A bullet type pressure switch for high purity high temperature environment

Abstract

The utility model relates to a bullet type absolute pressure switch for high -purity high temperature environment, including upper interface body, lower interface body, the one end of lower interface body is provided with the gas inlet under the high -purity high temperature environment, and the other end of lower interface body is fixedly connected with the one end of lower interface body, the junction of upper interface body and lower interface body is provided with the diaphragm, and the surface of diaphragm near upper interface body side is provided with the piston, the inner chamber of upper interface body is provided with the micro -switch, and the piston is through transmission block and micro -switch contact and is separated and disconnects, the other end of upper interface body is fixedly provided with vacuum gland, and vacuum gland is provided with vacuum gland wiring end and capillary that are used for sucking the gas inside the inner chamber of upper interface body and are electrically connected with the lead wire of micro -switch, vacuum gland still is provided with navigation plug disc, and navigation plug disc still is provided with serial port connector, and vacuum gland wiring end and serial port connector are electrically connected. It has the characteristics such as reasonable structure design, convenient to use, wide application range, long service life etc.

Description

Technical Field

[0001] This utility model relates to the field of pressure switch technology, specifically a spring-loaded absolute pressure switch for high-purity and high-temperature environments. As a pressure switch, it can monitor absolute pressure in high-temperature vacuum system environments and has a wide range of applications. Background Technology

[0002] As is well known, a high-purity environment refers to a controlled environment in which contaminants (such as particles, gaseous impurities, temperature and humidity fluctuations, etc.) in a specific space are reduced to extremely low levels through technical means. It is mainly used in scientific and industrial fields with extremely high purity requirements, such as semiconductor and crystal manufacturing, biomedicine, and cutting-edge scientific research. Absolute pressure (APS) refers to the pressure measurement value with absolute vacuum as the zero point, representing the actual physical pressure borne by the medium. It is symbolized as PABS or labeled "Abs," meaning the actual pressure of the medium measured against an absolute vacuum, directly reflecting the true pressure exerted on the object. The pressure difference between PABS and the vacuum state is the absolute pressure value. In the above environments, some are accompanied by high temperatures. Therefore, to accurately detect the current pressure in such environments, pressure switches are needed. A high-purity, high-temperature spring-loaded absolute pressure switch is a specially designed absolute pressure switch, mainly used in industrial scenarios with stringent requirements for medium purity, ambient temperature, and pressure control accuracy. Its application background for pressure monitoring and control in high-purity and high-temperature environments can be summarized as follows:

[0003] 1. Semiconductor manufacturing uses ultra-high purity gas (such as nitrogen and argon) delivery systems to prevent metal ion contamination of the wafer production environment; high-temperature processes (such as CVD and etching) must withstand temperatures above 300°C while ensuring pressure control stability.

[0004] 2. In petrochemical and energy industries, absolute pressure must be monitored in high-pressure reactors and pyrolysis units to prevent explosions caused by media leakage. In environments with highly corrosive media (such as sulfur-containing waste gas), stainless steel or special coating materials must be used to ensure long-term reliability.

[0005] 3. Control of the delivery of high-purity medical gases (such as oxygen and anesthetics) in medical and biotechnology, in compliance with GMP cleanroom standards, maintaining a sterile environment in bioreactors, and preventing pressure fluctuations from affecting the cell culture process.

[0006] 4. Pressure monitoring in aerospace and scientific research at extreme temperatures (-40℃ to 450℃), such as rocket fuel tanks and vacuum experimental equipment. These equipment need to adapt to low pressure and sudden temperature changes in high-altitude or space environments to ensure equipment safety.

[0007] 5. Environmental protection and hazardous waste treatment: real-time pressure monitoring in high-temperature incinerators and SCR denitrification systems to prevent toxic gas leaks; corrosion-resistant design to cope with harsh media such as acidic wastewater and chlorine-containing waste gas.

[0008] To achieve pressure stability within a high-temperature absolute pressure system, real-time monitoring of the absolute pressure during the high-temperature absolute pressure process is necessary. While existing technologies also have similar pressure switches, they often suffer from relatively complex structures, relatively poor detection sensitivity, and relatively high costs. Therefore, improvements to existing technologies are needed. This invention proposes a spring-loaded absolute pressure switch for high-purity, high-temperature environments, which can conveniently detect the internal pressure of the aforementioned system environment to facilitate corresponding control responses. It features high sensitivity and ease of use. Utility Model Content

[0009] The purpose of this utility model is to solve the above-mentioned technical problems and provide a spring-loaded absolute pressure switch for high-purity and high-temperature environments, which has the characteristics of reasonable structural design, convenient use, wide application range and long service life.

[0010] To achieve the above objectives, this utility model adopts the following technical solution:

[0011] A spring-loaded absolute pressure switch for high-purity and high-temperature environments includes an upper body 1 and a lower body 2. One end of the lower body is provided with a gas inlet for the high-purity and high-temperature environment, and the other end of the lower body is fixedly connected to one end of the lower body 2. A diaphragm 6 is provided at the connection between the upper and lower bodies. A piston 7 is provided on the surface of the diaphragm near the upper body for synchronously moving upward or downward when the diaphragm is deformed by a change in absolute pressure. A micro switch 9 is provided in the inner cavity of the upper body, and the piston is connected to a transmission block. 8. The micro switch is in contact with or disconnected from the micro switch; a vacuum cover 12 is fixedly installed at the other end of the upper body. The vacuum cover is provided with a vacuum cover terminal that is electrically connected to the lead wire of the micro switch 9, and a capillary tube 14 for absorbing gas inside the upper body cavity. One end of the capillary tube 14 extends into the upper body cavity, and the other end is located outside the upper body cavity; the vacuum cover is also provided with a flight plug disk 11, and the flight plug disk is also provided with a serial port connector 15; the vacuum cover terminal is electrically connected to the serial port connector.

[0012] As a further optimization of the above solution, the micro switch is provided with an alarm contact, which is connected to the micro switch via a switch positioning sleeve 3. The switch positioning sleeve is also connected to a switch pressure sleeve 13 for limiting the movement. With this configuration, the alarm point is set by connecting the switch positioning sleeve 3 and the micro switch 9 together, for example, by riveting, and then adjusting the setting. After adjustment, the switch pressure sleeve 13 is used to lock the setting point to prevent changes, thus limiting the movement of the switch positioning sleeve.

[0013] As a further optimization of the above solution, the transmission block is also provided with an elastic reset member 5 and a retaining ring 10. The elastic reset member is disposed between the piston and the retaining ring. With this arrangement, the piston can be reset while simultaneously driving the diaphragm to reset. The retaining ring acts similarly to a sliding member, allowing the elastic reset member to move more flexibly.

[0014] As a further optimization of the above solution, the elastic reset element is an elastic disc.

[0015] As a further optimization of the above solution, the transmission block is also threadedly connected to an elastic adjusting element 4. The elastic adjusting element is located on the side of the retaining ring away from the elastic reset element and is used to adjust the elastic force of the elastic reset element. With this setting, the elastic force of the elastic reset element can be adjusted, especially during maintenance or factory settings, to adjust the elastic force according to usage needs, and this adjustment is relatively convenient and quick.

[0016] As a further optimization of the above solution, the elastic adjusting element is a nut.

[0017] The spring-loaded absolute pressure switch of this invention for high-purity and high-temperature environments has the following beneficial effects:

[0018] 1. High purity compatibility: Suitable for pressure control of high purity gases or liquids, avoiding media contamination. Commonly used in fields with high cleanliness requirements such as semiconductors, medical and chemical industries, and can work stably in high-temperature environments.

[0019] 2. Compact structure and reliability: The spring-loaded design features fast response speed and good repeatability, while the mechanical structure is simple and easy to maintain; normally open / normally closed design is available, ensuring safe operation in corrosive or vibrating environments, effectively ensuring the safety and reliability of the device.

[0020] 3. Precise control: Supports setpoint adjustment, with some models achieving an accuracy of ±0.5%FS, meeting the requirements for high-precision pressure control;

[0021] 4. Corrosion resistance and long service life: Made of special stainless steel, it is suitable for highly corrosive environments and extends service life.

[0022] 5. Installation and connection flexibility: It provides threaded 9-16-18UNF end-face sealed installation, and the serial connector wire connection does not require additional fixing structure, simplifying industrial field deployment. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of the spring-loaded absolute pressure switch of this utility model for use in high-purity and high-temperature environments.

[0024] Figure 2This is a vertical cross-sectional schematic diagram of the spring-loaded absolute pressure switch of this utility model for use in high-purity and high-temperature environments. Detailed Implementation

[0025] The following is in conjunction with the appendix Figure 1-2 This invention describes a spring-loaded absolute pressure switch for use in high-purity and high-temperature environments:

[0026] A spring-loaded absolute pressure switch for high-purity and high-temperature environments includes an upper body 1 and a lower body 2. One end of the lower body is provided with a gas inlet for the high-purity and high-temperature environment, and the other end of the lower body is fixedly connected to one end of the lower body 2. A diaphragm 6 is provided at the connection between the upper and lower bodies. A piston 7 is provided on the surface of the diaphragm near the upper body for synchronously moving upward or downward when the diaphragm is deformed by a change in absolute pressure. A micro switch 9 is provided in the inner cavity of the upper body, and the piston is connected to a transmission block. 8. The micro switch is either in contact with or disconnected from the micro switch. A vacuum cover 12 is fixedly installed at the other end of the upper connector. The vacuum cover has a terminal block electrically connected to the lead wire of the micro switch 9, and a capillary tube 14 for evacuating gas from the inner cavity of the upper connector. One end of the capillary tube 14 extends into the inner cavity of the upper connector, and the other end is located outside the inner cavity of the upper connector. A serial port connector 15 is also provided on the vacuum cover. The terminal block of the vacuum cover is electrically connected to the serial port connector. An alarm contact is provided on the micro switch. This alarm contact is connected to the micro switch via a switch positioning sleeve 3. The switch positioning sleeve is also connected to a switch pressure sleeve 13 for limiting the movement. With this configuration, the alarm point is set by connecting the switch positioning sleeve 3 and the micro switch 9 together, for example, by riveting, and then adjusting the setting. After adjustment, the switch pressure sleeve 13 locks the setting point to prevent changes, thus limiting the movement of the switch positioning sleeve. The transmission block is also equipped with an elastic reset component 5 and a retaining ring 10. The elastic reset component is positioned between the piston and the retaining ring. This arrangement allows the piston to reset while simultaneously resetting the diaphragm. The retaining ring functions similarly to a sliding component, enabling more flexible movement of the elastic reset component. The elastic reset component is a resilient disc. The transmission block is also threaded with an elastic adjusting component 4, positioned on the side of the retaining ring furthest from the elastic reset component, used to adjust the elastic force of the elastic reset component. This arrangement allows for adjustment of the elastic force of the elastic reset component, especially convenient and quick for maintenance, factory settings, or adjustments based on usage requirements. The elastic adjusting component is a nut.

[0027] It should also be noted that the lower connector and diaphragm of this invention can be made of 316L stainless steel or other special materials to ensure that the high-purity system is free from contamination or chemical reactions with special gases; the upper connector, switch fixing sleeve, nut, retaining ring, disc and other structural components can also be made of 316 stainless steel. The specific choice can be made according to actual design and usage requirements; the high-temperature signal processing wire is located inside the stainless steel housing, and a serial connector is used to stably transmit the signal.

[0028] The working process of this utility model's spring-loaded absolute pressure switch for high-purity and high-temperature environments is as follows:

[0029] 1. Pressure Input and Transmission

[0030] The measured medium (e.g., a high-temperature gas or liquid medium) enters the sealed cavity through a 316L stainless steel interface, and pressure is applied to the isolation diaphragm.

[0031] 2. Shrapnel Deformation and Critical Triggering

[0032] Pressure drives the internal disc (the disc is made of a special alloy (such as silver-nickel AgNi) to maintain a stable elastic modulus at 300°C, avoiding thermal deformation that could lead to false triggering) to produce precise deformation;

[0033] Low-pressure stage: When the pressure is lower than the set value, the spring retains its original shape, and the micro switch is in the normally open / normally closed initial state;

[0034] Critical action: When the pressure is greater than or equal to the set value, the spring deformation exceeds the threshold, and the lever mechanism instantly pushes the micro switch contact to achieve circuit switching (response time < 20ms).

[0035] 3. Signal Output and Reset

[0036] Trigger signal: After the micro switch contacts are activated, they output an electrical signal (such as a switch quantity) to control the start / stop or alarm system of the control system;

[0037] Pressure drop: When the pressure drops to the recovery value (set value - switching difference), the spring returns to its original position, the contact returns to its initial state, and a single control cycle is completed.

[0038] 4. High-temperature environment adaptability

[0039] Key features

[0040] Precision control: the tolerance for spring deformation and micro switch linkage is ≤0.01mm, and the pressure repeatability error is ±0.1%.

[0041] Long-term cycle: Optimizes the fatigue strength of the spring sheet (such as corrugated structure), supporting >1 million cycles (≤25 cycles / min working condition).

[0042] It should be noted that the above description of the embodiments is intended to enable those skilled in the art to understand and apply the present invention. Those skilled in the art will readily be able to make various modifications to these embodiments and apply the general principles described herein to other embodiments without inventive effort. Therefore, the present invention is not limited to the embodiments described herein, and any improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the present invention should be within the protection scope of the present invention.

Claims

1. A spring-loaded absolute voltage switch for use in high-purity and high-temperature environments, characterized in that: The assembly includes an upper connector (1) and a lower connector (2). One end of the lower connector is provided with a gas inlet for a high-purity, high-temperature environment, and the other end of the lower connector is fixedly connected to one end of the lower connector. A diaphragm (6) is provided at the connection between the upper and lower connectors. A piston (7) is provided on the surface of the diaphragm near the upper connector for synchronously moving upward or downward when the diaphragm is deformed by a change in absolute pressure. A micro switch (9) is provided in the inner cavity of the upper connector, and the piston contacts the micro switch through a transmission block (8). The connection is made open or closed; a vacuum cover (12) is fixedly provided at the other end of the upper body. The vacuum cover is provided with a vacuum cover terminal that is electrically connected to the lead wire of the micro switch (9) and a capillary tube (14) for absorbing the gas inside the upper body cavity. One end of the capillary tube extends into the upper body cavity and the other end is located outside the upper body cavity. The vacuum cover is also provided with an aviation plug disk (11) and a serial port connector (15) is also provided on the aviation plug disk. The vacuum cover terminal is electrically connected to the serial port connector.

2. The spring-loaded absolute voltage switch for high-purity and high-temperature environments according to claim 1, characterized in that: The micro switch is provided with an alarm contact, which is connected to the micro switch through a switch positioning sleeve (3). The switch positioning sleeve is also connected to a switch pressure sleeve (13) for limiting the position.

3. A spring-loaded absolute voltage switch for high-purity and high-temperature environments according to claim 1, characterized in that: The transmission block is also provided with an elastic reset member (5) and a retaining ring (10), with the elastic reset member disposed between the piston and the retaining ring.

4. A spring-loaded absolute voltage switch for high-purity and high-temperature environments according to claim 3, characterized in that: The elastic reset element is a flexible disc.

5. A spring-loaded absolute voltage switch for high-purity and high-temperature environments according to claim 3, characterized in that: The transmission block is also threaded with an elastic adjustment element (4), which is located on the side of the retaining ring away from the elastic reset element to adjust the elastic force of the elastic reset element.

6. A spring-loaded absolute voltage switch for high-purity and high-temperature environments according to claim 5, characterized in that: The elastic adjusting element is a nut.

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