Monitoring device and gas phase decomposition machine

Abstract

The utility model belongs to the field of semiconductor technology, concretely relates to a monitoring device and gas phase decomposition machine platform. Monitoring device includes: support piece, including connecting portion, the both sides of connecting portion opposite are equipped with first sliding slot and second sliding slot, first clamping assembly includes: first clamping piece, first clamping piece is set up in first sliding slot, second clamping assembly, is set up in second sliding slot, first connecting piece is connected first clamping assembly and second clamping assembly, monitoring element is connected with first connecting piece. The monitoring device and gas phase decomposition machine platform of the application can guarantee the position determination of monitoring element, realize the installation of monitoring element, improve work efficiency.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, specifically relating to a monitoring device and a gas phase decomposition machine. Background Technology

[0002] As the raw material for devices, wafers are contaminated with various metallic impurities during processing, and the surface metal content directly affects the yield of devices. To reduce the surface metal content of wafers, VPD (vapor phase decomposition) equipment is used.

[0003] A vapor-phase decomposition (VPD) instrument is a pretreatment device for testing metallic elements on wafer surfaces. It deploys a vapor-phase decomposition liquid on the wafer surface to extract metallic contaminants, ultimately forming vapor-phase decomposition droplets. The VPD instrument uses a pipette to draw these droplets. During the aspiration process, the pipette remains stationary while the wafer rotates, and the droplets are adsorbed onto the bottom of the pipette by vacuum suction. The VPD instrument then collects the droplets into a container and uses ICP-MS (Inductively Coupled Plasma-Mass Spectrometry) for compositional analysis. The analysis results determine the content of metallic and other contaminant components on the wafer surface.

[0004] Without a monitoring mechanism, the VPD (Vacuum-Pulsed Droplet) machine will not provide any indication when droplets detach from the pipette, continuing to operate until staff notice, leading to droplet collection failure and wasting equipment operating costs and personnel time. Therefore, by installing monitoring equipment such as cameras to monitor the pipette's absorption of vapor-phase decomposition droplets, operating costs and personnel time costs can be reduced.

[0005] In related technologies, the fixed installation location of monitoring equipment leads to a complex disassembly and assembly process, reducing work efficiency. Utility Model Content

[0006] To address the aforementioned technical problems, this utility model provides a monitoring device and a gas phase decomposition machine, which aims to at least partially solve the technical problem that fixed installation locations of monitoring equipment lead to complex disassembly and assembly processes and reduced work efficiency.

[0007] The technical solution of this utility model is as follows: A monitoring device and a gas phase decomposition machine include: a support member including a connecting portion, wherein a first groove and a second groove are formed on opposite sides of the connecting portion; a first clamping assembly including a first clamping member movably disposed within the first groove; a second clamping assembly including a second clamping member movably disposed within the second groove; a first connecting member connecting the first clamping assembly and the second clamping assembly; and a monitoring component connected to the first connecting member; wherein, when the first clamping member is in a first position, the first clamping member abuts against the bottom wall of the first groove, and the second clamping member abuts against the bottom wall of the second groove.

[0008] In some embodiments, the first clamping member can be switched between the first position, the second position, and the third position; the first clamping member is connected to the pulling member; wherein, when the first clamping member is in the second position, the first clamping member is separated from the bottom wall of the first slide groove and is located within the first slide groove, and the second clamping member is separated from the bottom wall of the second slide groove and is located within the second slide groove; when the first clamping member is in the third position, the first clamping member is located outside the first slide groove, and the second clamping member is located outside the second slide groove.

[0009] In some implementations, the first clamping assembly further includes: a mounting base connected to the first connector; and a pull member slidably disposed on the mounting base and connected to the first clamping member.

[0010] In some embodiments, the first clamping assembly further includes a reset member, sleeved on the pull member and located between the mounting base and the first clamping member.

[0011] In some embodiments, the mounting base has a cavity and a through hole communicating with the cavity; the pulling member includes: a limiting part disposed in the cavity; and a pulling part, one end of which is connected at an angle to the limiting part, and the other end of which passes through the through hole and is connected to the first clamping member.

[0012] In some embodiments, the first clamping assembly further includes a limiting member disposed within the cavity and located between the limiting portion and the through hole.

[0013] In some embodiments, the second clamping assembly further includes: a support base connected to the first connector; and a second connector connected at an angle to the support base; wherein the second clamping member is connected to the end of the connector base opposite to the support base.

[0014] In some embodiments, the width of the second clamping member matches the width of the second groove in a direction parallel to the bottom wall of the second groove.

[0015] In some embodiments, the support further includes: a support portion connected at an angle to the connecting portion; and a counterweight portion connected to the end of the support portion opposite to the connecting portion.

[0016] Based on the same inventive concept, this application also provides a gas phase decomposition machine, including the aforementioned monitoring device.

[0017] The beneficial effects of this utility model include at least the following: Because the connecting parts of the support member have a first sliding groove and a second sliding groove on opposite sides, the first clamping member of the first clamping assembly is movably disposed in the first sliding groove, the second clamping member of the second clamping assembly is movably disposed in the second sliding groove, the first connecting member connects the first clamping assembly and the second clamping assembly, and the monitoring member is connected to the first connecting member, therefore, when monitoring is required, the first clamping member and the second clamping member are placed in the first sliding groove and the second sliding groove respectively. At this time, operating the first clamping member causes it to move away from the first sliding groove, so that the first clamping member does not exert force on the bottom wall of the first sliding groove, and the second clamping member does not exert force on the bottom wall of the second sliding groove, allowing the first clamping member to move within the first sliding groove. The second clamping assembly moves within the second slide groove, adjusting the positions of the first and second clamping members within the first and second slide grooves along their length. The first and second clamping members, via the first connecting member, drive the monitoring component to move, aligning it with the monitored object, such as a wafer on a vapor phase separator, ensuring accurate imaging. Then, the first clamping member is operated to position itself in a first position, applying force to the bottom wall of the first slide groove, and the second clamping member applies force to the bottom wall of the second slide groove, clamping the first and second clamping assemblies onto the support member. This ensures the monitoring component is positioned correctly, enabling its installation and improving work efficiency.

[0018] When monitoring is not required or when maintenance of the monitoring device is needed, the first clamping member is operated, moving away from the first slide groove. This prevents the first clamping member from exerting force on the bottom wall of the first slide groove, allowing it to be removed from the first slide groove. Similarly, the second clamping member is removed from the bottom wall of the second slide groove, allowing it to be removed from the second slide groove. In other words, the first clamping member disengages from the first slide groove, and the second clamping member disengages from the second slide groove, enabling the monitoring device to be detached from the support member. This reduces disassembly difficulty, improves work efficiency, avoids moving the entire monitoring device, reduces handling difficulty, and facilitates maintenance of the monitoring device.

[0019] When the monitored object changes, such as a change in the size and / or shape of the wafer, the pulling member moves away from the first slide groove. This prevents the first clamping member from exerting force on the bottom wall of the first slide groove, and the second clamping member from exerting force on the bottom wall of the second slide groove. The operator can move the first clamping member within the first slide groove and the second clamping member within the second slide groove by operating the first clamping member. The positions of the first and second clamping members within the first and second slide grooves can be adjusted along their lengths. Thus, the first and second clamping members drive the monitoring device to move through the first connecting member, allowing the monitoring device to be aligned with the wafer whose size and / or shape has changed. This adaptable to wafers of different sizes and / or shapes further ensures the accuracy of the image capture.

[0020] During the process of the pipette drawing up the vapor phase decomposition droplets, the monitoring device can take pictures of the wafer surface. The monitoring device is electrically connected to the computer component, that is, it can transmit the pictures to the computer host via network cable or data cable to judge the status of the vapor phase decomposition droplets. If the vapor phase decomposition droplets fall off, the user of the vapor phase decomposition machine will be notified through software and network, which plays a timely reminder and notification role. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 These are schematic diagrams of the monitoring devices in some embodiments; Figure 2 for Figure 1 Side view of the monitoring device; Figure 3 This is a schematic diagram of the structure of a gas phase decomposition machine including a monitoring device according to some embodiments; Figure 4 for Figure 1 A schematic diagram of the structure of the first clamping member of the first clamping assembly of the monitoring device located in the first position; Figure 5 for Figure 1 A schematic diagram of the structure of the first clamping member of the first clamping assembly of the monitoring device located in the second position; Figure 6 for Figure 1 A schematic diagram of the structure of the first clamping member of the first clamping assembly of the monitoring device located in the third position; Figure 7 for Figure 1A schematic diagram of the reset component of the first clamping assembly of the monitoring device in an extended state; Figure 8 for Figure 1 A schematic diagram of the reset component of the first clamping assembly of the monitoring device in a compressed state; Figure 9 for Figure 1 A schematic diagram of the structure of the pull component of the monitoring device; Figure 10 for Figure 1 A schematic diagram of the arrangement of the first clamping assembly and the second clamping assembly of the monitoring device; Figure 11 for Figure 1 A schematic diagram of the support structure of the monitoring device; Figure 12 for Figure 11 Side view of the support component.

[0023] In the attached image: Support 10, first slide 11, opening 111, first side wall 112, second side wall 113, bottom wall 114, second slide 12, support part 13, connecting part 14, counterweight part 15; First clamping assembly 20, mounting base 21, chamber 211, through hole 212, pulling member 22, limiting part 221, pulling part 222, first clamping member 23, resetting member 24, limiting member 25; Second clamping assembly 30, support base 31, second connector 32, second clamping member 33; First connector 40; 50 monitoring devices; 60 gas phase decomposer; 70 wafers; 80 straws. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only one partial embodiment of the present utility model, and not the entire embodiment. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model.

[0025] It should be noted that all directional indications in this embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0026] In this utility model, unless otherwise explicitly specified and limited, the terms "connection," "fixing," etc., should be interpreted broadly. For example, "fixing" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the connection of internal components of two elements or the interaction between two elements, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] Furthermore, in this utility model, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0028] By installing monitoring equipment such as cameras to monitor the suction of vapor-phase decomposition droplets by the pipette, the operating costs of the equipment and the time costs of personnel can be reduced. However, in related technologies, the fixed installation location of the monitoring equipment leads to complex assembly and disassembly processes, reducing work efficiency.

[0029] Based on these technical problems, this application provides a monitoring device and a gas phase decomposition machine, aiming to solve the technical problem that the fixed installation position of the monitoring equipment leads to a complicated disassembly and assembly process and reduces work efficiency.

[0030] The design concept of this application is to improve the efficiency of disassembly and assembly of monitoring components by having a first clamping member movably disposed in a first slide groove and a second clamping member movably disposed in a second slide groove.

[0031] Specific technical solutions will now be described in detail with reference to the accompanying drawings, which are not necessarily drawn to scale. Similar or identical reference numerals may be used to designate the same or similar parts in different figures. The use of similar or identical reference numerals in different figures does not mean that all figures including similar or identical reference numerals constitute a single or the same embodiment. The accompanying drawings illustrate the various embodiments discussed in this application in a generalized, illustrative, and not restrictive manner.

[0032] Figure 1 These are schematic diagrams of the monitoring devices in some embodiments; Figure 2 for Figure 1 A side view of the monitoring device. Combined with... Figure 1 and Figure 2The monitoring device according to this application embodiment includes: a support member 10, a first clamping assembly 20, a second clamping assembly 30, a first connecting member 40, and a monitoring member 50. The support member 10 includes a connecting portion 13, with a first sliding groove 11 and a second sliding groove 12 formed on opposite sides of the connecting portion 13. The first clamping assembly 20 includes a first clamping member 23, which is movably disposed within the first sliding groove 11. The second clamping assembly 30 includes a second clamping member 33, which is movably disposed within the second sliding groove 12. The first connecting member 40 connects the first clamping assembly 20 and the second clamping assembly 30. The monitoring member 50 is connected to the first connecting member 40.

[0033] The monitoring device 50 can be a camera, video camera, or webcam. This application does not impose any restrictions on this.

[0034] For example, the connecting portion 14 is in the shape of an "I" to form a first groove 11 and a second groove 12. Combined Figure 11 The first slide groove 11 has an opening 111, a first sidewall 112, a second sidewall 113, and a bottom wall 114. The two ends of the bottom wall 114 are connected to the first sidewall 112 and the second sidewall 113, respectively. The bottom wall 114 is opposite to the opening 111. A first clamping member 23 can pass through the opening 111 into the first slide groove 11. When the first clamping member 23 is located within the first slide groove 11, it is positioned between the first sidewall 112 and the second sidewall 113. The structure of the second slide groove 12 is identical to that of the first slide groove 11.

[0035] Figure 3 This is a schematic diagram of the structure of a gas phase decomposition machine including a monitoring device, according to some embodiments. Figure 1 , Figure 2 and Figure 3Before the suction tube 80 of the gas phase decomposition machine draws in the gas phase decomposition droplets, the support 10 is placed on the platform or a relatively flat position of the gas phase decomposition machine 60. The first clamping member 23 and the second clamping assembly 33 are respectively placed in the first slide groove 11 and the second slide groove 12. At this time, the first clamping member 23 is operated, and the first clamping member 23 moves away from the first slide groove 11, so that the first clamping member 23 does not exert force on the bottom wall 114 of the first slide groove 11, and the second clamping member 33 does not exert force on the bottom wall of the second slide groove 12. This allows the first clamping member 23 to move within the first slide groove 11, and the second clamping member 33 to move within the second slide groove 12. That is, the first clamping member 23 and the second clamping member 33 can be adjusted along the length direction of the first slide groove 11 and the second slide groove 12. The holding member 33 is positioned within the first slide groove 11 and the second slide groove 12, thereby causing the first clamping member 23 and the second clamping member 33 to drive the monitoring member 50 to move along the length direction of the first slide groove 11 and the second slide groove 12 via the first connecting member 40, so that the monitoring member 50 is aligned with the wafer 70 on the gas phase decomposition machine 60, ensuring the accuracy of the image capture. Then, the first clamping member 23 is operated to position the first clamping member 23 in the first position, so that the first clamping member 23 applies a force to the bottom wall 114 of the first slide groove 11, and the second clamping member 33 applies a force to the bottom wall of the second slide groove 12, so that the first clamping assembly 20 and the second clamping assembly 30 are clamped on the support member 10, ensuring the position of the monitoring member 50 is determined, realizing the installation of the monitoring member 50, and improving work efficiency.

[0036] When monitoring is not required or when maintenance of the monitoring device 50 is needed, the first clamping member 23 is operated to move away from the first slide groove 11, so that the first clamping member 23 does not exert force on the bottom wall 114 of the first slide groove 11, allowing the first clamping member 23 to be removed from the first slide groove 11. The second clamping member 33 does not exert force on the bottom wall of the second slide groove 12, allowing the second clamping member 33 to be removed from the second slide groove 12. In other words, the first clamping member 23 is disengaged from the first slide groove 11, and the second clamping member 33 is disengaged from the second slide groove 12, thus allowing the monitoring device 50 to be removed from the support member 10. This reduces the difficulty of disassembly, improves work efficiency, and avoids moving the entire monitoring device, reducing the difficulty of handling and facilitating maintenance of the monitoring device 50.

[0037] When the size and / or shape of the wafer 70 on the vapor phase decomposition machine 60 changes, the first clamping member 23 moves away from the first slide groove 11, so that the first clamping member 23 does not exert force on the bottom wall 114 of the first slide groove 11, and the second clamping member 33 does not exert force on the bottom wall of the second slide groove 12. This allows the first clamping member 23 to move within the first slide groove 11 and the second clamping member 33 to move within the second slide groove 12. Along the length direction of the first slide groove 11 and the second slide groove 12, the positions of the first clamping member 23 and the second clamping member 33 within the first slide groove 11 and the second slide groove 12 are adjusted. Thus, the first clamping member 23 and the second clamping member 33 drive the monitoring member 50 to move through the first connecting member 40, so that the monitoring member 50 is aligned with the wafer 70 on the vapor phase decomposition machine 60 after the size and / or shape has changed. Therefore, the monitoring device of this embodiment can not only adapt to wafers 70 of different sizes and / or shapes, further ensuring the accuracy of the image capture, but also the adjustment process is relatively simple.

[0038] During the process of the pipette 80 drawing up the vapor phase decomposition droplets, the monitoring device 50 can take pictures of the wafer surface. The monitoring device 50 is electrically connected to the computer component, that is, it can transmit the pictures to the computer host via network cable or data cable to judge the status of the vapor phase decomposition droplets. If the vapor phase decomposition droplets fall off, the user of the vapor phase decomposition machine 60 will be notified through software and network, which plays a timely reminder and notification role.

[0039] Figure 4 for Figure 1 A schematic diagram of the structure of the first clamping member 23 of the first clamping assembly of the monitoring device located in the first position; Figure 5 for Figure 1 A schematic diagram of the first clamping member 23 of the first clamping assembly of the monitoring device being located in the second position; Figure 6 for Figure 1 A schematic diagram of the first clamping member 23 of the first clamping assembly of the monitoring device located in the third position. (Combined with...) Figure 4 , Figure 5 and Figure 6 In some embodiments, the first clamping member 23 can switch between a first position, a second position, and a third position. When the first clamping member 23 is in the first position, it abuts against the bottom wall 114 of the first slide groove 11. When the first clamping member 23 is in the second position, it separates from the bottom wall 114 of the first slide groove 11 and is located within the first slide groove 11, while the second clamping member 33 separates from the bottom wall of the second slide groove 12 and is located within the second slide groove 12. When the first clamping member 23 is in the third position, it is located outside the first slide groove 11, and the second clamping member 33 is located outside the second slide groove 12.

[0040] When the monitoring component 50 needs to be installed on the support component 10, the first clamping component 23 is aligned with the first slide groove 11, and the second clamping component 33 is aligned with the second slide groove 12. At this time, the first clamping component 23 is in the third position. The first clamping component 23 is placed into the first slide groove 11, and the second clamping component 33 is placed into the second slide groove 12, causing the pulling component 22 to switch from the third position to the second position. The first clamping component 23 enters the first slide groove 11. Along the length direction of the first slide groove 11 and the second slide groove 12, the positions of the first clamping component 23 and the second clamping component 33 within the first slide groove 11 and the second slide groove 12 are adjusted. The first clamping component 23 and the second clamping component 33 drive the monitoring component 50 to move through the first connecting component 40, so that the monitoring component 50 is aligned with the wafer 70 on the gas phase decomposition machine 60, ensuring the accuracy of the image capture. Next, the first clamping member 23 is switched from the second position to the first position, and the first clamping member 23 abuts against the bottom wall 114 of the first slide groove 11. At the same time, under the condition that the first clamping member 23 applies force to the bottom wall 114 of the first slide groove 11, the second clamping member 33 is driven to move towards the bottom wall of the second slide groove 12 through the first connecting member 40, so that the second clamping member 33 abuts against the bottom wall of the second slide groove 12. The first clamping assembly 20 and the second clamping assembly 30 can be clamped on the support member 10, ensuring that the position of the monitoring member 50 is determined, realizing the installation of the monitoring member 50, and improving work efficiency.

[0041] After the pipette 80 draws up the gas-phase decomposition droplets, when monitoring is not required or when the monitoring device 50 needs to be inspected, the first clamping member 23 is operated to switch from the first position to the third position, causing the first clamping member 23 to disengage from the first slide groove 11. At the same time, the second clamping member 33 is moved away from the bottom wall of the second slide groove 12, causing the second clamping member 33 to disengage from the second slide groove 12. The monitoring device 50 can then be removed from the support member 10, reducing the difficulty of disassembly, improving work efficiency, and avoiding the need to move the entire monitoring device, reducing the difficulty of handling, and facilitating the inspection of the monitoring device 50.

[0042] When the size and / or shape of the wafer 70 on the vapor phase separator 60 changes, the first clamping member 23 is switched from the first position to the second position, and the first clamping member 23 is separated from the bottom wall 114 of the first slide 11. At the same time, the second clamping member 33 can be pulled away from the bottom wall of the second slide 12, so that the second clamping member 33 is separated from the bottom wall of the second slide 12. At this time, the first clamping member 23 is located in the first slide 11, and the second clamping member 33 is located in the second slide 12. Along the length direction of the first slide 11 and the second slide 12, the positions of the first clamping member 23 and the second clamping member 33 in the first slide 11 and the second slide 12 are adjusted. Thus, the first clamping member 23 and the second clamping member 33 drive the monitoring member 50 to move through the first connecting member 40, so that the monitoring member 50 is aligned with the wafer 70 on the vapor phase separator 60 after the size and / or shape has changed. This can adapt to wafers 70 of different sizes and / or shapes, further ensuring the accuracy of the imaging.

[0043] Combination Figure 4 , Figure 5 and Figure 6 In some embodiments, to facilitate switching of the first clamping member 23 between a first position, a second position, and a third position, the first clamping assembly 20 further includes a mounting base 21 and a pull member 22. The mounting base 21 is connected to the first connecting member 40. The pull member 22 is slidably disposed through the mounting base 21 and connected to the first clamping member 23. Operating the pull member 22 causes it to slide within the mounting base 21, thereby actuating the first clamping member 23 and enabling it to switch between the first position, the second position, and the third position.

[0044] Figure 7 for Figure 1 A schematic diagram of the reset component of the first clamping assembly of the monitoring device in an extended state; Figure 8 for Figure 1 A schematic diagram showing the reset component of the first clamping assembly of the monitoring device in a compressed state. (Combined with...) Figure 7 and Figure 8 In some embodiments, to facilitate the contact between the first clamping member 23 and the bottom wall 114 of the first sliding groove 11, the first clamping assembly 20 further includes a reset member 24. The reset member 24 is sleeved on the pulling member 22 and located between the mounting base 21 and the first clamping member 23. The reset member 24 can be a spring.

[0045] The first clamping member 23 is in the first position (connected) Figure 4When the first clamping member 24 is in an extended state, under the elastic force of the first clamping member 24, the first clamping member 23 pushes the first clamping member 23 to abut against the bottom wall 114 of the first slide groove 11. Before the first clamping member 23 switches from the first position to the second position or from the second position to the third position, the pulling member 22 is pulled. The pulling member 22 applies a force to the first clamping member 24 through the first clamping member 23, causing the first clamping member 24 to contract, so that the first clamping member 23 separates from the bottom wall 114 of the first slide groove 11 or the first clamping member 23 disengages from the first slide groove 11.

[0046] In other words, during the process of the first clamping member 23 switching from the second position to the third position, the pulling member 22 pulls the first clamping member 23 away from the bottom wall 114 of the first slide groove 11, so that the first clamping member 23 is located outside the first slide groove 11. At this time, the resetting member 24 is in the first compressed state, and the length of the resetting member 24 along the axial direction of the pulling member 22 is L1. During the process of the first clamping member 23 switching from the first position to the second position, the pulling member 22 pulls the first clamping member 23 away from the bottom wall 114 of the first slide groove 11, so that the first clamping member 23 is separated from the bottom wall of the first slide groove 11. At this time, the resetting member 24 is in the second compressed state. When the resetting member 24 is in the second compressed state, the length of the resetting member 24 along the axial direction of the pulling member 22 is L2, and L2 is greater than L1.

[0047] Before the first clamping member 23 switches from the second position to the first position, or before it switches from the third position to the first position, the pulling member 22 is no longer pulled. Under the elastic restoring force of the resetting member 24, the resetting member 24 extends. That is, the resetting member 24 pushes the first clamping member 23 towards the bottom wall 114 of the first slide groove 11 until the first clamping member 23 abuts against the bottom wall 114 of the first slide groove 11. The resetting member 24 is then in an extended state, so that the first clamping member 23 is in the first position. Along the axial direction of the pulling member 22, the length of the resetting member 24 is L3, where L3 is greater than L2. Therefore, it is easy to understand that when the first clamping member 23 is in the first, second, and third positions, the resetting member 24 is compressed.

[0048] In some embodiments, the two ends of the reset member 24 may be connected to the mounting base 21 and the first clamping member 23, respectively. Of course, in other embodiments, the two ends of the reset member 24 may not be connected to the mounting base 21 and the first clamping member 23, respectively.

[0049] Figure 9 for Figure 1 A schematic diagram of the structure of the pull component of the monitoring device; Figure 10 for Figure 1 A schematic diagram showing the arrangement of the first and second clamping components of the monitoring device. (Combined with...) Figure 4 , Figures 8 to 10 In some embodiments, to prevent the pulling member 22 from detaching from the mounting base 21, the mounting base 21 has a chamber 211 and a through hole 212 communicating with the chamber 211. The pulling member 22 includes a limiting part 221 and a pulling part 222. The limiting part 221 is disposed in the chamber 211. One end of the pulling part 222 is connected to the limiting part 221 at an angle, and the other end passes through the through hole 212 and is connected to the first clamping member 23. The dimensions of both the limiting part 221 and the first clamping member 23 are larger than the dimensions of the through hole 212.

[0050] During the movement of the pulling part 222 from the through hole 212 towards the bottom wall 114 of the first sliding groove 11, for example, after the monitoring component 50 is removed from the support component 10, the reset component 24 may further drive the first clamping component 23 to move further away from the first and third positions. In this case, the cavity wall of the chamber 211 will block the limiting part 221, preventing the limiting part 221 from dislodging from the through hole 212, thereby preventing the pulling part 22 from falling off the mounting base 21. When the pulling part 222 retracts from the through hole 212 to the limit position, for example, when the pulling part 22 is in the third position, the cavity wall of the chamber 211 will block the first clamping component 23, preventing the first clamping component 23 from entering the chamber 211 from the through hole 212, ensuring the stability of the installation of the pulling part 22. In some embodiments, the included angle between one end of the pulling part 222 and the limiting part 221 can be set to 45° to 135°. In this embodiment, the included angle between one end of the pulling part 222 and the limiting part 221 is 90°, that is, one end of the pulling part 222 is perpendicular to the limiting part 221. This is just an example and should not be construed as a limitation of this application.

[0051] In some embodiments, in order to ensure the stability of the pulling member 22's movement, the outer diameter of the pulling part 222 is matched with the diameter of the through hole 212. The hole wall of the through hole 212 can guide and limit the movement of the pulling part 222, so that the pulling part 222 can move along the axial direction of the through hole 212. At the same time, it can prevent the pulling part 222 from moving up and down in the through hole 212.

[0052] Combination Figure 4 and Figure 7In some embodiments, to ensure balance, the monitoring device further includes a limiting member 25. The limiting member 25 is disposed within the chamber 211 and located between the limiting portion 221 and the through hole 212. When the pulling portion 222 extends to its limit position from within the through hole 212, for example, after the monitoring member 50 is detached from the support member 10, the reset member 24 may continue to extend. The limiting member 25 blocks the limiting portion 221 to prevent the pulling portion 222 from continuing to move out of the chamber 211, preventing the first clamping member 23 from protruding too much and ensuring the stability of the first clamping assembly 20. In this case, the length of the reset member 24 along the axial direction of the pulling member 22 is L4, where L4 is greater than L3.

[0053] In some embodiments, the width of the first clamping member 23 matches the width of the first slide groove 11. The width of the first slide groove 11 is the distance between the first sidewall 112 and the second sidewall 113. The width of the first clamping member 23 also refers to the dimension perpendicular to the direction of the first sidewall 112 and the second sidewall 113. It can be understood that the width of the first clamping member 23 is the same as the width of the first slide groove 11, or the width of the first clamping member 23 is slightly smaller than the width of the first slide groove 11 (e.g., the width of the first slide groove 11 can be greater than the width of the first clamping member 23, the width of the first slide groove 11...). The difference between the width of the first clamping member 23 and the width of the first clamping member 23 is within the range of 0.1mm to 0.2mm. The shape of the first clamping member 23 matches the shape of the first slide groove 11. The matching of width and shape allows the first clamping member 23 to move along the length direction of the first slide groove 11 when it moves within the first slide groove 11. The size of the first slide groove 11 restricts the swaying of the first clamping member 23 in the direction perpendicular to the movement direction, and the matching shape further ensures the accuracy of the movement direction, avoiding offset caused by excessive gaps or shape mismatch, and meeting the requirements for clamping position. When the first clamping member 23 moves within the first slide groove 11 or is in a stationary clamping state, the matching size and shape provide good constraint and support. The tight fit between the first clamping member 23 and the groove wall of the first slide groove 11 can effectively absorb and disperse external forces, reduce the vibration and swaying of the first clamping member 23 during movement, and make the clamping operation more stable and reliable. Meanwhile, the matching of size and shape ensures that the first clamping member 23 can be firmly installed in the first slide groove 11 and will not accidentally fall off due to vibration, impact or other external forces during the operation monitored by the monitoring member 50.

[0054] In some other embodiments, the first clamping assembly 20 may include: a mounting base 21, a telescopic member, and a first clamping member 23. The fixed end of the telescopic member is disposed on the mounting base 21, and the moving end of the telescopic member is connected to the first clamping member 23. The moving end of the telescopic member can drive the first clamping member 23 to switch between a first position, a second position, and a third position. The telescopic member may be a hydraulic push rod or an electric push rod.

[0055] Combination Figure 4 , Figure 5 and Figure 10 In some embodiments, to maintain the stability of the monitoring component 50 during installation, the second clamping assembly 30 further includes a support base 31 and a second connector 32. The support base 31 is connected to the first connector 40. The second connector 32 is connected to the support base 31 at an angle. The second clamping member 33 is connected to the end of the second connector 32 that faces away from the support base 31.

[0056] When the monitoring component 50 needs to be installed, the puller 22 is pushed towards the first slide groove 11, so that the first clamping component 23 applies force to the bottom wall 114 of the first slide groove 11. The mounting base 21 drives the support base 31 to move through the first connector 40. The support base 31 drives the second clamping component 33 towards the bottom wall of the second slide groove 12 through the second connector 32, so that the second clamping component 33 applies force to the bottom wall of the second slide groove 12, so that the first clamping component 23 and the second clamping component 33 are clamped on the support component 10, ensuring that the position of the monitoring component 50 is determined, realizing the installation of the monitoring component 50, and improving work efficiency.

[0057] When monitoring is not required or when maintenance of the monitoring component 50 is needed, pulling the puller 22 away from the first slide groove 11 will prevent the first clamping member 23 from exerting force on the bottom wall 114 of the first slide groove 11. By gripping the first connecting member 40, the first connecting member 40 will drive the support base 31 away from the bottom wall of the second slide groove 12. This will allow the second clamping member 33 to move away from the bottom wall of the second slide groove 12, so that the first clamping member 23 can be removed from the first slide groove 11 and the second clamping member 33 can be removed from the second slide groove 12. In other words, the first clamping member 23 is disengaged from the first slide groove 11 and the second clamping member 33 is disengaged from the second slide groove 12, and the monitoring component 50 can be removed from the support member 10. This reduces the difficulty of disassembly, improves work efficiency, and avoids moving the entire monitoring device, reducing the difficulty of handling and facilitating maintenance of the monitoring component 50.

[0058] In some embodiments, the width of the second clamping member 33 matches the width of the second slide groove 12. It is understood that the width of the second clamping member 33 is consistent with the width of the second slide groove 12 or the width of the second clamping member 33 is slightly smaller than the width of the second slide groove 12 (e.g., the width of the second clamping member 33 can be smaller than the width of the second slide groove 12, and the difference between the width of the second clamping member 33 and the width of the second slide groove 12 can be in the range of 0.1mm to 0.2mm). The shape of the second clamping member 33 matches the shape of the second slide groove 12. The matching of size and shape allows the second clamping member 33 to move along the length direction of the second slide groove 12 when it moves within the second slide groove 12. The size of the second slide groove 12 restricts the swaying of the second clamping member 33 in the direction perpendicular to the movement direction, and the matching of shape further ensures the accuracy of the movement direction, avoids the offset caused by excessive gap or shape mismatch, and meets the requirements for clamping position. When the second clamping member 33 moves within the second slide groove 12 or remains stationary, its matching size and shape provide excellent constraint and support. The tight fit between the second clamping member 33 and the groove wall of the second slide groove 12 effectively absorbs and disperses external forces, reducing vibration and shaking during movement and making the clamping operation more stable and reliable. Simultaneously, the matching size and shape ensure that the second clamping member 33 is securely installed within the second slide groove 12 and will not accidentally detach due to vibration, impact, or other external forces during operation monitored by the monitoring component 50.

[0059] In some embodiments, the widths of the first clamping member 23 and the first slide groove 11 in the direction perpendicular to the bottom wall 114 may be the same or different. For example, in the direction perpendicular to the bottom wall 114, the width of the first clamping member 23 is smaller than the width of the first slide groove 11. In some embodiments, the widths of the second clamping member 33 and the second slide groove 12 in the direction perpendicular to the bottom wall 114 may be the same or different. For example, in the direction perpendicular to the bottom wall 114, the width of the second clamping member 33 is smaller than the width of the second slide groove 12.

[0060] Figure 11 for Figure 1 A schematic diagram of the structure of the support component 10 of the monitoring device; Figure 12 for Figure 11 Side view of the support member 10. Combined with... Figure 11 and Figure 12 In some embodiments, in order to ensure the stability of the support, the support member 10 further includes a support portion 13, which is connected to the connecting portion 14 at an angle.

[0061] In some embodiments, the included angle between the connecting part 14 and the supporting part 13 can be set from 45° to 135°. In this embodiment, the included angle between the connecting part 14 and the supporting part 13 is 90°, that is, the connecting part 14 and the supporting part 13 are set perpendicularly. This should not be construed as a limitation of this application.

[0062] Combination Figure 11 and Figure 12 In some embodiments, to ensure the stability of the support member 10 during installation, the support member 10 further includes a counterweight 15. The counterweight 15 is connected to the end of the support member 13 opposite to the connecting part 14. The counterweight 15 provides counterweight, and its placement can adjust the overall center of gravity of the support member 10, ensuring that the center of gravity of the support member 10 falls to the bottom. This enhances the balance of the support member 10 after installation, reduces tilting or swaying caused by center of gravity shift, and allows the support member 10 to more stably support the monitored component 50. The counterweight 15 ensures the stable installation of the support member 10, provides a stable support platform for the monitored component 50, reduces positional shifts or posture changes of the monitored component 50 caused by the swaying of the support member 10, thereby improving the working accuracy and performance of the monitored component 50.

[0063] The counterweight 15 increases the mass of the support member 10. According to the principle of inertia, the greater the mass, the stronger the object's ability to resist changes in its state of motion. Therefore, the counterweight 15 can reduce the swaying amplitude of the support member 10 when subjected to external forces, reducing the impact of vibration on the installation stability of the support member 10. In practical applications, the support member 10 may be subjected to external disturbances such as wind force and human impact. The counterweight 15 increases the weight of the support member 10, improving its resistance to external disturbances. Even when subjected to an impact of a certain magnitude, the support member 10 can maintain a relatively stable position and posture, and is not prone to displacement or tipping, ensuring the safety of the monitoring component 50.

[0064] Based on the same inventive concept, this application also proposes a gas phase decomposition machine, which adopts the aforementioned monitoring device. The specific structure of the monitoring device is as described in the above embodiments. Since the monitoring device adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be elaborated here.

[0065] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0066] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0067] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0068] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0069] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A monitoring device, characterized in that, include: The support member includes a connecting part, wherein a first sliding groove and a second sliding groove are provided on opposite sides of the connecting part; The first clamping assembly includes a first clamping member, which is movably disposed within the first sliding groove; The second clamping assembly includes a second clamping member, which is movably disposed within the second slide groove; A first connector connects the first clamping assembly and the second clamping assembly; The monitoring component is connected to the first connector. When the first clamping member is in the first position, the first clamping member abuts against the bottom wall of the first slide groove, and the second clamping member abuts against the bottom wall of the second slide groove.

2. The monitoring device according to claim 1, characterized in that, The first clamping member can switch between the first position, the second position, and the third position; Specifically, when the first clamping member is located in the second position, the first clamping member is separated from the bottom wall of the first slide groove and is located inside the first slide groove, and the second clamping member is separated from the bottom wall of the second slide groove and is located inside the second slide groove; when the first clamping member is located in the third position, the first clamping member is located outside the first slide groove, and the second clamping member is located outside the second slide groove.

3. The monitoring device according to claim 1, characterized in that, The first clamping component also includes: The mounting base is connected to the first connector. The pull member is slidably inserted into the mounting base and connected to the first clamping member.

4. The monitoring device according to claim 3, characterized in that, The first clamping component further includes: A reset member is sleeved on the pull member and located between the mounting base and the first clamping member.

5. The monitoring device according to claim 3, characterized in that, The mounting base has a cavity and a through hole communicating with the cavity; the pulling member includes: A limiting part is provided in the cavity; The pulling part has one end connected at an angle to the limiting part, and the other end passing through the through hole and connected to the first clamping member.

6. The monitoring device according to claim 5, characterized in that, The first clamping component further includes: A limiting member is disposed within the cavity and located between the limiting portion and the through hole.

7. The monitoring device according to any one of claims 1-6, characterized in that, The second clamping assembly further includes: The support base is connected to the first connector; The second connector is connected at an angle to the support base; The second clamping member is connected to the end of the second connecting member that is away from the support base.

8. The monitoring device according to claim 7, characterized in that, In a direction parallel to the bottom wall of the second groove, the width of the second clamping member matches the width of the second groove.

9. The monitoring device according to any one of claims 1-6, characterized in that, The support member also includes: The support portion is connected at an angle to the connecting portion; and The counterweight is connected to the end of the support that is opposite to the connecting part.

10. A gas phase decomposition apparatus, characterized in that, Includes the monitoring device as described in any one of claims 1-9.

Images