A flower basket top tooth structure and a substrate carrying device

Abstract

A flower basket top tooth structure and substrate bearing equipment relate to the technical field of semiconductor transport carrier, including at least one group of top tooth group, each group of top tooth group includes mounting plate, baffle and several top teeth, the baffle is set on one side of the mounting plate through fixing element, the support gap is formed between two adjacent top teeth, the baffle is provided with the accommodating slot corresponding to the support gap, the baffle is provided with at least two waist countersunk holes, the waist countersunk hole is used for the position of the baffle in horizontal direction is fine adjusted through the fixing element, so that the accommodating slot is aligned with the support gap, the top tooth is detachably connected with the mounting plate, the waist countersunk hole fine adjustment design of the utility model solves the problem that the accommodating slot and the top tooth gap are misaligned due to the manufacturing tolerance or thermal deformation of the traditional flower basket, the baffle position is fine adjusted horizontally, the silicon wafer is always accurately inserted into the accommodating slot, and scratch is avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor transport vehicle technology, and in particular to a basket top tooth structure and substrate carrying device. Background Technology

[0002] In silicon wafer production and photovoltaic cell manufacturing, the top tooth structure is a core component for automated loading, unloading, slicing, and transfer, and is widely used in quartz boats, baskets, and other tooling equipment. Its core functions include wafer positioning, wafer support, and buffer protection, directly impacting wafer yield and equipment capacity. However, existing top tooth technology still suffers from several technical bottlenecks, leading to defects such as edge chipping, microcracks, and scratches on silicon wafers during processing.

[0003] In the prior art, Chinese utility model patent with patent number ZL202123009707 discloses a basket-shaped tooth structure and its basket for solving the problem of EL top tooth marks during annealing. In its top tooth structure, the mounting base and the top tooth are integrally formed, and a PEEK baffle is provided on one side of the mounting base. The PEEK baffle has grooves with corresponding tooth slots, and bolt through holes that mate with the threaded holes of the mounting base. The mounting base and the PEEK baffle are fixedly connected by bolts. The integrated design of the mounting base and the top tooth of this utility model simplifies production. Due to the soft nature of the PEEK baffle, it provides a certain buffer protection for the silicon wafer during the insertion process, preventing the silicon wafer from directly contacting the bottom of the tooth slot, thereby protecting the safety of the silicon wafer during transportation.

[0004] However, the existing technology integrates the mounting base and the top teeth, and the PEEK baffle is directly fixed to the mounting base through the bolt through-hole, making the overall structure relatively fixed. If the installation error or thermal deformation causes the receiving groove and the top teeth to misalign, the silicon wafer is easily scratched when inserted. In this case, or if the top teeth are worn in some areas, the entire component needs to be replaced, resulting in excessive maintenance costs. Utility Model Content

[0005] The technical problem this invention aims to solve is how to balance buffer protection and precise positioning during the silicon wafer lifting process, while simultaneously reducing equipment maintenance costs.

[0006] To achieve the above objectives, according to one aspect of the utility model, a basket top tooth structure is provided, comprising at least one set of top teeth, each set of top teeth including a mounting plate, a stop bar, and a plurality of top teeth. The stop bar is disposed on one side of the mounting plate by a fixing element, and a support gap is formed between two adjacent top teeth. The stop bar has receiving grooves corresponding one-to-one with the support gaps, and the stop bar has at least two waist-shaped countersunk holes. The waist-shaped countersunk holes are used to finely adjust the position of the stop bar in the horizontal direction by means of the fixing element, so that the receiving grooves are aligned with the support gaps; the top teeth are detachably connected to the mounting plate.

[0007] As a preferred embodiment of the above technical solution, the mounting plate has a mounting hole facing downwards at its upper end, and the top tooth is installed in the mounting plate through the mounting hole. Furthermore, the mounting plate has a locking hole on its side, which communicates with the mounting hole. The top tooth is locked by a stopper, which passes through the locking hole and abuts against the outer surface of the main body segment.

[0008] As a preferred embodiment of the above technical solution, the top tooth includes an integrally formed main body section and a top section. The main body section is used to insert into the mounting hole and form a fit with the mounting plate. The top section has a tapered structure with a gradually decreasing cross-sectional area from bottom to top, and its top end is a smooth arc-shaped surface, and the arc-shaped surface and the tapered side are smoothly transitioned.

[0009] As a preferred embodiment of the above technical solution, it further includes side teeth, which are disposed on both sides of the mounting plate and are detachably connected to the mounting plate by fasteners.

[0010] As a preferred embodiment of the above technical solution, the end of the side tooth away from the top tooth is a mating plane; at least two countersunk holes are provided on the mating plane; the fastener is a countersunk fastener, and the head end face of the countersunk fastener is flush with the mating plane or embedded in the countersunk hole.

[0011] As a preferred embodiment of the above technical solution, the side tooth is provided with an inclined guide slope at one end near the top tooth, and the two sides of the guide slope are provided with rounded corner structures.

[0012] As a preferred embodiment of the above technical solution, the top tooth and the side tooth are made of ceramic material.

[0013] As a preferred embodiment of the above technical solution, it includes two sets of top tooth groups arranged in parallel to each other, and the stop bar of each set of top tooth groups is disposed on the side of its mounting plate away from the other set of top tooth groups.

[0014] As a preferred embodiment of the above technical solution, the lowest point of the receiving groove is higher than the mounting plate.

[0015] A substrate carrier device includes a lifting mechanism and a carrier platform. The carrier platform is mounted on the lifting mechanism and its lifting is controlled by the lifting mechanism. Two pairs of basket top tooth structures as described in any of the above technical solutions are arranged in parallel on the carrier platform.

[0016] In summary, this utility model has the following advantages: 1. The waist-shaped countersunk hole micro-adjustment design of this utility model solves the problem of misalignment between the receiving groove and the top tooth caused by manufacturing tolerances or thermal deformation in traditional flower baskets; by adjusting the position of the horizontal micro-adjustment bar, it ensures that the silicon wafer always falls accurately into the receiving groove when inserted, avoiding scratches; at the same time, the detachable top tooth design and the micro-adjustment function of the bar work together, so that after replacing the worn top tooth, only the bar needs to be micro-adjusted for quick calibration, overcoming the defects of high maintenance cost and cumbersome operation of the integrated structure; 2. Furthermore, the tip of the top tooth of this utility model is conical, and the top tip is a smooth circular curved surface, which is different from the wedge structure. Even if the silicon wafer to be lifted has undergone a slight angle change, the conical structure can lift and correct the silicon wafer through its smooth curved surface. The overall smooth structure will not scratch or crack the silicon wafer during the lifting process, so as to achieve the effect of adaptive correction and zero contact damage. 3. Furthermore, the side tooth design of this utility model provides smooth guidance during silicon wafer insertion through the synergistic effect of the guiding bevel and rounded corner structure, effectively buffering the impact force; combined with the detachable connection and the characteristics of ceramic materials, it ensures that the side teeth maintain high wear resistance during long-term use, avoids micro-cracks or fragments on the edge of the silicon wafer due to collision, and simplifies the maintenance process, improving the smoothness and reliability of the overall operation.

[0017] Further or other beneficial effects will be discussed in the embodiments. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the basket top tooth structure of this application; Figure 2 An exploded view of a set of top teeth; Figure 3 for Figure 1 Enlarged view of area A; Figure 4 This is a schematic diagram of the side tooth structure; Figure 5 This is a schematic diagram of the top tooth structure; Figure 6 This is a schematic diagram of the substrate carrier device structure; Among them, 100-top tooth assembly, 110-mounting plate, 111-mounting hole, 112-locking hole, 120-stop bar, 121-accommodating groove, 122-waist-shaped countersunk hole, 130-top tooth, 131-main body section, 132-top section, 140-side tooth, 141-guide slope, 142-rounded corner structure, 143-countersunk hole, 150-countersunk fastener, 200-lifting mechanism, 300-bearing platform. Detailed Implementation

[0019] The directional terms such as up, down, left, right, front, back, front, back, top, and bottom mentioned or possibly used in this specification are defined relative to the construction shown in the accompanying drawings. The terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively. These are relative concepts and may therefore vary depending on their location and usage. Therefore, these or other directional terms should not be interpreted as restrictive.

[0020] The present invention will be further explained below with reference to the embodiments: Example

[0021] A basket-shaped tooth structure includes at least one set of tooth groups 100, preferably two sets of tooth groups 100 in this embodiment. Each set of tooth groups 100 includes a mounting plate 110, a stop bar 120, and multiple tooth groups 130. The stop bar 120 is fixed to one side of the mounting plate 110 by a fixing element (not shown in the figure), and a support gap is formed between two adjacent tooth groups 130. The stop bar 120 has a receiving groove 121 corresponding to the support gap, and the stop bar 120 also has at least two waist-shaped countersunk holes 122. In this embodiment, three waist-shaped countersunk holes 122 are preferably designed on the stop bar 120 to effectively fix the front, middle, and rear sections of the stop bar 120. Three fixing holes for connecting the fixing element are opened at corresponding positions on the mounting plate 110. Based on the above settings, the position of the stop bar 120 can be finely adjusted in the horizontal direction by the fixing element to ensure that the receiving groove 121 is always precisely aligned with the support gap. The tooth groups 130 and the mounting plate 110 are detachably connected for easy partial replacement. Bolts are preferred as the fixing element; the top tooth 130 is made of ceramic material, which takes into account both wear resistance and impact resistance.

[0022] The stop bar 120 is fixed to the side of the mounting plate 110 via a countersunk hole 122 and a fixing element. This special hole shape allows the stop bar 120 to slide slightly in the horizontal direction. When installation errors cause misalignment between the receiving groove 121 on the stop bar 120 and the support gap of the top tooth 130, the operator only needs to loosen the bolts, slide the stop bar 120 to realign the receiving groove 121 with the gap center, and then tighten the bolts. This fine-tuning function, combined with the detachable connection between the top tooth 130 and the mounting plate 110, eliminates the need to replace the entire component after replacing a single worn top tooth 130; only the position of the stop bar 120 needs to be recalibrated, significantly reducing maintenance costs. This completely avoids the drawback of replacing the entire component due to partial damage in a one-piece structure. Even with highly wear-resistant and high-temperature-resistant ceramic materials, damage to the top tooth 130 is inevitable after prolonged use. The manufacturing cost of one-piece molded irregular parts made of ceramic material is relatively high. The split design can significantly reduce maintenance costs and extend the overall structural life.

[0023] Mounting plate 110 has a mounting hole 111 facing downwards at its upper end, and top tooth 130 is fitted into mounting plate 110 through mounting hole 111. Mounting plate 110 has a locking hole 112 on its side that communicates with mounting hole 111. A stop (not shown in the figure) passes through locking hole 112 and abuts against the outer surface of main body section 131 of top tooth 130 to achieve locking. The stop is preferably a locking bolt, and the corresponding locking hole 112 is a threaded hole adapted to the locking bolt. Top tooth 130 is composed of an integrally formed main body section 131 and a top section 132: the main body section 131 is inserted into mounting hole 111 and mates with mounting plate 110; the top section 132 has a tapered structure with a gradually decreasing cross-sectional area from bottom to top, and the top is a smooth arc surface, with the arc surface and the tapered side smoothly transitioning to avoid damage when lifting silicon wafer. During the process of lifting and jacking the silicon wafer using the jacking teeth 130, if the wafer has an angular offset in the previous process, the curved surface first contacts the edge of the wafer and guides it to slide towards the center, while the conical surface then provides uniform support. This feature eliminates the risk of hard impact from traditional wedge-shaped jacking teeth 130, avoiding edge chipping or microcracks in the silicon wafer.

[0024] The top tooth 130 structure also includes side teeth 140 located on both sides of the mounting plate 110, which are detachably connected to the mounting plate 110 via fasteners. The end of the side tooth 140 furthest from the top tooth 130 is a mating plane, on which at least two countersunk holes 143 are formed. The fasteners are countersunk fasteners 150, with the head end face of the countersunk fastener 150 flush with the mating plane or embedded within the countersunk holes 143. The side tooth 140 is detachably connected via the countersunk fasteners 150. The countersunk design prevents the bolt head from protruding and scratching other processing devices. The end of the side tooth 140 near the top tooth 130 has an inclined guide slope 141, with rounded corner structures 142 on both sides. During silicon wafer insertion, the slope decomposes the lateral impact force into an oblique component, and the rounded corner structures 142 further disperse the contact stress. This composite guiding mechanism allows the silicon wafer edge to enter the gap between the side teeth 140 and the top teeth 130 along a smooth path, effectively reducing microcracks caused by impacts. The side teeth 140 are also made of ceramic material, ensuring both wear resistance and impact resistance. The ceramic material ensures that the conical surface remains smooth over a long period, eliminating scratches caused by metal materials.

[0025] The basket-shaped tooth 130 structure includes two sets of parallel tooth groups 100. Each tooth group 100 has a baffle 120 positioned on the side of its mounting plate 110 away from the other tooth group 100, creating symmetrical support between the two receiving grooves 121. The lowest point of the receiving groove 121 is higher than the surface of the mounting plate 110, ensuring that the silicon wafer only contacts the receiving groove 121 and the tooth 130, avoiding hard contact with the mounting plate 110.

[0026] A substrate carrier device includes a lifting mechanism 200 and a carrier platform 300. The carrier platform 300 is mounted on the lifting mechanism 200 and its lifting and lowering are controlled by the lifting mechanism 200. Two pairs of the aforementioned basket-shaped tooth 130 structures are arranged in parallel on the carrier platform 300. During operation, the lifting mechanism 200 drives the carrier platform 300 to rise, so that the conical top section 132 of the tooth 130 contacts the edge of the silicon wafer. After the smooth curved surface adaptively corrects the angular deviation of the silicon wafer, it lifts it up. The silicon wafer then falls into the receiving groove 121 of the baffle 120 and is stably supported by the tooth assemblies 100 on both sides. If maintenance is required, the worn tooth 130 can be disassembled individually or the position of the countersunk hole 122 of the baffle 120 can be finely adjusted to quickly restore accuracy.

[0027] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0028] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A basket-shaped tooth structure, characterized in that: It includes at least one set of top teeth, each set of top teeth includes a mounting plate, a stop bar and several top teeth. The stop bar is set on one side of the mounting plate by a fixing element. A support gap is formed between two adjacent top teeth. The stop bar has a receiving groove that corresponds one-to-one with the support gap. The stop bar has at least two waist-shaped countersunk holes. The waist-shaped countersunk holes are used to finely adjust the position of the stop bar in the horizontal direction by the fixing element so that the receiving groove is aligned with the support gap. The top teeth are detachably connected to the mounting plate.

2. The basket-shaped tooth structure according to claim 1, characterized in that: The mounting plate has a mounting hole facing downwards at its upper end. The top tooth is installed in the mounting plate through the mounting hole. The mounting plate also has a locking hole on its side, which communicates with the mounting hole. The top tooth is locked by a stopper, which passes through the locking hole and abuts against the outer surface of the main body segment.

3. The basket-shaped tooth structure according to claim 2, characterized in that: The top tooth includes an integrally formed main body section and a top section. The main body section is used to insert into the mounting hole and form a fit with the mounting plate. The top section has a tapered structure with a gradually decreasing cross-sectional area from bottom to top, and its top end is a smooth arc-shaped surface, and the arc-shaped surface and the tapered side are smoothly transitioned.

4. The basket-shaped tooth structure according to claim 1, characterized in that: It also includes side teeth, which are disposed on both sides of the mounting plate and are detachably connected to the mounting plate by fasteners.

5. The basket-shaped tooth structure according to claim 4, characterized in that: The end of the side tooth away from the top tooth is a mating plane; at least two countersunk holes are provided on the mating plane; the fastener is a countersunk fastener, and the head end face of the countersunk fastener is flush with the mating plane or embedded in the countersunk hole.

6. The basket-shaped tooth structure according to claim 4, characterized in that: The side tooth is provided with an inclined guide slope at one end near the top tooth, and the two sides of the guide slope are provided with rounded corner structures.

7. The basket-shaped tooth structure according to claim 4, characterized in that: The top tooth and the side tooth are made of ceramic material.

8. The basket-shaped tooth structure according to claim 1, characterized in that: It includes two sets of top teeth arranged in parallel to each other, and the baffle of each set of top teeth is arranged on the side of its mounting plate away from the other set of top teeth.

9. The basket-shaped tooth structure according to claim 1, characterized in that: The lowest point of the receiving groove is higher than the mounting plate.

10. A substrate carrier device, characterized in that: It includes a lifting mechanism and a support platform. The support platform is disposed on the lifting mechanism and its lifting is controlled by the lifting mechanism. Two pairs of basket top tooth structures as described in any one of claims 1 to 9 are arranged in parallel on the support platform.

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