Wafer probe card fixing device

Abstract

The utility model relates to probe card technical field, concretely is a wafer probe card fixing device, fixed disc, the fixed device includes: three fixed seats of sliding in the fixed disc top, three the fixed seat is equal interval part, the fixed seat is C type setting, the fixed seat is used to carry wafer probe card, the pressure block that sets up in the fixed seat inside, the pressure block is used for the wafer probe card in the fixed seat inside is pressed tightly fixed, sets up in the fixed disc bottom's adjusting drive mechanism, the adjusting drive mechanism is used for driving three the fixed seat synchronous movement, the utility model discloses through three equal interval part's fixed seat and the cooperation of pressure block, realizes the quick clamping and compaction to the probe card of different size, effectively fixes the center position of fixed disc to the probe card at the same time, has improved the stability and flexibility of probe card fixation.

Description

Technical Field

[0001] This utility model relates to the field of probe card technology, specifically a wafer probe card fixing device. Background Technology

[0002] In semiconductor manufacturing, wafer probe cards are an important testing tool widely used in the testing and verification of integrated circuits (ICs). Their main function is to transmit test signals to different contact points on the wafer for electrical performance testing. Wafer probe cards typically consist of probes, a base, an interface, and other auxiliary components. Their size and shape vary depending on the testing requirements and wafer specifications. Currently, there are two main types of devices on the market for fixing wafer probe cards: one type uses mechanical means such as screws or clips to firmly fix the probe card, but this method is relatively cumbersome and requires a lot of manual operation; the other type uses clamps to hold the probe card in place.

[0003] Traditional wafer probe cards are fixed using bolts or clamps, which have the problem of not being able to clamp and fix probe cards of different diameters and not being able to fix the probe cards in the center of the device. Utility Model Content

[0004] This utility model addresses the technical problems existing in the prior art by providing a wafer probe card fixing device to solve the problems that traditional wafer probe card fixing devices cannot adapt to clamping and fixing probe cards of different diameters and cannot fix the probe card in the center position of the device.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A wafer probe card fixing device is provided, including a fixing disk, the fixing device comprising: Three mounting bases slide on the top of the mounting plate. The three mounting bases are equally spaced and are C-shaped. The mounting bases are used to support the wafer probe card. A pressure block disposed inside the fixing base is used to press and fix the wafer probe card inside the fixing base; An adjustment drive mechanism is disposed at the bottom of the fixed plate, the adjustment drive mechanism being used to drive the three fixed seats to move synchronously; and A compaction mechanism is provided on the side wall of the fixed base, which is used to drive the pressure block to move up and down inside the fixed base.

[0006] Furthermore, the adjustment drive mechanism includes: A base that is fixedly installed at the bottom of the fixed plate; A hydraulic push rod is bolted to the top of the base, and a lifting plate is fixedly connected to the output end of the hydraulic push rod; Three sliding grooves are provided on the side wall of the fixed plate, and the positions of the sliding grooves coincide with the positions of the fixed base; A movable plate is disposed at the bottom of the slide groove, and the movable plate is fixedly connected to the fixed base by four connecting rods, the four connecting rods being movably disposed inside the slide groove; and Three drive bars are provided between the movable plate and the lifting plate, and the two ends of the three drive bars are respectively hinged to the movable plate and the lifting plate.

[0007] Furthermore, the compaction mechanism includes: A mounting bracket is provided on the side wall of the movable plate, and an electric push rod is mounted in the middle of the mounting bracket, the electric push rod being rotatably connected to the mounting bracket; and A pressure plate is hinged to the top of the fixed base. The pressure plate is movably disposed in the middle of the fixed base. The two ends of the pressure plate are respectively hinged to the output end of the electric push rod and the pressure block. The pressure plate is bent.

[0008] Furthermore, an adjustment mechanism is provided on the top of the fixing plate, which is used to adjust the fixing angle of the probe card.

[0009] Furthermore, the adjustment mechanism includes; An adjustment plate is installed on top of the fixed plate, the adjustment plate has a T-shaped cross-section, and the bottom of the adjustment plate is rotatably connected to the fixed plate; A drive motor bolted to the bottom of the fixed disk, the output end of the drive motor being fixedly connected to the adjustment disk; and A silicone ring is disposed on the top of the adjustment disc, and the sidewall of the silicone ring contacts the probe card.

[0010] Furthermore, a touch sensor is provided on the side wall of the fixing base, and the touch sensor contacts and engages with the probe card.

[0011] Furthermore, two limiting grooves are provided on the side wall of the fixed base, and two limiting blocks are fixedly connected to the side wall of the pressure block, with the limiting blocks being movably connected to the limiting grooves.

[0012] Furthermore, one side of the pressure block is inclined downwards.

[0013] The beneficial effects of this utility model are: This invention designs a fixing device that can automatically clamp probe cards. Through the cooperation of three equally spaced fixing seats and pressure blocks, it can quickly clamp and compact probe cards of different sizes, and effectively fix the probe cards in the center of the fixing plate, thereby improving the stability and flexibility of probe card fixing. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a front view of the present invention; Figure 3 This utility model Figure 2 A three-dimensional cross-sectional view of point AA in the middle; Figure 4 This is a schematic diagram of the structure of the adjustment disc and silicone ring in this utility model; Figure 5 This is a schematic diagram of the adjustment drive mechanism in this utility model; Figure 6 This is a schematic diagram of the compaction mechanism in this utility model; The attached diagram lists the components represented by each number as follows: 1. Fixed plate; 2. Fixed base; 3. Pressure block; 4. Adjustment drive mechanism; 41. Base; 42. Hydraulic push rod; 43. Lifting plate; 44. Slide groove; 45. Movable plate; 46. Connecting rod; 47. Drive bar; 5. Compaction mechanism; 51. Mounting bracket; 52. Electric push rod; 53. Pressure plate; 6. Adjustment mechanism; 61. Adjustment disc; 62. Drive motor; 63. Silicone ring; 7. Touch sensor; 8. Limiting groove; 9. Limiting block. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this utility model and are not intended to limit this utility model.

[0016] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "left", "right", "horizontal", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0017] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0018] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0019] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0020] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0021] The present invention provides the following preferred embodiments: Example 1: Reference Figure 1 As shown, a wafer probe card fixing device includes a fixing plate 1, and the fixing device includes: Three mounting bases 2 slide on the top of the mounting plate 1. The three mounting bases 2 are equally spaced and are C-shaped. The mounting bases 2 are used to support the wafer probe card. The pressure block 3 is disposed inside the fixing base 2 and is used to press and fix the wafer probe card inside the fixing base 2. An adjustment drive mechanism 4 is located at the bottom of the fixed plate 1. The adjustment drive mechanism 4 is used to drive the three fixed seats 2 to move synchronously. The compaction mechanism 5 is installed on the side wall of the fixed base 2. The compaction mechanism 5 is used to drive the pressure block 3 to rise and fall inside the fixed base 2.

[0022] In use, the probe card is adaptively supported and positioned by three equally spaced C-shaped fixing seats 2. The three fixing seats 2 support and clamp the probe card, and the adjustment drive mechanism 4 drives the three fixing seats 2 to move synchronously in a centripetal or centrifugal motion to adjust the clamping diameter range, so as to quickly clamp and fix probe cards of different diameters. The pressure block 3 moves up and down along the inner wall of the fixing seat 2 under the drive of the compaction mechanism 5, and applies a vertical downward clamping force to the edge of the probe card. The clamping force of the fixing seat 2 and the clamping force of the probe card are used to effectively clamp and fix the probe card, so that the probe card can be tested in a stable state and ensure that it will not be displaced in the working state. At the same time, it effectively fixes the probe card fixing seat 2 to the center position of the fixing plate 1. In this way, through the cooperation of the three equally spaced fixing seats 2 and the pressure block 3, the probe cards of different sizes can be quickly clamped and compacted, and the probe cards are effectively fixed in the center position of the fixing plate 1, which improves the stability and flexibility of the probe card fixing.

[0023] Example 2: Reference Figure 3 As shown, the adjustment drive mechanism 4 includes: The base 41 is fixedly installed at the bottom of the fixed plate 1; A hydraulic push rod 42 is bolted to the top of the base 41, and the output end of the hydraulic push rod 42 is fixedly connected to a lifting plate 43; Three sliding grooves 44 are provided on the side wall of the fixed plate 1, and the positions of the sliding grooves 44 coincide with the positions of the fixed base 2; A movable plate 45 is disposed at the bottom of the slide 44. The movable plate 45 is fixedly connected to the fixed base 2 via four connecting rods 46, which are movably disposed inside the slide 44. Three drive bars 47 are provided between the movable plate 45 and the lifting plate 43, and the two ends of the three drive bars 47 are respectively hinged to the movable plate 45 and the lifting plate 43.

[0024] In use, the adjustment drive mechanism 4 consists of a base 41, a hydraulic push rod 42, a lifting plate 43, a slide groove 44, a movable plate 45, a connecting rod 46, and a drive bar 47. The hydraulic push rod 42 pushes the lifting plate 43 to move up and down. The drive bar 47 converts the linear displacement into the radial movement of the movable plate 45. Through the cooperation of the slide groove 44, the movable plate 45, and the connecting rod 46, the three fixed seats 2 are driven to move synchronously in a centripetal or centrifugal motion, realizing the flexible adjustment of the distance between the three fixed seats 2. This allows for the clamping of probe cards of different sizes. Thus, by adjusting the settings of the drive mechanism 4, the hydraulic push rod 42 drives the lifting plate 43 to move up and down. The lifting plate 43, through the cooperation of the drive bar 47, the slide groove 44, the movable plate 45, and the connecting rod 46, drives the three fixed seats 2 to move synchronously in a centripetal or centrifugal motion, realizing the rapid clamping of the probe card and the flexible adjustment of the distance between the three fixed seats 2.

[0025] Example 3: Reference Figure 6 As shown, the compaction mechanism 5 includes: A mounting bracket 51 is installed on the side wall of the movable plate 45. An electric push rod 52 is installed in the middle of the mounting bracket 51, and the electric push rod 52 is rotatably connected to the mounting bracket 51. The pressure plate 53 is hinged to the top of the fixed base 2. The pressure plate 53 is movably set in the middle of the fixed base 2. The two ends of the pressure plate 53 are respectively hinged to the output end of the electric push rod 52 and the pressure block 3. The pressure plate 53 is bent.

[0026] In use, the compaction mechanism 5 works together with the electric push rod 52 and the hinged pressure plate 53 to control the up and down movement of the pressure block 3. The electric push rod 52 drives the pressure plate 53 to rotate around the hinge point. The bending structure of the pressure plate 53 converts the horizontal thrust into the force that drives the pressure block 3 to move up and down, ensuring the up and down movement of the pressure block 3 inside the fixed seat 2. Thus, through the setting of the press mechanism, the cooperation between the electric push rod 52 and the pressure plate 53 realizes the driving of the up and down movement of the pressure block 3, so that the pressure block 3 can effectively compact and limit the probe card after the probe card is clamped and fixed in the fixed seat 2, and make the pressure block 3 stably compact and limit the probe card.

[0027] Example 4: Reference Figure 2 As shown, an adjustment mechanism 6 is provided on the top of the fixed plate 1. The adjustment mechanism 6 is used to adjust the fixed angle of the probe card.

[0028] In use, by adjusting the settings of mechanism 6, during the process of clamping the probe card in the fixed seat 2, the adjustment mechanism 6 effectively drives the rotation of the three fixed seats 2, thereby adjusting the angle of the probe card.

[0029] Example 5: Reference Figure 3 As shown, the adjustment mechanism 6 includes; An adjustment plate 61 is installed on the top of the fixed plate 1. The cross-section of the adjustment plate 61 is T-shaped, and the bottom of the adjustment plate 61 is rotatably connected to the fixed plate 1. A drive motor 62 is bolted to the bottom of the fixed disk 1, and the output end of the drive motor 62 is fixedly connected to the adjustment disk 61; and A silicone ring 63 is located on the top of the adjustment plate 61, and the sidewall of the silicone ring 63 is in contact with the probe card.

[0030] In use, the probe card placed on top of the three fixed bases 2 contacts the silicone ring 63. The probe card effectively contacts and presses the silicone ring 63 with its own weight. Through the output of the drive motor 62, the adjustment disk 61 is rotated. Through the friction between the silicone ring 63 and the probe card, the angle of the probe card is effectively adjusted. In this way, the angle of the probe card is automatically adjusted effectively during the fixing process.

[0031] Example 6: Reference Figure 6 As shown, a touch sensor 7 is provided on the side wall of the mounting base 2, and the touch sensor 7 is in contact with the probe card.

[0032] In use, the touch sensor 7 is set to detect whether the fixing seat 2 is in contact with the probe card during the clamping process. With the cooperation of the touch sensor 7, when all three touch sensors 7 on the side wall of the fixing seat 2 detect contact with the probe card, the probe card is effectively clamped. At this time, the driving of the fixing seat 2 can be stopped, which effectively avoids the fixing seat 2 clamping the probe card with too much or too little force, and prevents the probe card from being damaged or the clamping force from being insufficient during the fixing process.

[0033] Example 7: Reference Figure 6 As shown, two limiting grooves 8 are provided on the side wall of the fixed base 2, and two limiting blocks 9 are fixedly connected to the side wall of the pressure block 3. The limiting blocks 9 are movably connected to the limiting grooves 8.

[0034] In use, the limiting block 9 and the limiting groove 8 work together to limit the lifting and lowering movement of the pressure block 3, so that the pressure block 3 can move up and down precisely inside the limiting groove 8.

[0035] Example 8: Reference Figure 6 As shown, one side of the pressure block 3 is inclined downwards.

[0036] In use, by setting one side of the pressure block 3 to be tilted downward, it can prevent the pressure block 3 from blocking the clamping of the probe card by the fixing seat 2 during the clamping process.

[0037] Working Principle: In use, the probe card to be fixed is first placed on top of the fixed plate 1. At this time, the probe card is positioned on top of the adjusting plate 61 and contacts the silicone ring 63. The hydraulic push rod 42 pushes the lifting plate 43 up and down. The linear displacement is converted into radial movement of the movable plate 45 via the drive bar 47. Through the cooperation of the slide groove 44, the movable plate 45, and the connecting rod 46, the three fixed seats 2 are driven to move synchronously towards the center of the fixed plate 1. During this process, the three fixed seats 2 push the probe card towards the center of the fixed plate 1. When the three touch sensors 7 simultaneously detect contact between the fixed seat 2 and the probe card, the driving of the hydraulic push rod 42 is stopped. During this process, the probe card angle needs to be adjusted. When the pressure plate is in the correct position, the hydraulic push rod 42 starts to drive the lifting plate 43 to move a certain distance in the reverse direction, so that the fixed seat 2 loosens the probe card. At this time, the drive motor 62 is started. By adjusting the plate 61 and the silicone ring 63, the probe card is adjusted. Then, the hydraulic push rod 42 drives the fixed seat 2 to reset. The electric push rod 52 drives the pressure plate 53 to rotate around the hinge point. The bending structure of the pressure plate 53 converts the horizontal thrust into the lifting force of the pressure block 3, ensuring the lifting movement of the pressure block 3 inside the fixed seat 2, realizing the downward movement of the pressure plate 53, so that the pressure plate 53 effectively compacts and limits the probe card. In this way, the probe card is quickly clamped and limited, and the probe card is effectively fixed in the center position of the fixed plate 1.

[0038] The beneficial effects of this utility model are specifically reflected in the fact that the above description is only a preferred embodiment of this utility model and is not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A wafer probe card fixing device, comprising a fixing disk (1), characterized in that, The fixing device includes: Three mounting bases (2) slide on the top of the mounting plate (1). The three mounting bases (2) are equally spaced and are C-shaped. The mounting bases (2) are used to carry the wafer probe card. The pressure block (3) is disposed inside the fixing base (2) and is used to press and fix the wafer probe card inside the fixing base (2); An adjustment drive mechanism (4) is provided at the bottom of the fixed plate (1), the adjustment drive mechanism (4) is used to drive the three fixed seats (2) to move synchronously; and The compaction mechanism (5) is provided on the side wall of the fixed seat (2), and the compaction mechanism (5) is used to drive the pressure block (3) to rise and fall inside the fixed seat (2).

2. The wafer probe card fixing device according to claim 1, characterized in that, The adjustment drive mechanism (4) includes: A base (41) is fixedly installed at the bottom of the fixed plate (1); A hydraulic push rod (42) is bolted to the top of the base (41), and the output end of the hydraulic push rod (42) is fixedly connected to a lifting plate (43). Three sliding grooves (44) are provided on the side wall of the fixed plate (1), and the positions of the sliding grooves (44) coincide with the positions of the fixed seat (2); A movable plate (45) is disposed at the bottom of the slide groove (44). The movable plate (45) is fixedly connected to the fixed base (2) by four connecting rods (46). The four connecting rods (46) are movably disposed inside the slide groove (44). Three drive bars (47) are provided between the movable plate (45) and the lifting plate (43), and the two ends of the three drive bars (47) are respectively hinged to the movable plate (45) and the lifting plate (43).

3. The wafer probe card fixing device according to claim 2, characterized in that, The compaction mechanism (5) includes: A mounting bracket (51) is provided on the side wall of the movable plate (45), and an electric push rod (52) is installed in the middle of the mounting bracket (51). The electric push rod (52) is rotatably connected to the mounting bracket (51). A pressure plate (53) is hinged to the top of the fixed base (2). The pressure plate (53) is movably disposed in the middle of the fixed base (2). The two ends of the pressure plate (53) are respectively hinged to the output end of the electric push rod (52) and the pressure block (3). The pressure plate (53) is bent.

4. The wafer probe card fixing device according to claim 1, characterized in that, The top of the fixed plate (1) is provided with an adjustment mechanism (6), which is used to adjust the fixed angle of the probe card.

5. The wafer probe card fixing device according to claim 4, characterized in that, The adjustment mechanism (6) includes; An adjustment plate (61) is installed on the top of the fixed plate (1). The cross section of the adjustment plate (61) is T-shaped. The bottom of the adjustment plate (61) is rotatably connected to the fixed plate (1). A drive motor (62) is bolted to the bottom of the fixed disk (1), and the output end of the drive motor (62) is fixedly connected to the adjustment disk (61); and A silicone ring (63) is disposed on the top of the adjustment plate (61), and the sidewall of the silicone ring (63) is in contact with the probe card.

6. The wafer probe card fixing device according to claim 1, characterized in that, A touch sensor (7) is provided on the side wall of the fixed base (2), and the touch sensor (7) is in contact with the probe card.

7. The wafer probe card fixing device according to claim 1, characterized in that, The fixed base (2) has two limiting grooves (8) on its side wall, and the pressure block (3) has two limiting blocks (9) fixedly connected to its side wall. The limiting blocks (9) are movably connected to the limiting grooves (8).

8. The wafer probe card fixing device according to claim 1, characterized in that, One side of the pressure block (3) is inclined downward.

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