A die bonder jig for facilitating replacement of a carrier

Abstract

The utility model belongs to the technical field of semiconductor processing, concretely relates to a die bonding fixture convenient to replace carrier, including support, be provided with runner fixed edge on the support, runner fixed edge one side is provided with runner movable edge, the side of runner movable edge is provided with T type groove on the support, the T type groove is provided with the sliding block of sliding, runner movable edge is installed on sliding block, runner fixed edge one side and runner movable edge one side all are provided with belt mechanism for conveying frame, the below of runner fixed edge and the below of runner movable edge all are provided with the pneumatic cylinder, the utility model's runner movable edge can adjust the interval between runner fixed edge through the sliding of sliding block on T type groove, thereby satisfies the conveying of the carrier cover plate of different width size, runner fixed edge and runner movable edge all are provided with belt mechanism, drive in synchronization through motor, reaches the purpose that the carrier cover plate is transported.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing technology, specifically relating to a die bonding fixture that facilitates the replacement of carriers. Background Technology

[0002] Semiconductor processing (also known as chip manufacturing or wafer fabrication) is a complex process that transforms a designed integrated circuit pattern into an actual silicon chip. It involves hundreds of precision steps and is a complex and large-scale micro-engineering process. In general, it includes wafer preparation, front-end processing, back-end processing, wafer testing and packaging processes. During the production process, wafers are usually supported by frames and transported through a series of processes by a transport mechanism.

[0003] For example, a die bonding and layering conveying device for power devices provided by Chinese Patent Publication No. CN117334622B includes a first conveyor belt, a second conveyor belt, a third conveyor belt, a first operating table, and a second operating table. The first conveyor belt carries a wafer, and the wafer is conveyed by placing it directly on the conveyor belt for wafer manufacturing.

[0004] As described in the prior art of the aforementioned patent, it is not convenient to make adaptive adjustments to the width of the wafer carrier during the wafer transport process, and it is not convenient to meet the transport requirements of wafer carriers. Utility Model Content

[0005] The purpose of this invention is to provide a die bonding fixture that facilitates carrier replacement and can meet the needs of different carrier widths for wafer transport.

[0006] The specific technical solution adopted in this utility model is as follows:

[0007] A die bonding fixture for easy carrier replacement includes a bracket with a fixed flow channel side and a movable flow channel side on one side of the fixed flow channel side. A T-slot is provided on the bracket facing the movable flow channel side, and a slider is slidably mounted on the T-slot. The movable flow channel side is mounted on the slider. A belt mechanism is provided on both the fixed flow channel side and the movable flow channel side for conveying a frame. A cylinder is provided below both the fixed flow channel side and the movable flow channel side. A carrier fixing block is provided between the fixed flow channel side and the movable flow channel side. The upper end of the carrier fixing block is used to fix and install the carrier, and a positioning pin hole is provided at the top of the carrier fixing block. A carrier cover plate is fixedly installed on the upper end of the fixed flow channel side.

[0008] In a preferred embodiment, both the belt mechanism on the fixed side of the flow channel and the belt mechanism on the movable side of the flow channel are driven by motors.

[0009] In a preferred embodiment, a positioning pin is provided at the lower part of the carrier corresponding to the positioning pin hole of the carrier fixing block.

[0010] In a preferred embodiment, an iron block is further provided below the carrier, and a magnet for attracting the iron block is installed on the carrier fixing block.

[0011] In a preferred embodiment, the cylinder extends and retracts vertically, and a guide post assembly is provided on one side of each cylinder.

[0012] In a preferred embodiment, the belt mechanism on one side of the fixed edge of the flow channel includes a rotating roller and a driven wheel. A transmission belt is wound on the rotating roller. The central axis of the rotating roller and the central axis of the driven wheel are coincident. A drive wheel is provided at the output end of the motor. The drive wheel and the driven wheel are in contact with each other for transmission.

[0013] In a preferred embodiment, the belt mechanism on one side of the flow channel includes a second rotating roller on which a conveyor belt is wound.

[0014] In a preferred embodiment, the second rotating roller is connected to the first rotating roller via a transmission rod. The second rotating roller is slidably connected to one end of the transmission rod, and the other end of the transmission rod is fixedly connected to the first rotating roller. The central axis of the first rotating roller coincides with the central axis of the transmission rod and the central axis of the second rotating roller.

[0015] The technical effects achieved by this utility model are as follows:

[0016] The movable side of this utility model can adjust the distance between itself and the fixed side of the flow channel by sliding a slider on a T-slot, thereby meeting the needs of conveying vehicle cover plates of different widths. Both the fixed side and the movable side of the flow channel are equipped with belt mechanisms, which are synchronously driven by motors to achieve the purpose of transporting the vehicle cover plates. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of the vehicle with the removal of the vehicle cover and the vehicle itself.

[0018] Figure 2 This is a practical diagram of the structure viewed from below;

[0019] Figure 3 This is a schematic diagram of a practical structure with a vehicle cover.

[0020] Figure 4 This is a schematic diagram of the structure for removing the vehicle cover plate in this practical application;

[0021] Figure 5 This is a schematic diagram of the bottom structure of this practical vehicle.

[0022] The attached diagram lists the components represented by each number as follows:

[0023] 1. Bracket; 2. Fixed side of flow channel; 3. Movable side of flow channel; 4. T-slot; 5. Slider; 6. Belt mechanism; 7. Carrier fixing block; 8. Cylinder; 9. Carrier cover plate; 10. Carrier; 11. Frame; 101. Iron block; 61. Motor; 71. Positioning pin hole; 72. Magnet; 81. Guide post assembly; 611. Drive wheel; 612. Rotating roller one; 613. Driven wheel; 614. Transmission rod; 615. Rotating roller two. Detailed Implementation

[0024] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0025] Many specific details are set forth in the following description in order to provide a full understanding of this utility model. However, this utility model may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of this utility model. The phrase "in a preferred embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that mutually excludes other embodiments.

[0027] Secondly, this utility model is described in detail with reference to the schematic diagrams. When detailing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0028] Please see the appendix Figures 1 to 4As shown, this utility model provides a die bonding fixture for easy carrier replacement, including a bracket 1, a channel fixed edge 2 on the bracket 1, a channel movable edge 3 on one side of the channel fixed edge 2, a T-slot 4 on the bracket 1 facing the channel movable edge 3, a slider 5 slidably mounted on the T-slot 4, and the channel movable edge 3 mounted on the slider 5; a belt mechanism 6 is provided on both the channel fixed edge 2 and the channel movable edge 3 for conveying the frame 11; a cylinder 8 is provided below both the channel fixed edge 2 and the channel movable edge 3; a carrier fixing block 7 is provided between the channel fixed edge 2 and the channel movable edge 3, the upper end of the carrier fixing block 7 is used to fix the carrier 10, the top of the carrier fixing block 7 is provided with a positioning pin hole 71, and a carrier cover plate 9 is fixedly mounted on the upper end of the channel fixed edge 2;

[0029] This device primarily addresses the clamping and fixing of wafers during the packaging process. When the wafer is transferred from the previous process to the packaging process via a conveyor, it is mounted on frame 11 and transported to the packaging process by belt mechanisms 6 mounted on the fixed edge 2 and movable edge 3 of the flow channel. The wafer is then retracted downwards by cylinder 8, causing the fixed edge 2 and movable edge 3 to move downwards. Since belt mechanisms 6 and carrier cover plates 9 are also mounted on the fixed edge 2 and movable edge 3, the downward movement of the fixed edge 2 and movable edge 3 simultaneously moves the wafer on frame 11, as well as the belt mechanisms 6 and carrier cover plates 9, downwards. Due to the position of carrier 10... With the frame 11 fixed, the wafer, belt mechanism 6, and carrier cover plate 9 move down a certain distance simultaneously. The carrier cover plate 9 and carrier 10 will clamp and fix the wafer on the frame 11. After the wafer is packaged, the cylinder 8 extends upward, driving the flow channel fixed edge 2 and flow channel movable edge 3 to move up and return to their original positions. At the same time as the flow channel fixed edge 2 and flow channel movable edge 3 move up, the wafer on the frame 11, belt mechanism 6, and carrier cover plate 9 will move up simultaneously. Thus, the clamping of the wafer on the frame 11 between the carrier cover plate 9 and carrier 10 is released. Then, the packaged wafer is transferred to the next process through the belt mechanism 6.

[0030] It should be noted that the carrier cover plate 9 is fixedly installed to the flow channel fixed side 2, and the gap between the carrier cover plate 9 and the flow channel fixed side 2 is greater than the height of the frame 11 mounted on the belt mechanism 6. That is, when the cylinder 8 is extended upward, there is no contact between the carrier cover plate 9 and the frame 11.

[0031] In this embodiment, the wafer is placed on the frame 11, and the frame 11 is mounted on the belt mechanism 6 for transport to each process. During transport, the belt mechanism 6 on the fixed side 2 and the movable side 3 of the flow channel is driven by the motor 61 to transport the frame 11 with the wafer.

[0032] Both the belt mechanism 6 on the fixed side 2 of the flow channel and the belt mechanism 6 on the movable side 3 of the flow channel are driven by a motor 61.

[0033] The belt mechanism 6 on the fixed side 2 and the movable side 3 of the flow channel are synchronously driven by the motor 61 to achieve synchronous conveying and improve the accuracy of conveying.

[0034] In this embodiment, in order to ensure that frames 11 of different widths can be mounted on the belt mechanism 6 for transport, the width of the fixed side 2 and the movable side 3 of the flow channel can be adjusted. The movable side 3 can adjust the distance between itself and the fixed side 2 of the flow channel by sliding the slider 5 on the T-slot 4, thereby satisfying the transport of frames 11 of different widths. Both the fixed side 2 and the movable side 3 of the flow channel are equipped with belt mechanisms 6, which are synchronously driven by motor 61 to achieve the purpose of transporting the frames 11.

[0035] The cylinder 8 extends and retracts vertically. Each cylinder 8 is also provided with a guide post assembly 81 on one side. The belt mechanism 6 on the fixed side 2 of the flow channel includes a rotating roller 612 and a driven wheel 613. A transmission belt is wound on the rotating roller 612. The central axis of the rotating roller 612 and the central axis of the driven wheel 613 are coincident. The output end of the motor 61 is provided with a drive wheel 611. The drive wheel 611 and the driven wheel 613 are in contact with each other for transmission. The belt mechanism 6 on the movable side 3 of the flow channel includes a rotating roller 615. A transmission belt is wound on the rotating roller 615. The rotating roller 615 and the rotating roller 612 are connected by a transmission rod 614. The rotating roller 615 is slidably connected to one end of the transmission rod 614. The other end of the transmission rod 614 is fixedly connected to the rotating roller 612. The central axis of the rotating roller 612 is coincident with the central axis of the transmission rod 614 and the central axis of the rotating roller 615.

[0036] In this embodiment, the drive wheel 611 is driven by the motor 61 to rotate, which in turn drives the passive wheel 613 on the rotating roller 612 to rotate, thereby driving the rotating roller 612 to rotate. The rotation of the rotating roller 612 drives the conveyor belt on the fixed side 2 of the flow channel to rotate. The rotation of the rotating roller 612, through the transmission rod 614, simultaneously drives the rotating roller 615 on the movable side 3 of the flow channel to rotate. The rotating roller 615 drives the conveyor belt on the movable side 3 of the flow channel to rotate, thereby enabling the belt mechanisms 6 on both sides to move synchronously for transmission. The rotating roller 615 is slidably connected to the transmission rod 614, which can satisfy both the movement and adjustment of the fixed side 2 of the flow channel and the transmission requirements.

[0037] A positioning pin is provided at the positioning pin hole 71 of the carrier fixing block 7 below the carrier 10. An iron block 101 is also provided below the carrier 10. A magnet 72 for attracting the iron block 101 is installed on the carrier fixing block 7.

[0038] In this embodiment, the connection between the carrier 10 and the carrier fixing block 7 is achieved by the magnet 72 on the carrier fixing block 7 adsorbing the iron block 101 on the carrier 10. The magnetic attraction facilitates the disassembly and replacement of the carrier 10.

[0039] The working principle of this utility model is as follows: This device primarily addresses the clamping and fixing of wafers during the packaging process. When the wafer is transferred from the previous process to the packaging process via a conveyor, it is mounted on frame 11 and transported to the packaging process by a belt mechanism 6 mounted on the fixed edge 2 and movable edge 3 of the flow channel. The wafer is then retracted downwards by cylinder 8, causing the fixed edge 2 and movable edge 3 to move downwards. Since the fixed edge 2 and movable edge 3 are also equipped with belt mechanism 6 and carrier cover plate 9, the downward movement of the fixed edge 2 and movable edge 3 simultaneously moves the wafer on frame 11, as well as belt mechanism 6 and carrier cover plate 9, downwards. With the position of the carrier 10 fixed, after the wafer on the frame 11, the belt mechanism 6, and the carrier cover plate 9 move down a certain distance simultaneously, the carrier cover plate 9 and the carrier 10 will simultaneously clamp and fix the wafer on the frame 11. After the wafer is packaged, the cylinder 8 extends upward, driving the flow channel fixed edge 2 and the flow channel movable edge 3 to move up and return to their original positions. At the same time as the flow channel fixed edge 2 and the flow channel movable edge 3 move up, the wafer on the frame 11, the belt mechanism 6, and the carrier cover plate 9 will move up simultaneously. Thus, the carrier cover plate 9 and the carrier 10 release the clamping of the wafer on the frame 11, and then the packaged wafer is transferred to the next process through the belt mechanism 6.

[0040] The above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. Structures, devices, and operating methods not specifically described or explained in this utility model, unless otherwise specified or limited, shall be implemented using conventional methods in the art.

Claims

1. A die bonding fixture for easy carrier replacement, characterized in that: Includes a bracket (1), on which a flow channel fixed edge (2) is provided, and on one side of the flow channel fixed edge (2) a flow channel movable edge (3) is provided, and on the bracket (1) facing the flow channel movable edge (3) a T-slot (4) is provided, and a slider (5) is slidably provided on the T-slot (4), and the flow channel movable edge (3) is installed on the slider (5); A belt mechanism (6) is provided on one side of the fixed side (2) of the flow channel and on one side of the movable side (3) of the flow channel for conveying the frame (11). A cylinder (8) is provided below the fixed side (2) of the flow channel and below the movable side (3) of the flow channel. A carrier fixing block (7) is provided between the fixed side (2) of the flow channel and the movable side (3) of the flow channel. The upper end of the carrier fixing block (7) is used to fix the carrier (10). The top end of the carrier fixing block (7) is provided with a positioning pin hole (71). The carrier cover plate (9) is fixedly installed on the upper end of the fixed side (2) of the flow channel.

2. The die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: The belt mechanism (6) on the fixed side (2) of the flow channel and the belt mechanism (6) on the movable side (3) of the flow channel are both driven by a motor (61).

3. The die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: A positioning pin is provided at the lower part of the carrier (10) corresponding to the positioning pin hole (71) of the carrier fixing block (7).

4. The die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: An iron block (101) is also provided below the carrier (10), and a magnet (72) for attracting the iron block (101) is installed on the carrier fixing block (7).

5. A die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: The cylinder (8) extends and retracts in the direction of vertical extension and retraction, and a guide post assembly (81) is provided on one side of each cylinder (8).

6. A die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: The belt mechanism (6) on one side of the fixed edge (2) of the flow channel includes a rotating roller (612) and a driven wheel (613). A transmission belt is wound on the rotating roller (612). The central axis of the rotating roller (612) and the central axis of the driven wheel (613) are arranged to coincide. A drive wheel (611) is provided at the output end of the motor (61). The drive wheel (611) and the driven wheel (613) are in contact with each other for transmission.

7. A die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: The belt mechanism (6) on one side of the flow channel movable side (3) includes a rotating roller two (615), on which a conveyor belt is wound.

8. A die bonding fixture for convenient carrier replacement according to claim 1, characterized in that: Rotating roller two (615) is connected to rotating roller one (612) via a transmission rod (614). Rotating roller two (615) is slidably connected to one end of the transmission rod (614), and the other end of the transmission rod (614) is fixedly connected to rotating roller one (612). The central axis of rotating roller one (612) coincides with the central axis of the transmission rod (614) and the central axis of rotating roller two (615).

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