A drive mechanism for a transfer valve

Abstract

The utility model discloses a kind of drive mechanisms for transmission valve, comprising: two guide seats, symmetrically interval setting in valve rod both sides, with valve rod interval setting, and the outer wall of guide seat is connected with valve seat, for sliding connection transmission mechanism;Base, connect on the other end of guide seat, base has opening gas path and closing gas path on it, and opening gas path and closing gas path are not communicated between them;Two air cylinders, symmetrically set, one-to-one connection on the outer side wall of guide seat, air cylinder connects transmission mechanism;And two connecting blocks, symmetrically interval setting, connecting block one-to-one connection air cylinder, and the end of connecting block is connected with base, connecting block has first air passage and second air passage on it, first air passage and second air passage are interval setting between them, and first air passage and second air passage are not communicated between them, first air passage is communicated with air cylinder and opening gas path, second air passage is communicated with air cylinder and closing gas path;Overcome the technical problem that two air cylinders are not moved simultaneously, and the synchronism is relatively poor.

Description

Technical Field

[0001] This utility model relates to the field of transmission valve technology, specifically a drive mechanism for transmission valves. Background Technology

[0002] During the processing of wafers, they need to pass through different process chambers in sequence for corresponding processing. During processing, each chamber must be in a closed state. Therefore, a transfer valve is installed on the chamber. After the wafer enters the chamber through the transfer valve, the transfer valve seals the chamber. After the process is completed, the transfer valve opens and the wafer is removed. The structure of a transmission valve generally includes: a valve seat, a valve plate, a valve stem, a transmission mechanism, and a drive mechanism. The valve plate is located inside the valve seat and is used to open or close the window on the valve seat. When the window is open, the wafer can pass through. One end of the valve stem is connected to the valve plate, and the other end is located outside the valve seat. The transmission mechanism is located outside the valve seat and is connected to the other end of the valve stem. The drive mechanism is connected to the valve seat and is located outside the valve seat. It is used to link the operation of the transmission mechanism. The transmission mechanism links the valve stem to operate together, and the valve stem links the valve plate to open or close the window on the valve seat. The drive mechanism has cylinders. Depending on the number of pneumatic cylinders, it is generally a single-cylinder drive or a double-cylinder drive. The double-cylinder drive has a greater driving force and better stability than the single-cylinder drive. Therefore, double cylinders are usually used to drive the transmission valves that are slightly larger in size. However, traditional dual-cylinder drives are generally connected to the air source through independent air pipes (meaning that each cylinder has its own air source, and the two air sources are independent and not connected to each other). Therefore, in actual operation, the two cylinders do not move at the same time, and the synchronization is relatively poor. Over time, this can shorten the service life of the transmission valve and affect its sealing performance. Utility Model Content

[0003] In view of the above-mentioned shortcomings in the related technologies, the purpose is to provide a drive mechanism for a transmission valve to solve the technical problem that the two cylinders do not move at the same time and the synchronization is relatively poor in the related technologies. The technical solution to achieve the objective is: a drive mechanism for a transmission valve, comprising: Two guide seats are symmetrically spaced on both sides of the valve stem, and one end of each guide seat is connected to the outer wall of the valve seat for sliding connection of the transmission mechanism. A base is connected to the other end of the guide seat, the base having an opening air passage and a closing air passage, the opening air passage and the closing air passage being not connected; Two cylinders are symmetrically arranged and connected one-to-one to the outer wall of the guide seat. The cylinders are connected to the transmission mechanism and are used to link the transmission mechanism to slide along the guide seat. And two connecting blocks, symmetrically spaced apart, the connecting blocks are connected one-to-one to the cylinder, and one end of the connecting block is connected to the base. The connecting block has a first air passage and a second air passage, the first air passage and the second air passage are spaced apart, the first air passage and the second air passage are not connected, the first air passage is connected to the cylinder and the opening air passage, and the second air passage is connected to the cylinder and the closing air passage.

[0004] Furthermore: the guide seat has a guide groove and a through groove; The guide groove is used for sliding connection with the transmission mechanism; The through groove and the guide groove are spaced apart.

[0005] Furthermore: the base is a rectangular block structure, and after being connected to the guide seat, it forms two receiving spaces with the guide seat; The cylinder and the connecting block are disposed in the accommodating space.

[0006] Furthermore: the opening air passage includes: a third air passage and two fourth air passages; The third airway is connected to the fourth airway; The fourth airway is symmetrically arranged on the base and is aligned and connected to the first airway one-to-one. The air closure includes: a fifth airway and two sixth airways; The fifth airway is connected to the sixth airway; The sixth airway is symmetrically arranged on the base and is aligned and connected one-to-one with the second airway.

[0007] Furthermore: the third air passage and the fifth air passage are spaced apart, and the third air passage and the fifth air passage start from the width direction of the base and pass through the base.

[0008] Furthermore: the third airway or the fifth airway is a cylindrical airway, and the third airway and the fifth airway are staggered, with their center lines not on the same horizontal line.

[0009] Furthermore: the fourth or sixth airway is a cylindrical airway.

[0010] Furthermore: the first airway or the second airway is a cylindrical airway.

[0011] The above technical solution has the following beneficial effects: A drive mechanism for a transmission valve, compared with related technologies, is provided with a guide seat, a base, a cylinder and a connecting block; When it is necessary to open the window on the valve seat, pressurized gas is introduced through the opening air passage on the base. The gas enters the cylinder through the first air passage on the connecting block. The cylinder moves, and the cylinder-linked transmission mechanism slides along the guide seat. The transmission mechanism links the valve stem, and the valve stem links the valve plate. The valve plate opens the window on the valve seat. When it is necessary to close the window on the valve seat, pressurized gas is introduced through the closing air passage on the base. The gas enters the cylinder through the second air passage on the connecting block. The cylinder moves, and the cylinder-linked transmission mechanism slides along the guide seat. The transmission mechanism links the valve stem, and the valve stem links the valve plate. The valve plate closes the window on the valve seat. This overcomes the technical problem of the two cylinders not moving at the same time and having relatively poor synchronization, and achieves the technical effect of the two cylinders moving at the same time and having relatively good synchronization, which is practical. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall assembly structure; Figure 2 This is a schematic diagram of the base structure; Figure 3 This is a structural diagram of the base and connecting block; Figure 4 for Figure 3 The left view; In the diagram: 10. Guide seat, 10-1. Guide groove, 10-2. Through groove, 20. Base, 20-1. Accommodation space, 21. Third air passage, 22. Fourth air passage, 23. Fifth air passage, 24. Sixth air passage, 30. Cylinder, 40. Connecting block, 41. First air passage, 42. Second air passage, 100. Valve stem, 200. Valve seat, 300. Transmission mechanism. Detailed Implementation

[0013] To make the content easier to understand, the following detailed description is provided with reference to specific embodiments and accompanying drawings; A drive mechanism for a transmission valve solves the technical problem in related technologies where the two cylinders do not move simultaneously, resulting in relatively poor synchronicity. This mechanism can be manufactured and used, achieving the positive effect of enabling the two cylinders to move simultaneously with relatively good synchronicity. The overall concept is as follows:

[0014] Implementation Method

[0015] like Figure 1 As shown; a drive mechanism for a transfer valve, comprising: Two guide seats 10 are symmetrically spaced on both sides of the valve stem 100, and are spaced apart from the valve stem 100. One end of each guide seat 10 is connected to the outer wall of the valve seat 200 for sliding connection of the transmission mechanism 300. A base 20 is connected to the other end of the guide seat 10. The base 20 has an opening air passage and a closing air passage, which are not connected to each other. Two cylinders 30 are symmetrically arranged and connected one-to-one to the outer wall of the guide seat 10. The cylinders 30 are connected to the transmission mechanism 300 and are used to link the transmission mechanism 300 to slide along the guide seat 10. And two connecting blocks 40, symmetrically spaced apart, the connecting blocks 40 are connected one-to-one to the cylinder 30, and one end of the connecting block 40 is connected to the base 20. The connecting block 40 has a first air passage 41 and a second air passage 42, the first air passage 41 and the second air passage 42 are spaced apart, the first air passage 41 and the second air passage 42 are not connected, the first air passage 41 is connected to the cylinder 30 and the opening air passage, and the second air passage 42 is connected to the cylinder 30 and the closing air passage. Specifically, during implementation, when it is necessary to open the window on the valve seat 200, pressurized gas is introduced through the opening air passage on the base 20. The gas enters the cylinder 30 through the first air passage 41 on the connecting block 40. The cylinder 30 is activated, and the cylinder 30 is linked to the transmission mechanism 300, which slides along the guide seat 10. The transmission mechanism 300 is linked to the valve stem 100, and the valve stem 100 is linked to the valve plate. The valve plate opens the window on the valve seat 200. When it is necessary to close the window on the valve seat 200, pressurized gas is introduced through the closing air passage on the base 20. The gas enters the cylinder 30 through the second air passage 42 on the connecting block 40. The cylinder 30 is activated, and the cylinder 30 is linked to the transmission mechanism 300, which slides along the guide seat 10. The transmission mechanism 300 is linked to the valve stem 100, and the valve stem 100 is linked to the valve plate. The valve plate closes the window on the valve seat 200. Another implementation method: like Figure 1 As shown; in practice, the guide seat 10 is roughly rectangular block structure, and is connected to the valve seat 200 by screws, which makes assembly relatively convenient. In addition, the guide seat 10 forms a reliable support structure, which is beneficial for connecting and supporting the cylinder 30. The guide seat 10 has a guide groove 10-1 and a through groove 10-2; The guide groove 10-1 is used to slide with the transmission mechanism 300. For example, the guide groove 10-1 is a dovetail groove, which is used for guidance and helps the transmission mechanism 300 to move relatively smoothly along the sliding position without getting stuck. The transmission mechanism 300 has protrusions on its side wall that match the guide groove 10-1. This is common knowledge. Anyone skilled in the art can directly and without doubt know how to set up the transmission mechanism 300 after seeing the disclosed content, without having to do creative work or conduct excessive experiments. The through groove 10-2 and the guide groove 10-1 are spaced apart. For example, the through groove 10-2 is an oblong groove, which is beneficial for the connection between the transmission mechanism 300 and the telescopic shaft on the cylinder 30. When the transmission mechanism 300 slides along the guide groove 10-1, the connection between the transmission mechanism 300 and the telescopic shaft (for example, the two are connected by a pin, and the pin is inserted between the two) will not collide with the guide seat 10. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown; in practice, the base 20 is a rectangular block structure, and after being connected to the guide seat 10, it forms two accommodating spaces 20-1 between itself and the guide seat 10; The base 20 and the guide seat 10 are connected by screws, making assembly relatively convenient; The cylinder 30 and the connecting block 40 are arranged in the accommodating space 20-1, which has a compact structure and is relatively aesthetically pleasing. The opening air passage includes: a third air passage 21 and two fourth air passages 22; the third air passage 21 is connected to the fourth air passages 22; the fourth air passages 22 are symmetrically arranged on the base 20 and are aligned and connected one-to-one with the first air passage 41. The shut-off air passage includes: a fifth air passage 23 and two sixth air passages 24; the fifth air passage 23 is connected to the sixth air passages 24; the sixth air passages 24 are symmetrically arranged on the base 20 and are aligned and connected one-to-one with the second air passage 42. The third air passage 21 and the fifth air passage 23 are spaced apart, and the third air passage 21 and the fifth air passage 23 start from the width direction of the base 20 and pass through the base 20, so that the left and right ends of the third air passage 21 or the fifth air passage 23 can be connected to the air source (such as the air source generated by the air compressor) pipe, which provides relatively good flexibility of use. For example, the left end can be connected to the air source pipe through the air nozzle, and the right end can be closed. The third air passage 21 or the fifth air passage 23 is a cylindrical air passage, and the third air passage 21 and the fifth air passage 23 are staggered and their center lines are not on the same horizontal line; cylindrical air passages are relatively easy to manufacture; the staggered arrangement of the third air passage 21 and the fifth air passage 23 is conducive to the connection between the third air passage 21 and the fourth air passage 22, and the connection between the fifth air passage 23 and the sixth air passage 24, which is relatively easy to manufacture, and makes it impossible to connect the open air passage and the closed air passage; The fourth air passage 22 or the sixth air passage 24 is a cylindrical air passage, which is relatively easy to process and manufacture, and is conducive to gas flow. The system is equipped with an opening air passage and a closing air passage, which ensures that the air pressure of the two cylinders 30 is kept consistent, thus achieving synchronous operation of the two cylinders 30. The synchronization is relatively good. Moreover, the opening air passage and the closing air passage are located inside the component, making the structure compact and relatively aesthetically pleasing. Another implementation method: like Figure 1 As shown; in practice, cylinder 30 is a commonly used structure in the prior art, such as a double-acting linear motion cylinder. Those skilled in the art, after seeing the disclosed content, can directly and without doubt know how to set up cylinder 30, without needing to put in creative effort or conduct excessive experiments. Another implementation method: like Figure 1 , Figure 3 , Figure 4 As shown; in practice, the connecting block 40 is a block structure. After being projected from top to bottom, its shape is roughly "L" shaped. It is connected to the base 20 by screws, forming a reliable support structure. It abuts against the side wall of the cylinder 30, which is beneficial for limiting the cylinder 30. The first airway 41 or the second airway 42 is a cylindrical airway, which is relatively easy to process and manufacture, and is conducive to gas flow; The first air passage 41 and the second air passage 42 are connected to the cylinder 30 via air pipes (e.g., hoses) through air nozzles, which facilitates the entry of gas into the cylinder 30. When pressurized gas is introduced into the air passage, the gas enters the cylinder 30 through the first air passage 41. When pressurized gas is introduced into the closed air passage, the gas enters the cylinder 30 through the second air passage 42; Structures in the prior art: See Figure 1The valve stem 100, valve seat 200, transmission mechanism 300 and valve plate are common structures in the prior art and are not the inventive points of this utility model. They are only used to better describe this utility model and facilitate understanding of the technical solution of this utility model. Those skilled in the art can directly and without doubt know how to set them up after seeing the disclosed content, without needing to put in creative effort or conduct excessive experiments. In the description, it should be understood that the terms "up", "down", "left", "right", "front", "back", etc., indicate the orientation or positional relationship based on the positional relationship shown in the accompanying drawings, and are only for the convenience or simplification of the description, rather than indicating a specific orientation that must be present; the operation process described in the embodiments is not an absolute usage step, and corresponding adjustments can be made in actual use; Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art; the words “first,” “second,” and similar terms used in the specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components, and similarly, the words “a” or “a” and similar terms do not determine a quantity limitation, but rather indicate the presence of at least one, as determined by the content of the embodiments; The above description is only a preferred embodiment, but the scope of protection is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the disclosed technology, based on the technical solution and inventive concept, should be included within the scope of protection.

Claims

1. A drive mechanism for a transmission valve, characterized in that, include: Two guide seats are symmetrically spaced on both sides of the valve stem, and one end of each guide seat is connected to the outer wall of the valve seat for sliding connection of the transmission mechanism. A base is connected to the other end of the guide seat, the base having an opening air passage and a closing air passage, the opening air passage and the closing air passage being not connected; Two cylinders are symmetrically arranged and connected one-to-one to the outer wall of the guide seat. The cylinders are connected to the transmission mechanism and are used to link the transmission mechanism to slide along the guide seat. And two connecting blocks, symmetrically spaced apart, the connecting blocks are connected one-to-one to the cylinder, and one end of the connecting block is connected to the base. The connecting block has a first air passage and a second air passage, the first air passage and the second air passage are spaced apart, the first air passage and the second air passage are not connected, the first air passage is connected to the cylinder and the opening air passage, and the second air passage is connected to the cylinder and the closing air passage.

2. The drive mechanism for a transmission valve according to claim 1, characterized in that: The guide seat has a guide groove and a through groove; The guide groove is used for sliding connection with the transmission mechanism; The through groove and the guide groove are spaced apart.

3. The drive mechanism for a transmission valve according to claim 1, characterized in that: The base is a rectangular block structure, and after being connected to the guide seat, it forms two receiving spaces with the guide seat; The cylinder and the connecting block are disposed in the accommodating space.

4. The drive mechanism for a transmission valve according to claim 3, characterized in that: The opening air passage includes: one third air passage and two fourth air passages; The third airway is connected to the fourth airway; The fourth airway is symmetrically arranged on the base and is aligned and connected to the first airway one-to-one. The air closure includes: one fifth air passage and two sixth air passages; The fifth airway is connected to the sixth airway; The sixth airway is symmetrically arranged on the base and is aligned and connected one-to-one with the second airway.

5. The drive mechanism for a transmission valve according to claim 4, characterized in that: The third air passage and the fifth air passage are spaced apart, and the third air passage and the fifth air passage start from the width direction of the base and pass through the base.

6. The drive mechanism for a transmission valve according to claim 5, characterized in that: The third or fifth airway is a cylindrical airway, and the third and fifth airways are offset from each other, with their center lines not on the same horizontal line.

7. The drive mechanism for a transmission valve according to claim 6, characterized in that: The fourth or sixth airway is a cylindrical airway.

8. The drive mechanism for a transmission valve according to claim 7, characterized in that: The first airway or the second airway is a cylindrical airway.

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