility model relates to the field of vacuum tube sealing technology, and in particular to a quartz dewar tube with lugs. Background Technology

[0002] High-quality indium phosphide (InP) single crystals are important semiconductor materials, possessing excellent properties such as high electron mobility, high saturated electron drift velocity, suitable emission wavelength for low-loss fiber optic communication, strong radiation resistance, good thermal conductivity, high photoelectric conversion efficiency, and a wide bandgap. They have broad application prospects in optoelectronics, microwave technology, and solar power technology. Quartz Dewars are high-vacuum devices used in special experimental environments, especially for preparing semiconductor single crystal materials such as gallium arsenide and indium phosphide. They are typically made of high-purity quartz glass and have good heat resistance and shape retention properties. They are essential equipment for the preparation of some semiconductor single crystals. The design and use of quartz Dewars require consideration of specific requirements such as heat resistance and insulation performance.

[0003] Existing quartz Dewar tube equipment is limited by the small-size vertical temperature gradient (VGF) single crystal furnace, which restricts the size of the quartz Dewar tube and the internal crucible used for single crystal preparation. For the preparation of large-size, high-quality semiconductor single crystal materials, various preparation techniques and processes require significant improvements and adjustments, hindering efficient large-scale production. Furthermore, the temperature control and arrangement of the heating wires in the single crystal furnace directly affect the size and performance of the quartz Dewar tube and crucible, greatly increasing the difficulty of semiconductor single crystal preparation. Utility Model Content

[0004] In order to overcome the limitations of existing quartz Dewar tubes due to the structure and heating system of small-sized VGF single crystal furnaces, and to solve the above-mentioned problems in order to prepare large-sized, high-quality indium phosphide single crystals, it is necessary to improve and design quartz Dewar tubes under various complex preparation process requirements to meet the needs of efficient, high-quality, and large-scale production. This utility model provides a quartz Dewar tube with lugs.

[0005] The technical solution is as follows: A quartz Dewar tube with lugs, comprising a quartz tube, a quartz tube cap with lugs, and a welding method for the lug cap to the quartz tube; the quartz tube and the PBN crucible placed inside it have the same shape, the crucible is tightly placed inside the quartz tube, the crucible is used to fill the materials and additives required for single crystal preparation, and both the crucible and the quartz tube have a thin tube at the front end for filling single crystal seeds for crystal introduction during the single crystal preparation process. Additives and polycrystalline materials are filled into the crucible in a certain order, and the lug cap is inserted into the port of the quartz tube, ensuring that the height of the lug does not exceed the horizontal plane of the quartz tube port. After evacuating the quartz tube to a high vacuum, the quartz tube cap and the quartz tube are welded together using oxyhydrogen welding to form a quartz Dewar tube. The entire quartz Dewar tube is then lifted into the single crystal furnace by the lugs, sealed, and the single crystal preparation process is started.

[0006] Furthermore, the diameter of the lug-type quartz tube cap is slightly smaller than the diameter of the quartz tube. The sealing method involves inserting the lug-type quartz tube cap into the end of the quartz tube, ensuring that the height of the lug does not exceed the horizontal plane of the quartz tube opening.

[0007] Furthermore, PBN crucibles are containers used to prepare single crystals and have the same shape as quartz tubes. They all have a small, thin tube at the front end for placing single crystal seeds to act as crystal guides.

[0008] Furthermore, the single crystal seed is first placed into the small thin tube of the crucible, and then the relevant additives and polycrystalline materials are put into the crucible in sequence. The crucible is then placed into the quartz tube, and the crucible is perfectly nested inside the quartz tube, forming a tight nest.

[0009] Furthermore, the lug-type quartz tube cap proposed in this scheme is inserted into the port of the quartz tube, with the cap opening facing inward and the lug facing outward. A vacuuming sleeve is then installed, and vacuuming begins until the vacuum level reaches 5 × 10⁻⁶. -5 Pa.

[0010] Furthermore, after the quartz Dewar tube reaches the required vacuum level, the eared cap is fused to the quartz tube using oxyhydrogen welding to form a quartz Dewar tube, which is then placed in a single crystal furnace to start the single crystal preparation process.

[0011] Furthermore, the tube cap lug is welded to the quartz Dewar tube cap via a connector.

[0012] Furthermore, the tube cap lugs are welded to the quartz tube cap, and their load-bearing capacity can reach 15-20 kg or more.

[0013] Furthermore, compared with the previous quartz Dewar tubes and sealing methods, this solution has made substantial improvements. Not only can the quartz Dewar tube be easily lifted or placed in the single crystal furnace through the tube cap lug, but the length of the crucible and the space inside the quartz tube have also been greatly increased.

[0014] The beneficial effects are as follows: Firstly, by installing a cap lug on the quartz Dewar tube, a clear gripping point is provided, allowing operators to easily hold the lug with tools or their hands, facilitating the removal or placement of the quartz Dewar tube from or into the single-crystal furnace. Secondly, the increased internal space of the quartz tube prevents excessive internal red phosphorus vapor pressure and increases the crucible length by 40% to 60%, resulting in an additional 20-50 wafers produced per single-crystal rod preparation, significantly increasing economic efficiency and meeting the demands of large-scale production of large-size, high-quality indium phosphide single crystal rods, thus improving overall production capacity. Thirdly, the combination of the crucible and the quartz Dewar tube body for adjusting the temperature gradient in the single-crystal furnace enhances the control of temperature uniformity and temperature gradient within the quartz Dewar tube, improving the yield and quality of indium phosphide single crystal rod products. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the lug-type quartz Dewar tube, tube cap, and sealing method of this utility model.

[0016] Figure 2 This is a three-dimensional structural diagram for comparison with a previous type of quartz dewar tube without a cap, tube cap, and sealing method.

[0017] In the attached diagram, the following are the reference numerals: 1. Single crystal seed placement tube; 2. Crucible; 3. Quartz Dewar tube body; 4. Sealing area between quartz tube and cap; 5. Quartz Dewar tube cap; 6. Cap lug. Detailed Implementation

[0018] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0019] like Figure 1 As shown, a quartz Dewar tube with lugs includes a single crystal placement tube 1, a crucible 2, a quartz tube 3, a tube cap 5, and lugs 6. The crucible 2 is tightly fitted inside the quartz tube 3. The single crystal seed for crystal attraction is placed in the tube 1 of the crucible. Additives and indium phosphide polycrystalline material are sequentially filled into the crucible 2. The quartz tube cap 5 is inserted into the quartz tube from the positive direction at the end of the quartz tube, ensuring that the height of the lugs 6 does not exceed the horizontal plane of the end of the quartz tube 3. After installing a vacuum device at the end of the quartz tube, a vacuum is evacuated from the quartz tube. When the vacuum level inside the quartz tube reaches 5 × 10⁻⁶, the vacuum is evacuated. -5 At Pa, an oxyhydrogen welding torch is used to fuse the quartz tube cap and the quartz tube together to form a quartz Dewar tube. Placing the quartz Dewar tube into a single crystal furnace can initiate the preparation of indium phosphide single crystals. The various improvements in this scheme can ensure the uniform distribution and full melting of raw materials, providing a good foundation for the growth of high-quality single crystal rods.

[0020] Please see Figure 2This is a schematic diagram of a quartz Dewar tube and sealing scheme for 4-inch and smaller VGF single crystal furnaces used by most domestic and foreign companies. 1 is a small, thin tube at the front end of the crucible and quartz tube, used to place the single crystal seed for crystal attraction. 2 is a PBN crucible tightly fitted inside the quartz tube; the crucible and quartz tube have the same shape. The biggest difference from this design is that the quartz tube cap 5 does not have lugs, and the cap is inserted into the quartz tube with its opening facing outwards, leaving an 8-10cm distance between the edge of the cap and the end of the quartz tube. This is mainly to ensure that the welding area 4 between the cap and the quartz tube maintains a certain distance from the tube opening. Clearly, this type of quartz Dewar tube, lacking lugs, is not suitable for gripping and lifting. Secondly, because the sealing method between the cap and the quartz tube occupies most of the space in the quartz tube, the length of the built-in crucible is greatly limited, causing many of the problems mentioned above.

[0021] This solution is a quartz Dewar tube and sealing scheme designed for the actual production of large-size indium phosphide single crystals. The wall thickness of the quartz tube increases with its size, making the sealing between the tube and cap more difficult. This solution is suitable for single crystal furnaces with a five-stage temperature-controlled electric heating system, ensuring the matching of the quartz Dewar tube with the five heating temperature zones, facilitating temperature gradient adjustment and ensuring temperature field uniformity. The use of cap lugs 6 on the quartz Dewar tube cap 5 provides clear gripping points, allowing operators to easily hold the lugs 6 with tools or their hands, facilitating the insertion and removal of the quartz Dewar tube from the furnace chamber. Furthermore, increasing the length of the crucible 2 by 40% to 60% increases the production capacity by 20-30 wafers per single crystal rod production, significantly improving economic efficiency and meeting the needs of mass production of large-size, high-quality indium phosphide single crystal rods.

[0022] in, Figure 1 It is a quartz dewar tube with lugs, a cap, and a fusion sealing method.

[0023] Among them, 1 is the small thin tube at the front end of the crucible and quartz tube, which contains indium phosphide single crystal seeds for crystal introduction in single crystal preparation;

[0024] 2 is a PBN crucible, which is shaped like a quartz tube. Its size is exactly the same as the quartz tube to achieve a tight fit. It has a small thin tube section, a shoulder section and a straight section. L1 is the total length of the PBN crucible.

[0025] 3 represents the quartz tube, which also includes three parts: a small thin tube section, a shoulder section, and a straight section. L2 represents the total length of the quartz tube.

[0026] 4 is the area where the quartz tube cap and the quartz tube are fused together by oxyhydrogen welding, with a width of 3-4 cm;

[0027] 5 is the quartz tube cap. The welding method is to place the lug-type quartz tube cap upright into the quartz tube, with the height of the lug not exceeding the horizontal plane of the quartz tube end. Then, after the quartz tube is evacuated, it is fused with the quartz tube cap.

[0028] Figure 2 It is a quartz dewar tube without a cap, a tube cap, and a fusion sealing method.

[0029] Among them, 1 is the small thin tube at the front end of the crucible and quartz tube, which contains indium phosphide single crystal seeds for crystal introduction in single crystal preparation;

[0030] 2 is a PBN crucible, which is shaped like a quartz tube. Its size is exactly the same as the quartz tube to achieve a tight fit. It has a small thin tube section, a shoulder section and a straight section. L1 is the total length of the PBN crucible.

[0031] 3 represents the quartz tube, which also includes three parts: a small thin tube section, a shoulder section, and a straight section. L2 represents the total length of the quartz tube.

[0032] 4 is the area where the quartz tube cap and the quartz tube are fused together by oxyhydrogen welding, with a width of 3-4 cm;

[0033] 5 is the quartz tube cap, which is welded by inverting the quartz tube cap into the quartz tube and then fusion sealing it with the quartz tube.

[0034] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A quartz dewar tube with lugs, characterized in that, The quartz tube includes a small tube at the front end and a quartz tube cap with an ear (5) for sealing. The quartz tube and the internally nested crucible both have this small tube (1), in which a single crystal seed is placed for crystal introduction in single crystal preparation. A PBN crucible (2) is placed inside the quartz tube and nested with the quartz tube (3). The crucible and the quartz tube have the same shape and are used to fill the single crystal seed, mixed dopants and indium phosphide polycrystalline material. A quartz tube cap with an ear (5) is built into the end of the quartz tube (3). The quartz tube cap (5) has a cap ear (6). After the quartz tube cap and the quartz tube are evacuated to a high vacuum, they are sealed together by hydrogen-oxygen welding to form a sealing area (4) to form a quartz Dewar tube.

2. The quartz dewar tube with lugs according to claim 1, characterized in that, The quartz tube (3) and the crucible (2) have the same shape, and both have a small tube (1) at the front end. A single crystal seed is placed inside the crucible tube for crystal seeding in the preparation of indium phosphide single crystal.

3. A quartz dewar tube with lugs according to claim 2, characterized in that, The crucible (2) used for preparing single crystals is tightly enclosed in a quartz tube (3). A single crystal seed is placed in the thin tube (1) at the front end of the crucible (2). The shoulder of the crucible is used to sequentially fill in indium phosphide polycrystalline fragments and additives to be incorporated.

4. A quartz dewar tube with lugs according to claim 1, characterized in that, A lug-type quartz tube cap (5) is provided, the size of which is slightly smaller than the diameter of the quartz tube opening. It can be placed at the quartz tube port through the quartz tube opening. The height of the lug (6) cannot exceed the horizontal plane of the quartz tube opening. The lug-type quartz tube cap and the quartz tube containing the crucible and polycrystalline material are fused together near the port by oxyhydrogen welding to form a fused area (4).

5. A quartz dewar tube with lugs according to claim 4, characterized in that, The existing quartz Dewar tube and sealing method, the quartz tube cap (5) has no lug, L1 is the total length of the crucible, L2 is the total length of the quartz tube, the quartz tube cap is placed upside down with the cap opening facing outward, and is inserted from the quartz tube opening, 5-8cm lower than the tube opening end.

6. A quartz dewar tube with lugs according to claim 5, characterized in that, The quartz tube cap with lugs (5) is placed upright with the cap opening facing inward. It is inserted from the quartz tube port, making it convenient to put the entire quartz Dewar tube into or out of the single crystal furnace through the lugs. The cap and the quartz tube are sealed in the sealing area (4) by hydrogen-oxygen welding.

7. A quartz dewar tube with lugs according to claim 6, characterized in that, Compared to existing capless quartz Dewar tubes and sealing methods, its internal space is greatly increased, and the caps facilitate the insertion and removal of the quartz Dewar tube.

8. A quartz dewar tube with lugs according to claim 7, characterized in that, This design increases the length of the crucible by 40%-60%, allowing the single crystal rod inside the crucible to grow 20-60 cm longer, and correspondingly, 30-60 cm more crystals can be removed. A wafer.

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