A bellows seal mechanism for a transfer valve

Abstract

The utility model discloses a corrugated pipe sealing mechanism for transmission valve, corrugated pipe sealing mechanism sets up at the outside of valve housing, is sleeved on the valve rod, one end is connected with the sealing bottom plate, and the other end is contacted with the valve rod, and the corrugated pipe sealing mechanism forms the seal between the valve rod and sealing bottom plate, the corrugated pipe sealing mechanism includes: the corrugated pipe is sleeved on the valve rod, the first seat body is connected on one end of the corrugated pipe and is connected with the sealing bottom plate, the second seat body is connected on the other end of the corrugated pipe, the first seal is set up on the first seat body and forms the seal between the first seat body and sealing bottom plate, and the second seal is set up on the second seat body and forms the seal between the second seat body and valve rod, thereby overcome the technical problem of inconvenient installation, and when installing, dust and other impurities will be brought into the vacuum chamber.

Description

Technical Field

[0001] This utility model relates to the field of transmission valve technology, specifically a bellows sealing mechanism for a transmission valve. Background Technology

[0002] During the processing of wafers, they need to pass through different process chambers in sequence for corresponding processing. During processing, each chamber must be in a closed state. Therefore, a transfer valve is installed on the chamber. After the wafer enters the chamber through the transfer valve, the transfer valve seals the chamber. After the process is completed, the transfer valve opens and the wafer is removed. For example, in the prior art of valve plates, Chinese patent application number 202211428581.X, the subject matter of which is "Valve Plate Technology," the valve plate is installed at the upper end of the valve stem, and the drive device is installed at the lower end of the valve stem. The drive device is linked to the valve stem to move, and the valve stem is linked to the valve plate to move together. The valve plate opens or closes the valve port on the valve housing. In order to isolate the vacuum side from the atmospheric side, a bellows is set between the valve stem and the valve housing. The bellows is set in the vacuum chamber on the valve housing. Because the space of the vacuum chamber is small, it is inconvenient to install the bellows. Moreover, the outer surface of the bellows is corrugated, which easily accumulates dust and other impurities. During installation, dust and other impurities will be brought into the vacuum chamber, affecting the quality of the wafer. Utility Model Content

[0003] In view of the above-mentioned shortcomings in the related technologies, the purpose is to provide a bellows sealing mechanism for a transmission valve to solve the technical problems of inconvenient installation and the introduction of dust and other impurities into the vacuum chamber during installation. The technical solution to achieve the objective is: a bellows sealing mechanism for a transmission valve, wherein the bellows sealing mechanism is disposed outside the valve body, sleeved on the valve stem, one end is connected to the sealing base plate, and the other end contacts the valve stem, and the bellows sealing mechanism forms a seal between the valve stem and the sealing base plate; The bellows sealing mechanism includes: a bellows, which is sleeved on the valve stem; The first seat is connected to one end of the bellows and is connected to the sealing base plate; The second body is connected to the other end of the bellows; A first seal is provided on the first seat body, forming a seal between the first seat body and the sealing base plate; And a second seal, disposed on the second seat, forming a seal between the second seat and the valve stem.

[0004] Furthermore, one side of the first seat is welded to one end of the bellows, and the first seat is connected to the sealing base plate by screws.

[0005] Furthermore: the first seat is a square plate structure with a through hole in the middle, the through hole surrounding the valve stem and spaced apart from the valve stem.

[0006] Furthermore, the other side of the first seat also has a first groove, which is used to set the first seal.

[0007] Furthermore: the first groove is an annular groove that surrounds the through hole and is spaced apart from the through hole.

[0008] Furthermore, the second seat is welded to the other end of the bellows.

[0009] Furthermore: the second seat is an annular structure surrounding the valve stem, and the inner wall of the second seat has a second groove for setting the second seal.

[0010] Furthermore: the second groove is an annular groove.

[0011] Furthermore: the first seal is a sealing ring.

[0012] Furthermore: the second seal is a sealing ring.

[0013] The above technical solution has the following beneficial effects: A bellows sealing mechanism for a transmission valve, compared with related technologies, is provided with a bellows, a first seat, a second seat, a first seal, and a second seal; The bellows sealing mechanism is located outside the valve body. The bellows is sleeved on the valve stem and connected to the sealing base plate through the first seat. The first seal is located on the first seat and forms a seal between the first seat and the sealing base plate. The second seal on the second seat contacts the valve stem and forms a seal between the second seat and the valve stem. This realizes that the bellows sealing mechanism forms a seal between the valve stem and the sealing base plate. This overcomes the technical problems of inconvenient installation and the introduction of dust and other impurities into the vacuum chamber during installation, achieving the technical effect of relatively convenient installation and preventing the introduction of dust and other impurities into the vacuum chamber, thus demonstrating its practicality. Attached Figure Description

[0014] Figure 1 This is one of the schematic diagrams of the overall assembly structure; Figure 2 This is the second schematic diagram of the overall assembly structure; Figure 3 for Figure 1 or Figure 2 A partial sectional view; Figure 4 This is one of the structural schematic diagrams of the bellows, the first seat, and the second seat; Figure 5 This is the second structural schematic diagram of the bellows, the first seat, and the second seat; Figure 6 This is a structural schematic diagram of the sealing base plate; In the figure: 10. Bellows, 20. First seat, 20-1. Through hole, 20-2. First groove, 30. Second seat, 30-1. Second groove, 40. First seal, 50. Second seal, 100. Valve body, 200. Valve stem, 300. Sealing base plate, 301. Inner groove. Detailed Implementation

[0015] To make the content easier to understand, the following detailed description is provided with reference to specific embodiments and accompanying drawings; A bellows sealing mechanism for a transmission valve solves the technical problems of inconvenient installation and the introduction of dust and other impurities into the vacuum chamber during installation. This mechanism is manufactured and used, achieving the positive effects of relatively convenient installation and preventing the introduction of dust and other impurities into the vacuum chamber. The overall concept is as follows:

[0016] Implementation

[0017] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown; a bellows sealing mechanism for a transmission valve, the bellows sealing mechanism is disposed outside the valve body 100, sleeved on the valve stem 200, one end is connected to the sealing base plate 300, and the other end is in contact with the valve stem 200, the bellows sealing mechanism forms a seal between the valve stem 200 and the sealing base plate 300. The bellows sealing mechanism includes: a bellows 10, which is sleeved on the valve stem 200; The first seat 20 is connected to one end of the bellows 10 and is connected to the sealing base plate 300; The second seat 30 is connected to the other end of the bellows 10; A first seal 40 is disposed on the first seat 20, forming a seal between the first seat 20 and the sealing base plate 300; And a second seal 50, disposed on the second seat 30, forming a seal between the second seat 30 and the valve stem 200; In practice, the bellows sealing mechanism is located outside the valve body 100, the bellows 10 is sleeved on the valve stem 200, and is connected to the sealing base plate 300 through the first seat 20. The first seal 40 is located on the first seat 20 and forms a seal between the first seat 20 and the sealing base plate 300. The second seal 50 on the second seat 30 contacts the valve stem 200 and surrounds the valve stem 200, forming a seal between the second seat 30 and the valve stem 200. This achieves the bellows sealing mechanism forming a seal between the valve stem 200 and the sealing base plate 300, which is relatively convenient to install and will not bring dust or other impurities into the vacuum chamber. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 As shown; in practice, the bellows 10 is a flexible pipe with an annular corrugated structure, such as a stainless steel bellows. Due to its flexibility, when the valve stem 200 moves, the bellows 10 can expand and contract to buffer, without affecting the movement of the valve stem 200. Moreover, the bellows 10 is sleeved on the valve stem 200, forming a barrier, which helps to ensure sealing. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown; in practice, one side of the first seat 20 is welded to one end of the bellows 10, and the first seat 20 is connected to the sealing base plate 300 by screws; The first base 20 is a square plate structure, which is set in the inner groove 301 on the sealing base plate 300, which is conducive to the positioning of the first base 20 and makes assembly relatively convenient; The first seat 20 has a through hole 20-1 in the middle position. The through hole 20-1 surrounds the valve stem 200 and is spaced apart from the valve stem 200. The through hole 20-1 facilitates the valve stem 200 to pass through and does not affect the movement position of the valve stem 200. Moreover, it allows the first seat 20 to surround the valve stem 200, thus improving the sealing performance. The other side wall of the first seat 20 also has a first groove 20-2. The first groove 20-2 is an annular groove that surrounds the through hole 20-1 and is spaced apart from the through hole 20-1. The first groove 20-2 is used to set the first seal 40 to ensure the sealing performance. Another implementation method: like Figure 1 , Figure 2 , Figure 3, Figure 4 , Figure 5 As shown; in practice, the second seat 30 is welded to the other end of the bellows 10; The second seat 30 is an annular structure surrounding the valve stem 200. The inner wall of the second seat 30 has a second groove 30-1, which is an annular groove, which is beneficial for setting the second seal 50 and ensuring the sealing performance. Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 As shown; in practice, the first seal 40 is a sealing ring, such as an O-ring, which is set in the first groove 20-2 to form a seal between the first seat 20 and the sealing base plate 300, thus ensuring the sealing performance; Another implementation method: like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 As shown; in practice, the second seal 50 is a sealing ring, such as an O-ring, which is set in the second groove 30-1 to hold the valve stem 200 and form a seal between the second seat 30 and the valve stem 200, thus ensuring the sealing performance; Regarding the structure of valve body 100, valve stem 200, and sealing base plate 300: See Figure 1 , Figure 2 , Figure 3 , Figure 6 The valve housing 100, valve stem 200, and sealing base plate 300 are common structures in the prior art. The valve stem 200 is a stepped shaft, and the sealing base plate 300 is a rectangular block structure connected to the valve housing 100 by screws. This is not the inventive point of this utility model, but is only used to better describe this utility model and facilitate understanding of the technical solution of this utility model. Those skilled in the art can directly and without doubt know how to set the valve housing 100, valve stem 200, and sealing base plate 300 after seeing the disclosed content, without needing to expend creative labor or conduct excessive experiments. In the description, it should be understood that the terms "up", "down", "left", "right", "front", "back", etc., indicate the orientation or positional relationship based on the positional relationship shown in the accompanying drawings, and are only for the convenience or simplification of the description, rather than indicating a specific orientation that must be present; the operation process described in the embodiments is not an absolute usage step, and corresponding adjustments can be made in actual use; Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art; the words “first,” “second,” and similar terms used in the specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components, and similarly, the words “a” or “a” and similar terms do not determine a quantity limitation, but rather indicate the presence of at least one, as determined by the content of the embodiments; The above description is only a preferred embodiment, but the scope of protection is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the disclosed technology, based on the technical solution and inventive concept, should be included within the scope of protection.

Claims

1. A bellows sealing mechanism for a transmission valve, characterized in that, The bellows sealing mechanism is located outside the valve body and is fitted onto the valve stem. One end is connected to the sealing base plate, and the other end contacts the valve stem. The bellows sealing mechanism forms a seal between the valve stem and the sealing base plate. The bellows sealing mechanism includes: a bellows, which is sleeved on the valve stem; The first seat is connected to one end of the bellows and is connected to the sealing base plate; The second body is connected to the other end of the bellows; A first seal is provided on the first seat body, forming a seal between the first seat body and the sealing base plate; And a second seal, disposed on the second seat, forming a seal between the second seat and the valve stem.

2. The bellows sealing mechanism for a transmission valve according to claim 1, characterized in that: One side of the first seat is welded to one end of the bellows, and the first seat is connected to the sealing base plate by screws.

3. The bellows sealing mechanism for a transmission valve according to claim 2, characterized in that: The first seat is a square plate structure with a through hole in the middle. The through hole surrounds the valve stem and is spaced apart from the valve stem.

4. The bellows sealing mechanism for a transmission valve according to claim 3, characterized in that: The first seat also has a first groove on the other side, which is used to set the first seal.

5. The bellows sealing mechanism for a transmission valve according to claim 4, characterized in that: The first groove is an annular groove that surrounds the through hole and is spaced apart from the through hole.

6. The bellows sealing mechanism for a transmission valve according to claim 1, characterized in that: The second seat is welded to the other end of the bellows.

7. The bellows sealing mechanism for a transmission valve according to claim 6, characterized in that: The second seat is an annular structure surrounding the valve stem, and the inner wall of the second seat has a second groove for setting the second seal.

8. The bellows sealing mechanism for a transmission valve according to claim 7, characterized in that: The second groove is an annular groove.

9. A bellows sealing mechanism for a transmission valve according to claim 5, characterized in that: The first seal is a sealing ring.

10. A bellows sealing mechanism for a transmission valve according to claim 8, characterized in that: The second seal is a sealing ring.

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