A sleeve connecting device for a wafer defect detection machine laser exhaust system

Abstract

The utility model discloses a sleeve connecting device for wafer defect detection machine laser exhaust system, including split setting sleeve, first clamping piece and second clamping piece, one end of sleeve is open for with the exhaust duct connection, and the other end face is equipped with first connecting portion, vent portion and second connecting portion, and the vent portion is located between first connecting portion and second connecting portion, first clamping piece and second clamping piece are used for respectively with first connecting portion and second connecting portion detachably connected, and the first clamping piece and second clamping piece between after connecting form the clamping groove that can be clamped with wafer defect detection machine laser heating site. The sleeve connecting device for laser heating site and exhaust duct between provided in the application improves the efficiency of the exhaust duct, can effectively discharge the heat generated when laser works, prevents the laser failure caused by excessively high temperature.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a sleeve connection device for a laser exhaust system of a wafer defect inspection machine. Background Technology

[0002] In the semiconductor wafer manufacturing process, wafer defect inspection machines are required to detect whether wafer products have defects. These machines use lasers, which generate a significant amount of heat during operation. If this heat is not dissipated in time, it can irreversibly affect the lifespan of the wafer and compromise its measurement accuracy.

[0003] In existing technologies, ventilation systems are generally used to exhaust air from the laser heating parts in order to remove the heat generated by the laser. However, for dust protection and other purposes, the laser heating parts are usually equipped with protective covers. The ventilation pipes are directly connected to the protective covers of the laser heating parts. Due to the different structures of the pipes and the protective covers, the two have poor fit and cannot be tightly fitted. Therefore, the existing ventilation efficiency is low and cannot effectively reduce the temperature of the laser heating parts in a timely manner. Utility Model Content

[0004] The purpose of this invention is to provide a sleeve connection device for a laser exhaust system of a wafer defect inspection machine to overcome the shortcomings of the existing technology.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A sleeve connection device for a laser exhaust system of a wafer defect inspection machine includes a sleeve, a first snap-fit ​​component, and a second snap-fit ​​component that are separately configured.

[0007] One end of the sleeve is open for connection to the exhaust duct; the other end face is provided with a first connecting part, a vent part and a second connecting part, the vent part being located between the first connecting part and the second connecting part;

[0008] The first and second snap-fit ​​components are respectively used to detachably connect to the first and second connecting portions, and after connection, a slot is formed between the first and second snap-fit ​​components that can engage with the laser heating part of the wafer defect inspection machine.

[0009] Preferably, the sleeve connection device provided in this application further includes a clamp;

[0010] The clamp is used to connect the sleeve and the exhaust pipe.

[0011] Preferably, the first connecting part and the first snap-fit ​​member are fixedly connected by a first screw.

[0012] Preferably, the second connecting part and the second snap-fit ​​member are fixedly connected by a second screw.

[0013] Preferably, the laser heating part of the wafer defect inspection machine includes a laser, a laser positioning block, and a protective cover;

[0014] The laser positioning block is used to fix and install the laser;

[0015] The protective cover is disposed around the laser and the laser positioning block;

[0016] The protective cover is snapped into the first and second snap-fit ​​components;

[0017] The ventilation opening is connected to the inside of the protective cover.

[0018] Preferably, the protective cover and the vent are rectangular.

[0019] Preferably, the protective cover includes an upper side, a lower side, a left side, and a right side; the lengths of the upper side and the lower side are greater than the lengths of the left side and the right side.

[0020] The right side is provided with an outwardly extending first insert block and second insert block; the length of the first insert block is less than that of the second insert block;

[0021] A third insert block extending outward is provided on the left side;

[0022] The first snap-fit ​​component includes a first left side plate, a first right side plate, and an upper side plate connecting the first left side plate and the first right side plate; the first right side plate is provided with a first slot adapted to the first insert block;

[0023] The second snap-fit ​​component includes a lower side plate and a second right side plate located to the right of the lower side plate;

[0024] When the first snap-fit ​​component and the second snap-fit ​​component are connected to the sleeve, a second slot adapted to the second insert block is formed between the first right side plate and the second right side plate; a third slot adapted to the third insert block is formed between the left side of the first left side plate and the left side of the lower side plate.

[0025] When the protective cover is engaged with the first snap-fit ​​component and the second snap-fit ​​component, the upper and lower sides of the protective cover are located inside the upper and lower side plates, respectively.

[0026] Preferably, the first snap-fit ​​component further includes a first connecting plate for connecting with the first connecting portion, the bottom of the first connecting plate being connected to one side of the upper side plate;

[0027] The second snap-fit ​​component further includes a second connecting plate for connecting with the second connecting portion, the top of the second connecting plate being connected to one side of the lower side plate.

[0028] Preferably, the shapes of the first connecting plate and the second connecting plate are adapted to the shape of the end face of the sleeve.

[0029] The sleeve connection device provided in this application is used between the laser heating part and the exhaust pipe, which improves the efficiency of the exhaust pipe and can effectively dissipate the heat generated during laser operation, preventing laser failure caused by excessive temperature. Attached Figure Description

[0030] Figures 1-2 This is a schematic diagram of the sleeve connection device provided in this application. Figure 1 It is in a split state. Figure 2 (In a connected state);

[0031] Figure 3 This is a schematic diagram of the connection between the sleeve connecting device and the laser heating part;

[0032] Figure 4 yes Figure 3 A structural diagram from another perspective.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1-Sleeve; 11-First connecting part; 12-Second connecting part; 13-Ventilation port; 2-First snap-fit ​​component; 21-First slot; 22-Second slot; 23-Third slot; 24-First connecting plate; 3-Second snap-fit ​​component; 31-Second connecting plate; 4-Protective cover; 41-First insert block; 42-Second insert block; 43-Third insert block; 5-Exhaust duct; 6-Laser; 7-Laser positioning block. Detailed Implementation

[0035] A preferred embodiment of this application provides a sleeve connection device for a laser exhaust system of a wafer defect inspection machine, such as... Figures 1-2 As shown, it includes a sleeve 1, a first snap-fit ​​component 2, and a second snap-fit ​​component 3, which are set separately.

[0036] One end of the sleeve 1 is open for connection with the exhaust duct 5, and the sleeve and the exhaust duct 5 can be quickly and effectively connected by a clamp; the other end face is provided with a first connecting part 11, a vent part 13 and a second connecting part 12, and the vent part 13 is located between the first connecting part 11 and the second connecting part 12.

[0037] The first snap-fit ​​component 2 and the second snap-fit ​​component 3 are respectively used for detachable connection with the first connecting part 11 and the second connecting part 12. After connection, a slot is formed between the first snap-fit ​​component and the second snap-fit ​​component, which can engage with the laser heating part of the wafer defect inspection machine.

[0038] The sleeve connecting device provided in this application is a split type, which can be disassembled into three parts, and can be connected and assembled in use. Figure 2 The overall assembly shown is easy to install. Figures 3-4 As shown, the first snap-fit ​​2 and the second snap-fit ​​3, after being connected, can fit tightly with the protective cover 4 of the laser heating part, which improves the degree of connection with the laser heating part. This creates a negative pressure at the laser heating part, and hot air is continuously drawn to the outside through the ventilation port and the inside of the sleeve, preventing the laser heating part from overheating. This greatly improves the heat extraction efficiency of the ventilation system and effectively reduces the temperature of the laser heating part.

[0039] The sleeve connection device provided in this application is used between the laser heating part and the exhaust pipe, which improves the efficiency of the exhaust pipe and can effectively dissipate the heat generated during laser operation, preventing laser failure caused by excessive temperature.

[0040] The first connecting part 11 and the first snap-fit ​​part 2, and the second connecting part 12 and the second snap-fit ​​part 3 can be fixedly connected by screws. Of course, other connection methods can also be used for detachable connection, such as snap-fit.

[0041] To improve ventilation efficiency, the sleeve should be connected to the laser heating element in a sealed manner as much as possible. Furthermore, for ease of use, the connection between the sleeve and the laser heating element should be quick and stable. To achieve the above objectives, this application provides a preferred structure for the laser heating element, the first latching component, and the second latching component of a wafer defect inspection machine, as detailed below:

[0042] The laser heating components of the wafer defect inspection machine include the laser 6, the laser positioning block 7, and the protective cover 4.

[0043] Among them, the laser positioning block 7 is used to fix and install the laser 6;

[0044] The protective cover 4 is located around the laser 6 and the laser positioning block 7 to protect the laser 6.

[0045] One end of the protective cover 4 is connected to the machine base, and the other end is used to snap into the first snap-fit ​​part 2 and the second snap-fit ​​part 3. After snap-fitting, the vent 13 is connected to the inside of the protective cover 4, so that the heat dissipated by the laser can be drawn away by the exhaust system through the vent and the sleeve.

[0046] Preferably, the protective cover 5 is rectangular, and the laser positioning block 7 is fixed to the bottom inside the protective cover 4; in order to match the shape of the protective cover, the ventilation opening is also rectangular.

[0047] Preferably, the protective cover 4 includes an upper side, a lower side, a left side, and a right side; the lengths of the upper side and the lower side are greater than those of the left side and the right side. The right side is provided with an outwardly extending first insert 41 and a second insert 42; the length of the first insert 41 is less than that of the second insert 42; the left side is provided with an outwardly extending third insert 43.

[0048] The first snap-fit ​​component 2 includes a first left side plate, a first right side plate, and an upper side plate connecting the first left side plate and the first right side plate; the first right side plate is provided with a first slot 21 adapted to the first insert block; the second snap-fit ​​component 3 includes a lower side plate and a second right side plate located to the right of the lower side plate.

[0049] When the first snap-fit ​​2 and the second snap-fit ​​3 are connected to the sleeve 1, a second slot 22 adapted to the second insert block is formed between the bottom of the first right side plate and the top of the second right side plate; a third slot 23 adapted to the third insert block is formed between the bottom of the first left side plate and the left side of the lower side plate.

[0050] By inserting the first insert 41 into the first slot 21, the second insert 42 into the second slot 22, and the third insert 43 into the third slot 23, the protective cover 4 can be quickly snapped into place with the first snap-fit ​​member 2 and the second snap-fit ​​member 3. The second insert 42 and the third insert 43 are located on the right and left sides of the protective cover, respectively, which can stably connect the left and right sides of the protective cover and the sleeve. On the other hand, the first insert 41 and the second insert 42 are located on the upper and lower parts of the right side of the protective cover, respectively, which can stably connect the protective cover and the sleeve from the upper and lower sides. Moreover, the second slot 22 and the third slot 23 are both through slots, which cannot be supported by the first snap-fit ​​member and the second snap-fit ​​member. Therefore, this application provides the first slot 21 located on the first right side plate, which can be effectively supported and enhance the stability of the connection.

[0051] When the protective cover is snapped in place, the upper and lower sides of the protective cover, being longer than the left and right sides, are inserted into the inner sides of the upper and lower side plates, further enhancing the sealing of the connection.

[0052] Preferably, the first snap-fit ​​member 2 further includes a first connecting plate 24 for connecting to the first connecting portion, the bottom of the first connecting plate being connected to one side of the upper side plate; the second snap-fit ​​member 3 further includes a second connecting plate 31 for connecting to the second connecting portion, the top of the second connecting plate being connected to one side of the lower side plate. The first snap-fit ​​member 2 and the second snap-fit ​​member 3 are connected to the sleeve 1 via the first connecting plate 24 and the second connecting plate 31, respectively.

[0053] More preferably, the shapes of the first connecting plate and the second connecting plate are adapted to the end face of the sleeve, that is, one side profile of the first connecting plate and the second connecting plate is arc-shaped.

[0054] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and modifications.

Claims

1. A sleeve connection device for a laser exhaust system of a wafer defect inspection machine, characterized in that, Includes a separate sleeve, a first snap-fit ​​connector, and a second snap-fit ​​connector; One end of the sleeve is open for connection to the exhaust duct; the other end face is provided with a first connecting part, a vent part and a second connecting part, the vent part being located between the first connecting part and the second connecting part; The first and second snap-fit ​​components are respectively used to detachably connect to the first and second connecting portions, and after connection, a slot is formed between the first and second snap-fit ​​components that can engage with the laser heating part of the wafer defect inspection machine.

2. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 1, characterized in that, It also includes clamps; The clamp is used to connect the sleeve and the exhaust pipe.

3. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 1, characterized in that, The first connecting part and the first snap-fit ​​member are fixedly connected by the first screw.

4. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 1, characterized in that, The second connecting part and the second snap-fit ​​member are fixedly connected by a second screw.

5. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 1, characterized in that, The laser heating element of the wafer defect inspection machine includes a laser, a laser positioning block, and a protective cover; The laser positioning block is used to fix and install the laser; The protective cover is disposed around the laser and the laser positioning block; The protective cover is snapped into the first and second snap-fit ​​components; The ventilation opening is connected to the inside of the protective cover.

6. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 5, characterized in that, The protective cover and the ventilation opening are rectangular.

7. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 6, characterized in that, The protective cover includes an upper side, a lower side, a left side, and a right side; the lengths of the upper side and the lower side are greater than the lengths of the left side and the right side. The right side is provided with an outwardly extending first insert block and second insert block; the length of the first insert block is less than that of the second insert block; A third insert block extending outward is provided on the left side; The first snap-fit ​​component includes a first left side plate, a first right side plate, and an upper side plate connecting the first left side plate and the first right side plate; the first right side plate is provided with a first slot adapted to the first insert block; The second snap-fit ​​component includes a lower side plate and a second right side plate located to the right of the lower side plate; When the first snap-fit ​​component and the second snap-fit ​​component are connected to the sleeve, a second slot adapted to the second insert block is formed between the first right side plate and the second right side plate; a third slot adapted to the third insert block is formed between the left side of the first left side plate and the left side of the lower side plate. When the protective cover is engaged with the first snap-fit ​​component and the second snap-fit ​​component, the upper and lower sides of the protective cover are located inside the upper and lower side plates, respectively.

8. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 7, characterized in that, The first snap-fit ​​component further includes a first connecting plate for connecting with the first connecting portion, the bottom of the first connecting plate being connected to one side of the upper side plate; The second snap-fit ​​component further includes a second connecting plate for connecting with the second connecting portion, the top of the second connecting plate being connected to one side of the lower side plate.

9. The sleeve connection device for the laser exhaust system of a wafer defect inspection machine as described in claim 8, characterized in that, The shapes of the first connecting plate and the second connecting plate are adapted to the shape of the end face of the sleeve.

Images