Ion source adapted to multi-size filament replacement

Abstract

The utility model discloses an ion source suitable for multi -size filament replacement sets up ion source device and ion source device upper surface assembly's pressure disc, include: connecting piece is connected in the upper surface of pressure disc, and the lower surface of connecting piece is installed with the locating pin, and the locating pin is nested in the inner surface of pressure disc, and the inner surface of connecting piece upper and lower side is nested respectively with the heat insulating part, and the inner surface of heat insulating part is nested with the magnetic separation spare. The ion source suitable for multi -size filament replacement sets up the pressure disc of ion source device assembly, and cooperation connecting piece assembly support piece, for the filament body of later period assembly, and cooperation samarium cobalt magnet on connecting piece, control the stability of support piece assembly, and through movable locating's moving part on support piece, and the clamping piece of moving piece assembly, the filament body is clamped, and can adjust the distance between moving piece according to the length of filament body, adapts to the filament body of different size and carries out assembly.

Description

Technical Field

[0001] This utility model relates to the field of ion source technology, specifically to an ion source adaptable to the replacement of filaments of multiple sizes. Background Technology

[0002] The ion source filament is one of the core components of the ion source. During use, it generates thermionic electrons through heating with an electric current. These electrons collide with gas molecules or atoms in the ion source, causing them to ionize and thus forming an ion beam. The filament can be made of different sizes and materials depending on the application, to meet different ionization conditions and adapt to different ion source equipment. However, during use, it is inconvenient to control the stability of the assembly between the filament and the ion source, which can easily lead to unstable filament assembly.

[0003] To overcome the above-mentioned defects, the prior art (Chinese patent application No. CN202222305900.X, application date 20220830) provides a positioning and installation structure for an ion source filament. This structure uses a limiting member to adjust the position of the ion source filament. Since the distance between the limiting member base and the limiting plate is determined based on the distance between the cathode and the cathode clamp, it ensures that after the ion source filament position is adjusted, the distance between the ion source filament and the cathode is the set standard distance. This invention is simple and easy to operate when installing the ion source filament, enabling standardized operations and high-quality ion source filament installation. Furthermore, because the adjustment of the ion source filament position is performed between the cathodes, the operator can visually monitor the entire installation process, further ensuring the installation quality of the ion source filament. While the prior art can position and clamp the filament, its clamping structure has limitations during operation. When assembling filaments of different sizes, it can easily cause assembly instability and makes it inconvenient to quickly replace the filament.

[0004] To address the aforementioned issues, there is an urgent need for innovative designs based on existing ion sources that are adapted to the replacement of filaments of various sizes. Utility Model Content

[0005] The purpose of this invention is to provide an ion source that is adaptable to the replacement of filaments of multiple sizes, in order to solve the problems mentioned in the background art, where the clamping structure has limitations during operation, which can easily lead to unstable assembly and inconvenience in quickly replacing filaments when assembling filaments of different sizes.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an ion source adaptable to the replacement of filaments of multiple sizes, comprising an ion source device and a pressure plate assembled on the upper surface of the ion source device; comprising: a connector connected to the upper surface of the pressure plate, wherein a positioning pin is installed on the lower surface of the connector and the positioning pin is nested in the inner surface of the pressure plate, and heat insulation components are nested on the upper and lower sides of the inner surface of the connector, while a magnetic shielding component is nested on the inner surface of the heat insulation component, and a samarium cobalt magnet is nested on the inner surface of the magnetic shielding component, and a support component is magnetically connected to the upper surface of the connector; a limiting strip installed on the upper surface of the support component, wherein a movable component is slidably connected to the inner surface of the support component, and a handle is elastically connected to the inner surface of the movable component, while a limiting block is installed on the lower surface of the handle and the limiting block is engaged with the limiting strip.

[0007] Preferably, the connectors form a magnetic attraction structure with the pressure plate and the support member through samarium cobalt magnets, and the samarium cobalt magnets form a heat-insulating and magnetic-insulating structure with the connectors through magnetic isolation and heat-insulating members.

[0008] Preferably, the inner surface of the connector is telescopically connected to a pull rod, and a return spring is elastically connected between the pull rod and the connector. A pressing member is installed at the outer end of the pull rod, and a pressing block is obliquely slidably connected to the outer surface of the pressing member. A locking member is installed on the outer surface of the pressing block, and the locking member is limited and locked onto the inner surface of the support member.

[0009] Preferably, the connector and the pull rod form an elastic telescopic structure, and the pull rod forms an oblique sliding extrusion structure with the extrusion member and the extrusion block. The extrusion block is symmetrically arranged about the middle section of the inner surface of the connector. At the same time, the extrusion block and the clamping member form an integrated structure, and the connector forms a limiting engagement structure with the support member through the clamping member.

[0010] Preferably, the limiting strip and the support member form a symmetrical embedded installation arrangement, and the support member and the moving member form a limiting sliding structure. The moving member forms an elastic engaging structure with the limiting strip through the handle and the limiting block, and the contact surface between the limiting block and the limiting strip has a sawtooth meshing structure.

[0011] Preferably, the inner surface of the movable part is rotatably connected to a threaded rod, and the inner surface of the movable part is limited to a lifting connection with a clamping member. A filament body is locked between the clamping member and the movable part. A ratchet is threadedly connected to the upper side of the outer surface of the filament body, and the ratchet is limited to a rotating position on the upper surface of the movable part. Meanwhile, a rotating member is installed on the upper surface of the ratchet, and a pawl is meshed with the outer surface of the ratchet. A protective shell is nested on the outer surface of the pawl.

[0012] Preferably, the moving part forms a lifting structure with the clamping part through the threaded rod, and the moving part forms a clamping structure with the filament body through the clamping part. The contact surface between the moving part and the clamping part has a sawtooth structure. At the same time, the moving part, the ratchet, and the rotating part form a nested rotating structure. The ratchet and the threaded rod form a threaded structure. The ratchet and the pawl form an anti-reverse structure. At the same time, the pawl and the protective shell form a nested structure.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This ion source, adaptable to the replacement of filaments of various sizes, is equipped with a pressure plate for assembling the ion source device and a support component assembled with connectors for subsequent assembly of the filament body. The support component is equipped with a samarium cobalt magnet to control the stability of the assembly. The filament body is clamped by movable positioning components on the support component and clamping components assembled with the movable components. The distance between the movable components can be adjusted according to the length of the filament body to adapt to the assembly of filament bodies of different sizes.

[0015] 2. This ion source, adaptable to the replacement of filaments of various sizes, is equipped with positioning pins for the assembly of connectors. These pins are used for assembly positioning and, in conjunction with the samarium cobalt magnets within the connectors, control the stability of the assembly. When the samarium cobalt magnets are in use, they are encased with heat-insulating and magnetic-insulating components to prevent magnetic leakage from affecting ionization and to prevent high temperatures from damaging the samarium cobalt magnets. Furthermore, the cooperation of the extrusion and locking components within the connectors further improves the stability of the assembly with the support components.

[0016] 3. This ion source, adaptable to replacement of filaments of various sizes, is equipped with a limiting strip for easy positioning and symmetrical assembly. This strip can cooperate with the elastically adjustable limiting block on the moving part to control the positioning of the moving part and adjust its position to accommodate filament bodies of different sizes. Furthermore, through the cooperation of the ratchet gear and the rotating part on the moving part, the threaded control of the clamping part assembled with the threaded rod can move downward to limit and clamp the filament body, improving the stability of the filament body clamping and preventing it from falling off. In addition, the limiting effect of the ratchet gear and pawl prevents the filament body from detaching. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a three-dimensional structural diagram of the present invention;

[0019] Figure 3 This is a three-dimensional structural diagram of the present invention;

[0020] Figure 4 This is a three-dimensional structural diagram of the present invention;

[0021] Figure 5 This is a three-dimensional structural diagram of the present invention;

[0022] Figure 6 This is a three-dimensional structural diagram of the present invention.

[0023] In the diagram: 1. Ion source device; 2. Pressure plate; 3. Connector; 4. Positioning pin; 5. Heat insulation component; 6. Magnetic shielding component; 7. Samarium cobalt magnet; 8. Support component; 9. Pull rod; 10. Extrusion component; 11. Extrusion block; 12. Clamping component; 13. Limiting strip; 14. Moving component; 15. Handle; 16. Limiting block; 17. Threaded rod; 18. Clamping component; 19. Filament body; 20. Ratchet; 21. Rotating component; 22. Pawl; 23. Protective shell. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Please see Figures 1-6 The present invention provides the following technical solution: an ion source adapted to the replacement of filaments of multiple sizes, comprising an ion source device 1 and a pressure plate 2 assembled on the upper surface of the ion source device 1.

[0026] Example 1: As Figures 1-3 The technical solution shown is provided by this utility model as follows: An ion source adaptable to the replacement of filaments of multiple sizes, comprising: a connector 3 connected to the upper surface of a pressure plate 2, with a positioning pin 4 installed on the lower surface of the connector 3 and nested in the inner surface of the pressure plate 2; heat insulation components 5 are nested on the upper and lower sides of the inner surface of the connector 3, and a magnetic shielding component 6 is nested on the inner surface of the heat insulation component 5; a samarium cobalt magnet 7 is nested on the inner surface of the magnetic shielding component 6; and a support component 8 is magnetically connected to the upper surface of the connector 3. Please refer to [link to relevant documentation]. Figure 3 The connector 3, via the samarium cobalt magnet 7, forms a magnetic attraction structure with the pressure plate 2 and the support 8. Furthermore, the samarium cobalt magnet 7, via the magnetic shielding component 6 and the heat insulation component 5, forms a heat-insulating and magnetically shielding structure with the connector 3. (Please refer to...) Figure 3 The inner surface of the connector 3 is telescopically connected to a pull rod 9, and a return spring is elastically connected between the pull rod 9 and the connector 3. A pressing member 10 is installed at the outer end of the pull rod 9, and a pressing block 11 is obliquely slidably connected to the outer surface of the pressing member 10. A locking member 12 is installed on the outer surface of the pressing block 11, and the locking member 12 is locked and limited to the inner surface of the support member 8. Please refer to [link to relevant documentation]. Figure 3 The connector 3 and the pull rod 9 form an elastic telescopic structure, and the pull rod 9 forms an oblique sliding extrusion structure with the extrusion block 11 through the extrusion member 10. The extrusion block 11 is symmetrically arranged about the middle section of the inner surface of the connector 3. At the same time, the extrusion block 11 and the clamping member 12 form an integrated structure, and the connector 3 forms a limiting engagement structure with the support member 8 through the clamping member 12.

[0027] In use, the pressure plate 2 is assembled on the ion source device 1, and the connector 3 is assembled on the pressure plate 2. The connector 3 is stably positioned on the pressure plate 2 and on the lower side of the support 8 by the positioning pins 4 installed on the upper and lower sides. When the connector 3 is assembled, it cooperates with the embedded heat insulation component 5, magnetic shielding component 6 and samarium cobalt magnet 7 to magnetically attach to the pressure plate 2 and the support 8 respectively. When using the samarium cobalt magnet 7, the heat insulation and magnetic shielding of the samarium cobalt magnet 7 can be improved, and the stability of use can be improved. When assembling the support 8, the extrusion block 11 installed on the extrusion clamp 12 is centered and retracted in the connector 3, and the clamp 12 is controlled to slide obliquely to control the retraction of the return spring nested in the extrusion pull rod 9 of the extrusion component 10. After the assembly between the support 8 and the connector 3 is completed, the elasticity of the return spring controls the clamp 12 installed on the extrusion block 11 to be stably engaged on the support 8.

[0028] Example 2: Figure 4 and Figure 5 The technical solution shown, based on Embodiment 1, further discloses a position limiting adjustment for the moving parts 14, thereby controlling the distance between the moving parts 14 to accommodate filament bodies 19 of different sizes for assembly, and improving the ease of adjustment. This solves the problem that existing ion sources are not suitable for filament bodies 19 of multiple sizes. The specific details are as follows: a limiting strip 13 is installed on the upper surface of the support member 8, and the moving parts 14 are slidably connected to the inner surface of the support member 8. A handle 15 is elastically connected to the inner surface of the moving parts 14, and a limiting block 16 is installed on the lower surface of the handle 15, engaging with the limiting strip 13. Please refer to [link to relevant documentation]. Figure 4 and Figure 5 The limiting strip 13 and the support member 8 form a symmetrical embedded installation, and the support member 8 and the moving member 14 form a limiting sliding structure. The moving member 14 forms an elastic engaging structure with the limiting strip 13 through the handle 15 and the limiting block 16. At the same time, the contact surface between the limiting block 16 and the limiting strip 13 has a sawtooth meshing structure.

[0029] In use, the position of the control moving part 14 inside the support part 8 is adjusted according to the required clamping width of the filament body 19. The handle 15 assembled with the moving part 14 can be moved upward, thereby driving the limit block 16 installed on the handle 15 to move upward. This causes the return spring between the handle 15 and the moving part 14 to retract and adjust the position of the moving part 14. When the position meets the clamping requirements of the filament body 19, the handle 15 is released, and the elastic limit block 16 automatically engages with the limit strip 13, improving the stability of the moving part 14 after the spacing is adjusted.

[0030] Example 3: Figure 6 The technical solution shown, based on Embodiment 2, further discloses the stability of the clamping of the filament body 19 by the moving part 14, preventing the filament body 19 from falling off due to unstable clamping during operation, thus solving the problem of unstable assembly of the filament body 19. The specific details are as follows: A threaded rod 17 is rotatably connected to the inner surface of the moving part 14, and a clamping part 18 is connected to the inner surface of the moving part 14 for limiting lifting. The clamping part 18 and the moving part 14 are locked together with the filament body 19. A ratchet 20 is threadedly connected to the upper side of the outer surface of the filament body 19, and the ratchet 20 is limited to rotate on the upper surface of the moving part 14. A rotating part 21 is installed on the upper surface of the ratchet 20, and a pawl 22 is meshed with the outer surface of the ratchet 20. A protective shell 23 is nested on the outer surface of the pawl 22. Figure 6 As shown, the moving part 14 forms a lifting structure with the clamping part 18 through the threaded rod 17, and the moving part 14 forms a clamping structure with the filament body 19 through the clamping part 18. The contact surface between the moving part 14 and the clamping part 18 has a sawtooth structure. At the same time, the moving part 14, the ratchet 20 and the rotating part 21 form a nested rotating structure. The ratchet 20 and the threaded rod 17 form a threaded structure. The ratchet 20 and the pawl 22 form an anti-reverse structure. At the same time, the pawl 22 and the protective shell 23 form a nested structure.

[0031] When replacing the filament body, the ratchet 22 inside the manually adjustable protective shell 23 is positioned and rotated, and the spring between the ratchet 22 and the protective shell 23 is contracted, disengaging the ratchet 22 from the ratchet gear 20. This allows the rotating component 21 assembled on the upper side of the ratchet gear 20 to rotate. The clamping component 18 installed on the lower side of the threaded rod 17 is controlled to move up and down in the moving component 14 through helical rotation, thereby disengaging the clamping component 18 from the filament body 19. When the clamping component 18 is moved to the top of the inner surface of the moving component 14, the ratchet 22 is released, and a new filament body 19 can be replaced. In the reverse direction, the ratchet gear 20 assembled on the rotating component 21 is positioned and rotated in the moving component 14, controlling the vertical sliding of the threaded rod 17 about the moving component 14, controlling the clamping component 18 installed on the threaded rod 17 to move down, limiting and clamping the filament body 19, and through the cooperation of the ratchet 22, preventing disengagement and improving clamping stability.

[0032] The contents not described in detail in this specification are existing technologies known to those skilled in the art.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An ion source adapted to multiple filament replacements, comprising an ion source device (1) and a pressure plate (2) assembled on the upper surface of the ion source device (1); Its features are, include: A connector (3) is connected to the upper surface of the pressure plate (2), and a positioning pin (4) is installed on the lower surface of the connector (3). The positioning pin (4) is nested in the inner surface of the pressure plate (2). A heat insulation component (5) is nested on the upper and lower sides of the inner surface of the connector (3). A magnetic shielding component (6) is nested on the inner surface of the heat insulation component (5). A samarium cobalt magnet (7) is nested on the inner surface of the magnetic shielding component (6). A support component (8) is magnetically connected to the upper surface of the connector (3). A limiting strip (13) is installed on the upper surface of the support member (8), and a movable member (14) is slidably connected to the inner surface of the support member (8). A handle (15) is elastically connected to the inner surface of the movable member (14), and a limiting block (16) is installed on the lower surface of the handle (15), and the limiting block (16) is engaged and connected to the limiting strip (13).

2. An ion source adaptable to multi-size filament replacement according to claim 1, characterized in that: The connector (3) forms a magnetic attraction structure with the pressure plate (2) and the support member (8) through the samarium cobalt magnet (7), and the samarium cobalt magnet (7) forms a heat-insulating and magnetic-insulating structure with the connector (3) through the magnetic shielding member (6) and the heat-insulating member (5).

3. An ion source adaptable to multi-size filament replacement according to claim 1, characterized in that: The inner surface of the connector (3) is telescopically connected to a pull rod (9), and a return spring is elastically connected between the pull rod (9) and the connector (3). A pressing member (10) is installed at the end of the outer surface of the pull rod (9), and a pressing block (11) is obliquely slidably connected to the outer surface of the pressing member (10). A clamping member (12) is installed on the outer surface of the pressing block (11), and the clamping member (12) is limited and locked onto the inner surface of the support member (8).

4. An ion source adaptable to multi-size filament replacement according to claim 3, characterized in that: The connector (3) and the pull rod (9) form an elastic telescopic structure, and the pull rod (9) forms an oblique sliding extrusion structure with the extrusion block (11) through the extrusion member (10). The extrusion block (11) is symmetrically arranged about the middle section of the inner surface of the connector (3). At the same time, the extrusion block (11) and the clamp (12) form an integrated structure, and the connector (3) forms a limiting engagement structure with the support member (8) through the clamp (12).

5. An ion source adaptable to multi-size filament replacement according to claim 1, characterized in that: The limiting strip (13) and the support member (8) form a symmetrical embedded installation, and the support member (8) and the moving member (14) form a limiting sliding structure. The moving member (14) forms an elastic engaging structure with the limiting strip (13) through the handle (15) and the limiting block (16). At the same time, the contact surface between the limiting block (16) and the limiting strip (13) has a sawtooth meshing structure.

6. An ion source adaptable to multi-size filament replacement according to claim 1, characterized in that: The inner surface of the movable part (14) is rotatably connected to a threaded rod (17), and the inner surface of the movable part (14) is limited to lifting and lowering connected to a clamping part (18). The clamping part (18) and the movable part (14) are locked together with a filament body (19). The outer surface of the filament body (19) is threadedly connected to a ratchet gear (20), which limits the rotation of the ratchet gear (20) on the upper surface of the movable part (14). At the same time, a rotating part (21) is installed on the upper surface of the ratchet gear (20), and a pawl (22) is meshed with the outer surface of the ratchet gear (20). At the same time, a protective shell (23) is nested on the outer surface of the pawl (22).

7. An ion source adaptable to multi-size filament replacement according to claim 6, characterized in that: The moving part (14) forms a lifting structure with the clamping part (18) through the threaded rod (17), and the moving part (14) forms a clamping structure with the filament body (19) through the clamping part (18). The contact surface between the moving part (14) and the clamping part (18) has a sawtooth structure. At the same time, the moving part (14), the ratchet (20) and the rotating part (21) form a nested rotating structure. The ratchet (20) and the threaded rod (17) form a threaded structure. The ratchet (20) and the pawl (22) form an anti-reverse structure. At the same time, the pawl (22) and the protective shell (23) form a nested structure.

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