A quantum seal detection device

Abstract

The utility model relates to a kind of quantum sealing detection devices, belong to quantum detection technical field, for detecting measured object one, including, with ionization cavity and electronic cavity's tunable transmitter, air inlet unit, ionization component, faraday cylinder component, composite board and air outlet component;Air inlet unit, the tunable transmitter is provided with the air inlet pipe that communicates with the air inlet unit on;Ionization component, it is arranged in the tunable transmitter, for separating the ionization cavity and the electronic cavity;Faraday cylinder component, it is arranged on the tunable transmitter, the tunable transmitter is provided with the air outlet pipe for with the measured object one communication;Composite board, with faraday cylinder component sealing connection;Air outlet component, with measured object one communication.The utility model can judge whether there is small hole on measured object by quantum tunneling effect, to be able to detect measured object.

Description

Technical Field

[0001] This utility model relates to the field of quantum detection technology, and in particular to a quantum sealing detection device. Background Technology

[0002] Sealing tests are crucial in industry, especially in aerospace, nuclear energy, semiconductor manufacturing, and medical devices, where even minor leaks can have catastrophic consequences.

[0003] Traditional detection methods such as pressure decay method, helium mass spectrometry leak detection method, and ultrasonic detection have the following shortcomings: Limited sensitivity: Difficult to detect extremely small leaks, such as nanoscale defects or molecular-level infiltrations. Environmental interference: Susceptible to factors such as temperature, vibration, and electromagnetic noise. Destructive or invasive: Some methods require destroying the test object or injecting tracer gas. Utility Model Content

[0004] The purpose of this invention is to address the problems existing in the background technology by proposing a quantum sealing detection device that can determine whether there are micro-holes on the test object through the quantum tunneling effect, thereby enabling the detection of the test object.

[0005] The technical solution of this utility model is: a quantum sealing detection device for detecting a test object, comprising, A tunable transmitter with an ionization cavity and an electronic cavity; An air intake unit is provided, wherein the tunable transmitter is provided with an air intake pipe that communicates with the air intake unit; An ionization component, disposed within the tunable transmitter, serves to separate the ionization cavity from the electron cavity; A Faraday cylinder assembly is mounted on the tunable transmitter, which is provided with an air outlet pipe for communicating with the object being measured. The composite plate is sealed to the Faraday cylinder assembly; The air outlet component is connected to the object being tested.

[0006] Preferably, the ionization assembly includes an ionization electrode plate disposed within the tunable transmitter, an insulating mounting base having one or more electrodes disposed on the ionization electrode plate and having through holes, and a plurality of ionization needles disposed on the insulating mounting base.

[0007] Preferably, the Faraday cylinder assembly includes a shielding cover disposed on the air outlet duct, an insulating layer disposed within the shielding cover, and a Faraday cylinder disposed within the insulating layer; the object to be tested is disposed within the Faraday cylinder.

[0008] Preferably, it further includes a mounting cover and a sealing cover; the Faraday cylinder assembly includes a second shielding cover disposed on the mounting cover, a second insulating layer disposed on the second shielding cover, and a second Faraday cylinder disposed on the second insulating layer; both the Faraday cylinder assembly and the sealing cover are used for sealing connection with the second test object, and the venting assembly is disposed on the mounting cover and communicates with the inside of the sealing cover.

[0009] Preferably, the composite plate includes a shielding layer, an insulating layer three disposed on the shielding layer, and a sealing layer disposed on the insulating layer three; a gas pipe communicating with the inside of the Faraday cylinder is disposed through the shielding layer, the insulating layer three, and the sealing layer.

[0010] Preferably, a support frame is provided on the shielding layer; the support frame abuts against the object being tested; a grounding wire is provided on the shielding cover, and a power-connecting element is provided on the Faraday cylinder.

[0011] Preferably, the gas outlet assembly includes a gas outlet pipe that extends through the Faraday cylinder assembly and a control valve disposed on the gas outlet pipe.

[0012] Preferably, the mounting cover includes a lower cover body connected to the air outlet pipe and an upper cover body threadedly connected to the lower cover body; the sealing cover is disposed in the lower cover body, the second shielding cover is disposed on the upper cover body, and the upper cover body is provided with an air pipe penetrating the second shielding cover, the second insulating layer and the second Faraday cylinder; the lower cover body is provided with the air outlet assembly.

[0013] A quantum seal detection method, based on the aforementioned quantum seal detection device, includes the following steps: S1. The air intake unit injects compressed and filtered air into the ionization chamber of the tunable transmitter through the air intake pipe; S2. By applying a reverse voltage through the ionization component, the electron layers and nuclei of nitrogen and oxygen molecules are opened, generating positive ions and electrons. After ionization, the positive ions are attracted to the ground by the ionization component, while the electrons are accelerated into the electron cavity by the tunable transmitter, forming a high-speed, high-energy electron flow, i.e., a quantum beam. The internal pressure of the ionization cavity is P1, and the internal pressure of the electron cavity is P2. S3. For the workpiece of the type of object being tested, connect the air outlet pipe to one end of the object being tested, connect the air outlet assembly to the other end of the object being tested, the internal pressure of the air outlet assembly is P3, the internal pressure of the shielding cover is P4, and the internal pressure of the object being tested is P, where P = P2 - P3. S4. By applying a bias voltage to the Faraday cylinder, a potential energy difference is generated, so that electrons in the test object have enough energy to penetrate the tiny hole on the test object, hit the Faraday cylinder, and be collected by the Faraday cylinder. S5. The sealing performance is determined by collecting the charge signal on the Faraday cylinder. If the sealing performance of the tested object is good, the measured value is 0. The larger the measured value, the more holes there are on the tested object. S6. For the workpiece of the second type of test object, the air outlet pipe is connected to the lower cover, and the air outlet component is also connected to the lower cover. The cavity formed by the mounting cover, the sealing cover and the second test object is P. The cavity formed by the second Faraday cylinder and the second test object is P4. S7. By applying a bias voltage to the second Faraday cylinder, a potential energy difference is generated, so that the electrons in P have enough energy to penetrate the tiny hole on the second test object, hit the second Faraday cylinder, and be collected by the second Faraday cylinder. S8. The airtightness is determined by collecting the charge signal on the second Faraday cylinder. If the test object two If the seal is intact, the measured value is 0; the larger the measured value, the more holes there are on the object being tested.

[0014] Preferably, an inert gas is injected into the P4 chamber before detection to create constant temperature and humidity conditions for the P4 chamber, cool and purify the gas, and at the same time, a vacuum is drawn before measurement to eliminate residual negative charge in the P4 chamber and improve measurement accuracy.

[0015] In this invention, compressed and filtered air is injected into the air inlet duct, allowing it to enter the P1 chamber within the ionization chamber. When the ionization needle is energized, applying a voltage of several thousand to hundreds of thousands of volts between the needle and the insulating mounting base, the electric field strength near the needle reaches its maximum value, resulting in an electric field strength E = V / d, where V is the voltage and d is the electrode spacing. For corona discharge, the electrode spacing is typically on the order of millimeters, thus the electric field strength can reach 0.98-1.42 MV / m. This strong electric field is sufficient to cause the outer electrons of air molecules to overcome the binding force of the atomic nuclei and be emitted directly from the electrode surface, forming an initial electron flow. The kinetic energy of the electrons released by field emission is typically 10-50 eV, which matches the ionization energy of air molecules: approximately 15 eV for nitrogen and approximately 12 eV for oxygen.

[0016] Positive ions and electrons are generated through ionization. The positive ions are absorbed and grounded by the insulating mounting base, so only electrons can pass through the ionization component into P. By applying energy to the electrons, a high-speed, high-energy electron stream, i.e., a quantum beam, is formed. After the energy beam enters the P cavity, it will be ionized within the P cavity. By applying a bias voltage to the Faraday cylinder component, a potential energy difference exists between the quantum in the P cavity and the Faraday cylinder component, allowing the quantum to pass through the tiny hole on the test object and enter P4, forming a tunneling effect. After the quantum is received by the Faraday cylinder component, it will generate an electrical signal on the Faraday cylinder component. By detecting the electrical signal, it can be determined whether there is a tiny hole on the test object.

[0017] The detection method for the second test object is similar. In both cases, a quantum is injected into the P cavity, and a bias voltage is applied to the Faraday cylinder assembly, so that the quantum can tunnel through and collide with the Faraday cylinder assembly, and be detected by the Faraday cylinder assembly. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 is a structural schematic diagram of an embodiment of this utility model; Figure 2 is a schematic diagram of the Faraday cylinder assembly in this utility model; Figure 3 is a schematic diagram of the ionization component in this utility model; Figure 4 is a partial structural schematic diagram of the ionization component in this utility model.

[0020] Reference numerals: 1. Tunable transmitter; 101. Inlet duct; 102. Ionization chamber; 103. Electronic chamber; 104. Outlet duct; 2. Ionization assembly; 201. Ionization electrode; 202. Insulating mounting base; 203. Ionization needle; 2021. Through hole; 3. Faraday cylinder assembly; 3011. Shielding cover one; 3021. Insulation layer one; 3031. Faraday cylinder one; 3012. Shielding cover two; 3022. Insulation layer two; 3032. Faraday cylinder two; 4. Composite plate; 401. Shielding layer; 402. Insulation layer three; 403. Sealing layer; 404. Air pipe; 5. Air outlet assembly; 501. Air outlet pipe; 502. Control valve; 61. Test object one; 62. Test object two; 7. Support frame; 8. Mounting cover; 801. Upper cover; 802. Lower cover; 9. Sealing cover. Detailed Implementation

[0021] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0023] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of this utility model. (The last sentence appears to be incomplete and possibly refers to a different document or specification.) "In one embodiment" does not always refer to the same embodiment, nor is it an embodiment that is mutually exclusive with other embodiments, either alone or selectively.

[0024] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0025] Example 1 As shown in Figures 1-4, the present invention proposes a quantum sealing detection device for detecting a test object 61, comprising a tunable transmitter 1 having an ionization chamber 102 and an electron chamber 103, an air inlet unit, an ionization component 2, a Faraday cylinder component 3, a composite plate 4, and an air outlet component 5. The air intake unit, the tunable transmitter 1, is equipped with an air intake pipe 101 that communicates with the air intake unit; the ionization component 2 is installed inside the tunable transmitter 1 and is used to separate the ionization chamber 102 and the electron chamber 103; the Faraday cylinder assembly 3 is installed on the tunable transmitter 1, and the tunable transmitter 1 is equipped with an air outlet pipe 104 that communicates with the measured object 61; the composite plate 4 is sealed to the Faraday cylinder assembly 3; and the air outlet assembly 5 is connected to the measured object 61.

[0026] The ionization assembly 2 includes an ionization electrode 201 disposed within the tunable transmitter 1, an insulating mounting base 202 having one or more holes 2021 disposed on the ionization electrode 201, and an ionization needle 203 disposed on the insulating mounting base 202.

[0027] In this embodiment, compressed and filtered air is injected into the air inlet duct 101, allowing the air to enter the P1 cavity within the ionization chamber 102. A controllable voltage is applied to the ionization needle 203, powered by PWM. When a voltage of several thousand to hundreds of thousands of volts is applied between the ionization needle 203 and the ionization electrode 201, the electric field strength near the ionization needle 203 reaches its maximum value, resulting in an electric field strength E = V / d, where V is the voltage and d is the electrode spacing. For corona discharge, the electrode spacing is typically on the order of millimeters, therefore the electric field strength can reach [value missing]. With an electric field strength of 0.98-1.42 MV / m, this strong electric field is sufficient to cause the outer electrons of air molecules to overcome the binding force of the atomic nuclei and be emitted directly from the electrode surface, forming an initial electron stream. The kinetic energy of the electrons released by field emission is typically 10-50 eV, which matches the ionization energy of air molecules, approximately 15 eV for nitrogen and 12 eV for oxygen.

[0028] Positive ions and electrons are generated through ionization. The positive ions are absorbed by the ionization plate 201 and returned to the same source zero potential. Thus, only electrons can pass through the through hole 2021 on the insulating mounting base 202 and enter P2. By applying energy to the electrons, a high-speed, high-energy electron flow, i.e., a quantum beam, is formed. After the energy beam enters the P cavity, it will be ionized within the P cavity. By applying a bias voltage to the Faraday cylinder assembly 3, a potential energy difference exists between the quantum in the P cavity and the Faraday cylinder assembly 3. This allows the quantum to pass through the micro-hole on the test object 61 and enter P4, forming a tunneling effect. After the quantum is received by the Faraday cylinder assembly 3, an electrical signal is generated on the Faraday cylinder assembly 3. By detecting the electrical signal, it can be determined whether there is a micro-hole on the test object 61.

[0029] The detection method for the second test object 62 is similar. The quantum is injected into the P cavity, and a bias voltage is applied to the Faraday cylinder assembly 3 so that the quantum can tunnel through and collide with the Faraday cylinder assembly 3 and be detected by the Faraday cylinder assembly 3.

[0030] Example 2 As shown in Figures 1-4, the quantum sealing detection device proposed in this utility model, compared with the embodiments... First, in this embodiment, the Faraday cylinder assembly 3 includes a shield 3011 disposed on the air outlet duct 104, an insulating layer 3021 disposed inside the shield 3011, and a Faraday cylinder 3031 disposed inside the insulating layer 3021; ​​the object to be tested 61 is disposed inside the Faraday cylinder 3031.

[0031] The composite plate 4 includes a shielding layer 401, an insulating layer 402 disposed on the shielding layer 401, and a sealing layer 403 disposed on the insulating layer 402. A gas pipe 404, communicating with the inside of the Faraday cylinder 3031, is perforated through the shielding layer 401, the insulating layer 402, and the sealing layer 403. The gas pipe 404 is used to inject an inert gas, such as nitrogen, into the P4 chamber to create constant temperature and humidity conditions, cool and purify the gas, and... Evacuating the P4 cavity before measurement can eliminate residual negative charge and improve measurement accuracy.

[0032] The shielding layer 401 is equipped with a support frame 7; the support frame 7 abuts against the object under test 61; the shielding cover 3011 is equipped with a grounding wire, and the Faraday cylinder 3031 is equipped with an electrical connection element. The air outlet assembly 5 includes an air outlet pipe 501 that passes through the Faraday cylinder assembly 3, and a control valve 502 that is installed on the air outlet pipe 501.

[0033] In this embodiment, the two ends of the test object 61, such as a valve-like part, are connected to the air outlet pipe 104 and the air outlet pipe 501, respectively. Ionized electrons gain energy, forming quanta, which enter the test object 61. Opening the control valve 502 allows some quanta to be discharged through the air outlet pipe 501, improving quantum flow and detection accuracy. Micro-current sensors are installed at both the air outlet pipe 104 and the control valve 502. The micro-current is calculated by comparing the sensors in the air outlet pipe 104 and the control valve 502. A PID algorithm is used to determine the size of any escaping holes on the test object 61, detect the concentration in the P-cavity, and apply a bias voltage to the Faraday cylinder 3031. When the test object 61 has a micro-hole, the quanta within it gain sufficient potential energy to tunnel through the micro-hole into the Faraday cylinder 3031. Inside, it impacts the inner wall of the Faraday cylinder 3031. By detecting the electrical signal on the Faraday cylinder 3031, it can be determined whether the tested object 61 has a leak. If the detection result is 0, there is no leak. The larger the detection result, the larger or more leaking holes are.

[0034] Example 3 As shown in Figures 1-4, the quantum sealing detection device proposed in this utility model, compared with Embodiment 1 or Embodiment 2, further includes a mounting cover 8 and a sealing cover 9; a Faraday cylinder assembly 3, including a shielding cover 3012 disposed on the mounting cover 8, an insulating layer 3022 disposed on the shielding cover 3012, and a Faraday cylinder 3032 disposed on the insulating layer 3022; both the Faraday cylinder assembly 3 and the sealing cover 9 are used for sealing connection with the test object 62, and the venting assembly 5 is disposed on the mounting cover 8 and communicates with the inside of the sealing cover 9. A grounding wire is provided on the shielding cover 3012, and a power-connecting element is provided on the Faraday cylinder 3032.

[0035] The mounting cover 8 includes a lower cover 802 connected to the air outlet pipe 104, and an upper cover 801 threadedly connected to the lower cover 802; a sealing cover 9 is disposed inside the lower cover 802, and a second shielding cover 3012 is disposed on the upper cover 801. An air pipe 404 is disposed on the upper cover 801, which penetrates the second shielding cover 3012, the second insulating layer 3022, and the second Faraday cylinder 3032; an air outlet assembly 5 is disposed on the lower cover 802.

[0036] In this embodiment, when the object under test is a similar structure to object 62 (i.e., the object under test has no holes), object 62 needs to be placed on the sealing cover 9. The Faraday cylinder 3032 then presses object 62 onto the sealing cover 9, creating a sealed space between object 62, the sealing cover 9, and the Faraday cylinder 3032. This sealed space, formed by object 62, the sealing cover 9, and the lower cover 802, is P. When object 62 has a micro-hole, some quanta will pass through the micro-hole into P4. By applying a bias voltage to the Faraday cylinder 3032, the quanta in P have sufficient potential energy to pass through the micro-hole into P4 and then collide with the Faraday cylinder 3032. The measurement of the Faraday cylinder 3032... The electrical signal can determine whether there is a leak in the test object 62. The upper cover 801 and the lower cover 802 are used to clamp the test object 62 on the sealing cover 9 and the Faraday cylinder assembly 3 after tightening, so that the test object 62 can be measured.

[0037] Example 4 As shown in Figures 1-4, the quantum seal detection method proposed in this utility model includes the following steps: S1. The air intake unit injects compressed and filtered air into the ionization chamber 102 of the tunable transmitter 1 through the air intake pipe 101. S2. A reverse voltage is applied through ionization component 2, creating a voltage difference between the same source. When positive ions are needed, a positive voltage is applied to the ionization needle; when electrons are needed, a negative voltage is applied. This opens the electron shells and nuclei of nitrogen and oxygen molecules, generating positive ions and electrons. After ionization, the positive ions are guided to the zero potential of the same source by ionization component 2, while the electrons are accelerated into the electron cavity 103 by the tunable transmitter 1, forming a high-speed, high-energy electron beam. The internal pressure of ionization cavity 102 is P1, and the internal pressure of electron cavity 103 is... P2; S3. For the workpiece of type 61 being tested, connect the air outlet pipe 104 to one end of the workpiece 61 being tested, and connect the air outlet assembly 5 to the other end of the workpiece 61 being tested. The internal pressure of the air outlet assembly 5 is P3, the internal pressure of the shielding cover 3011 is P4, and the internal pressure of the workpiece 61 being tested is P, where P = P2 - P3. S4. By applying a bias voltage to the Faraday cylinder 3031, a potential energy difference is generated, causing the measured object to... Electrons inside 61 gain enough energy to penetrate the tiny hole on the test object 61, and collide with the Faraday tube 3031, where they are collected. S5. The sealing performance is determined by collecting the charge signal on the Faraday cylinder 3031. If the sealing performance of the test object 61 is good, the measured value is 0. The larger the measured value, the more holes there are on the test object 61. S6. For workpiece of type 62 under test, the air outlet pipe 104 is connected to the lower cover 802, and the air outlet component 5 is also connected to the lower cover 802. The cavity formed by the installation cover 8, the sealing cover 9 and the workpiece 62 under test is P. The cavity formed by the sealing of the Faraday cylinder 3032 and the workpiece 62 under test is P4. S7. By applying a bias voltage to the Faraday cylinder 3032, a potential energy difference is generated, so that the electrons in P have enough energy to penetrate the tiny hole on the test object 62, and collide with the Faraday cylinder 3032 and be collected by the Faraday cylinder 3032. S8. The sealing performance is determined by collecting the charge signal on the Faraday cylinder 3032. If the sealing performance of the test object 62 is good, the measured value is 0. The larger the measured value, the more holes there are on the test object 61.

[0038] Before testing, inert gas is injected into the P4 chamber to create constant temperature and humidity conditions, cool and purify the gas, and at the same time, a vacuum is drawn before measurement to eliminate residual negative charge in the P4 chamber and improve measurement accuracy.

[0039] In this embodiment, when a bias voltage is applied, quantum and trace amounts of negative ions are drawn out. The results are compared and detected by sensors at the air outlet duct 104 and control valve 502 to determine that the air is ionized, generating high-energy electrons within the tunable transmitter 1. High-energy electron collision ionization refers to the process where high-energy electrons collide with air molecules, causing the molecules to lose electrons and form free electrons and positive ions. High-energy electrons collide with air molecules such as nitrogen... When gas and oxygen collide, they transfer enough energy to ionize the molecules. After the molecules lose electrons, they form free electrons and positive ions. Applying a magnetic field in the same direction as the electric field can make the electrons move along a spiral trajectory, increasing the probability of collisions between electrons and gas molecules.

[0040] The minimum energy required for ionization is called the ionization energy. For example, the ionization energy of nitrogen is 15.58 eV, and that of oxygen is... 12.06 eV; The higher the electron energy, the greater the ionization probability. The higher the gas pressure, the higher the collision frequency, and the higher the ionization probability.

[0041] The wave function does not suddenly drop to zero at the potential barrier, but decays exponentially, meaning that a particle has a certain probability of appearing on the other side of the barrier. The probability of a particle passing through the barrier depends on the width and height of the barrier and the particle's energy. The narrower and lower the barrier, the greater the probability of tunneling.

[0042] Time-dependent Schrödinger equation in: Y(r, t): The wave function of the particle, which contains all the quantum information of the system.

[0043] The Hamiltonian operator, corresponding to the total energy of a system (kinetic energy + potential energy), is usually written as: v2 Laplace operator, describing the kinetic energy term.

[0044] The time-independent Schrödinger equation applies to stationary state problems and potential energy. Time not explicitly included: Where: E: the energy eigenvalue of the system, y(r) is the stationary wave function. Physical meaning of the wave function. Let y(r, t) represent the probability density of a particle at position r and time t. The wave function must satisfy the normalization condition: .

[0045] Mathematical requirements It is continuous, differentiable, and square-integrable.

[0046] Quantum harmonic oscillator: Obtaining equidistant energy levels ; Infinite potential barrier: Solving for discrete energy levels of a particle in a one-dimensional potential barrier; One-dimensional barrier tunneling: For a one-dimensional barrier, the probability of particle tunneling is... It can be calculated using the following formula: Where: Atransmitted and Aincident are the amplitudes of the transmitted wave and the incident wave, respectively; Tunneling probability formula: For a rectangular barrier with height vo and width a, the tunneling probability T is: Where: h is the reduced Planck constant, m is the particle mass, E is the particle energy, and vo is the potential barrier height; Micro-orifice tunneling: For micro-orifices, the tunneling probability depends on the orifice's geometry and potential field distribution. If the orifice radius is r and the barrier height is vo, then the tunneling probability can be approximated as: The Schrödinger equation is a core tool for describing particle behavior when studying quantum tunneling in tiny pores, such as nanoscale pores or barriers.

[0047] Boundary conditions and tunneling probability The wave function and its first derivative must be continuous at the boundary, that is: At x=0: At x=a: vn(a)=v(a) Using these boundary conditions, the coefficients A, B, C, D, and F can be solved simultaneously to obtain the transmission coefficient T and . Reflection coefficient R; Transmission coefficient The transmission coefficient T represents the probability that a particle penetrates the potential barrier, and is defined as the ratio of the square of the amplitude of the transmitted wave to that of the incident wave: For a thin barrier a that is very small, the transmission coefficient can be approximated as: The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A quantum-sealed detection device for detecting a test object (61), characterized in that: include, A tunable transmitter (1) having an ionization cavity (102) and an electron cavity (103); An air intake unit is provided on the tunable transmitter (1) and an air intake pipe (101) is connected to the air intake unit. The ionization component (2) is disposed within the tunable transmitter (1) and is used to separate the ionization cavity. (102) and the electronic cavity (103); Faraday cylinder assembly (3) is provided on the tunable transmitter (1), and the tunable transmitter (1) is provided with an air outlet pipe (104) for communicating with the measured object (61). The composite plate (4) is sealed to the Faraday cylinder assembly (3); The air outlet component (5) is connected to the test object (61).

2. The quantum sealing detection device according to claim 1, characterized in that, The ionization assembly (2) includes an ionization electrode plate (201) disposed in the tunable transmitter (1), an insulating mounting base (202) having one or more of them disposed on the ionization electrode plate (201) and having through holes (2021), and an ionization needle (203) having a plurality of them disposed on the insulating mounting base (202).

3. The quantum sealing detection device according to claim 1, characterized in that, The Faraday cylinder assembly (3) includes a shielding cover (3011) disposed on the air outlet pipe (104), an insulating layer (3021) disposed inside the shielding cover (3011), and a Faraday cylinder (3031) disposed inside the insulating layer (3021); the object to be tested (61) is disposed inside the Faraday cylinder (3031).

4. The quantum sealing detection device according to claim 2, characterized in that, It also includes a mounting cover (8) and a sealing cover (9); the Faraday cylinder assembly (3) includes a second shielding cover (3012) disposed on the mounting cover (8) and a second insulating layer (3022) disposed on the second shielding cover (3012). And Faraday cylinder two (3032) disposed on the second insulating layer (3022); the Faraday cylinder assembly (3) and the sealing cover (9) are both used to seal the test object two (62), and the venting assembly (5) is disposed on the mounting cover (8) and communicates with the sealing cover (9).

5. The quantum sealing detection device according to claim 3, characterized in that, The composite plate (4) includes a shielding layer (401), an insulating layer three (402) disposed on the shielding layer (401), and a sealing layer (403) disposed on the insulating layer three (402); a gas pipe (404) communicating with the inside of the Faraday cylinder one (3031) is provided through the shielding layer (401), the insulating layer three (402) and the sealing layer (403).

6. The quantum sealing detection device according to claim 5, characterized in that, A support frame (7) is provided on the shielding layer (401); the support frame (7) abuts against the object under test (61); a grounding wire is provided on the shielding cover (3011); and a power connection element is provided on the Faraday cylinder (3031).

7. The quantum sealing detection device according to claim 6, characterized in that, The gas outlet assembly (5) includes a gas outlet pipe (501) that passes through the Faraday cylinder assembly (3) and a control valve (502) that is disposed on the gas outlet pipe (501).

8. The quantum sealing detection device according to claim 4, characterized in that, The mounting cover (8) includes a lower cover (802) connected to the air outlet pipe (104) and an upper cover (801) threadedly connected to the lower cover (802); the sealing cover (9) is disposed inside the lower cover (802), the second shield (3012) is disposed on the upper cover (801), and the upper cover (801) is provided with an air pipe (404) penetrating the second shield (3012), the second insulation layer (3022) and the second Faraday cylinder (3032); the lower cover (802) is provided with the air outlet assembly (5).

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