Multiple laser system and laser annealing apparatus and laser crystallization apparatus including the same

Abstract

The utility model provides a kind of multiple laser system and the laser annealing device and laser crystallization device comprising it.The multiple laser system includes: multiple laser light sources, for generating multiple laser beams;Multiple attenuators, for adjusting the energy size of multiple laser beams;Main optical module, by merging multiple laser beams passing through multiple attenuators to output linear light beam;And at least one energy conservation optical system, between multiple attenuators and main optical module, and improve the directivity of laser beam supplied by multiple attenuators.

Description

Technical Field

[0001] This utility model relates to a multi-laser system that generates multiple laser beams, and a laser annealing device and a laser crystallization device including the system. Background Technology

[0002] Polycrystalline silicon exhibits electromobility characteristics tens to hundreds of times higher than those of amorphous silicon. Polycrystalline silicon can be formed by crystallizing amorphous silicon after deposition. Laser crystallization is widely used here, where amorphous silicon is melted by laser irradiation and then solidified, thus crystallizing it into polycrystalline silicon. Laser crystallization can achieve crystallization at relatively low temperatures in a short time. Furthermore, laser systems can also be used for heat treatment.

[0003] Such a laser system may include multiple laser beam generators and an optical system for combining laser beams and giving them the desired cross-section. Utility Model Content

[0004] In order to combine multiple laser beams, the optical path of the laser beam becomes longer, which leads to the problem of reduced laser beam energy.

[0005] The embodiment provides a system that can reduce the energy attenuation of a laser beam and improve the uniformity of a line beam in a multi-laser system.

[0006] One embodiment of a multi-laser system may include: multiple laser sources for generating multiple laser beams; multiple attenuators for adjusting the energy of the multiple laser beams; a main optical module for outputting a line beam by combining the multiple laser beams passing through the multiple attenuators; and at least one energy-conserving optical system located between the multiple attenuators and the main optical module, and for improving the directivity of the laser beams supplied by the multiple attenuators.

[0007] An energy-conserving optical system may include two condenser lenses.

[0008] An energy-conserving optical system may include two elliptical lenses.

[0009] An energy-conserving optical system may include two spherical lenses.

[0010] The main optical module may include the telescope optical system as well as the light transmission and deformation optical system.

[0011] The telescope optical system can supply light transmission and deformation optical systems by amplifying the laser beam supplied by the energy-conserving optical system to the required size.

[0012] Optical transmission and deformation systems can output light by integrating and deforming a laser beam supplied by a telescope optical system into a desired shape.

[0013] Optical transmission and deformation systems can output line beams.

[0014] The telescope optical system may include multiple telescope lens arrays, each corresponding to a multiple laser beam.

[0015] The telescope's optical system may include multiple raw beam monitors.

[0016] Multiple telescope lens arrays may include multiple transfer telescope lenses, multiple mirrors, multiple short-axis telescope lenses, and multiple long-axis telescope lenses.

[0017] An energy-conserving optical system may include two elliptical lenses.

[0018] An energy-conserving optical system may include two spherical lenses.

[0019] The multi-laser system may further include an array of mirrors located between multiple attenuators and the main optical module.

[0020] In an energy-conserving optical system, the lenses and mirrors of the mirror array can be mixed and matched.

[0021] An energy-conserving optical system can be located between multiple attenuators and mirror arrays.

[0022] An energy-conserving optical system may include two condenser lenses, and a mirror array may be located between the two condenser lenses.

[0023] An energy-conserving optical system may include a micro attenuator that extracts only 1% of the energy from multiple laser beams to transmit to a laser beam energy measurement device.

[0024] Such multi-laser systems can be applied to laser annealing devices or laser crystallization devices.

[0025] According to an embodiment, the energy attenuation of a laser beam and the uniformity of a line beam can be reduced by applying an energy-conserving optical system that enhances the directivity of the laser beam in a multi-laser system. Attached Figure Description

[0026] Figure 1 This is a block diagram of a multi-laser system according to one embodiment.

[0027] Figure 2 This is a cross-sectional view of an energy-conserving optical system of a multi-laser system according to one embodiment.

[0028] Figure 3 This is a schematic structural diagram of a multi-laser system according to one embodiment.

[0029] Figure 4 This is a schematic structural diagram of a multi-laser system according to one embodiment.

[0030] Figure 5 This is a schematic structural diagram of a multi-laser system according to one embodiment.

[0031] Figure 6 This is a schematic diagram of a multi-laser system according to one embodiment.

[0032] Figure 7 This is a flowchart illustrating the process of laser crystallization using a multi-laser system according to one embodiment.

[0033] Figure 8 It will be by Figure 5 The graph represents a comparison of the energy intensity distribution along the short axis of the laser beam output by the multi-laser system of the embodiment with that of the laser beam output by a conventional multi-laser system.

[0034] Figure 9 It will be by Figure 5 The graph represents a comparison of the energy intensity distribution along the long axis of the laser beam output by the multi-laser system of the embodiment with that of the laser beam output by a conventional multi-laser system.

[0035] Explanation of reference numerals in the attached figures

[0036] Laser generating section 100, attenuation section 200

[0037] Energy conservation optical system 300; Telescope optical system 400

[0038] 500 light transmission and deformation optical systems

[0039] First energy-conserving lenses: 310, 311, 321, 331, 341, 351, 361, 371, 381, 391, 301

[0040] Second energy conservation lenses 320, 312, 322, 332, 342, 352, 362, 372, 382, ​​392, 302; laser output terminals 101, 102; attenuators 210, 220.

[0041] Miniature attenuators 61, 62

[0042] Telescope lens arrays 410, 420, 430, 440, 450, 460

[0043] Energy conservation lens setting areas R1, R2, R3, R4, R5, R6 Detailed Implementation

[0044] The present invention will now be described in detail with reference to the accompanying drawings, providing a means for those skilled in the art to readily implement it. The present invention can be implemented in many different forms and is not limited to the embodiments described herein.

[0045] To clearly illustrate this utility model, parts unrelated to the description have been omitted, and the same reference numerals are used for the same or similar structural elements throughout the specification.

[0046] Furthermore, for ease of explanation, the size and thickness of the structures shown in the accompanying drawings are arbitrarily illustrated; therefore, this invention is not necessarily limited to the content depicted in the drawings. In the drawings, the thickness is shown enlarged to clearly illustrate multiple layers and regions. Moreover, for ease of explanation, the thickness of some layers and regions is exaggerated in the drawings.

[0047] Furthermore, when referring to a layer, membrane, region, or plate as being "above" or "on top of" another part, this includes not only the case where it is "directly" above another part, but also the case where there is another part between them. Conversely, when referring to a part as being "directly" above another part, it means that there is no other part between them. Additionally, being "above" or "on top of" the part that serves as a reference means being above or below the part that serves as a reference, and does not necessarily mean being "above" or "on top" in the opposite direction of gravity.

[0048] Furthermore, throughout the specification, when a part is referred to as "including" a structural element, in the absence of a specific statement to the contrary, this means that other structural elements may be included, but not excluded.

[0049] Figure 1 This is a block diagram of a multi-laser system according to one embodiment, and Figure 2 This is a cross-sectional view of an energy-conserving optical system of a multi-laser system according to one embodiment.

[0050] One embodiment of the multi-laser system may be a laser annealing device or a laser crystallization device.

[0051] One embodiment of the multi-laser system may include a laser generating unit 100, an attenuator (or attenuator) 200, an energy conservation optical system 300, a telescope optical system 400, and a light transmission and deformation optical system 500.

[0052] The laser generating unit 100 can generate a laser beam and supply the laser beam to the attenuation unit 200. For example, the laser generating unit 100 may include a laser oscillator as a laser source and a window. The laser oscillator can generate a laser beam, which can pass through the window and be supplied to the attenuation unit 200. The laser generating unit 100 may include multiple laser oscillators, each of which can generate a laser beam with the same energy magnitude or the same energy density.

[0053] For example, the laser beam generated by the laser generating unit 100 may have a wavelength of 300 nm to 550 nm, but according to the embodiment, the wavelength of the laser beam may be different. The laser beam generated by the laser generating unit 100 may include P-polarized light and S-polarized light.

[0054] The attenuation unit 200 can adjust the energy of the laser beam generated by the laser generating unit 100 and supply the laser beam with the adjusted energy to the energy conservation optical system 300.

[0055] The energy-conserving optical system 300 enhances the directivity of the laser beam supplied by the attenuator 200 and supplies it to the telescope optical system 400. That is, the energy-conserving optical system 300 allows the laser beam supplied by the attenuator 200 to maintain a constant beam cross-section and propagate in parallel without diffusion or contraction. The energy-conserving optical system 300 can be constructed using one or more optical lenses. For example, such as... Figure 2 As shown, the energy conservation optical system 300 can be configured to include a first energy conservation lens 310 and a second energy conservation lens 320, both of which are convex lenses. The energy conservation optical system 300 can be implemented with the following structure: the first energy conservation lens 310 and the second energy conservation lens 320 are spaced apart by a period equal to the sum of their focal lengths. The first energy conservation lens 310 and the second energy conservation lens 320 can be condensing lenses (e.g., spherical lenses or elliptical lenses). Using an elliptical lens prevents energy from concentrating at a single point, thereby preventing accidents caused by energy concentration. According to embodiments, the number or type of lenses constituting the energy conservation optical system 300 can vary.

[0056] The telescope optical system 400 supplies light to the light transmission and deformation optical system 500 by enlarging the cross-sectional area of ​​a laser beam, which is supplied by the energy-conserving optical system 300 and has enhanced directivity, to the desired size. The telescope optical system 400 may include multiple lenses, multiple mirrors, and multiple splitters, etc.

[0057] The light transmission and deformation optical system 500 can transmit the laser beam supplied by the telescope optical system 400 to the final output unit by deforming it into the desired shape. The laser annealing device or laser crystallization device can output a line beam by deforming the cross-section of the laser beam into a linear shape through the light transmission and deformation optical system 500.

[0058] The telescope optical system 400 and the light transmission and deformation optical system 500 can be collectively referred to as the main optical module.

[0059] Figure 3 This is a schematic structural diagram of a multi-laser system according to one embodiment.

[0060] Figure 3An example could be a multi-laser system that uses two laser oscillators to output line beams and serves as a laser annealing device.

[0061] Figure 3 The multiple laser system may include a laser generator 100, attenuators 210 and 220, energy-conserving lenses 311, 312, 321 and 322, micro attenuators 61 and 62, a telescope optical system 400, and a light transmission and deformation optical system 500.

[0062] The laser generating unit 100 may include laser output terminals 101 and 102 that emit laser beams from two laser oscillators, respectively. The two laser oscillators may be solid-state laser oscillators using solid materials such as ruby, Nd:YAG, or Ti:Sapphire as the oscillation medium. Although the laser generating unit 100 is illustrated as a block, according to embodiments, the individual laser oscillators may be arranged separately.

[0063] Attenuators 210 and 220 can supply energy to the first energy-conserving lenses 311 and 321 respectively by adjusting the energy of the laser beams output from the two laser output terminals 101 and 102.

[0064] The first energy-conserving lenses 311 and 321 can cooperate with the second energy-conserving lenses 312 and 322 to improve the directivity of the laser beam. That is, the first energy-conserving lenses 311 and 321 and the second energy-conserving lenses 312 and 322 constitute an energy-conserving optical system. Miniature attenuators 61 and 62 can be respectively disposed between the first energy-conserving lenses 311 and 321 and the second energy-conserving lenses 312 and 322. The miniature attenuators 61 and 62 are used to determine whether the intensity of the output laser beam is appropriate, extracting only 1% of the energy from the laser beam to transmit to the laser beam energy measuring device. The miniature attenuators 61 and 62 can be omitted; when performing laser annealing or crystallization operations in a multi-laser system, the miniature attenuators 61 and 62 can be placed away from the path of the laser beam.

[0065] The laser beams passing through the second energy-conserving lenses 312 and 322 are supplied to the telescope lens arrays 410 and 420 via a mirror array comprising multiple mirrors M11, M12, M13, M14, M21, M22, M23, and M24.

[0066] The energy-conserving optical system composed of the first energy-conserving lenses 311 and 321 and the second energy-conserving lenses 312 and 322 can also be applied to only a portion of multiple laser beams according to the embodiment. That is, a portion of the first energy-conserving lenses 311 and 321 and the second energy-conserving lenses 312 and 322 can be omitted.

[0067] Of the multiple mirrors M11, M12, M13, M14, M21, M22, M23, and M24 constituting the mirror array, M13 and M23 can split the laser beam and supply a portion of the split laser beam to the original beam monitors RBM1 and RBM2. The original beam monitors RBM1 and RBM2 can be devices that monitor in real time the intensity or shape of the laser beam before it is deformed by the optical system.

[0068] According to the embodiment, the first energy-conserving lenses 311, 321 and the second energy-conserving lenses 312, 322 can be mixed with the mirror array, for example, they can be placed in the middle of the mirror array or on both sides of the mirror array. That is, the first energy-conserving lenses 311, 321 and the second energy-conserving lenses 312, 322 can be placed at appropriate positions within the energy-conserving lens placement areas R1, R2 between the attenuators 210, 220 and the telescope lens arrays 410, 420.

[0069] The telescope lens arrays 410 and 420 included in the telescope optical system 400 supply light to the light transmission and deformation optical system 500 by magnifying the laser beam to the required size.

[0070] The optical transmission and deformation optical system 500 transmits the laser beam supplied by the telescope optical system 400 to the final output unit by integrating and deforming it into the desired shape. The optical transmission and deformation optical system 500 can integrate multiple laser beams from the telescope lens arrays 410 and 420 and deform the cross-section of the laser beams to a linear form to output a line beam. The optical transmission and deformation optical system 500 may include multiple mirrors M15, M6, M25, M7, a beam splitter BS, an energy-sigma monitor (ESM), etc.

[0071] Figure 4 This is a schematic structural diagram of another embodiment of a multi-laser system.

[0072] Figure 4 An example could be a multi-laser system that uses four laser oscillators to output line beams and serves as a laser annealing device.

[0073] Figure 4 The multiple laser system may include a laser generator 100, attenuators 210, 220, 230, 240, energy-conserving lenses 311, 312, 321, 322, 331, 332, 341, 342, micro attenuators 61, 62, 63, 64, a telescope optical system 400, and a light transmission and deformation optical system 500.

[0074] The laser generating unit 100 may include laser output terminals 101, 102, 103, and 104 that emit laser beams from four laser oscillators. The four laser oscillators may be solid-state laser oscillators using solid materials such as ruby, Nd:YAG, or Ti:Sapphire as the oscillation medium. Although the laser generating unit 100 is illustrated as a block, according to embodiments, each laser oscillator may be separately arranged.

[0075] Attenuators 210, 220, 230, and 240 supply the first energy-conserving lenses 311, 321, 331, and 341 respectively by adjusting the energy of the laser beams output from the four laser output terminals 101, 102, 103, and 104.

[0076] The first energy-conserving lenses 311, 321, 331, and 341 can cooperate with the second energy-conserving lenses 312, 322, 332, and 342 to improve the directivity of the laser beam. That is, the first energy-conserving lenses 311, 321, 331, and 341 and the second energy-conserving lenses 312, 322, 332, and 342 constitute an energy-conserving optical system. Miniature attenuators 61, 62, 63, and 64 can be respectively disposed between the first energy-conserving lenses 311, 321, 331, and 341 and the second energy-conserving lenses 312, 322, 332, and 342. The miniature attenuators 61, 62, 63, and 64 are used to determine whether the intensity of the output laser beam is appropriate, extracting only 1% of the energy from the laser beam to transmit to the laser beam energy measuring device. Miniature attenuators 61, 62, 63, and 64 can be omitted. When performing laser annealing or crystallization operations in a multi-laser system, miniature attenuators 61, 62, 63, and 64 can be placed in a position away from the path of the laser beam.

[0077] The laser beams through the second energy-conserving lenses 312, 322, 332, and 342 are supplied to the telescope optical system 400 via a mirror array including multiple mirrors M1 and M2.

[0078] The energy-conserving optical system comprised of the first energy-conserving lenses 311, 321, 331, 341 and the second energy-conserving lenses 312, 322, 332, 342 can, according to the embodiment, be applied to only a portion of the four laser beams. That is, a portion of the first energy-conserving lenses 311, 321, 331, 341 and the second energy-conserving lenses 312, 322, 332, 342 can be omitted.

[0079] According to the embodiment, the first energy-conserving lenses 311, 321, 331, 341 and the second energy-conserving lenses 312, 322, 332, 342 can be mixed with the mirror array, for example, they can be placed in the middle of the mirror array or on both sides of the mirror array. That is, the first energy-conserving lenses 311, 321, 331, 341 and the second energy-conserving lenses 312, 322, 332, 342 can be placed at appropriate positions within the energy-conserving lens placement areas R1, R2, R3, R4 between the attenuators 210, 220, 230, 240 and the telescope optical system 400.

[0080] The telescope optical system 400 may include telescope lens arrays 410, 420, 430, and 440, each corresponding to a plurality of laser beams. The telescope lens arrays 410, 420, 430, and 440 may each include multiple transfer telescope lenses (TLSP) and multiple mirrors M3, M4, M5, M6, and M... RB1 M RB2 Multiple short-axis telescope lenses TSA1, TSA2, multiple long-axis telescope lenses TLA1, TLA2, and raw beam monitor RBM.

[0081] The telescope lens arrays 410, 420, 430, and 440 contain multiple reflecting mirrors M3, M4, M5, M6, and M... RB1 M RB2 A portion of the M5 can split the laser beam and supply a portion of the split laser beam to the original beam monitor (RBM). The original beam monitor (RBM) can be a device that monitors in real time the intensity or shape of the laser beam before it is deformed by the optical system.

[0082] The telescope lens arrays 410, 420, 430, and 440 included in the telescope optical system 400 supply light to the light transmission and deformation optical system 500 by magnifying the laser beam to the required size.

[0083] The light transmission and deformation optical system 500 transmits the laser beam supplied by the telescope optical system 400 to the final output unit by integrating and deforming it into the desired shape. The light transmission and deformation optical system 500 can integrate multiple laser beams from multiple telescope lens arrays 410, 420, 430, 440 and deform the cross-section of the laser beam into a linear shape to output a line beam.

[0084] Figure 5 This is a schematic structural diagram of another embodiment of a multi-laser system.

[0085] Figure 5 An example could be a multi-laser system that uses six laser oscillators to output line beams and serves as a laser annealing device.

[0086] Figure 5 The multiple laser system may include a laser generator 100, attenuators 210, 220, 230, 240, 250, 260, energy-conserving lenses 311, 312, 321, 322, 331, 332, 341, 342, 351, 352, 361, 362, micro attenuators 61, 62, 63, 64, 65, 66, a telescope optical system 400, and a light transmission and deformation optical system 500.

[0087] The laser generating unit 100 may include laser output terminals 101, 102, 103, 104, 105, and 106 that emit laser beams from six laser oscillators respectively. The six laser oscillators may be solid-state laser oscillators using solid materials such as ruby, Nd:YAG, or Ti:Sapphire as the oscillation medium. Although the laser generating unit 100 is illustrated as a block, according to embodiments, each laser oscillator may be separately arranged.

[0088] Attenuators 210, 220, 230, 240, 250, and 260 supply the first energy-conserving lenses 311, 321, 331, 341, 351, and 361 respectively by adjusting the energy of the laser beams output from the six laser output terminals 101, 102, 103, 104, 105, and 106.

[0089] The first energy-conserving lenses 311, 321, 331, 341, 351, and 361 can cooperate with the second energy-conserving lenses 312, 322, 332, 342, 352, and 362 to improve the directivity of the laser beam. That is, the first energy-conserving lenses 311, 321, 331, 341, 351, and 361 and the second energy-conserving lenses 312, 322, 332, 342, 352, and 362 constitute an energy-conserving optical system. Micro attenuators 61, 62, 63, 64, 65, and 66 can be respectively disposed between the first energy-conserving lenses 311, 321, 331, 341, 351, and 361 and the second energy-conserving lenses 312, 322, 332, 342, 352, and 362. Miniature attenuators 61, 62, 63, 64, 65, and 66 are used to determine whether the intensity of the output laser beam is appropriate, extracting only 1% of the energy from the laser beam to transmit to the laser beam energy measurement device. Miniature attenuators 61, 62, 63, 64, 65, and 66 can be omitted. When performing laser annealing or crystallization operations in a multi-laser system, miniature attenuators 61, 62, 63, 64, 65, and 66 can be placed away from the path of the laser beam.

[0090] Laser beams passing through the second energy-conserving lenses 312, 322, and 332 are supplied to the telescope optical system 400 via a mirror array comprising multiple mirrors M1, M2, M3, and M4. Laser beams passing through the second energy-conserving lenses 342, 352, and 362 are supplied to the telescope optical system 400 via a mirror array comprising multiple mirrors M1 and M2.

[0091] The energy-conserving optical system comprised of the first energy-conserving lenses 311, 321, 331, 341, 351, 361 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362 can, according to the embodiment, be applied to only a portion of the six laser beams. That is, a portion of the first energy-conserving lenses 311, 321, 331, 341, 351, 361 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362 can be omitted.

[0092] According to the embodiment, the first energy-conserving lenses 311, 321, 331, 341, 351, 361 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362 can be mixed with the mirror array, for example, they can be placed in the middle of the mirror array or on both sides of the mirror array. That is, the first energy-conserving lenses 311, 321, 331, 341, 351, 361 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362 can be placed at appropriate positions within the energy-conserving lens placement areas R1, R2, R3, R4, R5, R6 between the attenuators 210, 220, 230, 240, 250, 260 and the telescope optical system 400.

[0093] The telescope optical system 400 may include telescope lens arrays 410, 420, 430, 440, 450, and 460, each corresponding to a plurality of laser beams. Telescope lens arrays 410, 420, and 430 may each include multiple transfer telescope lenses SP1, SP2, and SP3, and multiple reflecting mirrors M5, M6, and M7. RB1 M RB2 The system includes multiple short-axis telescope lenses TSA1 and TSA2, multiple long-axis telescope lenses TLA1 and TLA2, and a raw beam monitor (RBM). Telescope lens arrays 440, 450, and 460 may each include multiple transfer telescope lenses SP1, SP2, SP3, and multiple reflectors M3, M4, M5, M6, and M... RB1 M RB2 Multiple short-axis telescope lenses TSA1 and TSA2, multiple long-axis telescope lenses TLA1 and TLA2, and raw beam monitor RBM, etc.

[0094] Multiple reflecting mirrors M5, M6, and M of the telescope lens arrays 410, 420, and 430 RB1 M RB2 And the multiple reflecting mirrors M3, M4, M5, M6, and M of the telescope lens arrays 440, 450, and 460. RB1 M RB2 A portion of the M5 can split the laser beam and supply a portion of the split laser beam to the original beam monitor (RBM). The original beam monitor (RBM) can be a device that monitors the intensity or shape of the laser beam in real time as it passes through the optical system before deformation.

[0095] The telescope lens arrays 410, 420, 430, 440, 450, and 460 included in the telescope optical system 400 supply light to the light transmission and deformation optical system 500 by magnifying the laser beam to the required size.

[0096] The light transmission and deformation optical system 500 transmits the laser beam supplied by the telescope optical system 400 to the final output unit by integrating and deforming it into the desired shape. The light transmission and deformation optical system 500 can integrate multiple laser beams from multiple telescope lens arrays 410, 420, 430, 440, 450, and 460 and deform the cross-section of the laser beam into a linear shape to output a line beam.

[0097] Figure 6 This is a schematic diagram of another embodiment of a multi-laser system.

[0098] Figure 6 An embodiment could be a multi-laser system that uses ten laser generating units 100 to output line beams and serve as a laser crystallization device.

[0099] Figure 6 The multiple laser system may include a laser generator 100, an attenuator 200, energy-conserving lenses 311, 312, 321, 322, 331, 332, 341, 342, 351, 352, 361, 362, 371, 372, 381, 382, ​​391, 392, 301, 302, a telescope optical system 400, and a light transmission and deformation optical system 500.

[0100] Each of the ten laser generating units 100 may include a laser oscillator and emits a laser beam. The laser oscillator may be an excimer laser oscillator.

[0101] The attenuator 200 supplies energy to the first energy-conserving lenses 311, 321, 331, 341, 351, 361, 371, 381, 391, and 301 respectively by adjusting the energy of the laser beams output by each laser generating unit 100.

[0102] The first energy-conserving lenses 311, 321, 331, 341, 351, 361, 371, 381, 391, and 301 can cooperate with the second energy-conserving lenses 312, 322, 332, 342, 352, 362, 372, 382, ​​392, and 302 to improve the directivity of the laser beam. That is, the first energy-conserving lenses 311, 321, 331, 341, 351, 361, 371, 381, 391, and 301 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362, 372, 382, ​​392, and 302 constitute an energy-conserving optical system.

[0103] The laser beams from the second energy-conserving lenses 312, 322, 332, 342, 352, 362, 372, 382, ​​392, and 302 are supplied to the telescope optical system 400.

[0104] The energy-conserving optical system comprised of the first energy-conserving lenses 311, 321, 331, 341, 351, 361, 371, 381, 391, 301 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362, 372, 382, ​​392, 302 can, according to the embodiment, be applied to only a portion of the ten laser beams. That is, a portion of the first energy-conserving lenses 311, 321, 331, 341, 351, 361, 371, 381, 391, 301 and the second energy-conserving lenses 312, 322, 332, 342, 352, 362, 372, 382, ​​392, 302 can be omitted.

[0105] The telescope optical system 400 supplies light to the light transmission and deformation optical system 500 by enlarging the cross-sectional area of ​​a laser beam, which is supplied by the energy-conserving optical system 300 and has enhanced directivity, to the desired size. The telescope optical system 400 may include multiple lenses, multiple mirrors, and multiple splitters, etc.

[0106] The optical transmission and deformation optical system 500 transmits the laser beam supplied by the telescope optical system 400 to the final output unit by deforming it into a desired shape. The laser crystallization device outputs a line beam by deforming the cross-section of the laser beam into a linear shape using the optical transmission and deformation optical system 500. The optical transmission and deformation optical system 500 may include a homogenizer, a telescope lens group, a beam conversion unit, a beam mixing unit, a Fourier lens, etc.

[0107] Figure 7 This is a flowchart illustrating the process of laser crystallization using a multi-laser system according to one embodiment.

[0108] The efficiency and uniformity of the line beam output by the multi-laser system of one embodiment are continuously monitored.

[0109] If the energy efficiency and uniformity of the line beam do not meet the benchmark during monitoring, the curvature or position of the energy-conserving lens (ECO lens) is adjusted to bring the energy efficiency and uniformity of the line beam into compliance with the benchmark.

[0110] Next, confirm whether other process management parameters meet the benchmark. If they do not meet the benchmark, adjust the process management parameter to make it meet the benchmark.

[0111] If the energy efficiency and uniformity of the line beam meet the benchmarks and other process management parameters also meet the benchmarks, then crystallization is performed.

[0112] Table 1 below shows the results of the review of the following table. Figure 4 The results are a comparison of the energy, minor axis width, major axis width, minor axis uniformity, and major axis uniformity of the output line beam (LB) in various applications of the multiple laser system of the embodiment, with the energy, minor axis width, major axis width, minor axis uniformity, and major axis uniformity of the output line beam in the case without the application of the energy-conserving optical system (ECO) (reference).

[0113] [Table 1]

[0114]

[0115] Referring to Table 1, when the energy-conserving optical system is constructed with elliptical lenses and applied to all laser beams L1 to L4, the energy of the output line beam increases by 8.03%, the minor axis width decreases by 2.17%, the major axis width increases by 2.79%, the minor axis uniformity improves by 13.34% (since the values ​​represent energy deviation, a decrease in energy deviation means improved uniformity), and the major axis uniformity improves by 3.92%.

[0116] When the energy-conserving optical system is constructed using elliptical lenses and applied to a portion of the laser beams L1 and L2, the energy of the output line beam increases by 2.04%, the minor axis width remains almost unchanged, the major axis width increases by 2.65%, the minor axis uniformity improves by 22.80%, and the major axis uniformity decreases by 31.97%.

[0117] Table 2 below shows the results of the review of the following table. Figure 5 The energy (average, maximum), minor axis width, and major axis width of the output line beam in various modifications of the multi-laser system of the embodiment are compared with the energy (average, maximum), minor axis width, and major axis width of the output line beam in the case where an energy-conserving optical system (ECO) is not applied (reference).

[0118] [Table 2]

[0119]

[0120] Referring to Table 2, when the energy conservation optical system is constructed with elliptical lenses and applied to all laser beams L1 to L6, the average energy of the output line beam increases by 9.02%, the maximum intensity increases by 14.52%, the minor axis width decreases by 2.71%, and the major axis width increases by 5.66%.

[0121] When the energy-conserving optical system is constructed using spherical lenses and applied to all laser beams L1 to L6, the average energy of the output line beam increases by 4.31%, the maximum intensity increases by 9.48%, the minor axis width decreases by 0.91%, and the major axis width increases by 2.82%.

[0122] Such improvements in the energy intensity and beam width of a line beam can also be achieved in Figure 8 and Figure 9 Confirmed in China. Figure 8 It will be by Figure 5 The graph represents a comparison of the energy intensity distribution along the short axis of the laser beam output by the multi-laser system of the embodiment with that of the laser beam output by a conventional multi-laser system. Figure 9 It will be by Figure 5 The graph represents a comparison of the energy intensity distribution along the long axis of the laser beam output by the multi-laser system of the embodiment with that of the laser beam output by a conventional multi-laser system.

[0123] The embodiments of the present utility model have been described in detail above, but the scope of the present utility model is not limited thereto. Various modifications and improvements made by those skilled in the art using the basic concept of the present utility model as defined in the claims also fall within the scope of the present utility model.

Claims

1. A multi-laser system, comprising: Multiple laser sources are used to generate multiple laser beams; Multiple attenuators are used to adjust the energy of the multiple laser beams; The main optical module outputs a line beam by combining the multiple laser beams that have passed through the multiple attenuators; as well as At least one energy-conserving optical system is located between the plurality of attenuators and the main optical module, and improves the directivity of the laser beam supplied by the plurality of attenuators.

2. The multiple laser system according to claim 1, wherein, The energy-conserving optical system includes two focusing lenses.

3. The multiple laser system according to claim 2, wherein, The energy-conserving optical system includes two elliptical lenses.

4. The multiple laser system according to claim 1, wherein, The main optical module includes a telescope optical system and a light transmission and deformation optical system.

5. The multiple laser system according to claim 4, wherein, The telescope optical system supplies the light transmission and deformation optical system by amplifying the laser beam supplied by the energy-conserving optical system to the required size.

6. The multiple laser system according to claim 5, wherein, The light transmission and deformation optical system outputs light by integrating and deforming a laser beam supplied by the telescope optical system into the desired shape.

7. The multiple laser system according to claim 4, wherein, The telescope optical system includes multiple telescope lens arrays, each corresponding to one of the multiple laser beams.

8. The multiple laser system according to claim 7, wherein, The telescope's optical system includes multiple raw beam monitors.

9. A laser annealing apparatus comprising any one of the multiple laser systems of claims 1 to 8.

10. A laser crystallization apparatus comprising any one of the multiple laser systems of claims 1 to 8.

Images