A test probe station capable of mounting a variety of probe cards

Abstract

The utility model provides a kind of test probe platform of multiple probe cards can be installed, including mounting bracket and its inside rotation setting rotating cylinder, the inside symmetry of the both ends of rotating cylinder is opened with inner chamber, the inside of two sides inner chamber is movably provided with square plate by center spring, the inside other side of inner chamber is movably provided with adjusting plate by electric push rod. By moving square plate to one side in the inside of inner chamber, it is convenient to insert wafer between square plate and baffle strip, and square plate is extruded fixed to wafer under the elastic force of center spring, can improve the stability of wafer;According to the shape of probe card, it is convenient to put probe card between two limit rods, can be extruded fixed to probe card;The movement adjustment of adjusting plate is adjusted by electric push rod, adjusting plate can drive probe card to move in the direction of wafer, it is convenient to detect two wafers simultaneously, can improve the test efficiency of wafer, it is convenient to improve the practicability of the test probe platform.

Description

Technical Field

[0001] This utility model relates to the field of test probe station technology, specifically a test probe station that can install multiple probe cards. Background Technology

[0002] Test probe stations are devices used in the semiconductor testing field, mainly for wafer-level electronic device performance testing, including DC characteristic testing and RF parameter measurement.

[0003] Chinese invention patent CN114636844A discloses a semiconductor test probe station, including a test stage. The test stage has a test slot at its top and an operating platform at its top. A work box is mounted on the operating platform, and an adjustment device is mounted at the bottom of the work box. A test camera is fixedly mounted at the bottom of the adjustment device. Two electric push rods are fixedly connected to the bottom of the work box, located on the left and right sides of the test camera, respectively. This test probe station can only hold one wafer at a time, thus only one wafer can be tested at a time, reducing wafer testing efficiency and potentially affecting wafer processing and production, resulting in low practicality.

[0004] Therefore, this utility model provides a test probe station that can be equipped with various probe cards. Utility Model Content

[0005] To address the shortcomings of existing technologies, the purpose of this invention is to provide a test probe station capable of mounting multiple probe cards, thereby solving the problems mentioned in the background section. This invention facilitates the simultaneous mounting of two wafers and probe cards through a square plate, adjustment plate, and limiting rod, enabling simultaneous testing of two wafers, improving wafer testing efficiency, and enhancing the practicality of the test probe station.

[0006] To achieve the above objectives, this utility model is implemented through the following technical solution: a test probe station capable of mounting multiple probe cards, comprising a mounting frame and a rotating cylinder rotatably disposed inside it. Symmetrically shaped cavities are formed at both ends of the rotating cylinder. Square plates are movably disposed within the cavities on both sides via a central spring. An adjusting plate is movably disposed on the other side of the cavities via an electric push rod. Limiting rods are slidably disposed at the top and bottom of the adjusting plate, and the limiting rods are L-shaped. Arc-shaped slots are symmetrically formed at opposite ends of the top and bottom limiting rods. Probe cards are held between the limiting rods. A limiting mechanism is provided at the top of the mounting frame, and the limiting mechanism includes a limiting plate.

[0007] Furthermore, the mounting frame is U-shaped, and the front end of the rotating cylinder is provided with a vertical cut surface, which is located between the two ends of the mounting frame.

[0008] Furthermore, the central spring is fixedly installed at the center of the square plates on both sides, and sliders are symmetrically fixed at the top and bottom of the square plates, with the sliders being limited and slidably positioned inside the inner wall.

[0009] Furthermore, a baffle is fixedly provided on one side of the square plate corresponding to the top and bottom of the inner cavity, and a wafer is disposed between the square plate and the baffle.

[0010] Furthermore, a through hole is provided at the center of the adjustment plate, and the probe card is disposed on one side of the baffle and the wafer.

[0011] Furthermore, the mounting bracket has symmetrically formed grooves at both ends, and a through hole is formed at the center of the groove. The electric push rod is symmetrically fixed inside the groove.

[0012] Furthermore, an arc-shaped groove is provided on the outer wall of the adjustment plates on both sides with the through hole as the axis, and a slide rod is fixedly provided on the output rod end of the electric push rod, and the slide rod is slidably installed inside the arc-shaped groove.

[0013] Furthermore, a protrusion is fixedly provided on the top of the mounting bracket, and the adjusting screw is screwed into the inside of the protrusion through a screw hole. The adjusting screw is rotatably mounted on the top of the limiting plate, and the limiting plate is movably disposed on the top of the mounting bracket and inside the protrusion.

[0014] The beneficial effects of this utility model are as follows: This utility model provides a test probe station that can accommodate multiple probe cards. By moving a square plate to one side inside the inner cavity, it is convenient to insert the wafer between the square plate and the stop bar. The square plate, under the elastic force of the central spring, compresses and fixes the wafer, thereby improving the stability of the wafer. According to the shape of the probe card, it is convenient to clamp the probe card between two limiting rods, which can compress and fix the probe card. By adjusting the movement of the adjusting plate through the electric push rod, the adjusting plate can drive the probe card towards the wafer, which is convenient for simultaneous testing of two wafers, thereby improving the testing efficiency of the wafer and enhancing the practicality of the test probe station. By rotating the rotating cylinder and adjusting the rotation of the adjusting screw, the limiting plate can fit with the cut surface, thereby limiting the rotation cylinder and improving the stability of the rotation cylinder. Attached Figure Description

[0015] Figure 1 This is a structural diagram of a test probe station that can install multiple probe cards according to the present invention;

[0016] Figure 2 This is a front cross-sectional view of a test probe station capable of mounting multiple probe cards according to the present invention.

[0017] Figure 3 This invention relates to a test probe station capable of mounting multiple probe cards. Figure 2 Enlarged view of point A in the middle;

[0018] Figure 4 This is a structural diagram of a rotating cylinder of a test probe station capable of mounting multiple probe cards according to the present invention.

[0019] Figure 5 This is a structural diagram of a mounting frame for a test probe station capable of mounting multiple probe cards, according to the present invention.

[0020] Figure 6 This is a radial cross-sectional view of the rotating cylinder of a test probe station capable of mounting multiple probe cards according to this utility model.

[0021] Figure 7 This is a structural diagram of the adjustment plate of a test probe station that can install multiple probe cards according to the present invention;

[0022] Figure 8 This is a structural diagram of a limiting mechanism for a test probe station capable of mounting multiple probe cards, according to the present invention.

[0023] In the diagram: 1. Mounting bracket; 2. Rotating cylinder; 3. Groove; 4. Electric push rod; 5. Protrusion; 6. Adjusting screw; 7. Limiting plate; 8. Square plate; 9. Wafer; 10. Limiting rod; 11. Probe clip; 12. Adjusting plate; 13. Through hole; 14. Arc groove; 15. Center spring. Detailed Implementation

[0024] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0025] Please see Figures 1 to 8This utility model provides a technical solution: a test probe station capable of mounting multiple probe cards, including a mounting frame 1 and a rotating cylinder 2 rotatably disposed inside it. The rotating cylinder 2 has symmetrically formed inner cavities at both ends. Square plates 8 are movably disposed inside the inner cavities on both sides via central springs 15. An adjusting plate 12 is movably disposed on the other side of the inner cavity via an electric push rod 4. Limiting rods 10 are slidably disposed at the top and bottom of the adjusting plate 12, and the limiting rods 10 are L-shaped. A symmetrical arc-shaped slot is provided at one end, and a probe card 11 is held between the limiting rods 10. A limiting mechanism is provided at the top of the mounting frame 1. The limiting mechanism includes a limiting plate 7. Two wafers 9 are installed inside the cavity through one side of the square plate 8, which facilitates the simultaneous testing of the two wafers 9 and improves the testing efficiency of the wafers 9, thereby improving the processing efficiency of the wafers 9. The limiting rods 10 and the arc-shaped slot facilitate the snap-fit ​​installation of the square and round probe cards 11, which improves the practicality of the test probe station.

[0026] In this embodiment, the mounting bracket 1 is U-shaped, and the front end of the rotating cylinder 2 is provided with a vertical cut surface. The cut surface is located between the two ends of the mounting bracket 1. The cut surface facilitates the subsequent positioning of the rotating cylinder 2, and also facilitates the insertion, installation, removal, and replacement of the wafer 9 and probe card 11 through the cut surface.

[0027] In this embodiment, the central spring 15 is fixedly installed at the center of the square plates 8 on both sides. Sliders are symmetrically fixed at the top and bottom of the square plates 8. The sliders are limited and slidably installed inside the inner wall. A baffle is fixedly installed on one side of the square plate 8 corresponding to the top and bottom of the inner cavity. A wafer 9 is placed between the square plate 8 and the baffle. A through hole 13 is opened at the center of the adjusting plate 12. The probe clip 11 is placed on one side of the baffle and the wafer 9. The square plate 8 can be pressed towards the baffle under the elastic force of the central spring 15, which facilitates the pressing and fixing of the wafer 9 through the square plate 8, thereby improving the stability of the wafer 9. The slider can limit the square plate 8, thereby improving the stability of the square plate 8.

[0028] In this embodiment, the mounting bracket 1 has symmetrically arranged grooves 3 at both ends, and a through hole 13 is provided at the center of the groove 3. The electric push rod 4 is symmetrically fixed inside the groove 3. The outer wall of the adjustment plate 12 on both sides is provided with an arc-shaped groove 14 with the through hole 13 as the axis. The output rod end of the electric push rod 4 is fixedly provided with a slide rod. The slide rod is limited and slidably installed inside the arc-shaped groove 14. The through hole 13 facilitates the insertion and connection between the host and the probe card 11. The arc-shaped groove 14 can limit the slide rod, and when the rotating cylinder 2 rotates, the slide rod can slide inside the arc-shaped groove 14, which facilitates the pressing of the adjustment plate 12 by the electric push rod 4 and the slide rod, and facilitates the subsequent movement and adjustment of the adjustment plate 12.

[0029] In this embodiment, a protrusion 5 is fixedly provided on the top of the mounting frame 1. The adjusting screw 6 is screwed into the inside of the protrusion 5 through a screw hole. The adjusting screw 6 is rotatably mounted on the top of the limiting plate 7. The limiting plate 7 is movably disposed on the top of the mounting frame 1 and inside the protrusion 5. The limiting plate 7 can be lowered and adjusted by adjusting the screw 6 so that the limiting plate 7 is in close contact with the cut surface. This facilitates limiting the rotation of the cylinder 2 by the limiting plate 7 and the cut surface, thereby improving the stability of the rotation of the cylinder 2.

[0030] When using this test probe station that can accommodate multiple probe cards, the square plate 8 is moved to one side. The square plate 8 moves via a slider, increasing the distance between the square plate 8 and the stop bar and compressing the central spring 15. Two wafers 9 are then installed between the square plates 8 and the stop bars on both sides. The square plate 8 is released, and the square plate 8 is pressed against the central spring 15 under its elastic force, facilitating the compression and fixation of the two wafers 9. The central spring 15 always maintains its elastic force. A limit block is provided at the rear end of the limiting rod 10, and the limit block is slidably installed inside the top and bottom ends of the adjusting plate 12. A spring is fixed between the limit block and the inner wall of the adjusting plate 12. The top and bottom limit rods 10 are moved to both sides, and the limit rods 10 compress the springs through the limit blocks. The corresponding probe card 11 is inserted between the top and bottom limit rods 10, and the limit rods 10 compress and fix the probe card 11 under the elastic force of the springs. The rotating cylinder 2 is rotated inside the mounting frame 1, and the rotating cylinder 2 drives the adjusting plate 12 and the square plate 8. The plate 8, wafer 9, and probe card 11 are rotated, and the cut surface is adjusted to the top. The handwheel at the top of the adjusting screw 6 is rotated, and the adjusting screw 6 moves inside the protrusion 5. The adjusting screw 6 also drives the limiting plate 7 to descend and contact the cut surface, which facilitates the limiting of the rotating cylinder 2 through the action of the limiting plate 7 and the cut surface, thereby improving the stability of the rotating cylinder 2. The spring force can support the limiting rod 10 and the probe card 11 to prevent the probe card 11 from moving. The insertion interface of the probe card 11 is electrically connected to the IV tester through the groove 3 and the through hole 13. The adjusting plate 12 is adjusted laterally through the electric push rod 4 and its matching circuit, so that the adjusting plate 12 moves inside the two ends of the rotating cylinder 2. The adjusting plate 12 and the limiting rod 10 drive the probe card 11 to move closer to the wafer 9. The probe of the probe card 11 contacts the chip circuit on the wafer 9, which facilitates the simultaneous testing of two wafers 9, improves the testing efficiency of the wafer 9, and enhances the practicality of the test probe station.

[0031] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A test probe station capable of mounting multiple probe cards, comprising a mounting frame (1) and a rotating cylinder (2) rotatably disposed within it, characterized in that, The rotating cylinder (2) has symmetrically arranged inner cavities at both ends. Square plates (8) are movably arranged inside the inner cavities on both sides through a central spring (15). An adjusting plate (12) is movably arranged on the other side of the inner cavity through an electric push rod (4). Limiting rods (10) are slidably arranged at the top and bottom of the adjusting plate (12). The limiting rods (10) are L-shaped. Arc-shaped slots are symmetrically arranged at opposite ends of the top and bottom limiting rods (10). A probe card (11) is clamped between the limiting rods (10). A limiting mechanism is provided at the top of the mounting bracket (1). The limiting mechanism includes a limiting plate (7).

2. A test probe station capable of mounting multiple probe cards according to claim 1, characterized in that: The mounting bracket (1) is U-shaped, and the front end of the rotating cylinder (2) is provided with a vertical cut surface, which is located between the two ends of the mounting bracket (1).

3. A test probe station capable of mounting multiple probe cards according to claim 1, characterized in that: The central spring (15) is fixedly installed at the center of the square plates (8) on both sides. Sliders are symmetrically fixed at the top and bottom of the square plates (8), and the sliders are limited to slide inside the inner wall.

4. A test probe station capable of mounting multiple probe cards according to claim 3, characterized in that: A baffle is fixedly provided on one side of the square plate (8) corresponding to the top and bottom of the inner cavity, and a wafer (9) is provided between the square plate (8) and the baffle.

5. A test probe station capable of mounting multiple probe cards according to claim 4, characterized in that: A through hole (13) is provided at the center of the adjustment plate (12), and the probe card (11) is provided on one side of the baffle and the wafer (9).

6. A test probe station capable of mounting multiple probe cards according to claim 1, characterized in that: The mounting bracket (1) has symmetrically arranged grooves (3) at both ends, and a through hole (13) is provided at the center of the groove (3). The electric push rod (4) is symmetrically fixed inside the groove (3).

7. A test probe station capable of mounting multiple probe cards according to claim 6, characterized in that: An arc-shaped groove (14) is provided on the outer wall of the adjustment plate (12) on both sides with the through hole (13) as the axis. A slide rod is fixedly provided at the output rod end of the electric push rod (4). The slide rod is limited and slidably installed inside the arc-shaped groove (14).

8. A test probe station capable of mounting multiple probe cards according to claim 1, characterized in that: The top of the mounting bracket (1) is fixedly provided with a protrusion (5), and an adjusting screw (6) is installed on the top of the limiting plate (7) for limiting rotation. The adjusting screw (6) is screwed into the inside of the protrusion (5) through a screw hole. The limiting plate (7) is movably provided at the top of the mounting bracket (1) and inside the protrusion (5).

Images