Contour column connection structure

Abstract

The utility model belongs to the technical field of semiconductor processing equipment, disclose a kind of equal-height column connecting structure, including column, draw peg and briquetting, column is equipped with mounting hole and accommodating cavity, accommodating cavity forms opening in the lateral wall of column, and it is equipped with guide element in accommodating cavity;Draw peg one end is equipped with joint part, and draw peg is inserted in mounting hole;Briquetting is slidably connected with guide element along horizontal direction, and one end of briquetting is exposed to column through opening, and the other end is equipped with protruding part, and protruding part is equipped with compression inclined plane, and moving briquetting to make compression inclined plane and joint part abut. By setting accommodating cavity and briquetting, while simplifying the internal structure of equal-height column, user can directly observe the position of briquetting through the opening of accommodating cavity, and then quickly and accurately determine the locking condition of draw peg.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to an equal-height column connection structure. Background Technology

[0002] In semiconductor processing, multiple leveling posts are typically used to support the upper and lower dies or between the dies and other mating devices to ensure accurate die positioning. Currently, some dies on the market, for ease of connection between the upper and lower dies or between the die and fixtures, incorporate rivets on the parts that mate with the leveling posts. The rivets first lock the parts that need to mate with the die, and then the rivets are locked in place by a locking structure inside the leveling posts to achieve die assembly. However, this type of assembly solution has a complex internal structure with many internal parts, making manufacturing and use cumbersome. Furthermore, because the locking structure is located inside the leveling posts, users cannot visually observe the locking status of the rivets, which can easily lead to problems such as die detachment. Utility Model Content

[0003] The purpose of this utility model is to provide a connection structure for equal-height columns, which is simple in structure, easy to use, and allows direct observation of whether the rivets are locked.

[0004] To achieve this objective, the present invention adopts the following technical solution: a column connection structure of equal height, including a column body, a pull stud, and a pressure block. The column body is provided with a mounting hole and a receiving cavity. The mounting hole is opened at one end of the column body, and the receiving cavity is opened on the side wall of the column body and communicates with the mounting hole. The receiving cavity forms an opening on the side wall of the column body, and a guide is provided inside the receiving cavity. One end of the pull stud is provided with a locking part, which is arranged around the pull stud and protrudes outward along the radial direction of the pull stud. The pull stud is inserted into the mounting hole, and the locking part is located in the mounting hole and on one side of the guide. The pressure block is slidably connected to the guide in the horizontal direction. One end of the pressure block is exposed outside the column body through the opening, and the other end is provided with a protrusion. Along the axial direction of the column body, the protrusion is located on the side of the locking part facing the mounting hole. The side of the protrusion facing the locking part is provided with a pressing slope. The pressure block is moved so that the pressing slope abuts against the locking part.

[0005] Preferably, along the horizontal direction, one side wall of the receiving cavity is provided with a through hole, and the other side wall is provided with a connecting part. The guide is inserted through the through hole and detachably connected to the connecting part.

[0006] Preferably, the guide is a screw, the connecting part is a screw hole, the screw passes through the through hole and the receiving cavity and is threaded into the screw hole, and the pressure block is sleeved on the screw.

[0007] Preferably, a retaining spring is embedded in the through hole, which is used to limit the screw in the horizontal direction.

[0008] Preferably, the end of the pressure block away from the pull stud is provided with a first mark, the side wall of the column is provided with a second mark, and when the pressing inclined surface is located on one side of the snap-fit ​​part in the horizontal direction, the first mark and the second mark are arranged opposite to each other.

[0009] Preferably, the color of the first mark is the same as the color of the second mark, and the color of the first mark is different from the color of the column and the color of the pressing block.

[0010] Preferably, the end of the column with the mounting hole is provided with a guide portion, which is used to guide the pull stud into the mounting hole.

[0011] Preferably, when the pressure block abuts against the side wall of the receiving cavity where the through hole is located, the pressure block protrudes from the side wall of the column.

[0012] Preferably, the pressing block is rectangular in shape, and the two adjacent sidewalls of the pressing block are transitioned by rounded corners.

[0013] The beneficial effects of this utility model are as follows: After the rivet is installed on the part that needs to cooperate with the mold, the user inserts the rivet into the mounting hole and can move the pressure block horizontally so that the pressure block moves toward the locking part of the rivet. As the distance between the pressure block and the locking part decreases, the vertical distance between the pressing slope and the locking part also gradually decreases until the pressing slope abuts against the locking part. At this time, the pressure block presses the rivet, and the equal-level post is locked and fixed to the part to be cooperated with. By setting up a receiving cavity and a pressure block, the internal structure of the equal-level post is simplified, the connection between the equal-level post and the rivet is facilitated, and the ease of use is improved. At the same time, the user can directly observe the position of the pressure block through the opening of the receiving cavity, thereby quickly and accurately judging the locking status of the rivet, improving the visibility of the pressure block, and effectively improving the user experience. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the equal-height column connection structure according to an embodiment of the present utility model;

[0015] Figure 2 This is a schematic diagram of the structure of the column in an embodiment of this utility model;

[0016] Figure 3 This is a schematic diagram of the guide and pressure block according to an embodiment of the present invention;

[0017] Figure 4 This is a cross-sectional view of the column in an embodiment of this utility model.

[0018] In the picture:

[0019] 100, Column; 110, Mounting hole; 120, Receiving cavity; 121, Through hole; 122, Connecting part; 130, Guide; 140, Snap ring; 150, Guide; 160, First mark;

[0020] 200. Rivet; 210. Connecting part;

[0021] 300, pressure block; 310, protrusion; 311, clamping slope; 320, second mark. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0023] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0024] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0025] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0026] Reference Figures 1 to 4As shown, an equal-height column connection structure according to an embodiment of this application includes a column 100, a tie 200, and a pressure block 300. The column 100 is the equal-height column body. In distributed processing, the height difference between multiple columns 100 is within 0.02mm. The column 100 is provided with a mounting hole 110 and a receiving cavity 120. The mounting hole 110 is opened at the end of the column 100 away from the mold, and the mounting hole 110 and the column 100 are coaxial. The receiving cavity 120 is opened on the side wall of the column 100 and communicates with the mounting hole 110. The receiving cavity 120 forms an opening on the side wall of the column 100, and a guide member 130 is provided inside the receiving cavity 120. A snap-fit ​​portion 210 is provided at one end of the rivet 200. The snap-fit ​​portion 210 is arranged around the rivet 200 and protrudes outward along the radial direction of the rivet 200. The rivet 200 is inserted into the mounting hole 110. The snap-fit ​​portion 210 is located inside the mounting hole 110 and on one side of the guide member 130. The pressure block 300 is slidably connected to the guide member 130 in the horizontal direction. One end of the pressure block 300 is exposed outside the column 100 through an opening, and the other end is provided with a protrusion 310. Along the axial direction of the column 100, the protrusion 310 is located on the side of the snap-fit ​​portion 210 facing the mounting hole 110. A clamping slope 311 is provided on the side of the protrusion 310 facing the snap-fit ​​portion 210. The end of the clamping slope 311 near the snap-fit ​​portion 210 is inclined along the axial direction of the column 100 towards the mounting hole 110. The pressure block 300 is moved so that the clamping slope 311 abuts against the snap-fit ​​portion 210.

[0027] Understandably, after the pull pin 200 is installed onto the component that needs to cooperate with the mold (such as a base plate, fixture, etc.), the user inserts the pull pin 200 into the mounting hole 110 and can then move the pressure block 300 horizontally so that the pressure block 300 moves toward the snap-fit ​​portion 210 of the pull pin 200. As the distance between the pressure block 300 and the snap-fit ​​portion 210 decreases, the vertical distance between the clamping slope 311 and the snap-fit ​​portion 210 also gradually decreases until the clamping slope 311 abuts against the snap-fit ​​portion 210 (the stress between the mating component and the end face of the equal-height column will restrict the pull pin 200 from moving away from the clamping slope 311 along the axial direction of the column 100). At this point, the pressure block 300 clamps the pull pin 200, and the equal-height column is locked and fixed to the component to be mated. By setting up the receiving cavity 120 and the pressure block 300, the internal structure of the equalizing column is simplified, the connection between the equalizing column and the pull rivet 200 is facilitated, and the ease of use is improved. At the same time, the user can directly observe the position of the pressure block 300 through the opening of the receiving cavity 120, thereby quickly and accurately judging the locking status of the pull rivet 200, improving the visibility of the pressure block 300, and effectively improving the user experience.

[0028] Reference Figure 1As shown, it can be understood that the end of the pressure block 300 away from the rivet 200 is provided with a first mark 160, and the side wall of the column 100 is provided with a second mark 320. When the pressing inclined surface 311 is located on one side of the snap-fit ​​portion 210 in the horizontal direction, the first mark 160 and the second mark 320 are arranged opposite to each other. Optionally, the first mark 160 and the second mark 320 are usually the same shape and equal in size, but the first mark 160 is provided on the end face of the pressure block 300, and the second mark 320 is provided on the cylindrical surface of the column 100. The first mark 160 and the second mark 320 can be set as simple geometric shapes, or as text, patterns, or a mixture of the above shapes. In this embodiment, the first mark 160 is set as an inverted triangle, and the second mark 320 is set as an equilateral triangle, which will not be elaborated here.

[0029] When the first mark 160 and the second mark 320 are aligned, it indicates that the clamping slope 311 and the locking part 210 are not in contact, and the pull rivet 200 is in the unlocked state. By setting the first mark 160 and the second mark 320, users can easily check whether the pull rivet 200 is in the unlocked state, and at the same time, users can easily control the resetting of the pressure block 300, further improving the visibility of the pressure block 300.

[0030] Furthermore, the color of the first mark 160 is the same as the color of the second mark 320, but the color of the first mark 160 is different from the color of the column 100 and the color of the pressing block 300.

[0031] After setting the first mark 160 and the second mark 320, their colors can be changed through operations such as painting. This improves the distinction between the first mark 160 / second mark 320 and the column 100 and pressure block 300, preventing users from misreading the marks and further enhancing the user experience.

[0032] Reference Figure 2 and Figure 4 As shown, it can be understood that, along the horizontal direction, one side wall of the receiving cavity 120 is provided with a through hole 121, and the other side wall is provided with a connecting part 122. The guide member 130 passes through the through hole 121 and is detachably connected to the connecting part 122. Optionally, the connecting part 122 can be a slot structure, a block structure, an insertion hole structure, a magnetic attraction structure, etc., provided on the inner wall of the column 100. The guide member 130 achieves detachable connection with the connecting part 122 through a corresponding block structure, slot structure, insertion block structure, or magnetic structure.

[0033] By providing through holes 121 and connecting parts 122, the internal structure of the column 100 is further simplified, the guide 130 is easy to insert and remove, and the modularity of the contour column is improved.

[0034] Reference Figure 3 and Figure 4 As shown, the guide 130 is configured as a screw, the connecting part 122 is configured as a screw hole, the screw passes through the through hole 121 and the receiving cavity 120 and is threaded into the screw hole, and the pressure block 300 is sleeved on the screw. Specifically, the portion of the screw located in the receiving cavity 120 has a smooth outer peripheral wall, and the pressure block 300 has an inner hole, which is clearance-fitted with the smooth outer peripheral wall of the screw. At this time, the through hole 121 corresponding to the screw hole is a stepped hole, and the head of the screw is received in the stepped hole.

[0035] Setting the guide 130 as a screw can reduce the layout cost of the guide 130 and improve the installation stability of the guide 130.

[0036] Furthermore, the pressing block 300 is rectangular in shape, and the two adjacent side walls of the pressing block 300 are transitioned by rounded corners.

[0037] Setting the edges and corners of the rectangular block 300 to a smooth rounded structure can prevent the edges and corners of the block 300 from scraping against the inner wall of the receiving cavity 120, thus affecting the movement of the block 300, effectively improving the movement stability of the block 300, and extending the service life of the column 100.

[0038] Reference Figure 4 As shown, it can be understood that a retaining ring 140 is embedded in the through hole 121, and the retaining ring 140 is used to limit the screw in the horizontal direction.

[0039] By setting the retaining ring 140, the retaining ring 140 can stop the screw. When the screw is loose, the retaining ring 140 can restrict the movement of the screw, prevent the screw from falling off the level post, and further improve the installation stability of the screw.

[0040] In other embodiments, the guide 130 is configured as a plug, and the snap ring 140 can be replaced with a stop washer, plug, etc., which can also improve the installation stability of the guide 130 and prevent the guide 130 from detaching.

[0041] Furthermore, when the pressure block 300 abuts against the side wall of the receiving cavity 120 where the through hole 121 is provided, the pressure block 300 protrudes from the side wall of the column 100. In other words, when the pressure block 300 is in the position of the unlocking pull pin 200, along the opening direction of the receiving cavity 120, the length of the pressure block 300 is greater than the length of the side of the receiving cavity 120 where the through hole 121 is provided.

[0042] With the above arrangement, when the pressure block 300 is in its initial position without locking the pull stud 200, at least part of its side wall is located outside the receiving cavity 120, which makes it convenient for the user to clamp the pressure block 300 with two fingers to exert force, further improving the user experience.

[0043] It should be added that, along the horizontal direction, the sidewalls of the mounting hole 110 and the receiving cavity 120 with the connecting part 122 are spaced apart, so that after the pull rivet 200 is inserted into the mounting hole 110, there is a certain gap between the pull rivet 200 and the sidewall of the receiving cavity 120 with the connecting part 122. With the above arrangement, when the pressing slope 311 of the pressure block 300 presses the locking part 210 of the pull rivet 200, there are gaps on both sides of the pressure block 300 and the inner walls of both sides of the receiving cavity 120. The user can insert two fingers into the receiving cavity 120 to clamp the pressure block 300 and apply force, further improving the user experience.

[0044] Reference Figure 1 and Figure 2 As shown, it can be understood that the end of the column 100 with the mounting hole 110 is provided with a guide portion 150. The guide portion 150 is a conical structure arranged around the mounting hole 110. The guide portion 150 is used to guide the pull stud 200 into the mounting hole 110.

[0045] By setting the guide part 150, a certain positioning error is allowed between the rivet 200 and the mounting hole 110. The user does not need to precisely align the rivet 200 and the mounting hole 110. As long as the rivet 200 contacts the guide part 150, it can be quickly guided into the mounting hole 110, which further improves the ease of use of the contour post.

[0046] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A column connection structure of equal height, characterized in that, include: A column (100) is provided with a mounting hole (110) and a receiving cavity (120). The mounting hole (110) is opened at one end of the column (100), and the receiving cavity (120) is opened on the side wall of the column (100) and communicates with the mounting hole (110). The receiving cavity (120) forms an opening on the side wall of the column (100), and a guide (130) is provided inside the receiving cavity (120). A pull stud (200) has a snap-fit ​​part (210) at one end. The snap-fit ​​part (210) is arranged around the pull stud (200) and protrudes outward along the radial direction of the pull stud (200). The pull stud (200) is inserted into the mounting hole (110). The snap-fit ​​part (210) is located inside the mounting hole (110) and on one side of the guide (130). A pressure block (300) is slidably connected to the guide member (130) in the horizontal direction. One end of the pressure block (300) is exposed outside the column (100) through the opening, and the other end is provided with a protrusion (310). Along the axial direction of the column (100), the protrusion (310) is located on the side of the snap-fit ​​part (210) facing the mounting hole (110). The side of the protrusion (310) facing the snap-fit ​​part (210) is provided with a pressing slope (311). The pressure block (300) is moved so that the pressing slope (311) abuts against the snap-fit ​​part (210).

2. The equal-height column connection structure according to claim 1, characterized in that, Along the horizontal direction, one side wall of the receiving cavity (120) is provided with a through hole (121), and the other side wall is provided with a connecting part (122). The guide (130) passes through the through hole (121) and is detachably connected to the connecting part (122).

3. The equal-height column connection structure according to claim 2, characterized in that, The guide (130) is configured as a screw, the connecting part (122) is configured as a screw hole, the screw passes through the through hole (121) and the receiving cavity (120) and is threadedly engaged with the screw hole, and the pressure block (300) is sleeved on the screw.

4. The equal-height column connection structure according to claim 3, characterized in that, A retaining ring (140) is embedded in the through hole (121), and the retaining ring (140) is used to limit the screw in the horizontal direction.

5. The equal-height column connection structure according to claim 2, characterized in that, When the pressure block (300) abuts against the side wall of the receiving cavity (120) where the through hole (121) is located, the pressure block (300) protrudes from the side wall of the column (100).

6. The equal-height column connection structure according to claim 1, characterized in that, The end of the pressure block (300) away from the rivet (200) is provided with a first mark (160), and the side wall of the column (100) is provided with a second mark (320). When the pressing inclined surface (311) is located on one side of the snap-fit ​​part (210) in the horizontal direction, the first mark (160) and the second mark (320) are arranged opposite to each other.

7. The equal-height column connection structure according to claim 6, characterized in that, The first mark (160) is the same color as the second mark (320), but the color of the first mark (160) is different from the color of the column (100) and the color of the pressing block (300).

8. The equal-height column connection structure according to claim 1, characterized in that, The column (100) has a guide portion (150) at one end where the mounting hole (110) is located. The guide portion (150) is used to guide the pull stud (200) into the mounting hole (110).

9. The equal-height column connection structure according to claim 1, characterized in that, The pressure block (300) is rectangular in shape, and the two adjacent side walls of the pressure block (300) are connected by rounded corners.

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