A suspended temporary storage device and an automated material handling system

Abstract

The utility model provides a kind of suspension type temporary storage device and automatic material handling system, suspension type temporary storage device includes bearing and connecting piece;The quantity of bearing is two, two the bearing is spaced apart along first direction, the connecting piece extends along the first direction, and is connected with two bearing respectively;Each bearing includes base and at least one bearing disc;The base extends along second direction, the bearing disc is arranged on the base, and when the quantity of bearing disc is multiple, multiple bearing disc is arranged along the second direction;Second direction is perpendicular to the first direction.By the suspension type temporary storage device being set to double-layer structure, more wafer box can be stored, which is conducive to wafer factory to expand capacity.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a suspended temporary storage device and a material handling system. Background Technology

[0002] Automated material handling systems (AWMS) are essential equipment in wafer fabs. AWMS includes components such as tracks, suspended storage units, and overhead cranes. The suspended storage units are used to store wafer cassettes, and the overhead cranes travel along the tracks to retrieve and place wafer cassettes on the suspended storage units.

[0003] Existing suspended temporary storage devices are all single-layer structures, which limit the number of wafer cells they can hold, making it difficult for wafer fabs to expand their production capacity. Utility Model Content

[0004] The purpose of this invention is to provide a suspended temporary storage device and an automatic material handling system to solve the aforementioned problems.

[0005] To achieve the above objectives, this utility model provides a suspended temporary storage device, including a support member and a connector; the number of the support members is two, the two support members are spaced apart along a first direction, and the connector extends along the first direction and is connected to the two support members respectively;

[0006] Each of the carriers includes: a base and at least one carrier disk, the base extending along a second direction, the carrier disk disposed on the base, and when there are multiple carrier disks, the multiple carrier disks are arranged along the second direction; the second direction is perpendicular to the first direction.

[0007] Optionally, the two carriers are a first carrier and a second carrier; the first carrier includes m carrier disks, and the second carrier includes n carrier disks, where m and n are both positive integers, and m and n differ by 1.

[0008] The m bearing disks of the first bearing member and the n bearing disks of the second bearing member are arranged alternately along the second direction.

[0009] Optionally, one end of the connector extends to the side of the first carrier away from the second carrier and can be connected to a mounting surface;

[0010] m is 1 greater than n.

[0011] Optionally, the carrier disk is used to carry a wafer cassette;

[0012] In the same carrier, the distance between the axes of two adjacent carrier disks is greater than or equal to twice the maximum dimension of the wafer cell carried on the carrier disk in the second direction.

[0013] Optionally, both of the carriers include a plurality of carrier disks, and the number of carrier disks in the two carriers is equal;

[0014] At least one of the two carriers includes a drive unit; in the carrier including the drive unit, the drive unit is connected to all the carrier disks and is capable of driving each of the carrier disks to move independently along the second direction.

[0015] Optionally, the driving unit includes multiple sub-driving units;

[0016] In the carrier including the drive unit, each of the carrier disks is connected to one of the sub-drive units and is able to move along the second direction under the drive of the connected sub-drive unit.

[0017] Optionally, the sub-drive unit includes a motor and a plurality of rollers, at least a portion of which is a drive wheel, and the drive wheel is connected to the motor in a driving connection; the rotation axis of the roller extends along a third direction, and the third direction is perpendicular to the first direction and the second direction, respectively;

[0018] In the carrier including the drive unit, each of the carrier discs is connected to a plurality of the rollers of a sub-drive unit and is supported on the base by the plurality of the rollers.

[0019] Optionally, the two carriers are a first carrier and a second carrier, respectively; one end of the connector extends to the side of the first carrier away from the second carrier and can be connected to a mounting surface;

[0020] The second carrier includes the drive unit.

[0021] Optionally, the carrier including the drive unit further includes a positioning assembly, which includes a first positioning element and a second positioning element;

[0022] In the carrier including the drive unit, the first positioning element is disposed on the base, and each carrier disk is provided with a second positioning element.

[0023] To achieve the above objectives, this utility model also provides an automated material handling system, including a suspended temporary storage device, a track, and an overhead crane as described in any of the preceding claims;

[0024] The suspended temporary storage device is connected to the mounting surface via the connector;

[0025] The track is disposed on the mounting surface and located on one side of the suspended temporary storage device; the track extends along the second direction;

[0026] The overhead crane is movably mounted on the track.

[0027] Compared with the prior art, the suspended temporary storage device and automatic material handling system of this utility model have the following advantages:

[0028] The aforementioned suspended temporary storage device includes a support member and a connector; there are two support members, which are spaced apart along a first direction, and the connector extends along the first direction and is connected to the two support members respectively; each support member includes a base and at least one support disk; the base extends along a second direction, and the support disk is disposed on the base, and when there are multiple support disks, the multiple support disks are arranged along the second direction; the second direction is perpendicular to the first direction. By setting the suspended temporary storage device as a double-layer structure, more wafer cassettes can be stored, which is beneficial for wafer fabs to expand their production capacity. Attached Figure Description

[0029] The accompanying drawings are provided to better understand this utility model and do not constitute an undue limitation thereof. Wherein:

[0030] Figure 1 This is a schematic diagram of the suspended temporary storage device provided in Embodiment 1 of this utility model;

[0031] Figure 2 This is a schematic diagram illustrating the application scenario of the suspended temporary storage device provided in Embodiment 1 of this utility model;

[0032] Figure 3 yes Figure 2 The top view shows the wafer cassette on the second carrier, with the connectors omitted and the wafer cassette on the second carrier shown in red dashed lines.

[0033] Figure 4 This is a schematic diagram of the application scenario of the suspension temporary storage device provided in Embodiment 2 of this utility model;

[0034] Figure 5 yes Figure 4 The top view shows the wafer cassette on the second carrier, with the connectors omitted and the wafer cassette on the second carrier shown in red dashed lines.

[0035] Figure 6 This is a schematic diagram of the suspended temporary storage device provided in Embodiment 3 of this utility model when it is in a preset state;

[0036] Figure 7This is a partial structural schematic diagram of the second support member of the suspended temporary storage device provided in Embodiment 3 of this utility model;

[0037] Figure 8 This is a schematic diagram of a usage scenario of the suspended temporary storage device provided in Embodiment 3 of this utility model. In the diagram, each of the bearing disks of the first bearing member is aligned with each of the bearing disks of the second bearing member.

[0038] Figure 9 This is a schematic diagram of a usage scenario of the suspended temporary storage device provided in Embodiment 3 of this utility model. In the diagram, the No. 5 bearing plate is partially located on the side of the No. 2 bearing plate close to the No. 3 bearing plate.

[0039] Figure 10 This is a schematic diagram of a usage scenario of the suspended temporary storage device provided in Embodiment 3 of this utility model. In the diagram, bearing plate ①, bearing plate ④, and bearing plate ② are arranged alternately in the second direction.

[0040] Figure 11 yes Figure 10 The top view shows the wafer cassettes on carriers ④ and ⑤, which are omitted from the figure. The wafer cassette on carrier ⑥ is not shown because it completely overlaps with the wafer cassette on carrier ③.

[0041] Figure 12 This is a schematic diagram of a usage scenario of the suspended temporary storage device provided in Embodiment 3 of this utility model. In the diagram, the positions of bearing plate ①, bearing plate ⑤, and bearing plate ② are staggered in the second direction.

[0042] Figure 13 This utility model provides a schematic diagram of a usage scenario for a suspended temporary storage device according to Embodiment 3. In the diagram, the support plate ②, support plate ⑥ 120, and support plate ③ are staggered in the second direction.

[0043] [The reference numerals in the attached drawings are explained as follows]: 10-Suspended temporary storage device, 100-Bearing component, 110-Base, 120-Bearing plate, 131-Roller, 140-Positioning assembly, 141-First positioning element, 142-Second positioning element, 200-Connector. Detailed Implementation

[0044] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0045] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0046] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “a plurality” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “install,” “connect,” and “link” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can represent internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate relative importance or implicitly specify the number of indicated technical features. Those skilled in the art will understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0047] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to conveniently and clearly illustrate the objectives of the embodiments of this utility model. The same or similar reference numerals in the drawings represent the same or similar parts.

[0048] like Figure 1 and Figure 6 As shown, the suspended temporary storage device 10 includes a support member 100 and a connector 200. There are two support members 100, spaced apart along a first direction. The connector 200 extends along the first direction and connects to both support members 100. Each support member 100 includes a base 110 and at least one support plate 120. In any one support member 100, the base 110 extends along a second direction, and the support plate 120 is disposed on the base 110. When there are multiple support plates 120, the multiple support plates 120 are arranged along the second direction. The second direction is perpendicular to the first direction. Figure 1 The first direction is indicated by a double-headed arrow Z, and the second direction is indicated by a double-headed arrow X.

[0049] The suspended temporary storage device 10 is used in an automated material handling system. For example... Figure 2 , Figure 4 , Figures 8 to 10 , Figure 12 and Figure 13 Each of the carrier trays 120 shown is used to store one wafer cassette 20. By providing two carrier members 100 in the first direction, the number of wafer cassettes 20 stored in the suspended temporary storage device 10 can be increased, which is beneficial to improving the production capacity of the wafer fab. The construction of the carrier tray 120 can refer to the prior art, and will not be described in detail here.

[0050] Those skilled in the art will understand that the suspended temporary storage device 10 is connected to a mounting surface, such as a ceiling, via the connector 200 during application. Furthermore, during application, the first direction is vertical, and the second direction is horizontal; in other words, one of the two support members 100 is above the other. For ease of description, the upper support member 100 will be referred to herein as the first support member, and the lower support member 100 as the second support member. It will be understood that the upper end of the connector 200 extends beyond the upper surface of the first support member and connects to the mounting surface.

[0051] The automated material handling system includes, in addition to the suspended temporary storage device 10, a track and an overhead crane (not shown in the figure). The track is disposed on the mounting surface and located on one side of the suspended temporary storage device 10, and the track also extends along the second direction. The overhead crane is disposed on the track and is capable of moving along the track. The overhead crane is configured to pick up and place the wafer cassette 20 on the suspended temporary storage device 10. It is understood that the height of the two support members 100 of the suspended temporary storage device 10 should be designed according to the structure of the overhead crane, specifically so that the overhead crane can pick up and place the wafer cassette 20 on both the support plate 120 of the first support member and the support plate 120 of the second support member.

[0052] It should also be noted that, since the number of wafer cassettes 20 that the suspended temporary storage device 10 can support has increased, the load-bearing capacity of the mounting surface should be increased accordingly to improve reliability.

[0053] The structure of the suspended temporary storage device 10 will be further described below with reference to several embodiments.

[0054] <Example 1>

[0055] Figure 1 A schematic diagram of the suspended temporary storage device provided in this embodiment is shown. Figure 1 As shown, in this embodiment, the first carrier includes m carrier disks 120, and the second carrier includes n carrier disks 120, where m and n are both positive integers and differ by 1. The m carrier disks 120 of the first carrier and the n carrier disks 120 of the second carrier are arranged alternately in the second direction, and each carrier disk 120 of the first carrier is immovably disposed on the base 110, and each carrier disk 120 of the second carrier is immovably disposed on the base 110.

[0056] It is easy to understand that in this embodiment, on the same carrier 100, the distance between the axes of two adjacent carrier disks 120 is greater than or equal to the maximum dimension of the wafer cassette 20 carried on the carrier disk 120 in the second direction, so as to ensure that the wafer cassettes 20 carried on the same carrier 100 do not interfere with each other.

[0057] In this embodiment, the distance between the axes of two adjacent carrier disks 120 of the same carrier 100 is relatively large, specifically greater than or equal to twice the maximum dimension of the wafer cassette 20 supported on the carrier disk 120 in the second direction. Therefore, when all the carrier disks 120 of the suspended temporary storage device 10 are filled with wafer cassettes 20, such as... Figure 2 and Figure 3 As shown, each of the wafer cells 20 does not overlap in the second direction.

[0058] Taking m as 3 so that the first carrier can support three wafer cassettes 20 and n as 2 so that the second carrier can support two wafer cassettes 20 as an example. Figure 2 The left and right directions in the middle are the second direction, according to Figure 2 As shown in the diagram, the three wafer cassettes 20 carried on the first carrier are numbered ①, ②, and ③ from left to right, and the two wafer cassettes 20 carried on the second carrier are numbered ④ and ⑤. Viewed along the second direction, the arrangement of the five wafer cassettes 20 is as follows: wafer cassette ①, wafer cassette ④, wafer cassette ②, wafer cassette ⑤, and wafer cassette ③. Furthermore, wafer cassette ① and wafer cassette ④ do not overlap in the second direction; wafer cassette ④ and wafer cassette ② do not overlap in the second direction; wafer cassette ② and wafer cassette ⑤ do not overlap in the second direction; and wafer cassette ⑤ and wafer cassette ③ do not overlap in the second direction.

[0059] The advantage of this embodiment is that the wafer cassette 20 on the first carrier does not interfere with the loading and unloading of the wafer cassette 20 on the second carrier. The overhead crane can directly load and unload the wafer cassette 20 on both the first and second carriers. That is, there is no sequential requirement for the overhead crane to load and unload the wafer cassette 20 on the first and second carriers.

[0060] Although the above description uses the example of the first carrier member including three carrier disks 120 and the second carrier member including two carrier disks 120, in practice, both the first and second carrier members can include more carrier disks 120, or both can include fewer carrier disks 120, as long as the number of carrier disks 120 included in the first carrier member differs from the number of carrier disks 120 included in the second carrier member by 1. For example, the first carrier member may include four carrier disks 120 and the second carrier member may include three carrier disks 120, or the first carrier member may include two carrier disks 120 and the second carrier member may include one carrier disk 120.

[0061] Furthermore, the number of carrier disks 120 included in the second carrier may be greater than the number of carrier disks 120 included in the first carrier. For example, the first carrier may include two carrier disks 120, and the second carrier may include three carrier disks 120. However, in practice, it is preferable to place the wafer cassette 20, which is used more frequently, on the first carrier. Therefore, it is desirable that the first carrier includes more carrier disks 120. Thus, it is preferable that the number of carrier disks 120 included in the first carrier is greater than the number of carrier disks 120 included in the second carrier, i.e., m is greater than n by 1.

[0062] It can also be understood that the suspended temporary storage device 10 of this embodiment also allows the operator to manually pick up and put down the wafer cassette 20 during application.

[0063] Compared to the single-layer suspended temporary storage device in the prior art, the application of this embodiment can increase the storage capacity of the wafer cassette 20 by at least 25%.

[0064] <Example 2>

[0065] The difference between this embodiment and Embodiment 1 lies only in that the distance between the axes of two adjacent carrier disks 120 of the same carrier 100 is smaller, specifically less than twice the maximum dimension of the wafer cassette 20 supported on the carrier disk 120 along the second direction. However, the distance between the axes of two adjacent carrier disks 120 is still greater than or equal to the maximum dimension of the wafer cassette 20 supported on the carrier disk 120 in the second direction. Thus, when all the carrier disks 120 of the suspended temporary storage device 10 hold the wafer cassette 20, such as Figure 4 and Figure 5As shown, two adjacent wafer cassettes 20 of the suspended temporary storage device 10 partially overlap in the second direction. That is, wafer cassette 20 ① and wafer cassette 4 partially overlap in the second direction, wafer cassette 4 and wafer cassette 20 ② partially overlap in the second direction, wafer cassette 20 ② and wafer cassette 5 partially overlap in the second direction, and wafer cassette 5 and wafer cassette 3 partially overlap in the second direction.

[0066] In this situation, due to the height difference between the first and second carriers and the vertical height of the wafer cassette 20, the crane has certain sequential requirements when picking up and placing the wafer cassette 20 on the first and second carriers.

[0067] Specifically, when placing the wafer cassette 20 on the suspended temporary storage device 10, the wafer cassette 20 needs to be placed on each of the carrier trays 120 of the second carrier first, and then placed on each of the carrier trays 120 of the first carrier. That is, wafer cassettes 4 and 5 are placed on the second carrier first, and then wafer cassettes 1, 2, and 3 are placed on the first carrier. If the wafer cassette 20 is placed on all the carrier trays 120 of the first carrier first, the height difference between the first and second carriers and the vertical dimensions of the wafer cassette 20 will interfere with the process of placing the wafer cassette 20 onto the second carrier, making it impossible to place the wafer cassette 20 onto the second carrier.

[0068] When all the wafer cassettes 20 are placed on the carrier trays 120 of the suspended temporary storage device 10, if a wafer cassette 20 on the second carrier needs to be removed, at least a portion of the wafer cassettes 20 on the first carrier must first be removed. Otherwise, the wafer cassettes 20 on the first carrier will interfere with the removal of the wafer cassettes 20 on the second carrier, preventing the wafer cassettes 20 on the second carrier from being removed. Specifically, if wafer cassette 20 ④ needs to be removed, wafer cassettes 1 and 2 need to be removed first, and then wafer cassette 4 needs to be removed; if wafer cassette 5 needs to be removed, wafer cassettes 20 2 and 3 need to be removed first, and then wafer cassette 5 needs to be removed.

[0069] <Example 3>

[0070] Figure 6This is a schematic diagram of the suspended temporary storage device 10 provided in this embodiment. Figure 7 This is a partial structural schematic diagram of the suspended temporary storage device provided in this embodiment. (See attached diagram.) Figure 6 and Figure 7 As shown, the difference between this embodiment and Embodiment 2 is that both the first and second carriers include a plurality of carrier disks 120, and the number of carrier disks 120 included in the first and second carriers is the same. Furthermore, the carrier disks 120 of the second carrier are movably disposed on the base 110, and the second carrier also includes a driving unit (not shown in the figure). In the second carrier, the driving unit is connected to all the carrier disks 120 and can drive each carrier disk 120 to move independently along the second direction.

[0071] In this embodiment, the suspended temporary storage device 10 has a preset state, such as... Figure 6 and Figure 8 As shown, in the preset state, each of the carrier disks 120 on the first carrier is aligned with each of the carrier disks 120 on the second carrier.

[0072] Taking each of the aforementioned carrier members 100 as an example, which includes three of the aforementioned carrier disks 120, in Figure 6 and Figure 8 In the indicated orientation, the left-right direction is the second direction. In the preset state, the left-side support plate 120 of the first support member is aligned with the left-side support plate 120 of the second support member, the middle support plate 120 of the first support member is aligned with the middle support plate 120 of the second support member, and the right-side support plate 120 of the first support member is aligned with the right-side support plate 120 of the second support member. That is, the three support plates 120 on the first support member are numbered ①, ②, and ③ from left to right, and the three support plates 120 on the second support member are numbered ④, ⑤, and ⑥ from left to right. In the suspended temporary storage device 10 in the preset state, support plate 120 ① is aligned with support plate 4, support plate 20 ② is aligned with support plate 5, and support plate 20 ③ is aligned with support plate 6.

[0073] In this embodiment, when the suspended temporary storage device 10 is in the preset state, the distance between the axes of two adjacent carrier disks 120 of the same carrier 100 is small, specifically less than twice the maximum dimension of the wafer cassette 20 on the carrier disk 120 in the second direction. In this case, limited by the height difference between the first carrier and the second carrier and the dimension of the wafer cassette 20 in the vertical direction, when using the overhead crane to remove each wafer cassette 20 from the suspended temporary storage device 10 in the preset state, where all carrier disks 120 have wafer cassette 20 placed on them, it is necessary to first remove at least a portion of the wafer cassette 20 on the first carrier and adjust the position of the carrier disk 120 on the second carrier before the wafer cassette 20 on the second carrier can be removed. When placing the wafer cassette 20 onto each of the carrier trays 120 of the suspended temporary storage device 10 in a preset state using the overhead crane, it is necessary to adjust the position of the carrier trays 120 on the second carrier, and first place the wafer cassette 20 on the carrier trays 120 on the second carrier, and then place the wafer cassette 20 on the carrier trays 120 of the first carrier.

[0074] An optional operation for removing each wafer cassette 20 from the suspended temporary storage device 10, which is in the preset state and on all the carrier trays 120, is as follows:

[0075] Step S1: Move the carrier plate 120 described in ⑤ from left to right until the carrier plate 120 described in ⑤ is at least partially located on the side of the carrier plate 120 described in ② that is closer to the carrier plate 120 described in ③ (e.g., Figure 9 (As shown).

[0076] Step S2: Move the carrier plate 120 described in ④ in a left-to-right sequence until the carrier plate 120 described in ①, ④, and ② are staggered in the second direction (e.g., ...). Figure 10 As shown). At this time, as Figure 11 As shown, when observing the suspended temporary storage device 10 from top to bottom, it can be seen that the wafer cassette 20 located on the carrier disk 120 at number ① and the wafer cassette 20 located on the carrier disk 120 at number ④ partially overlap in the second direction. The wafer cassette 20 located on the carrier disk 120 at number ④ also partially overlaps in the second direction with the wafer cassette 20 located on the carrier disk 120 at number ②.

[0077] Step S3: The overhead crane removes the wafer cassette 20 from carrier plate 120 ① and carrier plate 120 ②.

[0078] Step S4: The overhead crane removes the wafer cassette 20 from the carrier disk 120 (number ④).

[0079] Step S5: Move the carrier disks 120 described in ④ and ⑤ from right to left until the carrier disks 120 described in ①, ⑤, and ② are staggered in the second direction (e.g., ...). Figure 12 (As shown).

[0080] Step S6: The crane removes the wafer cassette 20 from the carrier disk 120 (No. 5).

[0081] Step S7: The overhead crane removes the wafer cassette 20 from the carrier disk 120 (number ③).

[0082] Step S8: Move the carrier plate 120 described in ⑥ from right to left until the carrier plates 120 described in ②, ⑥, and ③ are staggered in the second direction (e.g., ...). Figure 13 (As shown).

[0083] Step S9: The crane removes the wafer cassette 20 from the carrier disk 120 (number ⑥).

[0084] The execution order of steps S3 and S7 can be other than that, as long as step S3 is executed before step 4 and step S7 is executed before step S9.

[0085] An optional operation for placing the wafer cassette 20 onto each of the carrier trays 120 of the suspended temporary storage device, which is in a preset state, by the overhead crane is as follows:

[0086] Step S11: Move the carrier disks 120 ...

[0087] Step S12 causes the overhead crane to place one of the wafer cassettes 20 on the carrier plate 120 number ④ and place the other wafer cassette 20 on the carrier plate 120 number ⑤.

[0088] Step S13: Move the carrier disks 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 120 220 1 ...

[0089] Step S14: Move the carrier plate 120 described in ⑥ from right to left until the carrier plate 120 described in ②, ⑥ and ③ are staggered in the second direction.

[0090] Step S15: The overhead crane places one of the wafer boxes 20 onto the carrier plate 120 (number ⑥).

[0091] Step S16: Move the carrier disks 120 described in ⑤ and ⑥ from left to right until the carrier disk 120 described in ⑤ is aligned with the carrier disk 120 described in ② and the carrier disk 120 described in ⑥ is aligned with the carrier disk 120 described in ③.

[0092] Step S17: Place one wafer cassette 20 on each of the following three carrier plates: ①, ②, and ③.

[0093] Compared to the existing single-layer suspended temporary storage device, using the suspended temporary storage device 10 of the above example to store the wafer cassette 20 can increase the storage capacity of the wafer cassette 20 by more than 50%.

[0094] In this embodiment, the driving unit preferably includes a plurality of sub-driving units. In the second carrier member, each carrier disk 120 is connected to one of the sub-driving units and is capable of moving along the second direction under the drive of the connected sub-driving unit.

[0095] Optionally, please return to the reference. Figure 7 The sub-drive unit includes a motor and a plurality of rollers 131, at least a portion of which are drive wheels, and the drive wheels are drively connected to the motor. The axes of the rollers extend along a third direction, which is perpendicular to the second direction and the first direction, respectively. In the second support member, each support plate 120 is connected to all the rollers 131 of the corresponding sub-drive unit and supported on the base 110 by the rollers 131. The motor is disposed in any suitable position, for example, on the support plate 120.

[0096] Additionally, the second carrier further includes a positioning assembly 140, which includes a first positioning element 141 and a second positioning element 142. On the second carrier, the first positioning element 141 is disposed on the base 110, and the second positioning element 142 is disposed on the carrier disk 120. The specific structure and method of the positioning assembly 140 can refer to existing technologies, as long as the carrier disk 120 can be positioned through the cooperation of the first positioning element 141 and the second positioning element 142. In an optional example, the first positioning element 141 includes a barcode, and the second positioning element 142 includes a sensor capable of scanning the barcode.

[0097] <Example 4>

[0098] The difference between this embodiment and embodiment three is that when the suspended temporary storage device 10 is in the preset state, the distance between the axes of two adjacent carrier disks 120 of the same carrier 100 is larger, specifically greater than or equal to twice the maximum dimension of the wafer cassette 20 supported on the carrier disk 120 in the second direction.

[0099] In this embodiment, when the overhead crane removes each wafer cassette 20 from the suspended temporary storage device 10, which is in the preset state and on all the carrier trays 120, only the position of the carrier tray 120 on the second carrier needs to be adjusted. It is not necessary to remove the wafer cassette 20 from the first carrier beforehand. Similarly, when the overhead crane places the wafer cassette 20 onto each of the carrier trays 120 of the suspended temporary storage device in the preset state, only the position of the carrier tray 120 on the second carrier needs to be adjusted. It is not mandatory to place the wafer cassette 20 on the second carrier before placing it on the first carrier. That is, the wafer cassette 20 can be placed on the first carrier before placing it on the second carrier.

[0100] For example, an optional operation for using the overhead crane to remove each wafer cassette 20 from the suspended temporary storage device 10, which is in the preset state and on all the carrier trays 120, is as follows:

[0101] Step S1': Move the carrier disks 120 ...

[0102] Step S2': The overhead crane removes the wafer cassette 20 from carrier disks 120 (number ④) and (number ⑤).

[0103] Step S3': Move the carrier disks 120 ...

[0104] Step S4': The overhead crane removes the wafer cassette 20 from the carrier plate 120 (number ⑥).

[0105] Step S5': The overhead crane removes the wafer cassette 20 from carrier disks ①, ②, and ③.

[0106] The step S5' can actually be performed at any suitable time, for example, before step S1', or between step S1' and step S2', or between step S2' and step S3', or between step S3' and step S4'.

[0107] An optional operation for placing the wafer cassette 20 onto each of the carrier trays 120 of the suspended temporary storage device, which is in a preset state, using the overhead crane is as follows:

[0108] Step 11': The crane places the wafer cassette 20 onto the carrier plate 120 (①), carrier plate 120 (②), and carrier plate 120 (③).

[0109] Step S12': Move the carrier disks 120 ...

[0110] Step S13': The crane places the wafer cassette 20 onto the carrier 120 of No. ④ and No. ⑤.

[0111] Step S14': Move the support disks 120 ...

[0112] Step S15': Place the wafer cassette 20 onto the carrier plate 120 (number ⑥) using the overhead crane.

[0113] Step S16': Move the carrier plate 120 described in ⑥ from left to right until the carrier plate 120 described in ⑥ is aligned with the carrier plate 120 described in ③.

[0114] In practice, step S11' can be executed at any suitable time, for example, between step S12' and step S13', or between step S13' and step S14', or between step S13' and step S14', or between step S14' and step S15', or between step S15' and step S16', or after step S16'.

[0115] <Example 5>

[0116] The difference between this embodiment and Embodiment 3 or Embodiment 4 is that the bearing disk 120 of the second bearing member is immovably disposed on the base 110, while the first bearing member includes the driving part, and each of the bearing disks 120 of the first bearing member is connected to the driving part and can move independently in the second direction under the drive of the driving part.

[0117] In this embodiment, the position of the carrier disk 120 on the first carrier is adjusted by moving the carrier disk 120 of the first carrier, and at least part of the wafer cassette 20 on the first carrier is removed in advance when necessary. Similarly, the purpose of picking up and placing the wafer cassette 120 on the carrier disk 120 of the second carrier can be achieved.

[0118] <Example 6>

[0119] The difference between this embodiment and Embodiment 3 or Embodiment 4 is that the first carrier includes a first driving part, the second carrier includes a second driving part, each of the carrier disks of the first carrier is connected to the first driving part and can move independently along the second direction under the drive of the first driving part, and each of the carrier disks of the second carrier is connected to the second driving part and can move independently along the second direction under the drive of the second driving part.

[0120] The second objective of this utility model is to provide an automatic material handling system, which includes the aforementioned suspended temporary storage device 10, track, and overhead crane.

[0121] The suspended temporary storage device 10 is connected to the mounting surface via the connector 200. The track is disposed on the mounting surface and located on one side of the suspended temporary storage device 10, and the track extends along the second direction. The overhead crane is movably disposed on the track and is capable of moving along the track. The configuration of the track and the overhead crane can refer to the prior art.

[0122] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A suspended temporary storage device, characterized in that, It includes a support member and a connector; the number of the support members is two, the two support members are spaced apart along a first direction, and the connector extends along the first direction and is connected to the two support members respectively; Each of the carriers includes: a base and at least one carrier disk, the base extending along a second direction, the carrier disk disposed on the base, and when there are multiple carrier disks, the multiple carrier disks are arranged along the second direction; the second direction is perpendicular to the first direction.

2. The suspended temporary storage device according to claim 1, characterized in that, The two carriers are a first carrier and a second carrier; the first carrier includes m carrier disks and the second carrier includes n carrier disks, where m and n are both positive integers and m and n differ by 1. The m bearing disks of the first bearing member and the n bearing disks of the second bearing member are arranged alternately along the second direction.

3. The suspended temporary storage device according to claim 2, characterized in that, One end of the connector extends to the side of the first carrier away from the second carrier and can be connected to a mounting surface; m is 1 greater than n.

4. The suspended temporary storage device according to claim 2 or 3, characterized in that, The carrier disk is used to carry the wafer cassette; In the same carrier, the distance between the axes of two adjacent carrier disks is greater than or equal to twice the maximum dimension of the wafer cell carried on the carrier disk in the second direction.

5. The suspended temporary storage device according to claim 1, characterized in that, Both of the carriers include a plurality of carrier disks, and the number of carrier disks in the two carriers is equal; At least one of the two carriers includes a drive unit; in the carrier including the drive unit, the drive unit is connected to all the carrier disks and is capable of driving each of the carrier disks to move independently along the second direction.

6. The suspended temporary storage device according to claim 5, characterized in that, The driving unit includes multiple sub-driving units; In the carrier including the drive unit, each carrier disk is connected to one of the sub-drive units and is able to move along the second direction under the drive of the connected sub-drive unit.

7. The suspended temporary storage device according to claim 6, characterized in that, The sub-drive unit includes a motor and a plurality of rollers, at least a portion of which is a drive wheel, and the drive wheel is connected to the motor in a driving connection; the rotation axis of the roller extends along a third direction, and the third direction is perpendicular to the first direction and the second direction respectively; In the carrier including the drive unit, each of the carrier discs is connected to a plurality of the rollers of a sub-drive unit and is supported on the base by the plurality of the rollers.

8. The suspended temporary storage device according to claim 5, characterized in that, The two carrier members are a first carrier member and a second carrier member, respectively; one end of the connector extends to the side of the first carrier member away from the second carrier member and can be connected to a mounting surface; The second carrier includes the drive unit.

9. The suspended temporary storage device according to claim 6, characterized in that, The carrier including the drive unit also includes a positioning assembly, which includes a first positioning element and a second positioning element; In the carrier including the drive unit, the first positioning element is disposed on the base, and each carrier disk is provided with a second positioning element.

10. An automated material handling system, characterized in that, Includes the suspended temporary storage device, track, and overhead crane as described in any one of claims 1-9; The suspended temporary storage device is connected to the mounting surface via the connector; The track is disposed on the mounting surface and located on one side of the suspended temporary storage device; the track extends along the second direction; The overhead crane is movably mounted on the track.

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