Substrate container for automated handling

Abstract

The application relates to a substrate container for automated handling, which can be gripped and carried by a gripper, and comprises a container body, an adapter member and a connecting head. The container body comprises a top plate, a bottom plate, a pair of side plates and a back plate. The top plate and the bottom plate are oppositely arranged, each side plate is oppositely arranged, and the back plate is connected between the top plate, the bottom plate and each side plate to jointly form a container cavity. The adapter member is fixed to one side of each side plate away from the bottom plate and the top plate. The connecting head is fixed to one side of the adapter member away from the container body to be gripped by the gripper. Therefore, the structural strength of the top of the substrate container can be strengthened through the adapter member, so that the container body is prevented from being deformed or broken due to the excessive weight of the substrate container when the connecting head is gripped by the gripper.

Description

[0001] This application claims priority to Taiwan Patent Application No. 114205573, filed on June 2, 2025, the entire contents of which are incorporated herein by reference. Technical Field

[0002] This application relates to a substrate container in the semiconductor field, and more particularly to a substrate container that can be used for automated handling. Background Technology

[0003] With the booming development of industry, in order to reduce labor costs, assembly time and production costs, and effectively improve production efficiency and yield, many manufacturers have gradually introduced semi-automated and automated devices and equipment. Common semi-automated or automated equipment in transportation systems includes conveyors, Automated Guided Vehicles (AGVs), Autonomous Mobile Robots (AMRs), and Overhead Hoist Transfer (OHT) systems, etc. Among them, OHT systems erect tracks in the air (such as on the ceiling) and use lifting devices to drive belts or steel cables to lift and lower, allowing gripping devices to pick up or place items and transport them to the required location on the tracks. This achieves stable and fast material handling and effectively utilizes indoor space without occupying ground space.

[0004] In the semiconductor industry, substrate containers are commonly used to hold multiple substrates such as wafers, glass substrates, or printed circuit boards. This allows for the batch transfer of multiple substrates to the required location or different processing stages, and protects the internal substrates from contamination or damage during transport. A typical substrate container, when loaded with multiple substrates, often weighs over ten kilograms. Therefore, substrate containers are mostly made of plastic to effectively reduce weight and ease the burden during handling. However, when substrate containers are used in OHT (Out-of-Touch) operations, because the containers are made of plastic, the excessive weight of the container can easily cause deformation or breakage of the top and sides of the container after the gripping device has grasped it.

[0005] In view of this, the applicant has devoted himself to researching and applying theoretical principles to address the shortcomings of the prior art, and has made every effort to solve the aforementioned problems, which has become the target of the applicant's improvement. Utility Model Content

[0006] The main purpose of this application is to strengthen the structural strength of the top of the substrate container by means of the adapter component, thereby preventing the container body from deforming or breaking due to the excessive weight of the substrate container after the gripper has gripped the connector.

[0007] To achieve the above objectives, this application provides a substrate container for automated handling, which can be gripped and transported by grippers. The substrate container for automated handling includes a container body, a connecting component, and a connector. The container body includes a top plate, a bottom plate, a pair of side plates, and a back plate. The top plate and the bottom plate are arranged opposite to each other, and the side plates are arranged opposite to each other. The back plate is connected between the top plate, the bottom plate, and the side plates to form a cavity. The connecting component is fixed to the side of each side plate away from the bottom plate and to the top plate. The connector is fixed to the side of the connecting component away from the container body for gripping by the grippers.

[0008] In one embodiment of this application, a plurality of first bolts are also included, the top plate has a plurality of first studs, and each first bolt passes through the adapter and is locked to each first stud.

[0009] In one embodiment of this application, a plurality of second bolts are also included, each side plate having a plurality of second studs, each second bolt passing through a transition member and locked to each second stud.

[0010] In one embodiment of this application, each second stud is located on the side of the corresponding side plate away from the base plate.

[0011] In one embodiment of this application, each side plate also has a plurality of ribs, each rib extending from each second stud toward the base plate.

[0012] In one embodiment of this application, the connector includes an additional circuit board and a plurality of extension posts, each extension post extending from the additional circuit board and abutting against the adapter member.

[0013] In one embodiment of this application, a plurality of third bolts are also included, the adapter having a plurality of screw holes, each third bolt passing through the additional circuit board and each extension post and locked in the screw hole.

[0014] In one embodiment of this application, a gap is formed between the additional circuit board and the adapter member to allow the grippers to grasp the additional circuit board.

[0015] In one embodiment of this application, a pair of handles are also included, each handle being located at both ends of the adapter and sandwiched between the container body and the adapter.

[0016] In one embodiment of this application, the adapter has a plurality of limiting slots, each handle has a pair of steps, each limiting slot is formed on the side of the adapter facing the container body, and each limiting slot covers and restricts each step.

[0017] In one embodiment of this application, the adapter has a plurality of positioning pins, each step has a positioning hole, and each positioning pin is located in a limiting slot and passes through the corresponding positioning hole.

[0018] In one embodiment of this application, the adapter has multiple through slots.

[0019] In one embodiment of this application, the adapter has a plurality of protruding walls, each protruding wall being disposed on the side of the adapter away from the container body and surrounding each through slot and the periphery of the adapter.

[0020] In one embodiment of this application, the adapter has a protruding wall disposed on the side of the adapter away from the container body and surrounding the periphery of the adapter.

[0021] In one embodiment of this application, the adapter is made of plastic, plastic steel, metal, or metal alloy.

[0022] The substrate container for automated handling described in this application is simultaneously fixed to the side of each side plate away from the bottom plate and the top plate via an adapter component. This strengthens the structural strength of the top of the substrate container and prevents the container body from deforming or breaking due to excessive weight of the substrate container after the gripper has gripped the connector. Attached Figure Description

[0023] Figure 1 This is a three-dimensional view of the present application.

[0024] Figure 2 This is a side view of the application of this invention in automated material handling.

[0025] Figure 3 This is an exploded perspective view of this application.

[0026] Figure 4 This is an exploded perspective view of the container body and the connecting component of this application.

[0027] Figure 5 This is an exploded perspective view of the container body, adapter components, and connectors of this application.

[0028] Figure 6 This is a three-dimensional view of the application without the handle installed.

[0029] Figure 7 This is an exploded perspective view of the adapter components and handles in this application.

[0030] Figure 8 This is a three-dimensional sectional view of the adapter components and handles in this application.

[0031] Explanation of reference numerals in the attached figures:

[0032] 10: Container body;

[0033] 11: Top slab;

[0034] 111: First stud;

[0035] 12: Base plate;

[0036] 13: Side panels;

[0037] 131: Second stud;

[0038] 132: step difference;

[0039] 133: Ribs;

[0040] 14: Back panel;

[0041] 15: cavity;

[0042] 16: Opening;

[0043] 20: Adapter components;

[0044] 21: Groove;

[0045] 22: Screw hole;

[0046] 23: Limiting slot;

[0047] 24: Positioning pin;

[0048] 25: Through slot;

[0049] 26: Protruding wall;

[0050] 30: Connector;

[0051] 31: Additional circuit board;

[0052] 32: Extended column;

[0053] 40: Handle;

[0054] 41: Steps;

[0055] 411: Positioning hole;

[0056] 91: First bolt;

[0057] 92: Second bolt;

[0058] 93: Third bolt;

[0059] A: Gripper;

[0060] B: Steel cable;

[0061] G: Gap. Detailed Implementation

[0062] In the description of this application, it should be understood that the terms "front side", "rear side", "left side", "right side", "front end", "rear end", "end", "longitudinal", "lateral", "vertical", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0063] As used herein, terms such as “first,” “second,” “third,” “fourth,” and “fifth” describe various components, parts, regions, hierarchies, and / or sections, which should not be limited by these terms. These terms are used only to distinguish one element, component, region, hierarchy, or section from another. Unless the context clearly indicates otherwise, the use of terms such as “first,” “second,” “third,” “fourth,” and “fifth” herein does not imply order or sequence.

[0064] Unless otherwise defined herein, terms such as "substantially" and "approximately" are used to describe and narrate small changes. When used in the context of an event or situation, these terms may include the exact moment the event or situation occurred, or an approximate point in time. For example, when used in the context of a numerical value, these terms may include a range of variation less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

[0065] The detailed description and technical content of this application will be explained below with reference to the accompanying drawings. However, the accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application.

[0066] Please see Figure 1 and Figure 2 As shown, this application provides a substrate container for automated handling, which can be gripped and transported by the grippers A of an Overhead Hoist Transfer (OHT) system, thereby transferring the substrate container to different processing locations. The OHT system uses a track (not shown) mounted on the ceiling for transport, and connects the grippers A via a suspension method (such as a steel cable B or belt). Please refer to [further details omitted]. Figures 3 to 6 As shown, the automated handling substrate container of this application mainly includes a container body 10, a transfer component 20, and a connector 30.

[0067] In this embodiment, the container body 10 is made of plastic to effectively reduce weight, but this application is not limited thereto. The container body 10 includes a top plate 11, a bottom plate 12, a pair of side plates 13, and a back plate 14. The top plate 11 and the bottom plate 12 are arranged opposite each other on the upper and lower sides, while the side plates 13 are arranged opposite each other on the left and right sides. The back plate 14 connects the top plate 11, the bottom plate 12, and the side plates 13, thereby forming a cavity 15 therein to accommodate multiple substrates (not shown in the figure). Specifically, the substrates can be wafers, glass substrates, or printed circuit boards, etc., and this application does not impose any restrictions on them. In this embodiment, an opening 16 is formed on the front side of the container body 10 to allow each substrate to be placed into the cavity 15, and each substrate is a wafer, that is, the container body 10 in this embodiment is a front-opening unified pod (FOUP). However, this application is not limited to the above description. For example, the container body 10 may also be in the form of a side-opening type, a top-opening type, or a bottom opening 16. Furthermore, the opening 16 of the container body 10 can be fitted with a removable door panel (not shown in the figure), which is well known to those skilled in the art and will not be described in detail here.

[0068] The adapter component 20 is made of plastic, PVC, metal, or a metal alloy, thus possessing good structural strength. For example, the plastic can be a high-strength plastic material such as polyoxymethylene (POM), polyetheretherketone (PEEK), or polyphenylene sulfide (PPS), while the metal alloy can be a lightweight high-strength alloy such as aluminum alloy or titanium alloy, thus giving the adapter component 20 the advantages of both high strength and lightweight. The adapter component 20 is fixed to the side of each side plate 13 away from the bottom plate 12 and the side of the top plate 11 away from the bottom plate 12. In other words, the center of the adapter 20 is fixed to the top plate 11, while both ends of the adapter 20 are fixed to the side plates 13. That is, the adapter 20 of this application is fixed to both the top plate 11 and the side plates 13, rather than only to the top plate 11. This allows the adapter 20 to distribute stress to both the top plate 11 and the side plates 13, thereby increasing tensile strength. The specific fixing method and detailed structure of the adapter 20 will be explained later and will not be repeated here.

[0069] The connector 30 is fixed to the side of the adapter 20 away from the container body 10, so as to be gripped by the gripper A. In other words, the connector 30 is only connected and fixed to the adapter 20 and not directly connected and fixed to the container body 10. The connector 30 can be a commercially available standard component or a self-made component that matches the gripper A of the OHT system, as long as it can be gripped by the gripper A of the OHT system. This application does not impose any restrictions on this. In this way, by fixing the adapter 20 to the side plates 13 away from the bottom plate 12 and the top plate 11 away from the bottom plate 12 at the same time, and by fixing the connector 30 only to the adapter 20 and not directly connected and fixed to the container body 10, the structural strength of the top of the substrate container can be effectively strengthened, thereby preventing the top plate 11 or the side plates 13 of the container body 10 from deforming or breaking due to the excessive weight of the substrate container after the gripper A grips the connector 30. More specifically, since the adapter component 20 is fixed to both the side plates 13 away from the bottom plate 12 and the top plate 11 away from the bottom plate 12, the tensile force applied by the gripper A to the connector 30 can be distributed to the top plate 11 and the side plates 13 through the adapter component 20, rather than being concentrated only on the top plate 11. This effectively prevents deformation or breakage of the container body 10. Furthermore, since both ends of the adapter component 20 are fixed to the side plates 13 respectively, and each side plate 13 is parallel to the tensile force applied by the gripper A to the connector 30, each side plate 13 provides the adapter component 20 with good tensile strength to withstand greater tensile forces.

[0070] Further explanation: The adapter component 20 is fixed to the container body 10 by locking or snapping. In this embodiment, the adapter component 20 is fixed to the container body 10 by locking. Specifically, the substrate container for automated handling of this application also includes a plurality of first bolts 91 and a plurality of second bolts 92. The top plate 11 of the container body 10 has a plurality of first studs 111, and each side plate 13 has a plurality of second studs 131. In this embodiment, there are two first studs 111, which are approximately located at the center of the adapter component 20, and there are also two second studs 131 on each side plate 13. However, this application is not limited to this, and the number and position of the first studs 111 and the second studs 131 can be adjusted accordingly as needed. Each first bolt 91 passes through the adapter 20 and is locked to each first stud 111, and each second bolt 92 passes through the adapter 20 and is locked to each second stud 131, thereby simultaneously locking the adapter 20 to the top plate 11 and each side plate 13 of the container body 10. More specifically, each first stud 111 is located on the side of the top plate 11 away from the bottom plate 12, and each second stud 131 is located on the side of its corresponding side plate 13 away from the bottom plate 12.

[0071] In this embodiment, the bottom of the adapter 20 has a plurality of grooves 21 formed at each of the first studs 111 corresponding to the top plate 11 (see...). Figure 7 The first studs 111 are accommodated in the grooves 21, which not only positions the adapter member 20 relative to the container body 10, but also allows the bottom of the adapter member 20 to rest flat against the top plate 11 of the container body 10 without gaps. Furthermore, in this embodiment, each side plate 13 has a step 132 formed on the side away from the bottom plate 12 (i.e., the connection between each side plate 13 and the top plate 11). The second studs 131 on each side plate 13 are located on the corresponding step 132 and are approximately flush with the top plate 11. This allows both ends of the adapter member 20 to rest flat against the second studs 131, further reducing the weight of the container body 10. However, this application is not limited to this. For example, the adapter member 20 may also have grooves formed at each second stud 131 corresponding to each side plate 13, allowing each second stud 131 to be accommodated in the groove. This eliminates the need for a step at the connection between each side plate 13 and the top plate 11.

[0072] Furthermore, each side plate 13 also has a plurality of ribs 133 corresponding to each second stud 131. Each rib 133 extends from each second stud 131 toward the base plate 12, thereby enhancing the structural strength of each side plate 13 to prevent deformation. Specifically, each rib 133 on each side plate 13 is formed on the side away from the other side plate 13. In this embodiment, each rib 133 is substantially a long rectangular body extending vertically from the corresponding second stud 131 toward the base plate 12, but this application is not limited to this. For example, each rib 133 may also extend obliquely or gradually narrow from the corresponding second stud 131 toward the base plate 12, as long as it can enhance the structural strength of the corresponding side plate 13 and effectively prevent deformation.

[0073] Further explanation: In this embodiment, the connector 30 includes an additional circuit board 31 and a plurality of extension posts 32. Each extension post 32 extends from the bottom of the additional circuit board 31, and each extension post 32 abuts against the adapter member 20, forming a gap G between the additional circuit board 31 and the adapter member 20, so that the gripper A can grip the additional circuit board 31 without interference. The connector 30 is fixed to the adapter member 20 by locking or snapping. In this embodiment, the connector 30 is fixed to the adapter member 20 by locking. Specifically, the substrate container for automated handling of this application also includes a plurality of third bolts 93. The adapter member 20 has a plurality of screw holes 22. Each screw hole 22 is formed on the side of the adapter member 20 facing the connector 30 (i.e., the side of the adapter member 20 away from the container body 10), and each screw hole 22 is correspondingly offset from each other around the periphery of each first stud 111 and each first bolt 91. Each third bolt 93 is sequentially inserted through the additional circuit board 31 of the connector 30 and each extension post 32 and locked in each screw hole 22, thereby securely locking the connector 30 onto the adapter 20.

[0074] Please continue reading. Figure 1 , Figure 3 , Figure 7 and Figure 8 As shown, to facilitate manual extraction of the substrate container by operators, the substrate container for automated handling in this application further includes a pair of handles 40. Each handle 40 is disposed at both ends of the adapter member 20, and each handle 40 is clamped between the container body 10 and the adapter member 20. Specifically, the adapter member 20 in this embodiment has multiple limiting slots 23, and each handle 40 has a pair of steps 41. Each limiting slot 23 is formed on the side of the adapter member 20 facing the container body 10, and each limiting slot 23 is located at one of the four corners of the adapter member 20. However, the number and position of the limiting slots 23 are not limited thereto, and those skilled in the art should be able to make corresponding adjustments according to different needs. Each handle 40 is generally arched, and each step 41 of each handle 40 is formed at both ends of the handle 40. Each limiting slot 23 of the adapter 20 covers and restricts the steps 41 of each handle 40, thereby restricting each handle 40 between the adapter 20 and the container body 10. More specifically, each handle 40 is arranged substantially perpendicular to both ends of the adapter 20, so that each step 41 of each handle 40 can be restricted within the limiting slot 23.

[0075] To further explain, each handle 40 can be fixed and restricted to the adapter member 20 by means of snapping, fitting, locking, etc. In this embodiment, each handle 40 is fixed and restricted to the adapter member 20 by fitting. Specifically, the adapter member 20 has a plurality of positioning pins 24, and each step 41 has a positioning hole 411. Each positioning pin 24 is located in a limiting groove 23 at the bottom of the adapter member 20, and each positioning pin 24 passes through a corresponding positioning hole 411 to achieve a positioning and locking effect. However, the fitting method between each handle 40 and the adapter member 20 is not limited to this, for example, depending on the design and usage requirements.

[0076] See also Figures 3 to 5 and Figures 7 to 8 As shown, to effectively reduce the weight of the adapter component 20, the adapter component 20 in this embodiment has multiple through slots 25. Each through slot 25 is generally rectangular and formed between each first bolt 91, each second bolt 92, and each third bolt 93. That is, each through slot 25 is offset from each first bolt 91, each second bolt 92, and each third bolt 93. However, this application does not impose any restrictions on this, and the position and shape of each through slot 25 should be adjusted accordingly according to different needs. Furthermore, to effectively increase the structural strength of the adapter component 20, the adapter component 20 in this embodiment has multiple protruding walls 26. Each protruding wall 26 is provided on the side of the adapter component 20 away from the container body 10 (i.e., the side facing the connector 30), and each protruding wall 26 surrounds each through slot 25 and the periphery of the adapter component 20. In this way, the structural strength of the adapter component 20 can be enhanced without excessively increasing its own weight, thereby preventing the adapter component 20 from being deformed or damaged by the pulling force when the gripper A clamps the connector 30.

[0077] The substrate container for automated handling of this application is simultaneously fixed to the side of each side plate 13 away from the bottom plate 12 and the top plate 11 by the adapter component 20. Therefore, the structural strength of the top of the substrate container can be strengthened, thereby preventing the container body 10 from deforming or breaking due to the excessive weight of the substrate container after the gripper A grips the connector 30.

[0078] In summary, the foregoing disclosure of this application is intended to enable those skilled in the art to clearly understand the technical content of this application and implement it accordingly, and is not intended to limit the scope of patent protection of this application. In addition, this application may of course have other embodiments not listed. Without departing from the spirit and substance of this application, those skilled in the art should be able to devise various corresponding changes and modifications based on this application, but all such corresponding changes and modifications should fall within the scope of protection of the patent claimed in this application.

Claims

1. A substrate container for automated handling, characterized in that, The substrate container for automated handling includes: [The container is designed for gripper gripping and transporting.] The container body includes a top plate, a bottom plate, a pair of side plates and a back plate. The top plate and the bottom plate are arranged opposite to each other, and the side plates are arranged opposite to each other. The back plate is connected between the top plate, the bottom plate and the side plates to form a cavity. The adapter component is fixed to the side of each of the side plates away from the bottom plate and the top plate; and The connector is fixed to the side of the adapter member away from the container body for gripping by the jaws.

2. The substrate container for automated handling as described in claim 1, characterized in that, It also includes a plurality of first bolts, the top plate having a plurality of first studs, each of the first bolts passing through the adapter and locked to the respective first stud.

3. The substrate container for automated handling as described in claim 1, characterized in that, It also includes a plurality of second bolts, each of the side plates having a plurality of second studs, each of the second bolts passing through the adapter and locked to each of the second studs.

4. The substrate container for automated handling as described in claim 3, characterized in that, Each of the second studs is located on the side of the corresponding side plate away from the base plate.

5. The substrate container for automated handling as described in claim 3, characterized in that, Each of the side plates also has a plurality of ribs, each of the ribs extending from each of the second studs toward the base plate.

6. The substrate container for automated handling as described in claim 1, characterized in that, The connector includes an additional circuit board and a plurality of extension posts, each of which extends from the additional circuit board and abuts against the adapter member.

7. The substrate container for automated handling as described in claim 6, characterized in that, It also includes a plurality of third bolts, the adapter having a plurality of screw holes, each of the third bolts passing through the additional circuit board and each of the extension posts and being locked in the screw holes.

8. The substrate container for automated handling as described in claim 6, characterized in that, A gap is formed between the additional circuit board and the adapter member to allow the grippers to grasp the additional circuit board.

9. The substrate container for automated handling as described in claim 1, characterized in that, It also includes a pair of handles, each of which is located at both ends of the adapter and is sandwiched between the container body and the adapter.

10. The substrate container for automated handling as described in claim 9, characterized in that, The adapter has multiple limiting slots, each handle has a pair of steps, each limiting slot is formed on the side of the adapter facing the container body, and each limiting slot covers and restricts each step.

11. The substrate container for automated handling as described in claim 10, characterized in that, The adapter has multiple positioning pins, each step has a positioning hole, and each positioning pin is located in the limiting slot and passes through the corresponding positioning hole.

12. The substrate container for automated handling as claimed in claim 1, characterized in that, The adapter has multiple through slots.

13. The substrate container for automated handling as described in claim 12, characterized in that, The adapter has multiple protruding walls, each of which is located on the side of the adapter away from the container body and surrounds each of the through slots and the periphery of the adapter.

14. The substrate container for automated handling as claimed in claim 1, characterized in that, The adapter has a protruding wall, which is located on the side of the adapter away from the container body and surrounds the periphery of the adapter.

15. The substrate container for automated handling as claimed in claim 1, characterized in that, The adapter is made of plastic, plastic steel, metal, or metal alloy.

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