A semiconductor detector access control anti-failure device

Abstract

The application discloses a kind of semiconductor detector access control anti-failure devices, it includes detection cabinet, isolation cabinet, inner cabinet door and outer cabinet door, the side of detection cabinet is equipped with first entrance, inner cabinet door is rotationally arranged on the inner wall of first entrance, isolation cabinet is connected to detection cabinet, the inner chamber of isolation cabinet is communicated with the inner chamber of detection cabinet by first entrance, the side wall of isolation cabinet away from detection cabinet is equipped with second entrance, outer cabinet door is rotationally connected to the inner wall of second entrance by hinge, limit step surface is arranged along the circumference at second entrance, reset torsional spring is arranged on the hinge, one end of reset torsional spring is connected with isolation cabinet, the other end is connected with outer cabinet door, and outer cabinet door is closed under the action of reset torsional spring in natural state second entrance is closed.The application has the effect of reducing the influence of X-ray on the external environment during the detection process.

Description

Technical Field

[0001] This application relates to the technical field of X-ray detection, and in particular to a semiconductor detector access control anti-failure device. Background Technology

[0002] The principle of X-ray semiconductor inspection instruments mainly relies on the penetrating power of X-rays and the properties of semiconductor materials. X-ray inspection instruments emit high-energy X-ray beams that penetrate the object being inspected (such as semiconductor wafers or components), then receive the X-ray signals after penetration and generate images, thereby detecting and analyzing minute defects.

[0003] Currently, when using semiconductor detectors, X-rays are emitted from inside the detector. Therefore, the detector's door is strictly sealed during operation to prevent harm to personnel.

[0004] Regarding the aforementioned technologies, the inventors believe that if the access control system of the semiconductor detector fails and the cabinet door is open, it may cause incalculable damage to personnel and other production equipment. Therefore, there is a need to provide a detection device that can stably block X-rays. Utility Model Content

[0005] To reduce the impact of X-rays on the external environment during the testing process, this application provides a semiconductor testing instrument access control and anti-failure device.

[0006] The semiconductor detector access control and failure prevention device provided in this application adopts the following technical solution: A semiconductor testing instrument access control and failure prevention device includes a testing cabinet, an isolation cabinet, an inner cabinet door, and an outer cabinet door. A first entrance is provided on one side of the testing cabinet. The inner cabinet door is rotatably mounted on the inner wall of the first entrance. The isolation cabinet is connected to the testing cabinet, and its inner cavity communicates with the inner cavity of the testing cabinet through the first entrance. A second entrance is provided on the side wall of the isolation cabinet away from the testing cabinet. The outer cabinet door is rotatably connected to the inner wall of the second entrance via a hinge. A limiting step surface is provided circumferentially at the second entrance. A reset torsion spring is provided on the hinge. One end of the reset torsion spring is connected to the isolation cabinet, and the other end is connected to the outer cabinet door. In its natural state, the outer cabinet door closes the second entrance under the action of the reset torsion spring.

[0007] By adopting the above technical solution, the testing cabinet encloses the first entrance, achieving double X-ray protection through the inner and outer cabinet doors. Furthermore, the outer cabinet door hinges are equipped with a return torsion spring, and a limiting step surface is provided on the inner edge of the second entrance, enabling automatic closure after opening and reducing the possibility of X-rays affecting the external environment. Through the coordinated operation of the testing cabinet, isolation cabinet, inner cabinet doors, and outer cabinet doors, double X-ray protection is achieved during the testing process, effectively reducing the impact of X-rays on the external environment.

[0008] Optionally, the first entrance and the second entrance are staggered.

[0009] By adopting the above technical solution, the isolation cabinet blocks X-rays due to the staggered arrangement of the first and second entrances, reducing the impact of X-rays leaking from the first entrance and the gap in the inner cabinet door on the external environment of the isolation room.

[0010] Optionally, an observation window is provided on the outer cabinet door, and lead glass is installed in the observation window.

[0011] By adopting the above technical solution, the observation window allows operators to observe the interior of the isolation cabinet and the opening and closing of the inner cabinet door. The lead glass effectively blocks X-rays, reducing their impact on the external environment and operators.

[0012] Optionally, a sliding lead plate for blocking the observation window is provided on the side of the outer cabinet door away from the testing cabinet. A sliding rod is horizontally provided on the outer cabinet door, and a connecting plate is connected to both ends of the sliding rod. The connecting plate is connected to the outer cabinet door, and the sliding rod passes through the sliding lead plate and is slidably connected to it.

[0013] By adopting the above technical solution, the sliding lead plate is slidably connected to the inner cabinet door through the sliding rod. During the detection process, the sliding lead plate blocks the observation window, which further isolates the X-rays and reduces the possibility of X-rays being transmitted to the outside from the observation window when the inner cabinet door is not closed.

[0014] Optionally, a return spring is fitted on the slide rod. One end of the return spring is connected to one of the connecting plates, and the other end is connected to the sliding lead plate. In its natural state, the sliding lead plate blocks the observation window under the action of the return spring.

[0015] By adopting the above technical solution, the reset spring is connected to the sliding lead plate. When no one pushes the sliding lead plate, the sliding lead plate will block the observation window, thus achieving the isolation of X-rays.

[0016] Optionally, a sensor transmitter and a sensor receiver are respectively installed on the two vertical inner walls adjacent to the isolation cabinet and the detection cabinet. When the inner cabinet door is closed, the sensor receiver receives the signal from the sensor transmitter. When the inner cabinet door is open, the inner cabinet door is located between the sensor transmitter and the sensor receiver. The isolation cabinet is equipped with an alarm and a control panel. The control panel is electrically connected to the alarm, the sensor transmitter, and the sensor receiver.

[0017] By adopting the above technical solution, the sensor receiver receives the signal from the sensor transmitter. When the inner cabinet door is opened during the detection process, the inner cabinet door blocks the sensor transmitter and sensor receiver. At this time, the sensor transmitter and sensor receiver send signals to the control panel, and the alarm is activated to remind the operator.

[0018] Optionally, a fixing component is provided on the side wall of the isolation cabinet where the second entrance is located. The fixing component includes a fixing slider, a connecting block, and a connecting ring. The connecting ring is connected to the side wall of the isolation cabinet next to the second entrance. The fixing slider is slidably connected to the connecting ring. One end of the fixing slider extends into the second entrance and fits against the outer cabinet door. The connecting block is vertically connected to the end of the fixing slider away from the second entrance.

[0019] By adopting the above technical solution, after the cabinet door is closed, the operator pushes the fixed slider, and one end of the fixed slider moves into the second entrance and limits the inner cabinet door, reducing the possibility of the inner cabinet door opening during the inspection process.

[0020] Optionally, the fixed slider has an abutting slope at the end away from the connecting block. The abutting slope is located on the side of the fixed slider away from the outer cabinet door. A fixing spring is connected between the connecting ring and the connecting block. In its natural state, the end of the fixed slider extends into the second inlet under the action of the fixing spring.

[0021] By adopting the above technical solution, when the outer cabinet door closes under the action of the return torsion spring, the outer cabinet door contacts the abutting inclined surface of the fixed slider, pushing the fixed slider forward, at which point the fixed spring is compressed. When the outer cabinet door is fully closed, the fixed slider returns to its original position under the action of the fixed spring, thus securing the outer cabinet door. The setting of the fixed spring and the abutting inclined surface enables the automatic reset of the fixed slider.

[0022] In summary, this application includes at least one of the following beneficial technical effects: 1. By coordinating the detection cabinet, isolation cabinet, inner cabinet door, and outer cabinet door, a dual barrier against X-rays during the detection process is achieved, which reduces the impact of X-rays on the external environment during the detection process; 2. The observation window allows operators to observe the interior of the isolation cabinet and the opening and closing of the inner cabinet doors; 3. The fixed components reduce the likelihood of the inner cabinet door opening during the inspection process. Attached Figure Description

[0023] Figure 1 This is a schematic diagram illustrating the structure of a semiconductor detector access control and anti-failure device according to an embodiment of this application.

[0024] Figure 2 This is a partial sectional view used in the embodiments of this application to illustrate the internal structure of the isolation cabinet.

[0025] Figure 3 yes Figure 2 Enlarged view of section B in the middle.

[0026] Figure 4 yes Figure 1 Enlarged view of part A in the middle.

[0027] Figure 5 This is a partial cross-sectional view used in the embodiments of this application to illustrate the sensor transmitter and the sensor.

[0028] Explanation of reference numerals in the attached diagram: 1. Detection cabinet; 101. First entrance; 2. Isolation cabinet; 21. Second entrance; 22. Limiting step; 3. Outer cabinet door; 31. Observation window; 4. Inner cabinet door; 5. Fixing component; 51. Fixing slider; 511. Abutting slope; 52. Connecting block; 53. Fixing spring; 54. Connecting ring; 6. Hinge; 7. Return torsion spring; 8. Lead glass; 9. Sliding lead plate; 10. Slide rod; 11. Connecting plate; 12. Return spring; 13. Sensor transmitter; 14. Sensor receiver; 15. Alarm; 16. Control panel. Detailed Implementation

[0029] The following is in conjunction with the appendix Figure 1-5 This application will be further described in detail below. Embodiments of this application provide a semiconductor detector access control and anti-failure device, which effectively reduces the impact of X-rays on the external environment during the detection process.

[0030] Reference Figure 1-3A semiconductor testing instrument access control and failure prevention device includes a testing cabinet 1, an isolation cabinet 2, an outer cabinet door 3, an inner cabinet door 4, and a fixing assembly 5. The testing cabinet 1, isolation cabinet 2, outer cabinet door 3, and inner cabinet door 4 are all made of lead. A first entrance 101 is opened on one of the vertical side walls of the testing cabinet 1, and the inner cabinet door 4 is rotatably connected to the inner wall of the first entrance 101. The isolation cabinet 2 is connected to the outer wall of the testing cabinet 1 where the first entrance 101 is located. A second entrance 21 is opened on the vertical side wall of the isolation cabinet 2 away from the testing cabinet 1, and the second entrance 21 is staggered with the first entrance 101. A limiting step surface 22 is circumferentially opened on the inner ring wall of the second entrance 21, and the inner wall of the second entrance 21 is rotatably connected to the outer cabinet door 3 via a hinge 6. A return torsion spring 7 is provided on the hinge 6, one end of which is connected to the outer cabinet door 3, and the other end is connected to the isolation cabinet 2. In its natural state, the outer cabinet door 3 blocks the second entrance 21 under the action of the reset torsion spring 7 and the limiting action of the limiting step surface 22.

[0031] Reference Figure 3 An observation window 31 is provided on the outer cabinet door 3, and a lead glass 8 is installed in the observation window 31. A sliding lead plate 9 is provided on the side of the outer cabinet door 3 outside the isolation cabinet 2. Two sliding rods 10 are horizontally arranged on the outer side of the outer cabinet door 3, and the two sliding rods 10 are respectively located on opposite sides of the observation window. A connecting plate 11 is connected to both ends of the sliding rod 10, and the connecting plate 11 is connected to the outer cabinet door 3. The sliding rod 10 passes through the sliding lead plate 9 and is slidably connected to it. A return spring 12 is sleeved on the sliding rod 10. The return spring 12 is connected to one of the connecting plates 11, and the other end is connected to the sliding lead plate 9. In the natural state, the sliding lead plate 9 blocks the observation window 31 under the action of the return spring 12.

[0032] Reference Figure 4 The fixing component 5 is disposed on the outer wall of the isolation cabinet 2 away from the testing cabinet 1. The fixing component 5 includes a fixing slider 51, a connecting block 52, a fixing spring 53, and a connecting ring 54. The connecting ring 54 is disposed on the outer wall of the isolation cabinet 2 and is located on one side of the second inlet 21. The fixing slider 51 is slidably connected to the connecting ring 54, and one end of the fixing slider 51 extends into the second inlet 21 and is fitted against one side of the outer cabinet door 3. The connecting block 52 is vertically connected to the end of the fixing slider 51 away from the second inlet 21. The fixing spring 53 is connected between the connecting block 52 and the connecting ring 54. In its natural state, one end of the fixing slider 51 extends into the second inlet 21. The end of the fixing slider 51 away from the connecting block 52 is provided with an abutting slope 511, which is located on the side of the fixing slider 51 away from the isolation cabinet 2.

[0033] Reference Figure 2 and Figure 5Sensor transmitters 13 and receivers 14 are connected to the two inner sidewalls adjacent to the isolation cabinet 2 and the detection cabinet 1, respectively, with the positions of the sensor transmitters 13 and receivers 14 corresponding to each other. When the inner cabinet door 4 is open, it obstructs the view between the sensor transmitters 13 and receivers 14. An alarm 15 and a control panel 16 are connected to the isolation cabinet 2, and the control panel 16 is electrically connected to the alarm 15, the sensor transmitters 13, and the sensor receivers 14.

[0034] Reference Figure 1-3 During use, the isolation cabinet 2 encloses the first entrance 101, and the outer cabinet door 3 and inner cabinet door 4 provide double protection against X-rays. Because the first entrance 101 and the second entrance 21 are staggered, the possibility of X-rays directly affecting the external environment through the gap between the first entrance 101 and the inner cabinet door 4 is reduced. The observation window 31 facilitates the operator's observation of the interior of the isolation cabinet 2 and the inner cabinet door 4, and the lead glass 8 further reduces the possibility of X-rays affecting the external environment. When it is necessary to observe the interior of the isolation chamber through the observation window, the sliding lead plate 9 is pushed; when the sliding lead plate 9 is released, the return spring 12 resets the sliding lead plate 9. The sliding lead plate 9 blocks the observation window 31, further reducing the possibility of X-rays affecting the outside.

[0035] Reference Figure 1 , Figure 3 and Figure 4 When the inner cabinet door 4 is opened, it obstructs the sensor transmitter 13 and sensor receiver 14. At this time, the sensor transmitter 13 and sensor receiver 14 send signals to the control panel 16, and the alarm 15 sounds an alarm to alert the operator. The reset torsion spring 7 enables the outer cabinet door 3 to close automatically. When the outer cabinet door 3 is closed, it contacts the inclined surface 511 of the fixed slider 51, pushing the fixed slider 51 and compressing the fixed spring 53 to accumulate elastic potential energy. When the inner cabinet door 4 is fully closed, the fixed slider 51 resets under the action of the fixed spring 53, limiting the outer cabinet door 3 and reducing the possibility of it opening during detection.

[0036] The implementation principle of the semiconductor detector access control anti-failure device in this embodiment is as follows: During use, the isolation cabinet 2 covers the first entrance 101, and the outer cabinet door 3 and inner cabinet door 4 provide double protection against X-rays. The observation window 31 facilitates the operator's observation of the interior of the isolation cabinet 2 and the condition of the inner cabinet door 4. When the inner cabinet door 4 is opened, it obstructs the sensor transmitter 13 and the sensor receiver 14. At this time, the sensor transmitter 13 and the sensor receiver 14 send signals to the control panel 16, and the alarm 15 sounds an alarm to remind the operator.

[0037] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A semiconductor detector access control and failure prevention device, characterized in that: The system includes a testing cabinet (1), an isolation cabinet (2), an inner cabinet door (4), and an outer cabinet door (3). A first entrance (101) is provided on one side of the testing cabinet (1). The inner cabinet door (4) is rotatably mounted on the inner wall of the first entrance (101). The isolation cabinet (2) is connected to the testing cabinet (1). The inner cavity of the isolation cabinet (2) communicates with the inner cavity of the testing cabinet (1) through the first entrance (101). An opening is provided on the side wall of the isolation cabinet (2) away from the testing cabinet (1). There is a second entrance (21). The outer cabinet door (3) is rotatably connected to the inner wall of the second entrance (21) via a hinge (6). A limiting step surface (22) is provided along the circumference at the second entrance (21). A reset torsion spring (7) is provided on the hinge (6). One end of the reset torsion spring (7) is connected to the isolation cabinet (2), and the other end is connected to the outer cabinet door (3). In its natural state, the outer cabinet door (3) closes the second entrance (21) under the action of the reset torsion spring (7).

2. The semiconductor detector access control anti-failure device according to claim 1, characterized in that: The first entrance (101) and the second entrance (21) are staggered.

3. The semiconductor detector access control failure prevention device according to claim 1, characterized in that: An observation window (31) is provided on the outer cabinet door (3), and lead glass (8) is provided in the observation window (31).

4. The semiconductor detector access control anti-failure device according to claim 3, characterized in that: A sliding lead plate (9) for blocking the observation window (31) is provided on the side of the outer cabinet door (3) away from the testing cabinet (1). A sliding rod (10) is horizontally provided on the outer cabinet door (3). A connecting plate (11) is connected to both ends of the sliding rod (10). The connecting plate (11) is connected to the outer cabinet door (3). The sliding rod (10) passes through the sliding lead plate (9) and is slidably connected to it.

5. The semiconductor detector access control anti-failure device according to claim 4, characterized in that: A return spring (12) is fitted on the slide rod (10). One end of the return spring (12) is connected to one of the connecting plates (11), and the other end is connected to the sliding lead plate (9). In its natural state, the sliding lead plate (9) blocks the observation window (31) under the action of the return spring (12).

6. The semiconductor detector access control anti-failure device according to claim 1, characterized in that: Sensor transmitters (13) and sensor receivers (14) are respectively installed on the two vertical inner walls adjacent to the isolation cabinet (2) and the detection cabinet (1). When the inner cabinet door (4) is closed, the sensor receiver (14) receives the signal from the sensor transmitter (13). When the inner cabinet door (4) is open, the inner cabinet door (4) is located between the sensor transmitter (13) and the sensor receiver (14). An alarm (15) and a control panel (16) are installed on the isolation cabinet (2). The control panel (16) is electrically connected to the alarm (15), the sensor transmitter (13), and the sensor receiver (14).

7. The semiconductor detector access control anti-failure device according to claim 1, characterized in that: The isolation cabinet (2) is provided with a fixing component (5) on the side wall of the second entrance (21). The fixing component (5) includes a fixing slider (51), a connecting block (52) and a connecting ring (54). The connecting ring (54) is connected to the side wall of the isolation cabinet (2) next to the second entrance (21). The fixing slider (51) is slidably connected in the connecting ring (54). One end of the fixing slider (51) extends into the second entrance (21) and fits against the outer cabinet door (3). The connecting block (52) is vertically connected to the end of the fixing slider (51) away from the second entrance (21).

8. The semiconductor detector access control anti-failure device according to claim 7, characterized in that: The fixed slider (51) has an abutting inclined surface (511) at one end away from the connecting block (52). The abutting inclined surface (511) is located on the side of the fixed slider (51) away from the outer cabinet door (3). A fixing spring (53) is connected between the connecting ring (54) and the connecting block (52). In its natural state, the end of the fixed slider (51) extends into the second inlet (21) under the action of the fixing spring (53).

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